CN102109492A - Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof - Google Patents
Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof Download PDFInfo
- Publication number
- CN102109492A CN102109492A CN2011100392292A CN201110039229A CN102109492A CN 102109492 A CN102109492 A CN 102109492A CN 2011100392292 A CN2011100392292 A CN 2011100392292A CN 201110039229 A CN201110039229 A CN 201110039229A CN 102109492 A CN102109492 A CN 102109492A
- Authority
- CN
- China
- Prior art keywords
- electrode
- gas humidity
- carbon nano
- tube film
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a carbon nanometer tube film ionization type gas humidity sensor and a humidity measurement method thereof. The sensor comprises a first electrode, a second electrode and a third electrode which are distributed in sequence, wherein the first electrode is provided with a breather hole, and a metal film substrate on which carbon nanometer tube films are distributed is adhered onto the inner surface of the first electrode; a leading-out hole is formed in the center of the second electrode; a blind hole is formed on the plate surface of the third electrode; and the three electrodes are isolated from one another. The method comprises the following steps: firstly, placing the gas humidity sensor; secondly, applying a voltage on the electrodes; thirdly, measuring the values of ion flows outputted by the sensor; fourthly, making samples of the measured values and gas humidity calibration values, and establishing a gas humidity measurement database with the samples and interpolated samples; fifthly, establishing a data fusion instrument and a gas humidity measurement model; and sixthly, inputting the measured values of the sensor into the measurement model to obtain the accurate gas humidity measurement value. The gas humidity sensor has low working voltage, as well as high gas humidity measurement sensitivity, linearity and accuracy, and can be used for humidity measurement of various gases.
Description
Technical field
The present invention relates to the gas humidity detection range, particularly a kind of ionization type gas humidity sensor and humidity measuring method thereof based on carbon nano-tube film and gas discharge principle.
Background technology
Along with pressing for and the development of nanometer technology of all trades and professions gas detection, nano-sensor has obtained considerable progress.Especially along with the discovery of carbon nano-tube in latter stage in 20th century, carbon nano-tube shows tempting application prospect in gas, temperature, Humidity Detection field.Carbon nano-tube film two electrode ionizing transducers in the carbon nano-tube moisture sensor with advantages such as its detection sensitivity height, detected gas wide ranges, response are fast, become the research focus of gas humidity detection range.Carbon nano-tube film two electrode ionization type gas humidity sensors are based on gas discharge principle, with carbon nano-tube as sensitive material, have the irreplaceable advantage of conventional sensors: the one, the specific surface area of carbon nano-tube is big, under the less situation of sensor overall dimensions, can improve the area of electrode greatly; Two are based on the tip curvature radius of carbon nanotube level, and working sensor voltage is greatly reduced, and obtain extremely strong electric field intensity near the carbon nano-tube tip, make tested gas ionization under low-voltage; The 3rd, the size of having dwindled sensor greatly, dynamic response is fast.Therefore, it has result of extraction at aspects such as biology, chemistry, machinery, aviation, military affairs, anti-terrorisms.
Existing carbon nano-tube film two electrode ionization type gas humidity sensors are developed under the condition of 120 microns die openings by Hui Guohua, the Chen Yuquan professor of Zhejiang University's biomedical engineering and instrumental science institute, studied the wet quick characteristic (Fig. 1) of carbon nano-tube thin film cathode two electrode sensors, i.e. the relation of voltage breakdown and humidity in the air.The voltage breakdown of this two electrode sensor and humidity have many-valued nonlinear characteristic, do not constitute carbon nano-tube film two electrode ionization type humidity sensors.
Therefore, to the research of carbon nano-tube film ionization type gas humidity sensor and humidity measuring method thereof, become the technical matters that needs to be resolved hurrily at present.
Summary of the invention
One of purpose of the present invention, provide a kind of carbon nano-tube film ionization type gas humidity sensor, the output current of conventional carbon nano-tube film two electrode sensors is divided into electron stream and ion flow, set up the ion flow of ionization type gas wet sensor collector collection of the present invention and the single-valued relationship of gas humidity, overcome the many-valued nonlinear problem of the wet quick characteristic of carbon nano-tube film two electrode sensors.Sensor construction of the present invention is simple, and cost is low, and measurement gas humidity is highly sensitive.
