CN102116785A - Device and method for analyzing static transient voltage drop - Google Patents

Device and method for analyzing static transient voltage drop Download PDF

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CN102116785A
CN102116785A CN 200910266844 CN200910266844A CN102116785A CN 102116785 A CN102116785 A CN 102116785A CN 200910266844 CN200910266844 CN 200910266844 CN 200910266844 A CN200910266844 A CN 200910266844A CN 102116785 A CN102116785 A CN 102116785A
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voltage drop
transient voltage
metal layer
oxide semiconductor
threshold
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CN102116785B (en
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罗振兴
卢建邦
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MSTAR SEMICONDUCTOR CO Ltd
MStar Software R&D Shenzhen Ltd
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Abstract

一种静态瞬态电压降分析装置,应用于一多阈值互补式金氧半导体晶体管。该静态瞬态电压降分析装置包含一估算模块、一处理模块及一量测模块。该估算模块根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值。该处理模块根据该瞬态电压降容忍值自多个候选仿真金属层中选取相对应的一仿真金属层,并将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中。该量测模块量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降。该量测所得的瞬态电压降实质上为该多阈值互补式金氧半导体晶体管的静态瞬态电压降。

Figure 200910266844

A static transient voltage drop analysis device is applied to a multi-threshold complementary metal oxide semiconductor transistor. The static transient voltage drop analysis device includes an estimation module, a processing module and a measurement module. The estimation module estimates a transient voltage drop tolerance value according to the transient voltage drop characteristic of the multi-threshold complementary metal oxide semiconductor transistor. The processing module selects a corresponding dummy metal layer from multiple candidate dummy metal layers according to the transient voltage drop tolerance value, and adds the dummy metal layer into the multi-threshold CMOS transistor. The measurement module measures a transient voltage drop of the dummy metal layer added to the multi-threshold CMOS transistor. The measured transient voltage drop is substantially the static transient voltage drop of the multi-threshold CMOS transistor.

Figure 200910266844

Description

静态瞬态电压降分析装置及方法Static transient voltage drop analysis device and method

【技术领域】【Technical field】

本发明与电源栅控(power gating)技术有关,特别地,关于一种不必通过昂贵的特殊分析工具即能对电源栅控电路中的多阈值互补式金氧半导体(Multi-Threshold Complementary Metal-Oxide-Semiconductor,MTCMOS)晶体管进行静态瞬态电压降(static IR drop)量测的静态瞬态电压降分析装置及静态瞬态电压降分析方法。The present invention is related to power gating technology, in particular, about a multi-threshold complementary metal-oxide semiconductor (Multi-Threshold Complementary Metal-Oxide Semiconductor) in a power gating circuit without using expensive special analysis tools. -Semiconductor, MTCMOS) transistor static transient voltage drop (static IR drop) measurement device and static transient voltage drop analysis method.

【背景技术】【Background technique】

随着专用集成电路(Application Specific Integrated Circuit,ASIC)及系统单芯片(System on Chip,SoC)逐渐采用0.13微米以下的IC制程,为了能够生产出体积更小且速度更快的IC,晶圆代工厂开始采用新的材料及制程技术,例如更小的制程尺度、可调整的阈值(scaled threshold)及不可调整的电压(unscaled voltage)等,但也随之产生愈来愈严重的漏电流(leakage current)及静态功耗(static power consumption)等问题。As ASIC (Application Specific Integrated Circuit, ASIC) and System on Chip (SoC) gradually adopt the IC process below 0.13 micron, in order to be able to produce smaller and faster IC, wafer generation Factories began to adopt new materials and process technologies, such as smaller process scale, adjustable threshold (scaled threshold) and unscaled voltage (unscaled voltage), etc., but it also produced more and more serious leakage current (leakage current) and static power consumption (static power consumption) and other issues.

尤其对于90纳米及65纳米以下的IC制程而言,电源管理(powermanagement)已成为IC设计者一项相当重要的考虑因素。为了有效地因应电源管理的课题,IC设计者采用各种技术来降低其设计的电路的静态功耗,例如多阈值(multi-thre shold)设计、多电压(multi-voltage)设计、时脉栅控(clock gating)以及电源栅控(power gating)等。Especially for IC processes below 90nm and below 65nm, power management has become a very important consideration for IC designers. In order to effectively respond to the issue of power management, IC designers use various techniques to reduce the static power consumption of their designed circuits, such as multi-threshold (multi-threshold) design, multi-voltage (multi-voltage) design, clock grid Control (clock gating) and power gate control (power gating), etc.

其中,于移动通信装置的电源栅控电路中,常设置有由PMOS组件或NMOS组件所组成的多阈值互补式金氧半导体(MTCMOS)晶体管。多阈值互补式金氧半导体晶体管通过将等电源电压(constant VDD)及切换电源电压(switchedVDD)分离的方式达到电源栅控的功效,藉以关闭移动通信装置中暂时不会用到其功能的模块,使其静态功耗能够大幅降低。Wherein, in the power gate control circuit of the mobile communication device, a multi-threshold complementary metal oxide semiconductor (MTCMOS) transistor composed of a PMOS device or an NMOS device is often arranged. The multi-threshold complementary metal oxide semiconductor transistor achieves the effect of power gate control by separating the equal power supply voltage (constant VDD) and the switched power supply voltage (switchedVDD), so as to turn off the modules that will not be used temporarily in the mobile communication device. Its static power consumption can be greatly reduced.

请参照图1A及图1B,图1A及图1B分别绘示两种不同的一般电源栅控电路的示意图。如图1A及图1B所示,电源栅控电路1包含PMOS组件10且电源栅控电路11’包含PMOS组件11及12,并分别具有等电源电压(constantVDD)与切换电源电压(switched VDD)。Please refer to FIG. 1A and FIG. 1B . FIG. 1A and FIG. 1B are respectively schematic diagrams of two different general power gate control circuits. As shown in FIG. 1A and FIG. 1B, the power gate control circuit 1 includes a PMOS device 10 and the power gate control circuit 11' includes PMOS devices 11 and 12, and respectively have constant VDD and switched VDD.

