CN102087409A - Standard scanning tool - Google Patents
Standard scanning tool Download PDFInfo
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- CN102087409A CN102087409A CN 201010565420 CN201010565420A CN102087409A CN 102087409 A CN102087409 A CN 102087409A CN 201010565420 CN201010565420 CN 201010565420 CN 201010565420 A CN201010565420 A CN 201010565420A CN 102087409 A CN102087409 A CN 102087409A
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- mems
- chamber
- standard tool
- scanning standard
- laser
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Abstract
The invention relates to a standard scanning tool which comprises two cavity pieces and an MEMS (Micro-electromechanical System). The standard scanning tool is characterized in that the two cavity pieces are arranged at the same side of the MEMS, and the distances between the MEMS and the two cavity pieces can be adjusted; identical or different films are plated between the two cavity pieces; and the air gap between the two cavity pieces can be changed by moving the MEMS so as to realize a continuous and adjustable transmission type standard tool and achieve the purpose of expanding the application range of a reflection type MEMS on the standard scanning tool.
Description
Technical field
The present invention relates to optical field, particularly relate to a kind of scanning mark tool.
Background technology
In the optical communication field, but often to use the etalon of scan-type simple in structure.Accompanying drawing 1 is common reflective MEMS(Micro Electro Mechanical System) etalon, form by an a part of catoptron and a MEMS, partially reflecting mirror and MEMS are respectively as a chamber sheet of etalon, reflective MEMS etalon only can be made adjustable G-T etalon, and function is very limited.
Summary of the invention
The objective of the invention is to only can make adjustable G-T etalon at existing reflective etalon, the technical matters that function is very limited provides a kind of scanning standard tool, reaches the purpose of spread reflection formula MEMS range of application on the scanning standard tool.
For achieving the above object, technical scheme proposed by the invention is: a kind of scanning standard tool, comprise two chamber sheets 101,102, one MEMS103, it is characterized in that, two chamber sheets 101,102 are positioned over MEMS103 the same side, and the distance of 101,102 of MEMS103 and two chamber sheets can regulate, and 101,102 of two chamber sheets are coated with identical or different film.Mobile MEMS103 to be changing the air-gap size between two chamber sheets 101,102, thereby can realize a kind of continuously adjustable transmission-type etalon.
Further, the scanning standard tool that technique scheme is mentioned, can be used for making adjustable narrow linewidth laser, a kind of adjustable narrow linewidth laser, except that comprising above-mentioned scanning standard tool, also comprise a part of catoptron 106, one laser diode or solid state laser 107, the spectral line width broad that laser diode or solid state laser 107 send, laser diode or solid state laser 107 send spectrum and enter the accurate tool of scan table through chamber sheet 101, and the light that transmits chamber sheet 102 passes through partially reflecting mirror 106 through scanning standard tool reflected back laser diode or solid state laser 107.
Description of drawings
Fig. 1 is reflective MEMS tunable etalon structural representation;
Fig. 2 is the scanning standard of the present invention structure synoptic diagram of signing an undertaking;
Fig. 3 is adjustable narrow linewidth laser structural representation.
Embodiment
The present invention will be further described below in conjunction with accompanying drawing.
101. chamber sheet, 102. chamber sheets, 103.MEMS, 104. incident beams, 105. transmitted light beams, 106. partially reflecting mirrors, 107. laser diodes or solid state laser.
