CN102080206A - Mask plate bearing device - Google Patents
Mask plate bearing device Download PDFInfo
- Publication number
- CN102080206A CN102080206A CN 201010594730 CN201010594730A CN102080206A CN 102080206 A CN102080206 A CN 102080206A CN 201010594730 CN201010594730 CN 201010594730 CN 201010594730 A CN201010594730 A CN 201010594730A CN 102080206 A CN102080206 A CN 102080206A
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- Prior art keywords
- plate
- screw
- coupling shaft
- retaining plate
- bogey
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- 230000008878 coupling Effects 0.000 claims description 41
- 238000010168 coupling process Methods 0.000 claims description 41
- 238000005859 coupling reaction Methods 0.000 claims description 41
- 239000004677 Nylon Substances 0.000 claims description 11
- 229920001778 nylon Polymers 0.000 claims description 11
- 239000003351 stiffener Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000009434 installation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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Abstract
The invention discloses a mask plate bearing device comprising a bearing mechanism and a limiting mechanism; the bearing mechanism comprises a bearing plate, a fixing plate, a connecting shaft, a first bolt and an elastic element, wherein the bearing plate is arranged right above the fixing plate, the connecting shaft is mounted on the fixing plate, the bearing plate is mounted on the upper end of the connecting shaft through the first bolt, and the elastic element is sleeved outside the connecting shaft and is supported between the bearing plate and the fixing plate; the limiting mechanism comprises a second bolt, a through hole stud bolt and a locknut, wherein the fixing plate is provided with a threaded hole matched with the through hole stud bolt which is mounted in the threaded hole and is used for fixing the locknut to the bottom of the threaded hole, and the second bolt is in threaded connection with the locknut after passing through the through holes of the bearing plate and the through hole stud bolt in sequence. Compared with the prior art, the mask plate bearing device is additionally provided with the limiting mechanism which locks a relative position between the fixing plate and the bearing plate and ensures the structural stability and the production precision of the mask plate bearing device.
Description
Technical field
The present invention relates to a kind of mask plate bogey, relate in particular in a kind of OLED production, the mask plate bogey of a workplatform is provided for loading, separation and the calibration of mask plate.
Background technology
With reference to figure 1, existing mask plate bogey 100 comprises plummer 11, base plate 12, coupling shaft 13 and spring 14, described plummer 11 and base plate 12 are installed in the two ends of coupling shaft 13 by screw, described spring 14 passes coupling shaft 13 and conflicts at the two ends of plummer 11 and base plate 12, discharge the moment of mask plate on plummer 12, spring 14 can cushion dull and stereotyped suffered surging force.Yet for a long time after the work, because object discharges the vibrations of moment plummer, can under the repeatedly collision of spring, produce loosening or displacement between the screw of connection plummer 11 and base plate 12 and the coupling shaft 13, make distance and relative position between plummer 11 and the base plate 12 change, thereby the production precision of OLED is impacted.
Therefore, be badly in need of a kind of Stability Analysis of Structures, the mask plate bogey that precision is high.
Summary of the invention
The purpose of this invention is to provide a kind of Stability Analysis of Structures, the mask plate bogey that precision is high.
For on realizing purpose is arranged, the invention discloses a kind of mask plate bogey, this device comprises load carrier and position-limit mechanism, described load carrier comprises loading plate, retaining plate, coupling shaft, first screw and elastic element, described loading plate is positioned at directly over the described retaining plate, described coupling shaft is fixedly mounted on the described retaining plate, described first screw passes described loading plate and is installed in the upper end of described coupling shaft, and described elastic element is placed in the outer also conflict of described coupling shaft between described loading plate and described retaining plate; Described position-limit mechanism comprises second screw, through hole double-screw bolt and set nut, described retaining plate is provided with the threaded hole that matches with described through hole double-screw bolt, described through hole double-screw bolt is installed in the described threaded hole and described set nut is fixed on the bottom of described threaded hole, and described second screw passes the through hole of described loading plate and through hole double-screw bolt successively and is threaded with described set nut.