Another object of the present invention provides a kind of humidity measuring method based on carbon nano-tube film ionization type gas humidity sensor, by carbon nano-tube film ionization type gas humidity sensor measurement gas humidity to be measured; The hardware configuration that this humidity measuring method requires is simple, and the inflammable and explosive and toxic gas humidity of energy measurement adopts data anastomosing algorithm, measurement gas humidity accuracy height.
The objective of the invention is to realize by following technical proposals.
Carbon nano-tube film ionization type gas humidity sensor, it is characterized in that: comprise three first electrode, second electrode and third electrodes that distribute successively from top to bottom, the electrode that described first electrode adheres to the metallic film base that the carbon nano-tube film that distributing is arranged by inside surface and is provided with bleeder vent constitutes; Second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
Architectural feature of the present invention also is:
Adjacent two interelectrode die openings are 30～250 μ m in described three electrodes; Described first electrode and second electrode pad are 0.01～170mm over against area
2, second electrode and third electrode pole plate are 0.01～190mm over against area
2
The bleeder vent of the electrode surface of described first electrode is 1～4, and growth or serigraphy have carbon nano-tube film on the metallic film base that the electrode inner surface adheres to;
The described second electrode extraction pole center is provided with 1～4 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4.
The present invention gives a kind of gas humidity measuring method based on carbon nano-tube film ionization type gas humidity sensor, and this method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set at the carbon nano-tube film ionization type gas humidity sensor of 30～250 μ m;
(2) carbon nano-tube film ionization type gas humidity sensor is placed in the gas humidity environment to be measured;
(3) the first electrode on-load voltage to carbon nano-tube film ionization type gas humidity sensor is 0V, the second electrode on-load voltage, 2～200V, third electrode on-load voltage 1～180V;
(4) in gas humidity measurement range to be measured, corresponding different humidity demarcating values, the gas discharge ion flow valuve of survey sensor output;
(5) with the sensor output ion flow valuve and corresponding humidity demarcating value that record in the step (4), form different experimental calibration samples, adopt the piecewise interpolation technology that the experimental calibration sample is carried out interpolation then, obtain interpolated data, obtain interpolated sample, and set up the gas humidity measured database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt the data fusion technology, make up the data fusion instrument, set up the moisture measurement model of gas humidity sensor, respectively with input sample and the desired output sample of the data in the gas humidity measured database as the data fusion instrument, and train and check as the training sample and the test samples of data fusion instrument respectively with data different in the range ability, when assay satisfies the measurement error requirement, the accurate measurement model of humidity of data fusion instrument output transducer;
The gas humidity measurement model that the ion flow valuve input step (6) of output obtains when (7) carbon nano-tube film ionization type gas humidity sensor being surveyed, the accurate measured value of this model output gas humidity.
The inventive method feature also is:
In the described carbon nano-tube film ionization type gas humidity sensor, second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.
The described gas humidity measured database of setting up is that experimental calibration data and interpolated data are formed database, and sensor is exported ion flow valuve and interpolated data thereof as the input sample, with gas humidity calibration value and interpolated data thereof as the desired output sample.
Based on the gas humidity measuring method of carbon nano-tube film ionization type gas humidity sensor, by carbon nano-tube film ionization type gas humidity sensor measurement gas humidity to be measured; Power by the sensor electrical potential source; Export by pA level current measurement system detecting sensor; Adjust electrode separation, adjust electrode voltage, in humidity environment to be measured, carry out the calibration experiment of sensor; Based on the piecewise interpolation technology experimental calibration data are carried out interpolation, obtain interpolated data; All data that will comprise experimental calibration data and interpolated data are formed the gas humidity measured database, obtain the monodrome humidity sensitive characteristic of sensor; According to the data in the gas humidity measured database,, set up the accurate measurement model of humidity of gas humidity sensor based on the data fusion technology; The gas humidity measurement model is imported in the output of sensor in real time during with actual measurement, just can obtain the measured result of gas humidity.This gas humidity measuring method has overcome the high and wet many-valued nonlinear problem of quick characteristic of carbon nano-tube film two electrode sensor operating voltage, the hardware configuration that requires is simple, inflammable, the explosive and toxic gas humidity of energy measurement, and cost is low, measurement gas humidity is highly sensitive, accuracy is high, is suitable for promoting the use of.
