CN102075834A - Diaphragm and silicon condenser microphone using same - Google Patents
Diaphragm and silicon condenser microphone using same Download PDFInfo
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- CN102075834A CN102075834A CN 200910109824 CN200910109824A CN102075834A CN 102075834 A CN102075834 A CN 102075834A CN 200910109824 CN200910109824 CN 200910109824 CN 200910109824 A CN200910109824 A CN 200910109824A CN 102075834 A CN102075834 A CN 102075834A
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Abstract
The invention provides a diaphragm. The diaphragm comprises a vibrating part, a plurality of supporting parts protruding from the periphery of the vibrating part, and a separation part, wherein the separation part is formed between the adjacent supporting parts; and a gap is formed between the separation part and the vibrating part. The diaphragm can reduce parasitic capacitance.
Description
Technical field
The present invention relates to a kind of capacitance microphone, relate in particular to a kind of micro-electro-mechanical microphone.
Background technology
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
And the microphone of using more and better performances at present is microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone is called for short MEMS), and in the correlation technique, parasitic capacitance is bigger, influences the performance of microphone.
Summary of the invention
The technical problem that the present invention need solve provides a kind of silicon capacitor microphone that can reduce the vibrating diaphragm of parasitic capacitance and use this vibrating diaphragm.
According to the above-mentioned technical problem that needs solution, designed a kind of vibrating diaphragm, this vibrating diaphragm involving vibrations portion, some support portions, separated part that self-excited oscillation portion periphery is outstanding, this separated part is arranged between the adjacent support portion and between this separated part and the vibration section the slit.
Preferably, described vibrating diaphragm is circular, and the support portion is the outstanding some crossbeams of self-excited oscillation portion excircle, separated part be arranged between the adjacent beams and separated part be shaped as fan-shaped.
Preferably, described crossbeam is with the circumference five equilibrium.
Preferably, the number of described crossbeam is four and with the circumference five equilibrium, the number of separated part is four and its center of circle symmetry about vibrating diaphragm.
Preferably, the radian of described separated part equates, and separated part and vibrating diaphragm concentric.
Also designed a kind of silicon capacitor microphone, comprise substrate, backboard and vibrating diaphragm, this vibrating diaphragm involving vibrations portion, some support portions, separated part that self-excited oscillation portion periphery is outstanding, this separated part is arranged between the adjacent support portion and between this separated part and the vibration section the slit.
Preferably, described vibrating diaphragm is circular, and the support portion is the outstanding some crossbeams of self-excited oscillation portion excircle, separated part be arranged between the adjacent beams and separated part be shaped as fan-shaped.
Preferably, described crossbeam is with the circumference five equilibrium.
Preferably, the number of described crossbeam is four and with the circumference five equilibrium, the number of separated part is four and its center of circle symmetry about vibrating diaphragm.
Preferably, the radian of described separated part equates, and separated part and vibrating diaphragm concentric.
Beneficial effect of the present invention is: owing between vibration section and the separated part space is arranged, make vibration section and separated part realize electric isolation, effectively reduce parasitic capacitance.
Description of drawings
Fig. 1 is the floor map of vibrating diaphragm provided by the invention;
Fig. 2 is the cutaway view of an embodiment provided by the invention.
Embodiment
The invention will be further described below in conjunction with drawings and embodiments.
Silicon capacitor microphone provided by the invention is mainly used in the electronic equipments such as mobile phone, is used to receive sound.Vibrating diaphragm is used for this silicon capacitor microphone.
Referring to Fig. 1, vibrating diaphragm 1 provided by the invention, involving vibrations portion 11, some support portions 12, separated part 13 that self-excited oscillation portion 11 peripheries are outstanding, this separated part 13 is arranged between the adjacent support portion 12 and between this separated part 13 and the vibration section 11 slit 4.Because the existence in this slit 4 is fallen vibrating diaphragm 1 and is divided into two independent parts, makes vibration section 11 and separated part 13 electric isolation to effectively reduce parasitic capacitance.
In one embodiment of the invention, vibrating diaphragm 1 is circular, and support portion 12 is the outstanding some crossbeams 12 of self-excited oscillation portion 11 excircles, and separated part 13 is arranged between the adjacent beams 12, and being shaped as of separated part 11 is fan-shaped.Crossbeam 12 is with the circumference five equilibrium.
Among Fig. 1, the number of crossbeam 12 is four, and with the vibrating diaphragm five equilibrium, the number of separated part 13 is four, about the center of circle symmetry of vibrating diaphragm 1.The radian of separated part 13 equates, and separated part 13 and vibrating diaphragm 1 concentric.
The present invention also provides a kind of silicon capacitor microphone, as Fig. 2, comprises substrate 3, backboard 2 and vibrating diaphragm 1.The feature of vibrating diaphragm 1 as mentioned above.
Above-described only is one embodiment of the present invention, should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the invention design, can also make improvement, but these all belongs to protection scope of the present invention.
Claims (10)
1. vibrating diaphragm is characterized in that: this vibrating diaphragm involving vibrations portion, some support portions, separated part that self-excited oscillation portion periphery is outstanding, this separated part is arranged between the adjacent support portion and between this separated part and the vibration section the slit.
2. vibrating diaphragm according to claim 1 is characterized in that: described vibrating diaphragm is for circular, and the support portion is the outstanding some crossbeams of self-excited oscillation portion excircle, separated part be arranged between the adjacent beams and separated part be shaped as fan-shaped.
3. vibrating diaphragm according to claim 2 is characterized in that: described crossbeam is with the circumference five equilibrium.
4. vibrating diaphragm according to claim 2 is characterized in that: the number of described crossbeam is four and with the circumference five equilibrium, the number of separated part is four and its center of circle symmetry about vibrating diaphragm.
5. vibrating diaphragm according to claim 2 is characterized in that: the radian of described separated part equates, and separated part and vibrating diaphragm concentric.
6. silicon capacitor microphone, comprise substrate, backboard and vibrating diaphragm, it is characterized in that: this vibrating diaphragm involving vibrations portion, some support portions, separated part that self-excited oscillation portion periphery is outstanding, this separated part is arranged between the adjacent support portion and between this separated part and the vibration section the slit.
7. vibrating diaphragm according to claim 6 is characterized in that: described vibrating diaphragm is for circular, and the support portion is the outstanding some crossbeams of self-excited oscillation portion excircle, separated part be arranged between the adjacent beams and separated part be shaped as fan-shaped.
8. vibrating diaphragm according to claim 7 is characterized in that: described crossbeam is with the circumference five equilibrium.
9. vibrating diaphragm according to claim 7 is characterized in that: the number of described crossbeam is four and with the circumference five equilibrium, the number of separated part is four and its center of circle symmetry about vibrating diaphragm.
10. vibrating diaphragm according to claim 7 is characterized in that: the radian of described separated part equates, and separated part and vibrating diaphragm concentric.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910109824.1A CN102075834B (en) | 2009-11-23 | 2009-11-23 | Vibrating diaphragm and apply the silicon capacitor microphone of this vibrating diaphragm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910109824.1A CN102075834B (en) | 2009-11-23 | 2009-11-23 | Vibrating diaphragm and apply the silicon capacitor microphone of this vibrating diaphragm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102075834A true CN102075834A (en) | 2011-05-25 |
| CN102075834B CN102075834B (en) | 2015-10-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910109824.1A Active CN102075834B (en) | 2009-11-23 | 2009-11-23 | Vibrating diaphragm and apply the silicon capacitor microphone of this vibrating diaphragm |
Country Status (1)
| Country | Link |
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| CN (1) | CN102075834B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105142086A (en) * | 2015-09-24 | 2015-12-09 | 歌尔声学股份有限公司 | MEMS microphone chip, microphone and audio device |
-
2009
- 2009-11-23 CN CN200910109824.1A patent/CN102075834B/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105142086A (en) * | 2015-09-24 | 2015-12-09 | 歌尔声学股份有限公司 | MEMS microphone chip, microphone and audio device |
| CN105142086B (en) * | 2015-09-24 | 2018-09-07 | 歌尔股份有限公司 | A kind of MEMS microphone chip, microphone and audio frequency apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102075834B (en) | 2015-10-14 |
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