Preferably, described load carrier also comprises ball stroke lining, and described ball stroke lining is embedded on the retaining plate and described ball stroke lining is socketed in outside the described coupling shaft.Described ball stroke lining can guarantee that described loading plate in movement in vertical direction, remains level, and preventing influences the steady of load object (mask plate) because the loading plate that works long hours tilts gradually.
Preferably, offer upper groove on the loading plate, offer low groove on the described retaining plate, described upper groove is relative with described low groove, conflicts respectively in described upper groove and low groove in the two ends of described elastic element.Upper groove and low groove make the easier for installation of elastic element, and the structure of mask plate bogey is more stable.
Preferably, the lower surface with described retaining plate is protruded in the lower end of described coupling shaft, and the lower end of described coupling shaft has outside screw, and described load carrier also comprises first nut, and described first nut and described outside screw match to merge described coupling shaft is fixed on the described retaining plate.Described first nut and coupling shaft are threaded and make and be connected more stablely between coupling shaft and the retaining plate, prevent that coupling shaft from moving on retaining plate.
Particularly, outside surface to inner threaded surface is drilled with the screw that runs through on described first nut, adopts stop screw to pass described screw and is butted on the outside screw of lower end of described coupling shaft.For after preventing to work long hours, produce loosening between the coupling shaft and first nut, especially under the repeatedly collision of elastic element, make the nut loosening of winning, on first nut, offer screw, and adopt stop screw to pass screw, and be butted on the outside screw of lower end of described coupling shaft, limited the rotation of first nut on coupling shaft, prevent first nut loosening.
Preferably, the lower surface of the described retaining plate formation pillar stiffener that stretches out.Described supporting makes that the installation of retaining plate is more firm, for the mask plate bogey provides stable Working environment.
Preferably, described set nut is the nylon set nut.During installation, the nylon that set nut is embedded in contacts with the outside screw extruding of second screw, prevents to produce between the set nut and second screw loosening.
Compared with prior art, mask plate bogey of the present invention has comprised position-limit mechanism, through hole double-screw bolt in its position-limit mechanism has limited the rotation of set nut and has moved, set nut makes that with being threaded of second screw relative position is locked between loading plate and the retaining plate, prevent in the existing mask plate bogey, because elastic element repeatedly collides the distance and the relative position that cause between retaining plate and the loading plate and changes, and has guaranteed the precision of its stability of structure of mask plate bogey and production.
Description of drawings
Fig. 1 is the structural representation of the mask plate bogey of prior art.
Fig. 2 is the structural representation of mask plate bogey of the present invention.
Fig. 3 is the sectional view of mask plate bogey of the present invention.
Fig. 4 is the three-dimensional exploded view of position-limit mechanism of the present invention.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, realized purpose and effect, give explanation below in conjunction with embodiment and conjunction with figs. are detailed.
With reference to figure 2-Fig. 4, mask plate bogey 200 of the present invention is used to loading, separation and the calibration of mask plate that a workplatform is provided, and its concrete structure is as follows:
Described mask plate bogey 200 comprises load carrier 20 and position-limit mechanism 30, and load carrier 20 is used for providing carrying platform stably to mask plate, and described position-limit mechanism 30 is used to guarantee the structural stability and the operating accuracy of mask plate bogey 200.
Described load carrier 20 comprises loading plate 21, retaining plate 22, coupling shaft 23, first screw 24, elastic element 25 and ball stroke lining 26, described loading plate 21 is positioned at directly over the described retaining plate 22, described coupling shaft 23 is fixedly mounted on the described retaining plate 22, described first screw 24 passes described loading plate 21 and is installed in the upper end of described coupling shaft 23, described elastic element 25 is placed in outside the described coupling shaft 23 and conflicts between described loading plate 21 and described retaining plate 22, and described ball stroke lining 26 is embedded on the retaining plate 22 and described ball stroke lining 26 is socketed in outside the described coupling shaft 23.Wherein, the lower end of retaining plate 22 has pillar stiffener 221, during work, described retaining plate 22 is fixedly mounted on the corresponding position by pillar stiffener 221, and when placing mask plate on loading plate 21, loading plate 21 is in the moment that contacts with mask plate, the impact force action that loading plate 21 is subjected to mask plate moves down, by the succession vibration damping of elastic element 25, guarantee that loading plate 21 bears the steady of load object, and form the level that lining 26 guarantees loading plates by ball.