亦请参照图2A及图2B,图2A及图2B分别绘示一般的电源栅控电路的电路布局示意图以及沿图2A中的虚线L所得到的多阈值互补式金氧半导体晶体管20的剖面图,示为以PMOS开关VDD的架构为例,如图2A及图2B所示。然而,从图2B可明显看出,由于多阈值互补式金氧半导体晶体管20通过将等电源电压(constant VDD)及切换电源电压(switched VDD)分离的方式达到电源栅控的功效,也就是说,等电源电压(constant VDD)与切换电源电压(switched VDD)并无任何的耦接关系,也因而导致多阈值互补式金氧半导体晶体管20的静态瞬态电压降的量测变得相当困难。Please also refer to FIG. 2A and FIG. 2B. FIG. 2A and FIG. 2B respectively depict a schematic circuit layout of a general power gate control circuit and a cross-sectional view of a multi-threshold complementary metal oxide semiconductor transistor 20 obtained along the dotted line L in FIG. 2A. , is shown by taking the structure of the PMOS switch VDD as an example, as shown in FIG. 2A and FIG. 2B . However, it can be clearly seen from FIG. 2B that since the multi-threshold complementary metal oxide semiconductor transistor 20 achieves the power gate control effect by separating the equal power supply voltage (constant VDD) and the switched power supply voltage (switched VDD), that is to say , there is no coupling relationship between the constant VDD and the switched VDD, which makes it difficult to measure the static transient voltage drop of the multi-threshold complementary metal oxide semiconductor transistor 20 .

虽然目前的电子自动设计(Electronic Design Automation,EDA)软件亦可通过某些特殊设计的分析软件来分析多阈值互补式金氧半导体晶体管的静态瞬态电压降,但其购置的成本非常可观,甚至可达数百万台币的谱,无论对于IC设计者或IC生产厂商而言,均是项十分沉重的负担。Although the current Electronic Design Automation (EDA) software can also analyze the static transient voltage drop of multi-threshold complementary metal oxide semiconductor transistors through some specially designed analysis software, the cost of its purchase is very considerable, even A spectrum that can reach several million Taiwan dollars is a very heavy burden for both IC designers and IC manufacturers.

因此,本发明的主要范畴在于提供一种静态瞬态电压降分析装置及静态瞬态电压降分析方法,以解决上述问题。Therefore, the main scope of the present invention is to provide a static transient voltage drop analysis device and a static transient voltage drop analysis method to solve the above problems.

【发明内容】【Content of invention】

根据本发明的第一具体实施例为一种静态瞬态电压降分析装置。于此实施例中,该静态瞬态电压降分析装置应用于一多阈值互补式金氧半导体晶体管。该静态瞬态电压降分析装置包含一估算模块、一处理模块及一量测模块。该估算模块用以根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值。该处理模块用以根据该瞬态电压降容忍值自多个候选仿真金属层中选取相对应的一仿真金属层,并将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中。该量测模块用以量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降。其中,该量测模块量测到的该瞬态电压降实质上即为该多阈值互补式金氧半导体晶体管的静态瞬态电压降。The first specific embodiment according to the present invention is a static transient voltage drop analysis device. In this embodiment, the static transient voltage drop analysis device is applied to a multi-threshold CMOS transistor. The static transient voltage drop analysis device includes an estimation module, a processing module and a measurement module. The estimating module is used for estimating a transient voltage drop tolerance value according to the transient voltage drop characteristic of the multi-threshold complementary metal oxide semiconductor transistor. The processing module is used for selecting a corresponding dummy metal layer from multiple candidate dummy metal layers according to the transient voltage drop tolerance value, and adding the dummy metal layer into the multi-threshold CMOS transistor. The measurement module is used for measuring a transient voltage drop of the dummy metal layer added to the multi-threshold complementary metal oxide semiconductor transistor. Wherein, the transient voltage drop measured by the measurement module is substantially the static transient voltage drop of the multi-threshold CMOS transistor.

根据本发明的第二具体实施例为一种静态瞬态电压降分析方法。于此实施例中,该静态瞬态电压降分析方法应用于一多阈值互补式金氧半导体晶体管。首先,该方法根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值;接着,该方法根据该瞬态电压降容忍值自多个候选仿真金属层中选取相对应的一仿真金属层;然后,该方法将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中;之后,该方法量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降。其中,该量测所得的瞬态电压降实质上即为该多阈值互补式金氧半导体晶体管的静态瞬态电压降。The second specific embodiment according to the present invention is a static transient voltage drop analysis method. In this embodiment, the static transient voltage drop analysis method is applied to a multi-threshold CMOS transistor. First, the method estimates a transient voltage drop tolerance value according to the transient voltage drop characteristic of the multi-threshold complementary metal oxide semiconductor transistor; then, the method selects a plurality of candidate simulation metal layers according to the transient voltage drop tolerance value Selecting a corresponding simulated metal layer; then, the method adds the simulated metal layer to the multi-threshold complementary metal oxide semiconductor transistor; afterward, the method measures the simulated metal layer added to the multi-threshold complementary metal oxide semiconductor transistor This simulates a transient voltage drop across the metal layer. Wherein, the measured transient voltage drop is substantially the static transient voltage drop of the multi-threshold CMOS transistor.

相较于先前技术,根据本发明的静态瞬态电压降分析装置及静态瞬态电压降分析方法先通过常见的SPICE仿真程序估算出待测的多阈值互补式金氧半导体晶体管的一瞬态电压降容忍值后,再将对应于该瞬态电压降容忍值的一仿真金属层加入至该多阈值互补式金氧半导体晶体管中,使得原本分离的等电源电压(constant VDD)及切换电源电压(switched VDD)通过该仿真金属层耦接在一起而形成短路,进而通过该仿真金属层准确地量测该多阈值互补式金氧半导体晶体管的静态瞬态电压降。Compared with the prior art, according to the static transient voltage drop analysis device and the static transient voltage drop analysis method of the present invention, a transient voltage of the multi-threshold complementary metal oxide semiconductor transistor to be tested is first estimated by a common SPICE simulation program After reducing the tolerance value, a dummy metal layer corresponding to the transient voltage drop tolerance value is added to the multi-threshold complementary metal oxide semiconductor transistor, so that the originally separated equal power supply voltage (constant VDD) and switching power supply voltage ( switched VDD) are coupled together through the simulated metal layer to form a short circuit, and then accurately measure the static transient voltage drop of the multi-threshold complementary metal oxide semiconductor transistor through the simulated metal layer.

