CN102080206B - Mask plate bearing device - Google Patents
Mask plate bearing device Download PDFInfo
- Publication number
- CN102080206B CN102080206B CN2010105947300A CN201010594730A CN102080206B CN 102080206 B CN102080206 B CN 102080206B CN 2010105947300 A CN2010105947300 A CN 2010105947300A CN 201010594730 A CN201010594730 A CN 201010594730A CN 102080206 B CN102080206 B CN 102080206B
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- Prior art keywords
- plate
- screw
- coupling shaft
- retaining plate
- bogey
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- Expired - Fee Related
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- 230000008878 coupling Effects 0.000 claims description 41
- 238000010168 coupling process Methods 0.000 claims description 41
- 238000005859 coupling reaction Methods 0.000 claims description 41
- 239000004677 Nylon Substances 0.000 claims description 11
- 229920001778 nylon Polymers 0.000 claims description 11
- 239000003351 stiffener Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000009434 installation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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Abstract
The invention discloses a mask plate bearing device comprising a bearing mechanism and a limiting mechanism; the bearing mechanism comprises a bearing plate, a fixing plate, a connecting shaft, a first bolt and an elastic element, wherein the bearing plate is arranged right above the fixing plate, the connecting shaft is mounted on the fixing plate, the bearing plate is mounted on the upper end of the connecting shaft through the first bolt, and the elastic element is sleeved outside the connecting shaft and is supported between the bearing plate and the fixing plate; the limiting mechanism comprises a second bolt, a through hole stud bolt and a locknut, wherein the fixing plate is provided with a threaded hole matched with the through hole stud bolt which is mounted in the threaded hole and is used for fixing the locknut to the bottom of the threaded hole, and the second bolt is in threaded connection with the locknut after passing through the through holes of the bearing plate and the through hole stud bolt in sequence. Compared with the prior art, the mask plate bearing device is additionally provided with the limiting mechanism which locks a relative position between the fixing plate and the bearing plate and ensures the structural stability and the production precision of the mask plate bearing device.
Description
Technical field
The present invention relates to a kind of mask plate bogey, relate in particular in a kind of OLED production, the mask plate bogey of a workplatform is provided for loading, separation and the calibration of mask plate.
Background technology
With reference to figure 1; Existing mask plate bogey 100 comprises plummer 11, base plate 12, coupling shaft 13 and spring 14; Said plummer 11 and base plate 12 are installed in the two ends of coupling shaft 13 through screw; Said spring 14 passes coupling shaft 13 and conflicts at the two ends of plummer 11 and base plate 12, on plummer 12, discharges the moment of mask plate, and spring 14 can cushion dull and stereotyped suffered surging force.Yet for a long time after the work; Because object discharges the vibrations of moment plummer; Can under the repeatedly collision of spring, produce to become flexible perhaps between the screw of connection plummer 11 and base plate 12 and the coupling shaft 13 and be shifted; Make distance and relative position between plummer 11 and the base plate 12 change, thereby the production precision of OLED is impacted.
Therefore, be badly in need of a kind of Stability Analysis of Structures, the mask plate bogey that precision is high.
Summary of the invention
The purpose of this invention is to provide a kind of Stability Analysis of Structures, the mask plate bogey that precision is high.
For on realizing purpose is arranged; The invention discloses a kind of mask plate bogey; This device comprises load carrier and position-limit mechanism; Said load carrier comprises loading plate, retaining plate, coupling shaft, first screw and elastic element, and said loading plate is positioned at directly over the said retaining plate, and said coupling shaft is fixedly mounted on the said retaining plate; Said first screw passes said loading plate and is installed in the upper end of said coupling shaft, and said elastic element is placed in the outer also conflict of said coupling shaft between said loading plate and said retaining plate; Said position-limit mechanism comprises second screw, through hole double-screw bolt and set nut; Said retaining plate is provided with the threaded hole that matches with said through hole double-screw bolt; Said through hole double-screw bolt is installed in the said threaded hole and said set nut is fixed on the bottom of said threaded hole, and said second screw passes the through hole of said loading plate and through hole double-screw bolt successively and is threaded with said set nut.
