CN102117893B - Vacuum heating degassing treatment equipment - Google Patents
Vacuum heating degassing treatment equipment Download PDFInfo
- Publication number
- CN102117893B CN102117893B CN2010105684377A CN201010568437A CN102117893B CN 102117893 B CN102117893 B CN 102117893B CN 2010105684377 A CN2010105684377 A CN 2010105684377A CN 201010568437 A CN201010568437 A CN 201010568437A CN 102117893 B CN102117893 B CN 102117893B
- Authority
- CN
- China
- Prior art keywords
- vacuum
- vacuum cavity
- fixed
- heating
- support column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 54
- 238000007872 degassing Methods 0.000 title abstract description 5
- 230000003028 elevating effect Effects 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims description 22
- 238000009849 vacuum degassing Methods 0.000 claims description 21
- 238000005086 pumping Methods 0.000 claims description 13
- 238000005538 encapsulation Methods 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 5
- 230000033001 locomotion Effects 0.000 claims description 4
- 239000012809 cooling fluid Substances 0.000 claims description 3
- 230000009969 flowable effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000009461 vacuum packaging Methods 0.000 abstract 1
- 210000003660 reticulum Anatomy 0.000 description 31
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000001301 oxygen Substances 0.000 description 12
- 229910052760 oxygen Inorganic materials 0.000 description 12
- 239000011368 organic material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Sliding Valves (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The invention discloses vacuum heating degassing treatment equipment comprising a framework, a vacuum cavity, a heating plate, an elevating assembly, a horizontal conveying assembly, a vacuumizing system and a control system, wherein an inlet and an outlet are respectively arranged at two ends of the vacuum cavity and are respectively provided with a sealed closing valve; the horizontal conveying assembly is transversely arranged in the vacuum cavity; the elevating assembly is provided with a plurality of supporting poles and cylinder motors, and the supporting poles freely extend to the inside of the vacuum cavity in a sealing way; the heating plate is installed in the vacuum cavity; the vacuumizing system is communicated with the vacuum cavity; and the heating plate, the elevating assembly, the horizontal conveying assembly and the vacuumizing system are all electrically connected with the control system. The vacuum heating degassing treatment equipment is simple in structure and convenient to operate, effectively prolongs the service life of a display device, plays a buffer role between the outside and a vacuum packaging production line, and does not need to damage the vacuum state of the production line during working.
Description
Technical field
The present invention relates to a kind of degassing processing equipment, relate in particular to a kind of bonnet to organic light emitting display carries out bake out before encapsulation heating in vacuum degassing processing equipment.
Background technology
The OLED display promptly utilizes Organic Light Emitting Diode (Organic Light-Emitting Diode) to be approved by vast production firm gradually as a kind of new technology of flat.But the OLED technical development we can say also very ripe so far, and its display device remains in some shortcomings, and the most outstanding defective is that its useful life is shorter at present, the life problems of device to a great extent limit the process of OLED display industryization.The life-span of OLED display is depended on the performance and the life-span of the organic material of being selected for use on the one hand, also depends on method for packing, sealed in unit and the effect etc. of device on the other hand.It is that glue seals the front and back glass substrate in vacuum environment that method for packing now generally is to use encapsulating material; Because the instability of the organic material in the OLED display; If the encapsulation of OLED display is bad; Along with the increase of organic luminous panel service time of OLED display, in the air with encapsulating material in moisture, moisture and oxygen etc. get into the OLED display interior chance also along with lifting.Organic material will react with gases such as water vapour in the vacuum chamber, oxygen; Be easy to cause a series of problems such as luminescent layer separates with electrode layer, organic material decomposition, anodizing; This has improved the not generation chance of light-emitting zone virtually; Reduce the brightness and the uniformity of luminescent layer, the useful life of also having reduced the OLED display.