因此,本发明所提出的静态瞬态电压降分析装置及静态瞬态电压降分析方法仅需采用一般的EDA软件即可准确地量测到该多阈值互补式金氧半导体晶体管的静态瞬态电压降,故可避免先前技术中需要购置某些特殊设计的分析软件所需的额外的庞大费用。Therefore, the static transient voltage drop analysis device and the static transient voltage drop analysis method proposed by the present invention can accurately measure the static transient voltage of the multi-threshold complementary metal oxide semiconductor transistor only by using general EDA software Therefore, it is possible to avoid the extra huge cost required to purchase some specially designed analysis software in the prior art.

关于本发明的优点与精神可以通过以下的发明详述及所附图式得到进一步的了解。The advantages and spirit of the present invention can be further understood through the following detailed description of the invention and the accompanying drawings.

【附图说明】【Description of drawings】

图1A及图1B分别绘示两种不同的一般电源栅控电路的示意图。FIG. 1A and FIG. 1B respectively illustrate schematic diagrams of two different general power gate control circuits.

图2A及图2B分别绘示一般的电源栅控电路的电路布局示意图以及沿图2A中的虚线L所得到的多阈值互补式金氧半导体晶体管的剖面图。2A and 2B respectively illustrate a schematic circuit layout of a general power gate control circuit and a cross-sectional view of a multi-threshold complementary metal-oxide-semiconductor transistor along the dotted line L in FIG. 2A .

图3绘示根据本发明的第一具体实施例的静态瞬态电压降分析装置的功能方块图。FIG. 3 is a functional block diagram of a static transient voltage drop analysis device according to a first embodiment of the present invention.

图4绘示通过SPICE仿真程序仿真得到多阈值互补式金氧半导体晶体管的IDS-VDS特性曲线图。FIG. 4 shows an I DS -V DS characteristic curve of a multi-threshold complementary metal-oxide-semiconductor transistor simulated by a SPICE simulation program.

图5A及图5B分别绘示尚未加入仿真金属层的多阈值互补式金氧半导体晶体管以及已加入仿真金属层的多阈值互补式金氧半导体晶体管的上视图。FIG. 5A and FIG. 5B respectively show the top views of the multi-threshold complementary metal oxide semiconductor transistor without adding the dummy metal layer and the multi-threshold complementary metal oxide semiconductor transistor with the dummy metal layer added.

图6A及图6B分别绘示尚未加入仿真金属层的多阈值互补式金氧半导体晶体管以及已加入仿真金属层的多阈值互补式金氧半导体晶体管的剖视图。6A and 6B are cross-sectional views of a multi-threshold complementary metal oxide semiconductor transistor without adding a dummy metal layer and a multi-threshold complementary metal oxide semiconductor transistor with a dummy metal layer, respectively.

图7A及图7B分别绘示尚未变更电源接脚所耦接的电源前的网络表程序代码以及已变更电源接脚所耦接的电源后的网络表程序代码。FIG. 7A and FIG. 7B respectively show the program code of the netlist before changing the power source coupled to the power pin and the program code of the netlist after changing the power source coupled to the power pin.

图8绘示电流由电源垫流至多阈值互补式金氧半导体晶体管的示意图。FIG. 8 is a schematic diagram of current flowing from the power pad to the multi-threshold CMOS transistor.

图9绘示根据本发明的第二具体实施例的静态瞬态电压降分析方法的流程图。FIG. 9 is a flowchart of a static transient voltage drop analysis method according to a second embodiment of the present invention.

【主要组件符号说明】[Description of main component symbols]

S10~S14:流程步骤S10~S14: process steps

1、1’、2、6:电源栅控电路1, 1', 2, 6: power grid control circuit

10~12、20:多阈值互补式金氧半导体晶体管10~12, 20: multi-threshold complementary metal oxide semiconductor transistor

3:静态瞬态电压降分析装置  30:估算模块3: Static transient voltage drop analysis device 30: Estimation module

32:处理模块               34:变更模块32: Processing module 34: Change module

36:量测模块               D:汲极36: Measurement module D: Sink

S:源极                    G:栅极S: Source G: Gate

L:剖面线                  M:金属层L: Section line M: Metal layer

P:电源垫                  std cell:标准电子组件P: power pad std cell: standard electronic component

5’:加入金属层的多阈值互补式金氧半导体晶体管5': Multi-threshold complementary metal oxide semiconductor transistor with metal layer added

【具体实施方式】【Detailed ways】

根据本发明的第一具体实施例为一种静态瞬态电压降分析装置。于此实施例中,于此实施例中,该静态瞬态电压降分析装置用以分析设置于一电源栅控电路中的一多阈值互补式金氧半导体晶体管的静态瞬态电压降,并且该电源栅控电路可设置于一移动通信装置或其它电子装置内,用以关闭该移动通信装置或其它电子装置中暂时不会使用到其功能的模块,例如通信模块、短消息模块或游戏模块,藉以减少其整体的总功耗,但不以此为限。The first specific embodiment according to the present invention is a static transient voltage drop analysis device. In this embodiment, in this embodiment, the static transient voltage drop analysis device is used to analyze the static transient voltage drop of a multi-threshold complementary metal oxide semiconductor transistor disposed in a power gate control circuit, and the The power gate control circuit can be arranged in a mobile communication device or other electronic devices, and is used to turn off modules whose functions will not be used temporarily in the mobile communication device or other electronic devices, such as communication modules, short message modules or game modules, In order to reduce its overall total power consumption, but not limited thereto.