The present invention can realize the measurement of all gases humidity owing to taked carbon nano-tube film ionization type gas humidity sensor to measure humidity, and accuracy is 1%.The sensor of this structure adopts carbon nano-tube film to do electrode, can realize working sensor voltage is reduced to 200 volts of following safe and practical scopes with the tip curvature radius of carbon nanotube level.By regulating the die opening and the electrode voltage of adjacent two electrodes of sensor electrode, in the moisture measurement scope, can solve carbon nano-tube film two electrode sensor operating voltage height in the prior art, the wet many-valued nonlinear problem of quick characteristic, can be used for the measurement of humidity in inflammable, explosive, the toxic gas environment.The present invention is owing to the humidity measuring method of having taked based on carbon nano-tube film ionization type gas humidity sensor, carbon nano-tube film ionizing transducer technology, pA level current measurement techniques, piecewise interpolation technology and data fusion technology are integrated, can realize the accurate measurement of gas humidity.
Description of drawings
Fig. 1 is the many-valued non-linear humidity sensitive characteristic of prior art carbon nano-tube film two electrode humidity sensors.
Fig. 2 is a carbon nano-tube film ionization type gas humidity sensor construction synoptic diagram of the present invention;
Fig. 3 is a carbon nano-tube film ionization type gas humidity sensor spatial structure side view of the present invention;
Fig. 4 is the single valued relation of humidity in the gas discharge ion flow of carbon nano-tube film ionization type gas humidity sensor of the present invention output and the nitrogen environment.
Among the figure: 1, first electrode; 2, second electrode; 3, third electrode; 4, be provided with the electrode of bleeder vent; 5, metallic film base; 6, carbon nano-tube film; 7, insulation column.
Embodiment
The present invention will be further described below in conjunction with drawings and the specific embodiments.
As Fig. 2, shown in Figure 3, this carbon nano-tube film ionization type gas humidity sensor, comprise by three successively from top to bottom the electrode of mutual superposition constitute, these three mutual superposition electrodes are respectively equipped with first electrode 1, second electrode 2 and third electrode 3, and the electrode 4 that its first electrode 1 adheres to the metallic film base 5 that the carbon nano-tube film 6 that distributing is arranged by inside surface and is provided with bleeder vent constitutes; Second electrode 2 is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode 3 is made of the collector that the battery lead plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column 7 respectively.
Among the carbon nano-tube film ionization type gas humidity sensor embodiment shown in Figure 2, the bleeder vent of the electrode surface of first electrode 1 has 2, and bleeder vent is circular; Side surface at this bleeder vent is attached with metallic film base 5, is distributed with carbon nano-tube film 6 on it, and this carbon nano-tube mouth of pipe is downward.Second electrode, 2 centers are provided with 1～4 fairlead, have provided among Fig. 2, Fig. 3 a fairlead and fairlead are set are circular embodiment.Third electrode 3 collector blind holes are corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4, provided among Fig. 2, Fig. 3 a blind hole to be set and blind hole is the embodiment of cylindrical structure.Insulation column 7 is separately positioned between first electrode 1 and second electrode 2, between second electrode 2 and the third electrode 3, promptly insulation column 7 is distributed in second electrode 2 over against the surperficial both sides of first electrode 1 and the both sides on the inboard golden film surface of third electrode 3.
The present invention's first electrode 1 adopts silicon sheet material to make, and a side surface of first electrode 1 is attached with metallic film base 5; Described carbon nano-tube film 6 can adopt FePC as catalyzer, and adopts carbon source, and carbon nano-tube film 6 is made in growth on metallic film base 5, and perhaps the serigraphy carbon nano-tube film 6.Second electrode 2 and third electrode 3 all adopt silicon wafer to manufacture.The two sides of first electrode 1 and third electrode 3 medial surfaces, second electrode 2 are equipped with metal film.
On the electrode in the present invention's first electrode 12 bleeder vents are arranged, be convenient to gas to be detected and enter electrode gap; Metallic film base 5 has conductive capability attached to first electrode, 1 one side surfaces; On second electrode 2 fairlead is arranged; Third electrode 3 collectors can be collected the positive ion stream that gas ionization produces.Between first electrode 1 and second electrode 2, isolate mutually by insulation column 7 between second electrode 2 and the third electrode 3; Tested gas enters in the gap of adjacent two electrodes of sensor by the gap between the sensor peripheral electrode.