At present the most key is exactly that device is carried out the rational and effective encapsulation, and this packaging system to device, method and packaging technology have proposed high requirement.For adapting to this requirement, avoid moisture, moisture and oxygen to enter into the OLED display interior, effective method is exactly before the encapsulation of OLED display, just with eliminating such as the moisture in the encapsulating material, moisture and oxygen and then encapsulate.Yet the not too suitable large-scale production line of method and apparatus of the encapsulation OLED display of adverse effect factors such as moisture, moisture and oxygen is got rid of in traditional being used to, sometimes can't be effectively with the unfavorable air scavenge in the encapsulating material.
Therefore; Need a kind of bonnet to organic light emitting display before encapsulation, to carry out bake out, entering display devices such as moisture, moisture and the oxygen inside after preventing to encapsulate in the encapsulating material reacts with organic material and reduces the heating in vacuum degassing processing equipment in the useful life of display device.
Summary of the invention
The object of the present invention is to provide a kind of bonnet to organic light emitting display before encapsulation, to carry out bake out, entering display devices such as moisture, moisture and the oxygen inside after preventing to encapsulate in the encapsulating material reacts with organic material and reduces the heating in vacuum degassing processing equipment in the useful life of display device.
To achieve these goals; The present invention provides a kind of heating in vacuum degassing processing equipment; Be applicable to that the bonnet to OLED carries out bake out before encapsulation; Comprise frame, vacuum cavity, heating plate, lifting assembly, horizontal feed assembly, vacuum-pumping system and control system; Said vacuum cavity is fixed on the said frame; The two ends of said vacuum cavity are respectively arranged with inlet and outlet, and said inlet and exit are provided with the seal valve, and said seal valve opens or closes said inlet and outlet; Said horizontal feed assembly traverses and is arranged at said vacuum cavity inside and two ends and dock with said inlet and outlet respectively and form the bonnet transmission channel that supplies bonnet to transmit; Said lifting assembly is installed on the outer below of said vacuum cavity, and said lifting assembly has some support columns and drives the cylinder motor that said support column is done straight reciprocating motion, and said support column is and stretches into hermetically in the said vacuum cavity and in the elevating movement that can freely in said vacuum cavity, make linear reciprocation under the effect of cylinder motor; The free end that stretches into the support column in the said vacuum cavity forms supporting surface; Said heating plate be installed on said vacuum cavity inner and be in supporting surface that the free end of said support column forms directly over, said vacuum-pumping system is communicated with said vacuum cavity, said heating plate, lifting assembly, horizontal feed assembly and vacuum-pumping system all are electrically connected with said control system.
Preferably, said heating in vacuum degassing processing equipment also comprises cooling device, and it is inner that said cooling device is installed on said vacuum cavity.Particularly, said cooling device is a coldplate, said coldplate be installed on said vacuum cavity inner and be in said heating plate directly over, said coldplate inside is equipped with cooling water pipe, fills with flowable cooling fluid in the said cooling water pipe.Because the radiation of heating plate; Cause whole cavity temperature all can raise; But just near that one side of workpiece, other places are invalid intensification, therefore in the efficient temperature utilization; Use the temperature in the said vacuum cavity of said coldplate cooling can effectively the reduction, said vacuum cavity is worked under normal temperature.
Preferably; Said lifting assembly also comprises supporting bracket and some bellowss; The piston rod of said cylinder motor and said supporting bracket are fixed; Said support column is fixed on the said supporting bracket, and said bellows is socketed on the said support column and an end is fixed in said vacuum cavity bottom hermetically, and the other end is fixed on the said supporting bracket hermetically.Promote the support column on the said supporting bracket through said cylinder motor, make said support column promote bonnet and rise, thereby it is nearer to make bonnet leave said heating plate; More effectively absorb the heat of said heating plate; Temperature is raise rapidly, simple in structure, flexible operation; Said bellows more can seal the junction between said support column and the vacuum cavity, prevents that atmosphere from getting in the said vacuum cavity.
Particularly, said lifting assembly also comprises guidance set, and said guidance set comprises guide post; Fairlead and fixed head; Said fixed head is fixed on the cylinder motor, and said fairlead passes and is fixed on the said supporting bracket, and said guide post is socketed in the said fairlead slidably; One end be fixed in said vacuum cavity bottom, the other end is fixed on the said fixed head.Said guidance set can accurately move said support column along the direction that sets, and play the guiding role.