请参照图3,图3绘示该静态瞬态电压降分析装置的功能方块图。如图3所示,静态瞬态电压降分析装置3包含估算模块30、处理模块32、变更模块34及量测模块36。其中,估算模块30耦接至处理模块32;处理模块32耦接至变更模块34;变更模块34耦接至量测模块36。接下来,将分别就静态瞬态电压降分析装置3的各模块及其功能进行介绍。Please refer to FIG. 3 , which is a functional block diagram of the static transient voltage drop analysis device. As shown in FIG. 3 , the static transient voltage drop analysis device 3 includes an estimation module 30 , a processing module 32 , a modification module 34 and a measurement module 36 . Wherein, the estimation module 30 is coupled to the processing module 32 ; the processing module 32 is coupled to the modification module 34 ; the modification module 34 is coupled to the measurement module 36 . Next, each module and its function of the static transient voltage drop analysis device 3 will be introduced respectively.

于此实施例中,估算模块30用以根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值。实际上,估算模块30可执行一般的SPICE仿真程序或其它仿真程序进行该多阈值互补式金氧半导体晶体管的瞬态电压降特性的仿真,并藉以估算出对应于该多阈值互补式金氧半导体晶体管的该瞬态电压降容忍值,但不以此为限。In this embodiment, the estimation module 30 is used for estimating a transient voltage drop tolerance value according to the transient voltage drop characteristic of the multi-threshold complementary metal oxide semiconductor transistor. In fact, the estimation module 30 can execute a general SPICE simulation program or other simulation programs to simulate the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor transistor, and thereby estimate the corresponding multi-threshold complementary metal oxide semiconductor transistor. The transient voltage drop tolerance value of the transistor, but not limited thereto.

接着,处理模块32用以根据该瞬态电压降容忍值自多个候选仿真金属层中选取相对应的一仿真金属层。于实际应用中,该多个候选仿真金属层以及其相对应的瞬态电压降容忍值可预先记录于一查找表中,并记录有该多个候选仿真金属层各自的尺寸及其阻值,但不以此为限。Next, the processing module 32 is used for selecting a corresponding simulated metal layer from a plurality of candidate simulated metal layers according to the transient voltage drop tolerance value. In practical applications, the multiple candidate dummy metal layers and their corresponding transient voltage drop tolerance values can be pre-recorded in a lookup table, and the respective sizes and resistance values of the multiple candidate dummy metal layers are recorded, But not limited to this.

举例而言,估算模块30可执行一般的SPICE仿真程序仿真得到该多阈值互补式金氧半导体晶体管的IDS-VDS特性曲线图,如图4所示。根据V=IR可知,当栅极电压VG固定时,阻值R=VDS/IDS,亦即图4中的虚线斜率的倒数。假设估算模块30所得到的该多阈值互补式金氧半导体晶体管的瞬态电压降容忍值ΔV为3%,则该方法即可进一步自查找表所记录的众多候选仿真金属层中选取对应于瞬态电压降容忍值3%的仿真金属层M,并可由下列的查找表所记录的信息得到仿真金属层M的宽度为0.06微米且其阻值为0.067欧姆。For example, the estimation module 30 can execute a general SPICE simulation program to obtain the I DS -V DS characteristic curve of the multi-threshold complementary metal oxide semiconductor transistor, as shown in FIG. 4 . According to V=IR, when the gate voltage V G is fixed, the resistance value R=V DS /I DS , which is the reciprocal of the slope of the dotted line in FIG. 4 . Assuming that the transient voltage drop tolerance value ΔV of the multi-threshold complementary metal oxide semiconductor transistor obtained by the estimation module 30 is 3%, the method can further select the corresponding transient voltage drop from the numerous candidate simulation metal layers recorded in the lookup table. The simulated metal layer M has a state voltage drop tolerance value of 3%, and the simulated metal layer M has a width of 0.06 microns and a resistance value of 0.067 ohms according to the information recorded in the following look-up table.

对照表Chart

  瞬态电压降容忍值Transient voltage drop tolerance value   仿真金属层种类Type of simulated metal layer   仿真金属层宽度Simulated metal layer width   仿真金属层阻值Simulation metal layer resistance   1% 1%   NN   0.02微米0.02 microns   0.027欧姆0.027 ohms   3%3%   Mm   0.06微米0.06 micron   0.067欧姆0.067 ohms   5%5%   NN   0.09微米0.09 microns   0.101欧姆0.101 ohms   7%7%   Mm   0.11微米0.11 microns   0.122欧姆0.122 ohms

接着,处理模块32进一步将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中。请参照图5A及图5B,图5A及图5B分别绘示尚未加入仿真金属层M的多阈值互补式金氧半导体晶体管5以及已加入仿真金属层M的多阈值互补式金氧半导体晶体管5’的上视图。Next, the processing module 32 further adds the dummy metal layer to the multi-threshold CMOS transistor. Please refer to FIG. 5A and FIG. 5B. FIG. 5A and FIG. 5B respectively show a multi-threshold complementary metal oxide semiconductor transistor 5 that has not yet been added to the dummy metal layer M and a multi-threshold complementary metal oxide semiconductor transistor 5' that has been added to the dummy metal layer M. top view of .

如图5A所示,多阈值互补式金氧半导体晶体管5包含切换电源电压(switched VDD),等电源电压(constant VDD),以及共连接地电压(VSS),其中切换电源电压和等电源电压之间彼此不相连。在一般的模式下,只有等电源电压会跟系统电压源连接,至于待量测的部分则是等电源电压与切换电源电压之间的静态瞬态电压降。As shown in Figure 5A, the multi-threshold complementary metal oxide semiconductor transistor 5 includes a switched power supply voltage (switched VDD), an equal power supply voltage (constant VDD), and a common connection ground voltage (VSS), wherein the switched power supply voltage and the equal power supply voltage are not connected to each other. In normal mode, only the equal power supply voltage is connected to the system voltage source, and the part to be measured is the static transient voltage drop between the equal power supply voltage and the switching power supply voltage.

