CN102074490B - Intermittent transmission and heating mechanism - Google Patents

Intermittent transmission and heating mechanism Download PDF

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Publication number
CN102074490B
CN102074490B CN 201010502606 CN201010502606A CN102074490B CN 102074490 B CN102074490 B CN 102074490B CN 201010502606 CN201010502606 CN 201010502606 CN 201010502606 A CN201010502606 A CN 201010502606A CN 102074490 B CN102074490 B CN 102074490B
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China
Prior art keywords
holder
rotating shaft
roller
moving seat
intermittent transmission
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CN 201010502606
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CN102074490A (en
Inventor
杨明生
王银果
刘惠森
范继良
王曼媛
王勇
张华�
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Dongguan Anwell Digital Machinery Co Ltd
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Dongguan Anwell Digital Machinery Co Ltd
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Abstract

The invention discloses an intermittent transmission and heating mechanism which comprises a driven base, a base, a lifting mechanism, a horizontal movement mechanism, a lift driving mechanism and a heater, wherein the driven base is used for bearing a substrate to be heated; at least two parallel fixed bases are arranged on the upper surface of the base; the lifting mechanism comprises a lifting support pillar, a round wheel, a roller and a roller fixing plate; the horizontal movement mechanism is fixedly connected with the driven base and drives the driven base to horizontally reciprocate on the roller; the lift driving mechanism comprises a rotary shaft, a rotary shaft motor and an eccentric wheel; and the heater is in the shape of a flat plate, arranged right above the driven base, and parallel to the driven base. The intermittent transmission and heating mechanism disclosed by the invention has the advantages of high automation degree and capabilities of greatly reducing the labor intensity, improving production efficiency, and reducing production cost.

Description

The intermittent transmission heating arrangements
Technical field
The present invention relates to a kind of transmission heating arrangements, relate in particular to a kind of intermittent transmission heating arrangements that the substrate of organic light emitting display is heated in the process of transmission.
Background technology
Along with the continuous progress of science and technology, the instructions for use of people's logarithmic code product improves constantly, especially the display screen of digital product.The OLED display screen is exactly a kind of new product in the digital product, OLED is Organic Light Emitting Diode (Organic Light-Emitting Diode), be called again Organic Electricity laser display (Organic Electroluminesence Display, OELD), OLED is a kind of low-voltage, low-power consumption, high brightness, high light efficiency, wide vision, entirely solidify, full-color aobvious, lightweight, electroluminescent device that price is low, just becoming the focus of world today's display device research, therefore, has larger market potential.
At present, all need the substrate that loads the organic light emitting display diode is carried out heat treated before producing organic light emitting display, and existing heat and carry for the substrate to Organic Light Emitting Diode normally carried out by heater, carrier chain and grasping mechanism, the flow process of its execution is as follows: at first, carrier chain is accepted the substrate that a procedure transports, and before substrate is transported to heater; Then, by grasping mechanism substrate is caught on the heater, then heater heats substrate, until with base plate heating to satisfying technological standards.At last, the thin plate that again substrate will be positioned over after will heating on the carrier chain of grasping mechanism is transported to the corresponding operation of execution in the next process.
In above-mentioned processing procedure, because heater and carrier chain are not continuous, also need to control grasping mechanism in the middle of it substrate is carried out the position adjustment, the production line that has even use manual operation move to substrate on the heater heats, such production line automation degree is low, directly cause labor strength high, the low and too high shortcoming of production cost of production efficiency.
Therefore, need a kind of automaticity high, can greatly reduce labour intensity, enhance productivity the intermittent transmission heating arrangements that reduces production costs.
Summary of the invention
The object of the present invention is to provide a kind of automaticity high, can greatly reduce labour intensity, enhance productivity the intermittent transmission heating arrangements that reduces production costs.
To achieve these goals, the invention provides a kind of intermittent transmission heating arrangements, be applicable to substrate to organic light emitting display and transmit and heat, comprising: the moving seat of holder, pedestal, elevating mechanism, horizontal mobile mechanism, lift drive mechanism and heater; The moving seat of described holder is used for carrying substrate to be heated; The moving seat of described pedestal and described holder is parallel to each other, and the lower surface of described pedestal is horizontal structure, and the upper surface of described pedestal is equipped with at least two holders that are parallel to each other; Described elevating mechanism comprises lifting support, circle wheel, roller and roller fixed head, the upper end of described lifting support is connected with described roller fixed head, described roller is articulated on the described roller fixed head, the moving seat of described holder is carried on the described roller, and the lower end of described lifting support is passing holder and taking turns pivot joint with circle of slip; Described horizontal mobile mechanism is fixedly connected with the moving seat of described holder, and described horizontal mobile mechanism drives the moving seat of described holder and does horizontal reciprocating movement at described roller; Described lift drive mechanism comprises rotating shaft, rotating shaft electric motor and eccentric wheel, described rotating shaft electric motor is fixed on the described pedestal, described rotating shaft is articulated on the described pedestal and with the output shaft of described rotating shaft electric motor and is connected, described eccentric wheel is fixed in the described rotating shaft and described eccentric wheel face and described round tangent contact of wheel face of taking turns, and described rotating shaft electric motor drives the moving seat of described holder by described eccentric wheel and horizontal mobile mechanism is done the vertical lifting motion synchronously; Described heater is tabular, and described heater is positioned at directly over the moving seat of described holder and with the moving seat of described holder and is parallel to each other.
Preferably, described roller fixed head offers groove, and described roller is articulated in the described groove.By described groove is set, make described roller energy in the inner accommodating, simple and compact for structure.
Preferably, the moving seat of described holder comprises that two is mutually parallel and over against the moving bar of the holder that arranges, the upper end of the moving bar of two described holders all offers relative recess along its length, the limit, two opposite sides of described substrate is carried on respectively on the described recess, and the lower end of the moving bar of two described holders is stretched into respectively in the described groove and is tangent with described roller and contacts.The described recess of the moving bar of described holder can carry described substrate, and substrate just is positioned in the formed space of two described recesses, prevents displacement.
Particularly, the both sides, upper end of described roller fixed head are articulated with respectively and are horizontally disposed directive wheel, and the moving bar of described holder is arranged between the directive wheel of both sides of upper end of roller fixed head clampingly.Described directive wheel can carry out guide effect to the moving seat of described holder, thus make the moving bar of described holder steadily, mobile quickly and accurately.
Particularly, the end of the moving bar of described holder has the support arm that extends along pedestal, is horizontally disposed transverse slat by one between the described support arm and is fixedly connected with.Thereby utilize described support arm the moving seat of described horizontal mobile mechanism and described holder can be fixed together and realize synchronizing moving, simple in structure, mounting or dismounting are convenient.
More specifically, described horizontal mobile mechanism comprises lead screw motor, ball screw, feed screw nut and screw mandrel base, described lead screw motor is fixed on the described screw mandrel base, described screw mandrel base is fixed on the described elevating mechanism, described feed screw nut is fixed on the described transverse slat, described ball screw be connected with the output shaft of described lead screw motor and with described feed screw nut engagement, described ball screw is and is horizontally disposed with.By utilizing described lead screw motor to drive described ball screw, make described ball screw drive described feed screw nut axially moving around along described ball screw, because described ball screw cooperates with the feed screw nut and can accurately locate, therefore, the moving seat of described holder also can accurately move and locate under described feed screw nut's drive.
Preferably, described lift drive mechanism also comprises some rotating shaft load bearing seats that are fixed on the described pedestal, and described rotating shaft load bearing seat is passed in described rotating shaft with articulating.Because described shaft length is longer, carries described rotating shaft by using described rotating shaft load bearing seat, prevents that described rotating shaft is because of the stressed excessive flexural deformation in stage casing.
Preferably, the lower end of the described lifting support of two mutual correspondences is fixedly connected with by a crossbearer, and described circle wheel correspondence is articulated on the described crossbearer.Described crossbearer can be fixed described circle wheel, realizes rolling with described eccentric wheel thereby described round wheel can be rotated at described crossbearer tangently.
Particularly, the described crossbearer of contiguous described horizontal mobile mechanism stretches out fixed leg, and described fixed leg is fixedly connected with described horizontal mobile mechanism.Described horizontal mobile mechanism can be realized rising synchronously or descending with the moving seat of described holder by being connected with described crossbearer.