Preferably, said horizontal feed assembly comprises driven unit, base and some conveying rollers, and said driven unit is installed on the said base, and said conveying roller horizontal pivot is connected on the said base.Said driven unit can be transported to said bonnet on the said lifting assembly after driving said conveying roller, prepares near perform the location to said heating plate for rising.
Compared with prior art; Because the present invention is transported in the said vacuum cavity through the said bonnet before will encapsulating, and utilizes said lifting assembly to make said bonnet near said heating plate, and then the encapsulating material on the said bonnet is heated; Impurity such as its inner moisture, moisture and oxygen are discharged; Utilize the vacuum-evacuate system that it is extracted out again, behind bake out, encapsulate again, thereby entering display devices such as moisture, moisture and the oxygen inside that prevents to encapsulate in the encapsulating material of back reacts with organic material; Entire equipment is simple in structure; Easy to operate, as effectively to have improved the organic material in the organic display spare of encapsulation back life-span, thereby the useful life of having improved display device.
Description of drawings
Fig. 1 is the decomposing schematic representation of heating in vacuum degassing processing equipment of the present invention.
Fig. 2 is the cutaway view figure of heating in vacuum degassing processing equipment of the present invention.
Fig. 3 is the structural representation of lifting assembly in the heating in vacuum degassing processing equipment of the present invention.
Fig. 4 is the working state schematic representation of heating in vacuum degassing processing equipment of the present invention
Embodiment
Like Fig. 1, shown in Figure 2, heating in vacuum degassing processing equipment 100 of the present invention comprises frame 1, vacuum cavity 2, heating plate 3, coldplate 4, seal valve 5, lifting assembly 6, horizontal feed assembly 7, vacuum-pumping system 8 and control system (not shown).Said vacuum cavity 2 is fixed on the said frame 1; Said vacuum cavity 2 both sides offer inlet 21 respectively and export 22; Said lifting assembly 6 is installed on the below of said vacuum cavity 2, and said lifting assembly 6 has some support columns 63, said support column 63 stretch into hermetically in the said vacuum cavity 2 and can be freely said vacuum cavity 2 in straight line go up and down and at free end formation supporting surface; It is inner and be in the top of the supporting surface that the free end of said support column 63 forms that said heating 3 plates are installed on said vacuum cavity 2; Said coldplate 4 is installed on said vacuum cavity 2 inside and is in the top of said heating plate 3, and said coldplate 4 inside are equipped with cooling water pipe 41, fill with flowable cooling fluid in the said cooling water pipe 41; Heating plate 3 add heat utilization just near that one side of workpiece; Other places are invalid intensification, use said coldplate 4 coolings can effectively reduce the temperature in the said vacuum cavity 2, and said vacuum cavity 2 is worked under normal temperature.Said horizontal feed assembly 7 traverses and is arranged at said vacuum cavity 2 inside and two ends respectively with said inlet 21 and export 22 and dock and form the bonnet transmission channel 7a that supplies bonnet 200 transmission.Said vacuum-pumping system 8 is communicated with said vacuum cavity 2.Said seal valve 5 is installed on said inlet 21 respectively and exports on 22, can open or close said inlet 21 and export 22.Said heating plate 3, seal valve 5, lifting assembly 6, horizontal feed assembly 7 and vacuum-pumping system 8 all are electrically connected with said control system, and said control system is controlled the operating state of said heating plate 3, seal valve 5, lifting assembly 6, horizontal feed assembly 7 and vacuum-pumping system 8.