Particularly, the upper surface and the lower surface of described retaining plate 22 stretched out at the two ends of described coupling shaft 23, and the upper end of described coupling shaft 23 offers screw, the lower end of described coupling shaft 23 has outside screw, described first screw 24 passes loading plate 21 and matches with the screw of coupling shaft 23, makes loading plate 21 and retaining plate 22 link together by coupling shaft 23; Be arranged with first nut 27 on the lower end of described coupling shaft 23, the outside surface of above-mentioned first nut 27 to inner threaded surface is drilled with the screw that runs through, use stop screw 28 to pass the screw of described first nut 27, and be butted on the outside screw of lower end of described coupling shaft 23, described stop screw 28 restrictions first nut 27 rotates on coupling shaft 23, prevents the loosening of first nut 27.Wherein, the screw on first nut 27 is two or is 90 four of spending each other.
Particularly, the lower surface of loading plate 21 offers upper groove 211, the upper surface of described retaining plate 22 offers low groove 222, and described upper groove 211 is relative with described low groove 222, conflicts respectively in described upper groove 211 and low groove 222 in the two ends of described elastic element 25.
With reference to figure 3 and Fig. 4, described position-limit mechanism 30 comprises second screw 31, through hole double-screw bolt 32 and set nut 33, described retaining plate 22 is provided with the threaded hole 223 that matches with the outside screw 321 of described through hole double-screw bolt 32, described through hole double-screw bolt 32 is installed in the described threaded hole 223 and described set nut 33 is fixed on the bottom of described threaded hole 223, offer the open holes 212 that matches with second screw 31 on the described loading plate 21, described second screw 31 passes the through hole of the open holes 212 of described loading plate 21 and through hole double-screw bolt 32 successively and is threaded with described set nut 33.Wherein, offer the through hole 224 that passes for second screw 31 in the described threaded hole 223, when second screw 31 was threaded with set nut 33, the end of described second screw 31 was positioned at the through hole 224 of described retaining plate 22.During work, described through hole double-screw bolt 32 has limited the rotation of set nut 33 and has moved up and down, set nut 33 and being threaded of second screw 31 have locked the relative position between loading plate 21 and the retaining plate 22, prevent mask plate bogey 200 because more than 25 collision of elastic element causes the relative position between retaining plate 22 and the loading plate 21 to change, guaranteed the precision of mask plate bogey 200 stability of structure and production.
The preferably, described set nut 33 is the nylon set nut, described set nut 33 comprises nut body and nylon ring, described nut body comprises nut portions 332 and the inner nylon portion 331 that is inlaid with nylon ring with internal thread, when second screw 31 matches with set nut 33, the outside screw of second screw 31 pushes the nylon ring that set nut is embedded in, make nylon be out of shape, after installing, the outside screw extruding of the nylon ring of set nut 33 and second screw 31 contacts, the nylon that is extruded produces a very big screen resilience to second screw 31, makes second screw 31 be not easy to become flexible.
Above disclosed only is the preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (7)
1. mask plate bogey, it is characterized in that: comprise load carrier and position-limit mechanism, described load carrier comprises loading plate, retaining plate, coupling shaft, first screw and elastic element, described loading plate is positioned at directly over the described retaining plate, described coupling shaft is fixedly mounted on the described retaining plate, described first screw passes described loading plate and is installed in the upper end of described coupling shaft, and described elastic element is placed in the outer also conflict of described coupling shaft between described loading plate and described retaining plate; Described position-limit mechanism comprises second screw, through hole double-screw bolt and set nut, described retaining plate is provided with the threaded hole that matches with described through hole double-screw bolt, described through hole double-screw bolt is installed in the described threaded hole and described set nut is fixed on the bottom of described threaded hole, and described second screw passes the through hole of described loading plate and through hole double-screw bolt successively and is threaded with described set nut.