As shown in Figure 2, a kind of scanning standard tool, comprise chamber sheet 101, chamber sheet 102, reach MEMS103, chamber sheet 101, chamber sheet 102 are two chamber sheets of etalon, be positioned at the same side of MEMS103, chamber sheet 101 is coated with identical or different retes with chamber sheet 102, and the distance of 101,102 of MEMS103 and two chamber sheets can be regulated
When light beam 104 is incident to chamber sheet 101 with certain angle, part light a sees through chamber sheet 101, part light b reflection; The light a that sees through chamber sheet 101 reflexes to chamber sheet 102 through MEMS 103, and 102 part light c transmissions are gone out through the chamber sheet, part light d reflection; On the part light d process MEMS reflected back chamber sheet 101, part light e transmission, part light f reflexes to MEMS and reflexes on the chamber sheet 102 again; Part light g transmission, part light h reflection; By that analogy, c, g ... Deng light beam through the chamber sheet 102 transmissions go out, interfere, form the etalon transmitted light beam; B, e ... reflect back through chamber sheet 101 Deng light beam, interfere, form the etalon folded light beam.MEMS103 can move up and down in addition, is equivalent to change the air-gap size of etalon, but so just makes the transmission etalon of a scan-type.
Fig. 3 is the adjustable narrow linewidth laser that utilizes this scanning standard tool to make, and chamber sheet 101, MEMS103, chamber sheet 102 constitute the scanning tool, the spectral line width broad that laser diode or solid state laser 107 send, and laser instrument can be solid state laser.After the spectrum that laser diode or solid state laser 107 send filters by the scanning standard tool, transmitted spectrum is via partially reflecting mirror 106 and through scanning standard tool reflected back laser diode or solid state laser 107, the spectral band of reflected back amplifies at laser diode 107 resonator cavity interior resonances, and other spectral range wave bands are suppressed simultaneously.The spectral band that so just can realize laser diode or solid state laser 107 original broads is narrowed down by wide.Because MEMS is adjustable, also can change as required in addition than the centre wavelength of narrow linewidth.
Although specifically show and introduced the present invention in conjunction with preferred embodiment; but the those skilled in the art should be understood that; in the spirit and scope of the present invention that do not break away from appended claims and limited; can make various variations to the present invention in the form and details, be protection scope of the present invention.
Claims (5)
1. a scanning standard tool (100) comprises two chamber sheets (101,102), a MEMS(103), it is characterized in that two chamber sheets (101,102) are positioned over MEMS(103) the same side.
2. a kind of scanning standard tool according to claim 1 (100) is characterized in that: described MEMS(103) and the distance between the two chamber sheets (101,102) can regulate.
3. a kind of scanning standard tool according to claim 1 and 2 (100) is characterized in that: two chamber sheets are coated with identical film between (101,102).
4. a kind of scanning standard tool according to claim 1 and 2 (100) is characterized in that: two chamber sheets are coated with different films between (101,102).
5. adjustable narrow linewidth laser, it is characterized in that: except that comprising the described scanning standard tool of above-mentioned arbitrary claim, also comprise a part of catoptron (106), one laser diode or solid state laser (107), laser diode or solid state laser (107) are positioned at chamber sheet (101) the place ahead, and partially reflecting mirror (106) is positioned on chamber sheet (102) the transmitted light light path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010565420 CN102087409A (en) | 2010-11-30 | 2010-11-30 | Standard scanning tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010565420 CN102087409A (en) | 2010-11-30 | 2010-11-30 | Standard scanning tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102087409A true CN102087409A (en) | 2011-06-08 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010565420 Pending CN102087409A (en) | 2010-11-30 | 2010-11-30 | Standard scanning tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102087409A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020105653A1 (en) * | 2001-01-16 | 2002-08-08 | Bardia Pezeshki | Tunable optical device using a scanning MEMS mirror |
-
2010
- 2010-11-30 CN CN 201010565420 patent/CN102087409A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020105653A1 (en) * | 2001-01-16 | 2002-08-08 | Bardia Pezeshki | Tunable optical device using a scanning MEMS mirror |
Non-Patent Citations (2)
| Title |
|---|
| 《QUANTUM ELECTRONICS》 20050228 A.Q.Liu et al Continuous Wavelength Tuning in Micromachined Littrow External-Cavity Lasers 全文 1-5 第41卷, 第2期 2 * |
| 《通信技术》 20091231 苏福根等 光纤通信中的MEMS外腔可调谐激光器技术 全文 1-5 第42卷, 第7期 2 * |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110608 |