如图5B所示,处理模块32将仿真金属层M耦接于等电源电压与切换电源电压之间,使得原本在图5A中彼此分离的等电源电压及切换电源电压能够通过仿真金属层M耦接在一起而形成短路,并且由于仿真金属层M所具有的阻值R根据VDS/IDS而得,故仿真金属层M于多阈值互补式金氧半导体晶体管5’中能够表现出等同于瞬态电压降容忍值ΔV的特性。至于图6A及图6B则分别绘示尚未加入仿真金属层M的多阈值互补式金氧半导体晶体管5以及已加入仿真金属层M的多阈值互补式金氧半导体晶体管5’的剖视图,于此不另行赘述。As shown in FIG. 5B , the processing module 32 couples the dummy metal layer M between the equal power supply voltage and the switching power supply voltage, so that the equal power supply voltage and the switching power supply voltage that are originally separated from each other in FIG. 5A can be coupled through the dummy metal layer M. are connected together to form a short circuit, and since the resistance R of the simulated metal layer M is obtained according to V DS /I DS , the simulated metal layer M can exhibit the equivalent of Characteristics of transient voltage drop tolerance value ΔV. As for FIG. 6A and FIG. 6B , they respectively show cross-sectional views of the multi-threshold complementary metal oxide semiconductor transistor 5 that has not been added to the dummy metal layer M and the multi-threshold complementary metal oxide semiconductor transistor 5 ′ that has been added to the dummy metal layer M. I will repeat them separately.

之后,变更模块34将会变更多阈值互补式金氧半导体晶体管5’的电源接脚VDD所耦接的电源。请参照图7A及图7B,图7A及图7B分别绘示尚未变更电源接脚VDD所耦接的电源前的网络表(netlist)程序代码以及已变更电源接脚VDD所耦接的电源后的网络表程序代码。由图7A及图7B可知,变更模块34将多阈值互补式金氧半导体晶体管5’的电源接脚VDD所耦接的电源由原本的切换电源电压(switched VDD)变更至等电源电压(constantVDD),但不以此为限。Afterwards, the changing module 34 will change the power source coupled to the power pin VDD of the multi-threshold complementary metal oxide semiconductor transistor 5'. Please refer to FIG. 7A and FIG. 7B. FIG. 7A and FIG. 7B show the program code of the netlist (netlist) before changing the power supply coupled to the power pin VDD and the program code after changing the power supply coupled to the power pin VDD, respectively. Netlist program code. It can be seen from FIG. 7A and FIG. 7B that the changing module 34 changes the power supply coupled to the power supply pin VDD of the multi-threshold complementary metal oxide semiconductor transistor 5' from the original switched VDD to the constant VDD. , but not limited to this.

至于图8绘示电流由电源垫流至多阈值互补式金氧半导体晶体管的示意图。如图8中的箭头所示,电源端/接地端之间的电流将会由电源垫P流至多阈值互补式金氧半导体晶体管5’,并由多阈值互补式金氧半导体晶体管5’流至网络(mesh)以及由网络流至标准电子组件std cell,亦即电源端/接地端之间的电流能够由电源垫P流至所有耦接至网络的节点(node)。As for FIG. 8 , a schematic diagram of current flowing from the power pad to the multi-threshold CMOS transistor is shown. As shown by the arrow in FIG. 8, the current between the power terminal/ground terminal will flow from the power supply pad P to the multi-threshold complementary metal oxide semiconductor transistor 5', and flow from the multi-threshold complementary metal oxide semiconductor transistor 5' to The network (mesh) and the current flowing from the network to the standard electronic component std cell, that is, the current between the power terminal/ground terminal can flow from the power pad P to all nodes (nodes) coupled to the network.

最后,量测模块36将会量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降。值得注意的是,由于该多阈值互补式金氧半导体晶体管中原本分离的等电源电压(constant VDD)及切换电源电压(switched VDD)已通过该仿真金属层耦接在一起而形成短路,故该方法仅需通过一般的EDA软件即可准确地测得该多阈值互补式金氧半导体晶体管的静态瞬态电压降。亦即,该量测模块量测到的该瞬态电压降实质上即为该多阈值互补式金氧半导体晶体管的静态瞬态电压降。Finally, the measurement module 36 will measure a transient voltage drop of the dummy metal layer added to the multi-threshold CMOS transistor. It is worth noting that since the originally separated constant VDD and switched VDD in the multi-threshold complementary metal oxide semiconductor transistor have been coupled together through the dummy metal layer to form a short circuit, the The method only needs to use general EDA software to accurately measure the static transient voltage drop of the multi-threshold complementary metal oxide semiconductor transistor. That is, the transient voltage drop measured by the measuring module is substantially the static transient voltage drop of the multi-threshold CMOS transistor.

根据本发明的第二具体实施例为一种静态瞬态电压降分析方法。于此实施例中,该静态瞬态电压降分析方法用以分析设置于一电源栅控电路中的一多阈值互补式金氧半导体晶体管的静态瞬态电压降,并且该电源栅控电路可设置于一移动通信装置或其它电子装置内,用以关闭该移动通信装置或其它电子装置中暂时不会使用其功能的模块,例如通信模块、短消息模块或游戏模块,藉以减少其整体的总功耗,但不以此为限。The second specific embodiment according to the present invention is a static transient voltage drop analysis method. In this embodiment, the static transient voltage drop analysis method is used to analyze the static transient voltage drop of a multi-threshold complementary metal oxide semiconductor transistor disposed in a power gate control circuit, and the power gate control circuit can be configured In a mobile communication device or other electronic devices, it is used to turn off modules whose functions will not be used temporarily in the mobile communication device or other electronic devices, such as communication modules, short message modules or game modules, so as to reduce its overall total power Consumption, but not limited to this.

请参照图9,图9绘示该静态瞬态电压降分析方法的流程图。如图9所示,首先,该方法执行步骤S10,根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值。实际上,该方法通过一般的SPICE仿真程序仿真该多阈值互补式金氧半导体晶体管的瞬态电压降特性,并藉以估算出对应于该多阈值互补式金氧半导体晶体管的该瞬态电压降容忍值。Please refer to FIG. 9 , which is a flow chart of the static transient voltage drop analysis method. As shown in FIG. 9 , first, the method executes step S10 , estimating a transient voltage drop tolerance value according to the transient voltage drop characteristic of the multi-threshold complementary metal oxide semiconductor transistor. In fact, the method simulates the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor transistor through a general SPICE simulation program, and thereby estimates the transient voltage drop tolerance corresponding to the multi-threshold complementary metal oxide semiconductor transistor. value.

接着,该方法执行步骤S11,根据该瞬态电压降容忍值自多个候选仿真金属层中选取相对应的一仿真金属层。于实际应用中,该多个候选仿真金属层以及其相对应的瞬态电压降容忍值可预先记录于一查找表中,并记录有该多个候选仿真金属层各自的尺寸及其阻值。Next, the method executes step S11, selecting a corresponding simulated metal layer from a plurality of candidate simulated metal layers according to the transient voltage drop tolerance value. In practical applications, the plurality of candidate dummy metal layers and their corresponding transient voltage drop tolerance values can be pre-recorded in a look-up table, and the respective sizes and resistance values of the plurality of candidate dummy metal layers are recorded.

然后,该方法执行步骤S12,将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中。更详细地说,该方法将该仿真金属层耦接于等电源电压及切换电源电压之间,使得原本分离的等电源电压及切换电源电压能够通过该仿真金属层形成短路。Then, the method executes step S12, adding the dummy metal layer into the multi-threshold CMOS transistor. More specifically, the method couples the dummy metal layer between the equal power supply voltage and the switching power supply voltage, so that the originally separated equal power supply voltage and switching power supply voltage can form a short circuit through the dummy metal layer.

之后,该方法执行步骤S13,变更该多阈值互补式金氧半导体晶体管的电源接脚所耦接的电源。于此实施例中,该方法将该多阈值互补式金氧半导体晶体管的电源接脚所耦接的电源由原本的切换电源电压变更至等电源电压,但不以此为限。Afterwards, the method executes step S13 , changing the power source coupled to the power pin of the multi-threshold complementary metal oxide semiconductor transistor. In this embodiment, the method changes the power source coupled to the power pin of the multi-threshold complementary metal oxide semiconductor transistor from the original switching power supply voltage to an equal power supply voltage, but not limited thereto.

最后,该方法执行步骤S14,量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降。值得注意的是,由于该多阈值互补式金氧半导体晶体管中原本分离的等电源电压及切换电源电压已通过该仿真金属层耦接在一起而形成短路,故该方法仅需通过一般的EDA软件即可准确地通过该仿真金属层测得该多阈值互补式金氧半导体晶体管的静态瞬态电压降。亦即,该量测得的瞬态电压降实质上即为该多阈值互补式金氧半导体晶体管的静态瞬态电压降。Finally, the method executes step S14 to measure a transient voltage drop of the dummy metal layer added to the multi-threshold CMOS transistor. It is worth noting that since the originally separated equal power supply voltage and switching power supply voltage in the multi-threshold complementary metal oxide semiconductor transistor have been coupled together through the dummy metal layer to form a short circuit, so this method only needs to pass through the general EDA software The static transient voltage drop of the multi-threshold complementary metal oxide semiconductor transistor can be accurately measured through the simulated metal layer. That is, the measured transient voltage drop is substantially the static transient voltage drop of the multi-threshold CMOS transistor.

举例而言,假设该方法执行步骤S10所得到的该多阈值互补式金氧半导体晶体管的瞬态电压降容忍值为5%,则该方法即可进一步自查找表所记录的众多候选仿真金属层中选取对应于瞬态电压降容忍值5%的仿真金属层N,并可由查找表所记录的信息得到仿真金属层N的宽度为0.09微米且其阻值为0.101欧姆。For example, assuming that the transient voltage drop tolerance value of the multi-threshold complementary metal-oxide-semiconductor transistor obtained in step S10 of the method is 5%, the method can further select from the numerous candidate simulated metal layers recorded in the look-up table The simulated metal layer N corresponding to 5% of the transient voltage drop tolerance value is selected, and the width of the simulated metal layer N is 0.09 microns and its resistance value is 0.101 ohms according to the information recorded in the look-up table.

接着,该方法将仿真金属层N耦接于等电源电压及切换电源电压之间,使得等电源电压及切换电源电压通过仿真金属层N形成短路,并将该多阈值互补式金氧半导体晶体管的电源接脚所耦接的电源由原本的切换电源电压变更至等电源电压。因此,该方法最后即可通过一般的EDA软件准确地测得该多阈值互补式金氧半导体晶体管的静态瞬态电压降。Next, in the method, the dummy metal layer N is coupled between the equal power supply voltage and the switching power supply voltage, so that the equal power supply voltage and the switching power supply voltage form a short circuit through the dummy metal layer N, and the multi-threshold complementary metal oxide semiconductor transistor The power source coupled to the power pin is changed from the original switching power supply voltage to the equal power supply voltage. Therefore, in the end, the method can accurately measure the static transient voltage drop of the multi-threshold complementary metal oxide semiconductor transistor through common EDA software.

相较于先前技术,根据本发明的静态瞬态电压降分析装置及静态瞬态电压降分析方法先通过常见的SPICE仿真程序估算出待测的多阈值互补式金氧半导体晶体管的一瞬态电压降容忍值后,再将对应于该瞬态电压降容忍值的一仿真金属层加入至该多阈值互补式金氧半导体晶体管中,使得原本分离的等电源电压及切换电源电压通过该仿真金属层耦接在一起而形成短路,进而通过该仿真金属层准确地量测该多阈值互补式金氧半导体晶体管的静态瞬态电压降。Compared with the prior art, according to the static transient voltage drop analysis device and the static transient voltage drop analysis method of the present invention, a transient voltage of the multi-threshold complementary metal oxide semiconductor transistor to be tested is first estimated by a common SPICE simulation program After reducing the tolerance value, a dummy metal layer corresponding to the transient voltage drop tolerance value is added to the multi-threshold complementary metal oxide semiconductor transistor, so that the originally separated equal power supply voltage and switching power supply voltage pass through the dummy metal layer are coupled together to form a short circuit, and then accurately measure the static transient voltage drop of the multi-threshold CMOS transistor through the dummy metal layer.