Preferably, said load carrier also comprises ball stroke lining, and said ball stroke lining is embedded on the retaining plate and said ball stroke lining is socketed in outside the said coupling shaft.Said ball stroke lining can guarantee that said loading plate in movement in vertical direction, remains level, and preventing influences the steady of load object (mask plate) because the loading plate that works long hours tilts gradually.
Preferably, offer upper groove on the loading plate, offer low groove on the said retaining plate, said upper groove is relative with said low groove, conflicts respectively in said upper groove and low groove in the two ends of said elastic element.Upper groove and low groove make the easier for installation of elastic element, and the structure of mask plate bogey is more stable.
Preferably; The lower end protrusion of said coupling shaft and the lower surface of said retaining plate; And the lower end of said coupling shaft has outside screw, and said load carrier also comprises first nut, and said first nut and said outside screw match to merge said coupling shaft is fixed on the said retaining plate.Said first nut and coupling shaft are threaded and make and be connected more stablely between coupling shaft and the retaining plate, prevent that coupling shaft from moving on retaining plate.
Particularly, outside surface to inner threaded surface is drilled with the screw that runs through on said first nut, adopts stop screw to pass said screw and is butted on the outside screw of lower end of said coupling shaft.For after preventing to work long hours; Produce between the coupling shaft and first nut and become flexible, especially under the repeatedly collision of elastic element, make the nut loosening of winning, on first nut, offer screw; And adopt stop screw to pass screw; And be butted on the outside screw of lower end of said coupling shaft, limited the rotation of first nut on coupling shaft, prevent first nut loosening.
Preferably, the lower surface of the said retaining plate formation pillar stiffener that stretches out.Said supporting makes that the installation of retaining plate is more firm, for the mask plate bogey provides stable Working environment.
Preferably, said set nut is the nylon set nut.During installation, the nylon that set nut is embedded in contacts with the outside screw extruding of second screw, prevents to produce between the set nut and second screw loosening.
Compared with prior art; Mask plate bogey of the present invention has comprised position-limit mechanism; Through hole double-screw bolt in its position-limit mechanism has limited the rotation of set nut and has moved; Set nut makes that with being threaded of second screw relative position is locked between loading plate and the retaining plate; Prevent because elastic element repeatedly collides the distance and the relative position that cause between retaining plate and the loading plate and changes, to have guaranteed the precision of its stability of structure of mask plate bogey and production in the existing mask plate bogey.
Description of drawings
Fig. 1 is the structural representation of the mask plate bogey of prior art.
Fig. 2 is the structural representation of mask plate bogey of the present invention.
Fig. 3 is the sectional view of mask plate bogey of the present invention.
Fig. 4 is the three-dimensional exploded view of position-limit mechanism according to the invention.
Embodiment
By specifying technology contents of the present invention, structural attitude, realized purpose and effect, give explanation below in conjunction with embodiment and conjunction with figs. are detailed.
With reference to figure 2-Fig. 4, loading, separation and calibration that mask plate bogey 200 of the present invention is used to mask plate provide a workplatform, and its concrete structure is following:
Said mask plate bogey 200 comprises load carrier 20 and position-limit mechanism 30, and load carrier 20 is used for carrying platform stably to mask plate being provided, and said position-limit mechanism 30 is used to guarantee the structural stability and the operating accuracy of mask plate bogey 200.