As shown in Figure 3; Said lifting assembly 6 comprises cylinder motor 61, supporting bracket 62, some support columns 63, guidance set 64 and some bellowss 65; The piston rod 61a of said cylinder motor 61 and said supporting bracket 62 are fixing; Said support column 63 is fixed on the said supporting bracket 62, and said bellows 65 is socketed on the said support column 63 and an end is fixed in said vacuum cavity 2 bottoms hermetically, and the other end is fixed on the said supporting bracket 62 hermetically.Said guidance set 64 comprises guide post 64a, fairlead 64b and fixed head 64c, and said fixed head 64c is fixed on the cylinder motor 61; Said fairlead 64b passes and is fixed on the said supporting bracket 62; Said guide post 64a is socketed in the said fairlead 64b slidably, an end be fixed in said vacuum cavity 2 bottoms, the other end is fixed on the said fixed head 64c; Said guidance set 64 can accurately move said support column 63 along the direction that sets, and play the guiding role.Through the support column 63 that said cylinder motor 61 promotes on the said supporting bracket 62, make said support column 63 promote bonnets 200 and rise, thereby make bonnet 200 nearer from said heating plate 3; More effectively absorb the heat of said heating plate 3; Temperature is raise rapidly, simple in structure, flexible operation; Said bellows 65 more can seal the junction between said support column 63 and the vacuum cavity 2, prevents that atmosphere from getting in the said vacuum cavity 2.
Said horizontal feed assembly 7 comprises driven unit 71, base 72 and some conveying rollers 73, and said driven unit 71 is installed on the said base 72, and said conveying roller 73 horizontal pivots are connected on the said base 72.Can said bonnet 200 be transported on the said lifting assembly 6 after said driven unit 71 drives said conveying roller 73, prepare near perform the location to said heating plate 3 for rising.
Comprehensive above-mentioned and combine Fig. 4, the operation principle in the face of heating in vacuum degassing processing equipment 100 of the present invention is elaborated down, as follows:
During work; The outlet 22 of heating in vacuum degassing processing equipment 100 of the present invention is connected with the starting end of Vacuum Package production line, before the encapsulation, said bonnet 200 is transported to inlet 21 1 ends of said vacuum cavity 2; Said control system is controlled said seal valve 5 and is opened and control said horizontal feed assembly 7 startups; Said bonnet 200 gets into said vacuum cavity 2 backs to be stopped after the drive of the conveying roller 73 on the said horizontal feed assembly 7 is moved between said heating plate 3 and the said support column 63, and said seal valve 5 cuts out, with said vacuum cavity 2 sealings; Control system starts said lifting assembly 6 then; The cylinder motor 61 piston rod 61a of said lifting assembly 6 promote said supporting bracket 62 along said guide post 64a direction rising, and then make said support column 63 promote said bonnet 200 risings also slowly near said heating plate 3, and heating plate 3 starts intensification; Encapsulating material 201 on the heating bonnet 200 is discharged in the said vacuum cavity 2 moisture, moisture and the oxygen of encapsulating material 201; Simultaneously, start said vacuum-pumping system 8, the gas in the said vacuum cavity 2 is extracted out.After degasification is accomplished; The said bonnet 200 of 63 times generals who has surrendered of the support column of said lifting assembly 6 is positioned on the said bonnet transmission channel 7a; Said control system is controlled said horizontal feed assembly 7 startups and is controlled said seal valve 5 and open said outlet 22, at last said bonnet 200 is transported in the vacuum lines in said vacuum cavity 2.
Because the present invention is transported in the said vacuum cavity 2 through the said bonnet 200 before will encapsulating, and utilizes said lifting assembly 6 to make said bonnet 200 near said heating plate 3, and then the encapsulating material 201 on the said bonnet 200 is heated; Impurity such as its inner moisture, moisture and oxygen are discharged, utilize vacuum-pumping system 8 again, behind bake out, encapsulate again its extraction; Thereby entering display devices such as moisture, moisture and the oxygen inside that prevents to encapsulate in the encapsulating material 201 of back reacts with organic material; Entire equipment is simple in structure, and is easy to operate, effectively improved the life-span of the organic material in the organic display spare of encapsulation back; Thereby improved the useful life of display device; In addition, because the present invention handles bonnet 200 before bonnet 200 gets into the Vacuum Package production line, its inside also is in vacuum state; Can after handling, directly bonnet 200 be sent into production line; Therefore, heating in vacuum degassing processing equipment 100 of the present invention plays cushioning effect between extraneous and Vacuum Package production line, need not to destroy the vacuum state of production line when bonnet 200 is sent into production line.
The said vacuum-pumping system 8 that heating in vacuum degassing processing equipment of the present invention 100 is involved and the operation principle of control system are well known to those of ordinary skill in the art, no longer do detailed explanation at this.
Above disclosedly be merely preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, the equivalent variations of therefore doing according to claim of the present invention still belongs to the scope that the present invention is contained.
Claims (6)
1. heating in vacuum degassing processing equipment; Be applicable to that the bonnet to OLED carries out bake out before encapsulation; It is characterized in that: comprise frame, vacuum cavity, heating plate, lifting assembly, horizontal feed assembly, vacuum-pumping system and control system; Said vacuum cavity is fixed on the said frame; The two ends of said vacuum cavity are respectively arranged with inlet and outlet; Said inlet and exit are provided with the seal valve; Said seal valve opens or closes said inlet and outlet, and said horizontal feed assembly traverses and is arranged at said vacuum cavity inside and two ends and dock with said inlet and outlet respectively and form the bonnet transmission channel that supplies the bonnet transmission, and said lifting assembly is installed on the below outside the said vacuum cavity; Said lifting assembly has some support columns and drives the cylinder motor that said support column is done straight reciprocating motion; Said support column is and stretches in the said vacuum cavity hermetically and in the elevating movement that can freely in said vacuum cavity, make linear reciprocation the effect of cylinder motor under, the free end that stretches into the support column in the said vacuum cavity forms supporting surface, said heating plate be installed on said vacuum cavity inner and be in said support column free end formation supporting surface directly over; Said vacuum-pumping system is communicated with said vacuum cavity, and said heating plate, lifting assembly, horizontal feed assembly and vacuum-pumping system all are electrically connected with said control system.
2. heating in vacuum degassing processing equipment as claimed in claim 1 is characterized in that: also comprise cooling device, it is inner that said cooling device is installed on said vacuum cavity.
3. heating in vacuum degassing processing equipment as claimed in claim 2; It is characterized in that: said cooling device is a coldplate; Said coldplate be installed on said vacuum cavity inner and be in said heating plate directly over; Said coldplate inside is equipped with cooling water pipe, fills with flowable cooling fluid in the said cooling water pipe.
4. heating in vacuum degassing processing equipment as claimed in claim 1; It is characterized in that: said lifting assembly also comprises supporting bracket and some bellowss; The piston rod of said cylinder motor and said supporting bracket are fixed; Said support column is fixed on the said supporting bracket, and said bellows is socketed on the said support column and an end is fixed in said vacuum cavity bottom hermetically, and the other end is fixed on the said supporting bracket hermetically.
5. heating in vacuum degassing processing equipment as claimed in claim 4, it is characterized in that: said lifting assembly also comprises guidance set, said guidance set comprises guide post; Fairlead and fixed head; Said fixed head is fixed on the cylinder motor, and said fairlead passes and is fixed on the said supporting bracket, and said guide post is socketed in the said fairlead slidably; One end be fixed in said vacuum cavity bottom, the other end is fixed on the said fixed head.
6. heating in vacuum degassing processing equipment as claimed in claim 1; It is characterized in that: said horizontal feed assembly comprises driven unit, base and some conveying rollers; Said driven unit is installed on the said base, and said conveying roller horizontal pivot is connected on the said base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105684377A CN102117893B (en) | 2010-12-01 | 2010-12-01 | Vacuum heating degassing treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105684377A CN102117893B (en) | 2010-12-01 | 2010-12-01 | Vacuum heating degassing treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102117893A CN102117893A (en) | 2011-07-06 |
| CN102117893B true CN102117893B (en) | 2012-07-04 |
Family
ID=44216551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105684377A Expired - Fee Related CN102117893B (en) | 2010-12-01 | 2010-12-01 | Vacuum heating degassing treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102117893B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1265516A (en) * | 1999-03-01 | 2000-09-06 | 中外炉工业株式会社 | Exhaust sealing method for plasma display panel |
| CN201298524Y (en) * | 2008-10-17 | 2009-08-26 | 南京华显高科有限公司 | Sealing device for shadow-mask plasma display screen |
| CN201364868Y (en) * | 2008-12-30 | 2009-12-16 | 四川虹欧显示器件有限公司 | Seal and exhaust furnace for shortening sealing and exhaustion time of plasma display screen |
| CN201918432U (en) * | 2010-12-01 | 2011-08-03 | 东莞宏威数码机械有限公司 | Vacuum heating and degassing treatment device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3754859B2 (en) * | 2000-02-16 | 2006-03-15 | キヤノン株式会社 | Manufacturing method of image display device |
-
2010
- 2010-12-01 CN CN2010105684377A patent/CN102117893B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1265516A (en) * | 1999-03-01 | 2000-09-06 | 中外炉工业株式会社 | Exhaust sealing method for plasma display panel |
| CN201298524Y (en) * | 2008-10-17 | 2009-08-26 | 南京华显高科有限公司 | Sealing device for shadow-mask plasma display screen |
| CN201364868Y (en) * | 2008-12-30 | 2009-12-16 | 四川虹欧显示器件有限公司 | Seal and exhaust furnace for shortening sealing and exhaustion time of plasma display screen |
| CN201918432U (en) * | 2010-12-01 | 2011-08-03 | 东莞宏威数码机械有限公司 | Vacuum heating and degassing treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102117893A (en) | 2011-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101650816B1 (en) | Vacuum extraction device, vacuum glass manufacturing system, and related method | |
| CN104347460B (en) | Wafer transmits chamber | |
| CN201918432U (en) | Vacuum heating and degassing treatment device | |
| CN1574271A (en) | Substrate conveying device and conveying method, and vacuum disposal device | |
| CN103682240A (en) | Battery manufacturing equipment, battery no-cavity vacuum liquid-drawing device and battery vacuum-pumping packaging method | |
| CN108421679B (en) | Full-automatic double-vacuum box glue filling machine | |
| CN115654922B (en) | Continuous chip packaging and welding vacuum furnace and working method thereof | |
| CN104029858A (en) | Packaging bag flattening and exhausting sealing machine | |
| CN103022250A (en) | Positive pressure encapsulation device of building integrated photovoltaics (BIPV) solar energy component | |
| CN201266614Y (en) | Rotary table type vacuum air suction sealing machine | |
| JP5903930B2 (en) | Substrate transfer apparatus and semiconductor manufacturing apparatus using the substrate transfer apparatus | |
| CN102117893B (en) | Vacuum heating degassing treatment equipment | |
| CN208695446U (en) | Double vacuum box structures of full-automatic glue filling machine | |
| CN203644871U (en) | Battery manufacturing device and cavity-free vacuum liquid extracting device thereof | |
| CN102030464B (en) | Continuous production equipment of vacuum glass | |
| CN111098581A (en) | Special-shaped glass doubling equipment | |
| CN104326260A (en) | Automatic pipe loading machine for pipe-made glass bottles and pipe loading method thereof | |
| CN106340565A (en) | Lamination technology suitable for flexible photovoltaic assembly | |
| CN103526281B (en) | Vertical solution phase epitaxy stove | |
| CN115246715B (en) | Continuous full-automatic energy-saving production line for vacuum glass | |
| CN109703161B (en) | Lamination method, bearing jig and lamination equipment of photovoltaic module | |
| CN106494052A (en) | A kind of solar double-glass assemblies two-chamber laminating machine | |
| CN205838844U (en) | A kind of automated fiber optic deuterium processing equipment | |
| CN206970463U (en) | A kind of bend glass screen hot press | |
| CN204102849U (en) | Non-polarized lamp exhaust argon filling machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20120704 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20120704 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20120704 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20120704 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20120704 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20210905 Granted publication date: 20120704 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20131201 |