因此,本发明所提出的静态瞬态电压降分析装置及静态瞬态电压降分析方法不必如同先前技术一样仰赖某些特殊设计的分析软件,仅需采用一般的EDA软件即可准确地量测到该多阈值互补式金氧半导体晶体管的静态瞬态电压降,故可省去额外设置该些特殊设计的分析软件的庞大费用。Therefore, the static transient voltage drop analysis device and the static transient voltage drop analysis method proposed by the present invention do not need to rely on some specially designed analysis software like the prior art, and only need to use general EDA software to accurately measure The static transient voltage drop of the multi-threshold complementary metal-oxide-semiconductor transistor can save the huge cost of additionally setting these specially designed analysis software.

通过以上较佳具体实施例的详述,希望能更加清楚描述本发明的特征与精神,而并非以上述所揭露的较佳具体实施例来对本发明的范畴加以限制。相反地,其目的是希望能涵盖各种改变及具相等性的安排于本发明所欲申请的专利范围的范畴内。Through the above detailed description of the preferred embodiments, it is hoped that the features and spirit of the present invention can be described more clearly, rather than limiting the scope of the present invention by the preferred embodiments disclosed above. On the contrary, the intention is to cover various changes and equivalent arrangements within the scope of the claimed patent scope of the present invention.

Claims (15)

1.一种静态瞬态电压降分析装置,用以量测一多阈值互补式金氧半导体晶体管的一静态瞬态电压降,该静态瞬态电压降分析装置包含:1. A static transient voltage drop analysis device for measuring a static transient voltage drop of a multi-threshold complementary metal oxide semiconductor transistor, the static transient voltage drop analysis device comprising: 一估算模块,用以根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值;An estimation module, used to estimate a transient voltage drop tolerance value according to the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor transistor; 一处理模块,耦接至该估算模块,用以根据该瞬态电压降容忍值自多个候选仿真金属层中选取一仿真金属层,并将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中;以及A processing module, coupled to the estimation module, is used to select a simulated metal layer from a plurality of candidate simulated metal layers according to the transient voltage drop tolerance value, and add the simulated metal layer to the multi-threshold complementary metal oxide In semiconductor transistors; and 一量测模块,用以量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降;a measurement module for measuring a transient voltage drop of the dummy metal layer added to the multi-threshold complementary metal oxide semiconductor transistor; 其中,该量测模块量测到的该瞬态电压降为该多阈值互补式金氧半导体晶体管的该静态瞬态电压降。Wherein, the transient voltage drop measured by the measurement module is the static transient voltage drop of the multi-threshold CMOS transistor. 2.根据权利要求1所述的静态瞬态电压降分析装置,其特征在于,该多阈值互补式金氧半导体晶体管设置于一电源栅控电路中,并且该电源栅控电路包含一切换电源电压及一等电源电压。2. The static transient voltage drop analysis device according to claim 1, wherein the multi-threshold complementary metal oxide semiconductor transistor is arranged in a power gate control circuit, and the power gate control circuit includes a switching power supply voltage And first-class power supply voltage. 3.根据权利要求2所述的静态瞬态电压降分析装置,其特征在于,进一步包含:3. The static transient voltage drop analysis device according to claim 2, further comprising: 一变更模块,耦接于该处理模块与该多阈值互补式金氧半导体晶体管,用以将该多阈值互补式金氧半导体晶体管的一电源接脚所耦接的电源由原本的该切换电源电压变更为该等电源电压。A modification module, coupled to the processing module and the multi-threshold complementary metal oxide semiconductor transistor, for changing the power supply coupled to a power pin of the multi-threshold complementary metal oxide semiconductor transistor from the original switching power supply voltage Change to these supply voltages. 4.根据权利要求2所述的静态瞬态电压降分析装置,其特征在于,该多阈值互补式金氧半导体晶体管包含一第一电极及一第二电极,该第一电极耦接至该等电源电压且该第二电极耦接至该切换电源电压,该处理模块将该仿真金属层耦接于该第一电极与该第二电极之间,使得该第一电极与该第二电极形成短路。4. The static transient voltage drop analysis device according to claim 2, wherein the multi-threshold complementary metal oxide semiconductor transistor comprises a first electrode and a second electrode, and the first electrode is coupled to the a power supply voltage and the second electrode is coupled to the switching power supply voltage, the processing module couples the dummy metal layer between the first electrode and the second electrode, so that the first electrode and the second electrode form a short circuit . 5.根据权利要求4所述的静态瞬态电压降分析装置,其特征在于,该量测模块通过一般的EDA软件量测该仿真金属层的该瞬态电压降。5 . The static transient voltage drop analysis device according to claim 4 , wherein the measurement module measures the transient voltage drop of the simulated metal layer through general EDA software. 6.根据权利要求1所述的静态瞬态电压降分析装置,其特征在于,该多个候选仿真金属层以及相对应的瞬态电压降容忍值预先记录于一查找表中。6 . The static transient voltage drop analysis device according to claim 1 , wherein the plurality of candidate simulated metal layers and corresponding transient voltage drop tolerance values are pre-recorded in a look-up table. 7.根据权利要求6所述的静态瞬态电压降分析装置,其特征在于,该查找表更记录有该多个候选仿真金属层的尺寸及其阻值,当该处理模块选取该仿真金属层时,该处理模块亦可由该查找表得到该仿真金属层的尺寸及其阻值,并根据该仿真金属层的尺寸及其阻值将该仿真金属层设置于该多阈值互补式金氧半导体晶体管内。7. The static transient voltage drop analysis device according to claim 6, wherein the look-up table further records the sizes and resistance values of the plurality of candidate simulated metal layers, when the processing module selects the simulated metal layer , the processing module can also obtain the size and resistance value of the simulated metal layer from the look-up table, and set the simulated metal layer on the multi-threshold complementary metal oxide semiconductor transistor according to the size and resistance value of the simulated metal layer Inside. 8.根据权利要求1所述的静态瞬态电压降分析装置,其特征在于,该估算模块执行SPICE仿真程序仿真该多阈值互补式金氧半导体晶体管的瞬态电压降特性,以估算出该瞬态电压降容忍值。8. The static transient voltage drop analysis device according to claim 1, wherein the estimation module executes a SPICE simulation program to simulate the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor transistor to estimate the transient voltage drop state voltage drop tolerance value. 9.一种静态瞬态电压降分析方法,用以量测一多阈值互补式金氧半导体晶体管的一静态瞬态电压降,该方法包含下列步骤:9. A static transient voltage drop analysis method for measuring a static transient voltage drop of a multi-threshold complementary metal oxide semiconductor transistor, the method comprising the following steps: 根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出一瞬态电压降容忍值;Estimate a transient voltage drop tolerance value according to the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor transistor; 根据该瞬态电压降容忍值自多个候选仿真金属层中选取一仿真金属层;selecting a simulated metal layer from a plurality of candidate simulated metal layers according to the transient voltage drop tolerance value; 将该仿真金属层加入至该多阈值互补式金氧半导体晶体管中;以及adding the dummy metal layer to the multi-threshold CMOS transistor; and 量测已加入至该多阈值互补式金氧半导体晶体管中的该仿真金属层的一瞬态电压降;measuring a transient voltage drop of the dummy metal layer added to the multi-threshold CMOS transistor; 其中,该量测所得的瞬态电压降为该多阈值互补式金氧半导体晶体管的该静态瞬态电压降。Wherein, the measured transient voltage drop is the static transient voltage drop of the multi-threshold CMOS transistor. 10.根据权利要求9所述的静态瞬态电压降分析方法,其特征在于,该多阈值互补式金氧半导体晶体管设置于一电源栅控电路中,并且该电源栅控电路包含一切换电源电压及一等电源电压。10. The static transient voltage drop analysis method according to claim 9, wherein the multi-threshold complementary metal oxide semiconductor transistor is arranged in a power gate control circuit, and the power gate control circuit includes a switching power supply voltage And first-class power supply voltage. 11.根据权利要求10所述的静态瞬态电压降分析方法,其特征在于,于加入该仿真金属层至该多阈值互补式金氧半导体晶体管的步骤后,该方法进一步包含下列步骤:11. The static transient voltage drop analysis method according to claim 10, characterized in that, after the step of adding the dummy metal layer to the multi-threshold CMOS transistor, the method further comprises the following steps: 将该多阈值互补式金氧半导体晶体管的一电源接脚所耦接的电源由原本的该切换电源电压变更为该等电源电压。The power source coupled to a power pin of the multi-threshold complementary metal oxide semiconductor transistor is changed from the original switching power supply voltage to the power supply voltages. 12.根据权利要求10所述的静态瞬态电压降分析方法,其特征在于,该多阈值互补式金氧半导体晶体管包含一第一电极及一第二电极,该第一电极耦接至该等电源电压且该第二电极耦接至该切换电源电压,于加入该仿真金属层至该多阈值互补式金氧半导体晶体管的步骤中,该仿真金属层耦接于该第一电极与该第二电极之间,使得该第一电极与该第二电极形成短路。12. The static transient voltage drop analysis method according to claim 10, wherein the multi-threshold complementary metal oxide semiconductor transistor comprises a first electrode and a second electrode, and the first electrode is coupled to the power supply voltage and the second electrode is coupled to the switching power supply voltage, in the step of adding the dummy metal layer to the multi-threshold complementary metal oxide semiconductor transistor, the dummy metal layer is coupled between the first electrode and the second Between the electrodes, the first electrode and the second electrode form a short circuit. 13.根据权利要求12所述的静态瞬态电压降分析方法,其特征在于,于量测该仿真金属层的该瞬态电压降的步骤中,该方法通过一般的EDA软件量测该仿真金属层的该瞬态电压降。13. The static transient voltage drop analysis method according to claim 12, characterized in that, in the step of measuring the transient voltage drop of the simulated metal layer, the method measures the simulated metal by general EDA software layer for this transient voltage drop. 14.根据权利要求9所述的静态瞬态电压降分析方法,其特征在于,于选取相对应的该仿真金属层的步骤中,该方法亦可同时得到该仿真金属层的尺寸及其阻值,并根据该仿真金属层的尺寸及其阻值将该仿真金属层设置于该多阈值互补式金氧半导体晶体管内。14. The static transient voltage drop analysis method according to claim 9, characterized in that, in the step of selecting the corresponding simulated metal layer, the method can also simultaneously obtain the size and resistance value of the simulated metal layer , and the dummy metal layer is set in the multi-threshold CMOS transistor according to the size and resistance value of the dummy metal layer. 15.根据权利要求9所述的静态瞬态电压降分析方法,其特征在于,于根据该多阈值互补式金氧半导体晶体管的瞬态电压降特性估算出该瞬态电压降容忍值的步骤中,该方法执行SPICE仿真程序仿真该多阈值互补式金氧半场导体晶体管的瞬态电压降特性,以估算出该瞬态电压降容忍值。15. The static transient voltage drop analysis method according to claim 9, characterized in that in the step of estimating the transient voltage drop tolerance value according to the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor transistor The method executes a SPICE simulation program to simulate the transient voltage drop characteristics of the multi-threshold complementary metal oxide semiconductor field transistor, so as to estimate the transient voltage drop tolerance value.
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CN106249034A (en) * 2016-08-15 2016-12-21 北京航空航天大学 Voltage drop alarm on a kind of sheet adjusting system for working in coordination with dynamic voltage frequency
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