The present invention takes the carbon nano-tube film ionization type gas humidity sensor of said structure when measurement gas humidity, and second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.Second electrode and first electrode form the electron stream loop, and the third electrode and first electrode form the ion flow loop, realize electron stream is separated with ion flow.Between the ion flow and gas humidity of the output of carbon nano-tube film ionization type gas humidity sensor, apply at second electrode on the basis of certain voltage, present single valued relation (shown in Figure 4).By piecewise interpolation and data fusion, realized the accuracy of measurement of gas humidity 1%.Carbon nano-tube film ionizing transducer technology, pA level current measurement techniques, piecewise interpolation technology and data fusion technology are the features of humidity measuring method of the present invention.
Below by an instantiation, the method for carbon nano-tube film ionization type gas humidity sensor measurement gas humidity of the present invention is described further.
Adopt the fixing carbon nano-tube film ionization type gas humidity sensor of die opening, experiment has obtained the monodrome humidity characteristic (shown in Figure 4) in the nitrogen, the moisture measurement model that the ion flow input data fusion of sensor output is set up has obtained fiducial error less than the moisture measurement value in 1% the nitrogen.
Among the embodiment of carbon nano-tube film ionization type gas humidity sensor nitrogen environment humidity shown in Figure 4, the experimental situation condition is 20.8～21.8 ℃ of temperature, atmospheric pressure 93.6～100KPa.Sensor first electrode 1 and second electrode, 2 die openings are that 200 μ m, second electrode 2 are 100 μ m with third electrode 3 die openings; First electrode 1 and second electrode, 2 pole plates are 170mm over against area
2, second electrode 2 is 190mm with third electrode 3 pole plates over against area
2First electrode, 1 cathode voltage is 0V, second electrode, 2 extraction pole on-load voltage 90V, third electrode 3 collector on-load voltage 10V.Along with the rising of humidity, the ion flow that collector is collected increases, and presents monodrome rising relation between ion flow and the humidity.In 25.8～100%RH humidity range, 25 groups of experimental calibration data have been obtained.Humidity sensor ion flow valuve is as the input sample, and the humidity demarcating value is as the desired output sample data.Adopting linear interpolation, is that step-length is carried out equidistant interpolation with 0.5%RH in 25.8～100%RH humidity range, obtains 150 groups of interpolated datas, and forms databases with 25 groups of experimental calibration data.Select for use 45 groups of interpolated datas as training sample, 25 groups of experimental calibration data are as test samples, and input data fusion instrument by the training check, obtains moisture measurement model in the nitrogen.The linearity of this moisture measurement model is that the assay fiducial error maximal value of 0.15%, 25 group of test samples is 0.2%, has reached 1% moisture measurement accuracy.
Present embodiment basic structure is with embodiment 1, different is: adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m in three electrodes of carbon nano-tube film ionization type gas humidity sensor, and first electrode 1 and second electrode, 2 pole plates are 0.01mm over against area
2, second electrode 2 is 0.01mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of first electrode 1 has 1, and bleeder vent is quadrilateral, pentagon or hexagon; Second electrode, 2 center fairleads are 4, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 4, and blind hole is 3～6 prisms or pyramid.
The humidity measuring method of present embodiment is substantially the same manner as Example 1, and different is:
The first electrode cathode voltage of carbon nano-tube film ionization type gas humidity sensor is 0V, the second electrode extraction pole on-load voltage 2V, third electrode collector on-load voltage 1V.
Present embodiment basic structure is with embodiment 1, different is: adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m in three electrodes of carbon nano-tube film ionization type gas humidity sensor, and first electrode 1 and second electrode, 2 pole plates are 10mm over against area
2, second electrode 2 is 100mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of first electrode 1 has 4, and bleeder vent is quadrilateral, pentagon or hexagon; Second electrode, 2 center fairleads are 2, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 2, and blind hole is 3～6 prisms or pyramid.
The humidity measuring method of present embodiment is substantially the same manner as Example 1, and different is:
The first electrode cathode voltage of carbon nano-tube film ionization type gas humidity sensor is 0V, the second electrode extraction pole on-load voltage 200V, third electrode collector on-load voltage 180V.
The present invention is by carbon nano-tube film ionization type gas humidity sensor, the output of pA level current measurement system detecting sensor, piecewise interpolation and data fusion method, form a kind of novel, can measure various gas humidities to be measured, the linearity is good, accuracy is high gas humidity measuring method.The direct measurement gas humidity of sensor of the present invention is also exported the above faint ion flow of pA level; The pA level ion flow of pA level current measurement system detectable gas humidity sensor output; Piecewise interpolation and data fusion method can obtain the high gas humidity measured value of accuracy.