Said load carrier 20 comprises loading plate 21, retaining plate 22, coupling shaft 23, first screw 24, elastic element 25 and ball stroke lining 26; Said loading plate 21 is positioned at directly over the said retaining plate 22; Said coupling shaft 23 is fixedly mounted on the said retaining plate 22; Said first screw 24 passes said loading plate 21 and is installed in the upper end of said coupling shaft 23; Said elastic element 25 is placed in outside the said coupling shaft 23 and conflicts between said loading plate 21 and said retaining plate 22, and said ball stroke lining 26 is embedded on the retaining plate 22 and said ball stroke lining 26 is socketed in outside the said coupling shaft 23.Wherein, the lower end of retaining plate 22 has pillar stiffener 221, during work; Said retaining plate 22 is fixedly mounted on the corresponding position through pillar stiffener 221, and when on loading plate 21, placing mask plate, loading plate 21 is in the moment that contacts with mask plate; The impact force action that loading plate 21 receives mask plate moves down; Through the succession vibration damping of elastic element 25, guarantee that loading plate 21 bears the steady of load object, and form the level that lining 26 guarantees loading plates through ball.
Particularly; The upper surface and the lower surface of said retaining plate 22 stretched out at the two ends of said coupling shaft 23; And the upper end of said coupling shaft 23 offers screw; The lower end of said coupling shaft 23 has outside screw, and said first screw 24 passes loading plate 21 and matches with the screw of coupling shaft 23, makes loading plate 21 and retaining plate 22 link together through coupling shaft 23; Be arranged with first nut 27 on the lower end of said coupling shaft 23; The outside surface of above-mentioned first nut 27 to inner threaded surface is drilled with the screw that runs through; Use stop screw 28 to pass the screw of said first nut 27; And be butted on the outside screw of lower end of said coupling shaft 23, said stop screw 28 restrictions first nut 27 rotates on coupling shaft 23, prevents becoming flexible of first nut 27.Wherein, the screw on first nut 27 be two or be each other 90 the degree four.
Particularly; The lower surface of loading plate 21 offers upper groove 211; The upper surface of said retaining plate 22 offers low groove 222, and said upper groove 211 is relative with said low groove 222, conflicts respectively in said upper groove 211 and low groove 222 in the two ends of said elastic element 25.
With reference to figure 3 and Fig. 4; Said position-limit mechanism 30 comprises second screw 31, through hole double-screw bolt 32 and set nut 33; Said retaining plate 22 is provided with the threaded hole 223 that matches with the outside screw 321 of said through hole double-screw bolt 32; Said through hole double-screw bolt 32 is installed in the bottom that is fixed on said threaded hole 223 in the said threaded hole 223 and with said set nut 33; Offer the open hole 212 that matches with second screw 31 on the said loading plate 21, said second screw 31 pass successively said loading plate 21 open hole 212 and through hole double-screw bolt 32 through hole and be threaded with said set nut 33.Wherein, offer the through hole 224 that supplies second screw 31 to pass in the said threaded hole 223, when second screw 31 was threaded with set nut 33, the end of said second screw 31 was positioned at the through hole 224 of said retaining plate 22.During work; Said through hole double-screw bolt 32 has limited the rotation of set nut 33 and has moved up and down; Set nut 33 has locked the relative position between loading plate 21 and the retaining plate 22 with being threaded of second screw 31; Prevent mask plate bogey 200 because more than 25 collision of elastic element causes the relative position between retaining plate 22 and the loading plate 21 to change, guaranteed the precision of mask plate bogey 200 stability of structure and production.
The preferably, said set nut 33 is the nylon set nut, said set nut 33 comprises nut body and nylon ring; Said nut body comprises the nut portions 332 and the inner nylon portion 331 that is inlaid with nylon ring with IT; When second screw 31 matched with set nut 33, the outside screw of second screw 31 pushed the nylon ring that set nut is embedded in, and made nylon be out of shape; After installing; The outside screw extruding of the nylon ring of set nut 33 and second screw 31 contacts, and the nylon that is extruded produces a very big screen resilience to second screw 31, makes second screw 31 be not easy to become flexible.
The above disclosed the preferred embodiments of the present invention that are merely can not limit the present invention's interest field certainly with this, so according to the equivalent variations that claim of the present invention is done, still belong to the scope that the present invention is contained.
Claims (7)
1. mask plate bogey; It is characterized in that: comprise load carrier and position-limit mechanism; Said load carrier comprises loading plate, retaining plate, coupling shaft, first screw and elastic element, and said loading plate is positioned at directly over the said retaining plate, and said coupling shaft is fixedly mounted on the said retaining plate; Said first screw passes said loading plate and is installed in the upper end of said coupling shaft, and said elastic element is placed in the outer also conflict of said coupling shaft between said loading plate and said retaining plate; Said position-limit mechanism comprises second screw, through hole double-screw bolt and set nut; Said retaining plate is provided with the threaded hole that matches with said through hole double-screw bolt; Said through hole double-screw bolt is installed in the said threaded hole and said set nut is fixed on the bottom of said threaded hole, and said second screw passes the through hole of said loading plate and through hole double-screw bolt successively and is threaded with said set nut.
2. mask plate bogey as claimed in claim 1 is characterized in that: said load carrier also comprises ball stroke lining, and said ball stroke lining is embedded on the retaining plate and said ball stroke lining is socketed in outside the said coupling shaft.
3. mask plate bogey as claimed in claim 1; It is characterized in that: offer upper groove on the loading plate; Offer low groove on the said retaining plate, said upper groove is relative with said low groove, conflicts respectively in said upper groove and low groove in the two ends of said elastic element.
4. mask plate bogey as claimed in claim 1; It is characterized in that: the lower surface of said retaining plate is stretched out in the lower end of said coupling shaft; And the lower end of said coupling shaft has outside screw; Said load carrier also comprises first nut, and said first nut and said outside screw match to merge said coupling shaft is fixed on the said retaining plate.
5. mask plate bogey as claimed in claim 4 is characterized in that: outside surface to inner threaded surface is drilled with the screw that runs through on said first nut, and stop screw passes said screw and is butted on the outside screw of lower end of said coupling shaft.
6. mask plate bogey as claimed in claim 1 is characterized in that: the lower surface of the said retaining plate formation pillar stiffener that stretches out.
7. mask plate bogey as claimed in claim 1 is characterized in that: said set nut is the nylon set nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105947300A CN102080206B (en) | 2010-12-20 | 2010-12-20 | Mask plate bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105947300A CN102080206B (en) | 2010-12-20 | 2010-12-20 | Mask plate bearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102080206A CN102080206A (en) | 2011-06-01 |
| CN102080206B true CN102080206B (en) | 2012-11-14 |
Family
ID=44086393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105947300A Expired - Fee Related CN102080206B (en) | 2010-12-20 | 2010-12-20 | Mask plate bearing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102080206B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103206979B (en) * | 2012-01-11 | 2017-01-25 | 昆山允升吉光电科技有限公司 | Mask plate bearing frame |
| CN103491741B (en) * | 2013-08-22 | 2017-02-08 | 深圳市伟创电气有限公司 | Structure for connecting PCB and inverted rectifier module and assembly and disassembly method thereof |
| CN110158029B (en) * | 2019-07-05 | 2020-07-17 | 北京北方华创微电子装备有限公司 | Mask structure and FCVA device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105634A (en) * | 2006-07-13 | 2008-01-16 | 中芯国际集成电路制造(上海)有限公司 | Mask protection film removing device and its method |
| CN201950656U (en) * | 2010-12-20 | 2011-08-31 | 东莞宏威数码机械有限公司 | Mask plate bearing platform |
-
2010
- 2010-12-20 CN CN2010105947300A patent/CN102080206B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105634A (en) * | 2006-07-13 | 2008-01-16 | 中芯国际集成电路制造(上海)有限公司 | Mask protection film removing device and its method |
| CN201950656U (en) * | 2010-12-20 | 2011-08-31 | 东莞宏威数码机械有限公司 | Mask plate bearing platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102080206A (en) | 2011-06-01 |
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