2. mask plate bogey as claimed in claim 1 is characterized in that: described load carrier also comprises ball stroke lining, and described ball stroke lining is embedded on the retaining plate and described ball stroke lining is socketed in outside the described coupling shaft.
3. mask plate bogey as claimed in claim 1, it is characterized in that: offer upper groove on the loading plate, offer low groove on the described retaining plate, described upper groove is relative with described low groove, conflicts respectively in described upper groove and low groove in the two ends of described elastic element.
4. mask plate bogey as claimed in claim 1, it is characterized in that: the lower surface of described retaining plate is stretched out in the lower end of described coupling shaft, and the lower end of described coupling shaft has outside screw, described load carrier also comprises first nut, and described first nut and described outside screw match to merge described coupling shaft is fixed on the described retaining plate.
5. mask plate bogey as claimed in claim 4 is characterized in that: outside surface to inner threaded surface is drilled with the screw that runs through on described first nut, and stop screw passes described screw and is butted on the outside screw of lower end of described coupling shaft.
6. mask plate bogey as claimed in claim 1 is characterized in that: the lower surface of the described retaining plate formation pillar stiffener that stretches out.
7. mask plate bogey as claimed in claim 1 is characterized in that: described set nut is the nylon set nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105947300A CN102080206B (en) | 2010-12-20 | 2010-12-20 | Mask plate bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105947300A CN102080206B (en) | 2010-12-20 | 2010-12-20 | Mask plate bearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102080206A true CN102080206A (en) | 2011-06-01 |
| CN102080206B CN102080206B (en) | 2012-11-14 |
Family
ID=44086393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105947300A Expired - Fee Related CN102080206B (en) | 2010-12-20 | 2010-12-20 | Mask plate bearing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102080206B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103206979A (en) * | 2012-01-11 | 2013-07-17 | 昆山允升吉光电科技有限公司 | Mask plate bearing frame |
| CN103491741A (en) * | 2013-08-22 | 2014-01-01 | 深圳市伟创电气有限公司 | Structure for connecting PCB and inverted rectifier module and assembly and disassembly method thereof |
| WO2021004331A1 (en) * | 2019-07-05 | 2021-01-14 | 北京北方华创微电子装备有限公司 | Mask structure and fcva device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105634A (en) * | 2006-07-13 | 2008-01-16 | 中芯国际集成电路制造(上海)有限公司 | Mask protection film removing device and its method |
| CN201950656U (en) * | 2010-12-20 | 2011-08-31 | 东莞宏威数码机械有限公司 | Mask plate bearing platform |
-
2010
- 2010-12-20 CN CN2010105947300A patent/CN102080206B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105634A (en) * | 2006-07-13 | 2008-01-16 | 中芯国际集成电路制造(上海)有限公司 | Mask protection film removing device and its method |
| CN201950656U (en) * | 2010-12-20 | 2011-08-31 | 东莞宏威数码机械有限公司 | Mask plate bearing platform |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103206979A (en) * | 2012-01-11 | 2013-07-17 | 昆山允升吉光电科技有限公司 | Mask plate bearing frame |
| CN103206979B (en) * | 2012-01-11 | 2017-01-25 | 昆山允升吉光电科技有限公司 | Mask plate bearing frame |
| CN103491741A (en) * | 2013-08-22 | 2014-01-01 | 深圳市伟创电气有限公司 | Structure for connecting PCB and inverted rectifier module and assembly and disassembly method thereof |
| CN103491741B (en) * | 2013-08-22 | 2017-02-08 | 深圳市伟创电气有限公司 | Structure for connecting PCB and inverted rectifier module and assembly and disassembly method thereof |
| WO2021004331A1 (en) * | 2019-07-05 | 2021-01-14 | 北京北方华创微电子装备有限公司 | Mask structure and fcva device |
| US11408064B2 (en) | 2019-07-05 | 2022-08-09 | Beijing Naura Microelectronics Equipment Co., Ltd. | Mask structure and FCVA apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102080206B (en) | 2012-11-14 |
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