Though the present invention has made detailed description with above-mentioned preferred embodiment to the present invention, the foregoing description also is not used in qualification the present invention.Under the situation that does not break away from given technical characterictic of technical solution of the present invention and range of structures, the increase that technical characterictic is done, distortion or with the replacement of the same content in this area all should belong to protection scope of the present invention.
Claims (6)
1. carbon nano-tube film ionization type gas humidity sensor, it is characterized in that: comprise three first electrode, second electrode and third electrodes that distribute successively from top to bottom, the electrode that described first electrode adheres to the metallic film base that the carbon nano-tube film that distributing is arranged by inside surface and is provided with bleeder vent constitutes; Second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
2. carbon nano-tube film ionization type gas humidity sensor according to claim 1 is characterized in that: adjacent two interelectrode die openings are 30～250 μ m in described three electrodes; Described first electrode and second electrode pad are 0.01～170mm over against area
2, second electrode and third electrode pole plate are 0.01～190mm over against area
2
3. carbon nano-tube film ionization type gas humidity sensor according to claim 1, it is characterized in that: the bleeder vent of the electrode surface of described first electrode is 1～4, and growth or serigraphy have carbon nano-tube film on the metallic film base that the electrode inner surface adheres to;
The described second electrode extraction pole center is provided with 1～4 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4.
4. based on the gas humidity measuring method of carbon nano-tube film ionization type gas humidity sensor, it is characterized in that this method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set at the carbon nano-tube film ionization type gas humidity sensor of 30～250 μ m;
(2) carbon nano-tube film ionization type gas humidity sensor is placed in the gas humidity environment to be measured;
(3) the first electrode on-load voltage to carbon nano-tube film ionization type gas humidity sensor is 0V, the second electrode on-load voltage, 2～200V, third electrode on-load voltage 1～180V;
(4) in gas humidity measurement range to be measured, corresponding different humidity demarcating values, the gas discharge ion flow valuve of survey sensor output;
(5) with the sensor output ion flow valuve and corresponding humidity demarcating value that record in the step (4), form different experimental calibration samples, adopt the piecewise interpolation technology that the experimental calibration sample is carried out interpolation then, obtain interpolated data, obtain interpolated sample, and set up the gas humidity measured database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt the data fusion technology, make up the data fusion instrument, set up the moisture measurement model of gas humidity sensor, respectively with input sample and the desired output sample of the data in the gas humidity measured database as the data fusion instrument, and train and check as the training sample and the test samples of data fusion instrument respectively with data different in the range ability, when assay satisfies the measurement error requirement, the accurate measurement model of humidity of data fusion instrument output transducer;
The gas humidity measurement model that the ion flow valuve input step (6) of output obtains when (7) carbon nano-tube film ionization type gas humidity sensor being surveyed, the accurate measured value of this model output gas humidity.
5. the gas humidity measuring method based on carbon nano-tube film ionization type gas humidity sensor according to claim 4, it is characterized in that: in the described carbon nano-tube film ionization type gas humidity sensor, second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.
6. the gas humidity measuring method based on carbon nano-tube film ionization type gas humidity sensor according to claim 4, it is characterized in that: the described gas humidity measured database of setting up, be that experimental calibration data and interpolated data are formed database, sensor is exported ion flow valuve and interpolated data thereof as the input sample, with gas humidity calibration value and interpolated data thereof as the desired output sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110039229 CN102109492B (en) | 2011-02-16 | 2011-02-16 | Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110039229 CN102109492B (en) | 2011-02-16 | 2011-02-16 | Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102109492A true CN102109492A (en) | 2011-06-29 |
| CN102109492B CN102109492B (en) | 2013-05-22 |
Family
ID=44173709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110039229 Expired - Fee Related CN102109492B (en) | 2011-02-16 | 2011-02-16 | Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102109492B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102081067A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same |
| CN102095789A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nanotube film ionizing sensor and method for detecting concentration of bi-component gas |
| CN103236429A (en) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | Miniature carbon nano pipe humidity sensor chip with heating unit |
| CN106198714A (en) * | 2016-08-03 | 2016-12-07 | 西安交通大学 | A kind of gold-plated carbon nano-tube film ionization type methane transducer |