Particularly, be articulated with described circle wheel on the described horizontal mobile mechanism, be fixed with in the described rotating shaft be articulated in described horizontal mobile mechanism on the tangent eccentric wheel that contacts of wheel face of circle wheel.By described circle wheel and eccentric wheel are set, make described lift drive mechanism when driving the lifting of the moving seat of described holder, drive described horizontal mobile mechanism, realize and the moving seat of described holder synchronization lifting.
Compared with prior art, because the present invention is by using a rotating shaft electric motor to drive described rotating shaft, make described rotating shaft drive simultaneously some described eccentric wheels, utilize on the described eccentric wheel different radii when rotating, to have the characteristics of differing heights, make a plurality of described elevating mechanisms realize moving up and down, thereby the moving seat of described holder and described horizontal mobile mechanism can be risen or descend simultaneously, recycling described lead screw motor drives described ball screw and drives described feed screw nut, the moving seat of described holder can level be moved around, and by controlling the intermittent rotary of motor, make the moving seat of described holder of bearing substrate realize rising off and on or descending, and move around off and on, thereby realize being input to substrate on the described heater and more outwards output after heating, whole process automation degree is high, can greatly reduce labour intensity, and utilize described ball screw to drive, make the mobile energy of the moving seat of described holder accurately, fast, greatly improved production efficiency, reduced production costs.
Description of drawings
Fig. 1 is the structural representation of intermittent transmission heating arrangements of the present invention.
Fig. 2 is the side sectional view of intermittent transmission heating arrangements of the present invention.
Fig. 3 is the enlarged drawing of A part among Fig. 1.
Fig. 4 is the cutaway view of horizontal mobile mechanism in the intermittent transmission heating arrangements of the present invention.
Embodiment
As shown in Figures 1 and 2, intermittent transmission heating arrangements 100 of the present invention comprises the moving seat 1 of holder, pedestal 2, elevating mechanism 3, horizontal mobile mechanism 4, lift drive mechanism 5 and heater 6; The moving seat 1 of described holder is used for carrying substrate to be heated 200; Described pedestal 2 is parallel to each other with the moving seat 1 of described holder, and the lower surface of described pedestal 2 is horizontal structure, and the upper surface of described pedestal 2 is equipped with three holders that are parallel to each other 21; Described elevating mechanism 3 comprises lifting support 31, circle wheel 32, roller 33 and roller fixed head 34, the upper end of described lifting support 31 is connected with described roller fixed head 34, described roller 33 is articulated on the described roller fixed head 34, the moving seat 1 of described holder is carried on the described roller 33, and the lower end of described lifting support 31 is passing holder 21 and taking turns 32 pivot joints with circle of slip; The moving seat 1 of described horizontal mobile mechanism 4 and described holder is fixedly connected with, and described horizontal mobile mechanism 4 drives the moving seat of described holder 1 and does horizontal reciprocating movement at described roller 33; Described lift drive mechanism 5 comprises rotating shaft 51, rotating shaft electric motor 52 and eccentric wheel 53, described rotating shaft electric motor 52 is fixed on the described pedestal 2, described rotating shaft 51 is articulated on the described pedestal 2 and with the output shaft of described rotating shaft electric motor 52 and is connected, described eccentric wheel 53 is fixed in the described rotating shaft 51 and tangent contact of wheel face of the wheel face of described eccentric wheel 53 and described circle wheel 32, and described rotating shaft electric motor 52 drives the moving seat 1 of described holder by described eccentric wheel 53 and horizontal mobile mechanism 4 is done the vertical lifting motion synchronously; Described heater 6 is tabular, and described heater 6 is positioned at directly over the moving seat 1 of described holder and with the moving seat 1 of described holder and is parallel to each other.
In conjunction with shown in Figure 3, described roller fixed head 34 offers groove 34a, and described roller 33 is articulated in the described groove 34a.By described groove 34a is set, make described roller 33 energy in the inner accommodating, simple and compact for structure.The moving seat 1 of described holder comprises that two is mutually parallel and over against the moving bar 11 of the holder that arranges, the upper end of the moving bar 11 of two described holders all offers relative recess 11a along its length, the limit, two opposite sides of described substrate 200 is carried on respectively on the described recess 11a, and the lower end of the moving bar 11 of two described holders is stretched into respectively in the described groove 34a and is tangent with described roller 33 and contacts.The described recess 11a of the moving bar 11 of described holder can carry described substrate 200, and described substrate 200 just is positioned in the formed space of two described recess 11a, prevents that described substrate 200 is shifted.The both sides, upper end of described roller fixed head 34 are articulated with respectively and are horizontally disposed directive wheel 34b, and the moving bar 11 of described holder is arranged between the directive wheel 34b of both sides of upper end of roller fixed head 34 clampingly.Described directive wheel 34b can carry out guide effect to the moving seat 1 of described holder, thus make the moving bar 11 of described holder steadily, mobile quickly and accurately.The end of the moving bar 11 of described holder has along pedestal and extends support arm 12, is horizontally disposed transverse slat 13 by one between the described support arm 12 and is fixedly connected with.Thereby utilize described support arm 12 the moving seat 1 of described horizontal mobile mechanism 4 and described holder can be fixed together and realize synchronizing moving, simple in structure, mounting or dismounting are convenient.
In conjunction with shown in Figure 4, described horizontal mobile mechanism 4 comprises lead screw motor 41, ball screw 42, feed screw nut 43 and screw mandrel base 44, described lead screw motor 41 is fixed on the described screw mandrel base 44, described screw mandrel base 44 is fixed on the described crossbearer 35 of described elevating mechanism 3, described feed screw nut 43 is fixed on the described transverse slat 13, described ball screw 42 be connected with the output shaft of described lead screw motor 41 and with described feed screw nut 43 engagements, described ball screw 42 is and is horizontally disposed with.By utilizing described lead screw motor 41 to drive described ball screw 42, make described ball screw 42 drive described feed screw nut 43 axially moving around along described ball screw 42, because described ball screw 42 cooperates and can accurately locate with feed screw nut 43, therefore, the moving seat 1 of described holder also can accurately move and locate under described feed screw nut's 43 drive.
Described lift drive mechanism 5 also comprises some rotating shaft load bearing seats 54 that are fixed on the described pedestal 2, and described rotating shaft load bearing seat 54 is passed in described rotating shaft 51 with articulating.Because described rotating shaft 51 length are longer, by using the described rotating shaft 51 of described rotating shaft load bearing seat 54 carryings, prevent that described rotating shaft 51 is because of the stressed excessive flexural deformation in stage casing.
The lower end of the described lifting support 31 of two mutual correspondences is fixedly connected with by a crossbearer 35, and described circle wheel 32 correspondences are articulated on the described crossbearer 35.Described crossbearer 35 can be fixed described circle wheel 32, realizes and described eccentric wheel 34 tangent ground rolls thereby described circle wheel 32 can be rotated at described crossbearer 35.More specifically, the described crossbearer 35 of contiguous described horizontal mobile mechanism 4 stretches out fixed leg 35a, and described fixed leg 35a is fixedly connected with described horizontal mobile mechanism 4.Described horizontal mobile mechanism 4 can be realized rising synchronously or descending with the moving seat 1 of described holder by being connected with described crossbearer 35.
Be articulated with described circle wheel 32 on the described horizontal mobile mechanism 4, be fixed with in the described rotating shaft 51 be articulated in described horizontal mobile mechanism 4 on the tangent eccentric wheel that contacts 34 of wheel face of circle wheel 32.By described circle wheel 32 and eccentric wheel 34 are set, make described lift drive mechanism 5 when driving 1 lifting of the moving seat of described holder, drive described horizontal mobile mechanism 4, realize and the moving seat of described holder 1 synchronization lifting.
Comprehensive above-mentioned and by reference to the accompanying drawings, the below is described in detail intermittent transmission heating arrangements 100 of the present invention:
During work, described intake roller 300 rotates along a direction, and described substrate 200 is carried on the intake roller 300 and along the b direction and moves.In the time of directly over described substrate 200 moves to described intake roller 200, described intake roller 200 stops operating, described rotating shaft electric motor 52 rotates and drives described eccentric wheel 53, described eccentric wheel 53 rotates, because described eccentric wheel 53 radiuses are different, when the wheel face relative sliding of the wheel face of described eccentric wheel 53 and described roller 33 is raised described roller 33, described roller fixed head 34 rises and promotes described lifting support 31 and rises, and then promote the moving seat 1 of described holder and rise, when the moving seat 1 of described holder rises to the horizontal plane of described substrate 200 described substrate 200 held up and continue to rise, when a side of described eccentric wheel 53 radius maximums turns to peak, described rotating shaft electric motor 52 stops operating, at this moment, the moving seat 1 of described holder arrives peak and stops to rise.Simultaneously, described lead screw motor 41 is rotated and is driven described ball screw 42, and described ball screw 42 rotates described feed screw nut 43 is moved along the b direction, and then drives the moving seat of described holder 1 along continuous straight runs to the translation of b direction by described transverse slat 13 and described support arm 12.In the time of directly over the moving seat 1 of described holder moves to described heater 6, described lead screw motor 41 stops operating, and makes the moving seat 1 of described holder stop translation.At this moment, described rotating shaft electric motor 52 startups are rotated further, and a side and described roller 33 that described eccentric wheel 53 radiuses are little are tangent, and 1 time described substrate 200 of general who has surrendered of the moving seat of holder described in this process is positioned over described heater 6 tops and heats.After heating is finished, described rotating shaft electric motor 52 rotates to drive and stops after described eccentric wheel 53 holds up described substrate 200, described lead screw motor 41 rotate continue with described substrate 200 move to output roller 400 directly over after stop, described rotating shaft electric motor 52 rotates described substrate 200 declines again and is positioned on the described output roller 400, and described output roller 400 rotates sends described substrate 200 into subsequent processing.At last, described lead screw motor 41 drives described ball screw 42 to counter-rotation, makes the moving seat 1 of described holder move to original position, prepares next substrate of transmission.
Because the present invention is by using a rotating shaft electric motor 52 to drive described rotating shaft 51, make described rotating shaft 51 drive simultaneously some described eccentric wheels 53, utilize on the described eccentric wheel 53 different radii when rotating, to have the characteristics of differing heights, make a plurality of described elevating mechanisms 3 realize moving up and down, thereby the moving seat 1 of described holder and described horizontal mobile mechanism 4 can be risen or descend simultaneously, recycle described lead screw motor 41 and drive the described ball screw 42 described feed screw nuts 43 of drive, the moving seat 1 of described holder can level be moved around, and by controlling the intermittent rotary of motor, make the moving seat 1 of described holder of bearing substrate 200 realize rising off and on or descending, and move around off and on, thereby realize being input to substrate 200 on the described heater 6 and more outwards output after heating, whole process automation degree is high, can greatly reduce labour intensity, and utilize described ball screw 42 to drive, the moving seat 1 of described holder is moved can be accurately, fast, greatly improved production efficiency, reduced production costs.
The involved input of intermittent transmission heating arrangements of the present invention 100, output roller 300,400 and the operation principle of heater 6 be well known to those of ordinary skill in the art, no longer be described in detail at this.
Above disclosed only is preferred embodiments of the present invention, certainly can not limit with this interest field of the present invention, and the equivalent variations of therefore doing according to the present patent application claim still belongs to the scope that the present invention is contained.

Claims (10)

1. intermittent transmission heating arrangements is applicable to substrate to organic light emitting display and transmits and heat, and it is characterized in that, comprising:
The moving seat of holder, the moving seat of described holder is used for carrying substrate to be heated;
Pedestal, the moving seat of described pedestal and described holder is parallel to each other, and the lower surface of described pedestal is horizontal structure, and the upper surface of described pedestal is equipped with at least two holders that are parallel to each other;
Elevating mechanism, described elevating mechanism comprises lifting support, circle wheel, roller and roller fixed head, the upper end of described lifting support is connected with described roller fixed head, described roller is articulated on the described roller fixed head, the moving seat of described holder is carried on the described roller, and the lower end of described lifting support is passing holder and taking turns pivot joint with circle of slip;
Horizontal mobile mechanism, described horizontal mobile mechanism is fixedly connected with the moving seat of described holder, and described horizontal mobile mechanism drives the moving seat of described holder and does horizontal reciprocating movement at described roller;
Lift drive mechanism, described lift drive mechanism comprises rotating shaft, rotating shaft electric motor and eccentric wheel, described rotating shaft electric motor is fixed on the described pedestal, described rotating shaft is articulated on the described pedestal and with the output shaft of described rotating shaft electric motor and is connected, described eccentric wheel is fixed in the described rotating shaft and described eccentric wheel face and described round tangent contact of wheel face of taking turns, and described rotating shaft electric motor drives the moving seat of described holder by described eccentric wheel and horizontal mobile mechanism is done the vertical lifting motion synchronously; And
Heater, described heater is tabular, and described heater is positioned at directly over the moving seat of described holder and with the moving seat of described holder and is parallel to each other.
2. intermittent transmission heating arrangements as claimed in claim 1, it is characterized in that: described roller fixed head offers groove, and described roller is articulated in the described groove.
3. intermittent transmission heating arrangements as claimed in claim 2, it is characterized in that: the moving seat of described holder comprises that two is mutually parallel and over against the moving bar of the holder that arranges, the upper end of the moving bar of two described holders all offers relative recess along its length, the limit, two opposite sides of described substrate is carried on respectively on the described recess, and the lower end of the moving bar of two described holders is stretched into respectively in the described groove and is tangent with described roller and contacts.
4. intermittent transmission heating arrangements as claimed in claim 3, it is characterized in that: the both sides, upper end of described roller fixed head are articulated with respectively and are horizontally disposed directive wheel, and the moving bar of described holder is arranged between the directive wheel of both sides of upper end of roller fixed head clampingly.
5. intermittent transmission heating arrangements as claimed in claim 3 is characterized in that: the end of the moving bar of described holder has the support arm that extends along pedestal, is horizontally disposed transverse slat by one between the described support arm and is fixedly connected with.
6. intermittent transmission heating arrangements as claimed in claim 5, it is characterized in that: described horizontal mobile mechanism comprises lead screw motor, ball screw, feed screw nut and screw mandrel base, described lead screw motor is fixed on the described screw mandrel base, described screw mandrel base is fixed on the described elevating mechanism, described feed screw nut is fixed on the described transverse slat, described ball screw be connected with the output shaft of described lead screw motor and with described feed screw nut engagement, described ball screw is and is horizontally disposed with.
7. intermittent transmission heating arrangements as claimed in claim 1, it is characterized in that: described lift drive mechanism also comprises some rotating shaft load bearing seats that are fixed on the described pedestal, described rotating shaft load bearing seat is passed in described rotating shaft with articulating.
8. intermittent transmission heating arrangements as claimed in claim 1 is characterized in that: two mutually the lower end of corresponding described lifting support be fixedly connected with by a crossbearer, described circle wheel correspondence is articulated on the described crossbearer.
9. intermittent transmission heating arrangements as claimed in claim 8 is characterized in that: the described crossbearer of contiguous described horizontal mobile mechanism stretches out fixed leg, and described fixed leg is fixedly connected with described horizontal mobile mechanism.
10. intermittent transmission heating arrangements as claimed in claim 8 is characterized in that: be articulated with described circle wheel on the described horizontal mobile mechanism, be fixed with in the described rotating shaft be articulated in described horizontal mobile mechanism on the tangent eccentric wheel that contacts of wheel face of circle wheel.
CN 201010502606 2010-09-30 2010-09-30 Intermittent transmission and heating mechanism Expired - Fee Related CN102074490B (en)

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Publication number Priority date Publication date Assignee Title
CN102709488A (en) * 2012-01-13 2012-10-03 东莞宏威数码机械有限公司 Conveying mechanism for substrates
CN103787067B (en) * 2014-01-23 2017-01-25 北京京东方显示技术有限公司 Substrate conveying device
CN111331289A (en) * 2020-04-29 2020-06-26 深圳市东昕科技有限公司 Transmission device and vacuum welding equipment
CN113808308B (en) * 2021-09-28 2023-05-05 广脉科技股份有限公司 Community trip safety supervision system

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Publication number Priority date Publication date Assignee Title
CN100479117C (en) * 2004-05-12 2009-04-15 微传科技有限公司 System for heat treatment of semiconductor device
CN101762985A (en) * 2008-11-05 2010-06-30 细美事有限公司 Apparatus for processing a substrate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202025727U (en) * 2010-09-30 2011-11-02 东莞宏威数码机械有限公司 Intermittent transmission heating device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100479117C (en) * 2004-05-12 2009-04-15 微传科技有限公司 System for heat treatment of semiconductor device
CN101762985A (en) * 2008-11-05 2010-06-30 细美事有限公司 Apparatus for processing a substrate

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