| CN107525825A (en) * | 2016-06-21 | 2017-12-29 | 天津理工大学 | It is prepared by a kind of gas sensor based on screen printing technique |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220513A (en) * | 2005-02-09 | 2006-08-24 | Fujitsu Ltd | Target detection device, its manufacturing method and target detection method |
| CN101363807A (en) * | 2008-09-11 | 2009-02-11 | 电子科技大学 | Organic gas sensor and method for making same |
| CN102081072A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Carbon nanotube (CNT) film based ionization nitric oxide (NO) sensor and method for measuring concentration by adopting same |
| CN102095781A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same |
| CN102175756A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film ionizing sulphur dioxide sensor and concentration measuring method by utilizing same |
-
2011
- 2011-02-16 CN CN 201110039229 patent/CN102109492B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220513A (en) * | 2005-02-09 | 2006-08-24 | Fujitsu Ltd | Target detection device, its manufacturing method and target detection method |
| CN101363807A (en) * | 2008-09-11 | 2009-02-11 | 电子科技大学 | Organic gas sensor and method for making same |
| CN102081072A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Carbon nanotube (CNT) film based ionization nitric oxide (NO) sensor and method for measuring concentration by adopting same |
| CN102095781A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same |
| CN102175756A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film ionizing sulphur dioxide sensor and concentration measuring method by utilizing same |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102081067A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same |
| CN102095789A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nanotube film ionizing sensor and method for detecting concentration of bi-component gas |
| CN102081067B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same |
| CN102095789B (en) * | 2011-02-16 | 2013-07-10 | 西安交通大学 | Carbon nanotube film ionizing sensor and method for detecting concentration of bi-component gas |
| CN103236429A (en) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | Miniature carbon nano pipe humidity sensor chip with heating unit |
| CN103236429B (en) * | 2013-05-14 | 2015-09-09 | 哈尔滨工业大学 | With the Miniature carbon nano pipe humidity sensor chip of heating unit |
| CN107525825A (en) * | 2016-06-21 | 2017-12-29 | 天津理工大学 | It is prepared by a kind of gas sensor based on screen printing technique |
| CN106198714A (en) * | 2016-08-03 | 2016-12-07 | 西安交通大学 | A kind of gold-plated carbon nano-tube film ionization type methane transducer |
| CN106198714B (en) * | 2016-08-03 | 2019-04-12 | 西安交通大学 | A kind of gold-plated carbon nano-tube film ionization type methane transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102109492B (en) | 2013-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102095781B (en) | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same | |
| CN102175343B (en) | Carbon nanotube film three-electrode gas temperature sensor and temperature measuring method thereof | |
| CN102081073B (en) | Micro-nanometer carbon nanotube film three-electrode sensor | |
| CN102081071B (en) | Micronano ionizing sensor of carbon nanotube film | |
| CN102081067B (en) | Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same | |
| CN102109492B (en) | Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof | |
| CN102095787B (en) | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same | |
| CN102095783B (en) | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas | |
| CN102175755B (en) | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof | |
| CN102072784B (en) | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof | |
| CN102095786B (en) | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same | |
| CN102095790B (en) | Carbon nanotube film ionizing sensor array and method for detecting concentration of mixed gas | |
| CN102081068B (en) | Three-electrode sulfur dioxide sensor of carbon nanotube film | |
| CN102095788B (en) | Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof | |
| CN102095791B (en) | Method for detecting concentration of two-component gas based on carbon nano tube film three-electrode sensor | |
| CN102175756B (en) | Carbon nanotube film ionizing sulphur dioxide sensor and concentration measuring method by utilizing same | |
| CN102081069B (en) | Carbon nanotube (CNT) film based three-electrode sensor and method for detecting concentration of single gas by adopting same | |
| CN102095789B (en) | Carbon nanotube film ionizing sensor and method for detecting concentration of bi-component gas | |
| CN102081072B (en) | Carbon nanotube (CNT) film based ionization nitric oxide (NO) sensor and method for measuring concentration by adopting same | |
| CN102095784B (en) | Carbon nano tube film three-electrode gas humidity sensor and humidity measuring method thereof | |
| CN102081070B (en) | Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof | |
| CN102095782B (en) | Gas on-line detection device based on micro-nano carbon nano tube film three-electrode | |
| CN102095785B (en) | Carbon nano tube thin film three-electrode nitric oxide sensor and concentration measuring method by utilizing same | |
| CN102095792B (en) | Online gas detection device based on carbon-nano-tube membrane micron-nano electrode | |
| WO2017183168A1 (en) | Charged particle microscope and sample image pickup method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130522 Termination date: 20160216 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |