CN102071404A - Coating film rotating device and method for side cylindrical surface of optical fiber - Google Patents

Coating film rotating device and method for side cylindrical surface of optical fiber Download PDF

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Publication number
CN102071404A
CN102071404A CN200910241547XA CN200910241547A CN102071404A CN 102071404 A CN102071404 A CN 102071404A CN 200910241547X A CN200910241547X A CN 200910241547XA CN 200910241547 A CN200910241547 A CN 200910241547A CN 102071404 A CN102071404 A CN 102071404A
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China
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optical fiber
cylindrical surface
plated film
flat disk
revolution
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CN200910241547XA
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CN102071404B (en
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冯小明
赵懿昊
祁琼
刘素平
马骁宇
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Abstract

The invention relates to a coating film rotating device for a side cylindrical surface of an optical fiber, comprising a flat disk and a revolution piece, wherein the center of the flat disk is fixed with a center shaft, the revolution piece is shaped as a barrel and sleeved on the center shaft of the flat disk, a plurality of horizontal struts are transversally arranged at one end of the revolution piece which is close to the flat disk, the end part of each horizontal strut is pivoted with an autorotation piece, the autorotation piece is in frictional contact with the surface of the flat disk, the parts are placed in a film coating chamber, a crucible is also placed in the film coating chamber, each autorotation piece is connected with the optical fiber to be plated, and the revolution piece drives the autorotation pieces which are in frictional contact with the surface of the flat disk to rotate when the revolution piece rotates.

Description

Optical fiber side cylindrical surface plated film swivel arrangement and method
Technical field
The invention belongs to optical fiber coupling field, specifically, the present invention relates to a kind of optical fiber side cylindrical surface plated film swivel arrangement and method.
Background technology
Semiconductor laser (LD) is little with its electro-optical efficiency height, volume, narrow bandwidth, reliability advantages of higher, is widely used at aspects such as field such as optical-fibre communications, solid statelasers.But the beam quality of semiconductor laser can't be comparable with the solid statelaser that with doped yttrium aluminum garnet (YAG) is working medium, and the angle of divergence of semiconductor laser generally characterizes from both direction: perpendicular to the quick shaft direction and the slow-axis direction that is parallel to the pn knot of pn knot.The quick shaft direction angle of divergence is bigger, generally about 40 °, in the beam shaping technology of semiconductor laser, the first step all needs its fast compression that collimates, and the most traditional and simple compression method is exactly to utilize a bare fibre to assemble the laser that LD sends as cylindrical lens, though this method is simple and convenient, but because there is Fresnel reflection (reflectivity is about 4%) in optical fiber side cylindrical surface, if so directly utilize bare fibre to compress, the loss of inherent laser alignment just reaches 7.8%, the coupling efficiency that this has had a strong impact on whole beam shaping causes meaningless light energy losses, has also increased the heat radiation load of system simultaneously.In order to address this problem, directly method is exactly to be coated with the last layer high transmittance film on the side cylindrical surface of bare fibre, its reflectivity is reduced to below 0.5%, the light energy losses that this like this inherent Fresnel reflection causes just is reduced to very faint degree, almost can ignore, but the high transmittance film that is coated with one deck even compact in the arc-shaped surface of bare fibre is unusual difficulty undoubtedly, this invention provides a kind of optical fiber side cylindrical surface coating clamp at this problem exactly, so that the side cylindrical surface plated film of optical fiber becomes possibility.
Summary of the invention
The objective of the invention is to, a kind of optical fiber side cylindrical surface plated film swivel arrangement and method are provided, can carry out plated film the side cylindrical surface of optical fiber, and have simple in structure, the advantage of easy handling.
For achieving the above object, the invention provides a kind of optical fiber side cylindrical surface plated film swivel arrangement, comprising:
One flat disk, this discal center fixation one central shaft;
One revolution part, this revolution part is a tubular, is placed on the discal central shaft, and the close discal end of this revolution part is horizontal a plurality of horizontal struts, and the end of described horizontal strut is articulated with the rotation part, and this rotation part contacts with discal surface friction;
Above-mentioned parts place a coating chamber, also are placed with crucible in coating chamber, and wherein each rotation part is connected with optical fiber to be plated, drive the rotation part that contacts with the flat disk surface friction and rotate when described revolution part rotates.
Wherein said discal surface roughness Ra is 0.4 μ m-20 μ m.
The quantity of wherein said horizontal strut is 4-10.
Wherein said horizontal strut is positioned at outside the flat disk with the optical fiber to be plated that the length of the rotation part of its end pivot joint is selected the rotation part is connected.
The invention provides the method for a kind of optical fiber side cylindrical surface plated film, this method is to use the described optical fiber side of claim 1 cylindrical surface plated film swivel arrangement, comprises the steps:
Step 1: optical fiber to be plated is connected with the rotation part;
Step 2: coating chamber is vacuumized;
Step 3: start the revolution part and make it to rotate;
Step 4: the rotation part that the rotation drive of this revolution part contacts with the flat disk surface friction rotates;
Step 5: open the crucible in the coating chamber, make the coating materials evaporation in the crucible, treat the light-plated fibre and carry out plated film.
Coating materials in the wherein said crucible is MgF 2Or CaF 2Low-index material.
Wherein saidly coating chamber is vacuumized the air pressure of coating chamber<2 * 10 -3Pa.
Characteristics of the present invention are:
1, the revolution of revolution part drives the revolution of rotation part, produces rolling resistance between autobiography spare and flat disk simultaneously, thereby causes the rotation of rotation part, and last result is equivalent to optical fiber integrally to be plated and revolves round the sun in coating chamber, simultaneously around self cylinder axis rotation;
2, simple in structure, be easy to assembling;
3, revolution speed can be regulated in actual process operation, makes coating speed accelerate or slow down;
4, optical fiber convenient disassembly to be plated, and once can be coated with in a large number, as long as increase revolution part horizontal strut number and rotation number of packages simultaneously.
Description of drawings
For further specifying technology contents of the present invention, the invention will be further described below in conjunction with accompanying drawing, wherein:
Fig. 1 is the structural representation of optical fiber side of the present invention cylindrical surface plated film swivel arrangement;
Fig. 2 is an embodiment of the invention synoptic diagram;
Fig. 3 is an embodiment of the invention operating process synoptic diagram.
Embodiment
See also illustrated in figures 1 and 2ly, the invention provides a kind of optical fiber side cylindrical surface plated film swivel arrangement, comprising:
The central shaft 6 at one flat disk 1 and center thereof, the surface roughness Ra of wherein said flat disk 1 are 0.4 μ m-20 μ m, and diameter is 180mm, and thickness is 10mm.Central shaft 6 diameters are 15mm, and length is about 120mm.Flat disk 1 and central shaft 6 are stainless material and make, and fuse the rigidity combination;
One revolution part 2 and horizontal strut on every side 3 thereof, these revolution part 2 centers are a tubular, are placed on the central shaft 6, this revolution part 2 is near the horizontal 2-10 of having of an end horizontal strut 3 (quantity of the horizontal strut 3 of present embodiment is 8) of flat disk 1.Revolution part 2 center tubular external diameters are 20mm, and horizontal strut length is 60mm, and both are stainless material and make, the rigidity combination;
The autobiographical type 4, this autobiographical type 4 are a right cylinder (but two ends circular cone scalariform), for stainless material is made, its diameter is 15mm, and length is 25mm, and the end of it and horizontal strut is articulated, can rotate around its central shaft, and there is the pore that can supply chucking optical fiber 5 to be plated at terminal center;
Above-mentioned parts are assembled together and place a coating chamber 9, and the central shaft 6 and the coating chamber 9 at flat disk 1 and center thereof are fixed into one, and flat disk 1 keeps level attitude.Revolution body 2 is connected with mechanical transmission facility in the coating chamber 9.Also be placed with crucible 8 in addition in coating chamber 9, wherein each rotation part 4 is connected with optical fiber 5 chuckings to be plated, drives the rotation part 4 that contacts with flat disk 1 surface friction and rotate when described revolution part 2 rotates.
See also shown in Figure 3ly,, the invention provides the method for a kind of optical fiber side cylindrical surface plated film, comprise the steps: simultaneously in conjunction with Fig. 1 and Fig. 2
Step 1: optical fiber 5 to be plated is connected with rotation part 4 chuckings, and the core diameter of optical fiber 5 to be plated is 0.6mm;
Step 2: coating chamber 9 is vacuumized, make coating chamber 9 air pressure<2 * 10 -3Pa, and be baked to 180 ℃;
Step 3: start revolution part 2 by mechanical drive mode and make it to rotate, slewing rate is 12 cycle per minute clocks;
Step 4: the rotation part 4 that the rotation drive of this revolution part 2 contacts with flat disk 1 surface friction rotates, and autobiography rotates and can extrapolate: be about 112 cycle per minute clocks;
Step 5: open the crucible 8 in the coating chamber 9, utilize the mode of electron beam evaporation that the coating materials 7 in the crucible 8 is evaporated, carry out the plated film on optical fiber to be plated 5 side cylindrical surface, wherein the coating materials in the crucible 87 is MgF 2Or CaF 2(coating materials 7 of present embodiment is MgF 2), its specific refractory power is about 1.38, and is littler than the specific refractory power 1.47 of fiber optic materials, is convenient to be coated with anti-reflection film, during evaporation, can add the hall ion source that adds that assistant depositing is used, and makes the rete compactness and the adhesivity that plate reach best.
Generally only need unitary film system to get final product to optical fiber plating high transmittance film, its film is that optical thickness is about 1/4 optical wavelength.
The present invention is by physical construction design cleverly, utilize the principle of rolling resistance, the revolution and the rotation of optical fiber to be plated have been realized simultaneously, make optical fiber in coating chamber at the uniform velocity carry out planetary motion, thereby make that being coated with of high transmittance film becomes possibility on the optical fiber side cylindrical surface, and can realize the high uniformity of high transmittance film.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (7)

1. optical fiber side cylindrical surface plated film swivel arrangement comprises:
One flat disk, this discal center fixation one central shaft;
One revolution part, this revolution part is a tubular, is placed on the discal central shaft, and the close discal end of this revolution part is horizontal a plurality of horizontal struts, and the end of described horizontal strut is articulated with the rotation part, and this rotation part contacts with discal surface friction;
Above-mentioned parts place a coating chamber, also are placed with crucible in coating chamber, and wherein each rotation part is connected with optical fiber to be plated, drive the rotation part that contacts with the flat disk surface friction and rotate when described revolution part rotates.
2. by the described optical fiber side of claim 1 cylindrical surface plated film swivel arrangement, wherein said discal surface roughness Ra is 0.4 μ m-20 μ m.
3. by the described optical fiber side of claim 1 cylindrical surface plated film swivel arrangement, the quantity of wherein said horizontal strut is 4-10.
4. by the described optical fiber side of claim 1 cylindrical surface plated film swivel arrangement, wherein said horizontal strut is positioned at outside the flat disk with the optical fiber to be plated that the length of the rotation part of its end pivot joint is selected the rotation part is connected.
5. the method for an optical fiber side cylindrical surface plated film, this method is to use the described optical fiber side of claim 1 cylindrical surface plated film swivel arrangement, comprises the steps:
Step 1: optical fiber to be plated is connected with the rotation part;
Step 2: coating chamber is vacuumized;
Step 3: start the revolution part and make it to rotate;
Step 4: the rotation part that the rotation drive of this revolution part contacts with the flat disk surface friction rotates;
Step 5: open the crucible in the coating chamber, make the coating materials evaporation in the crucible, treat the light-plated fibre and carry out plated film.
6. by the method for the described optical fiber side of claim 5 cylindrical surface plated film, the coating materials in the wherein said crucible is MgF 2Or CaF 2Low-index material.
7. by the method for the described optical fiber side of claim 5 cylindrical surface plated film, wherein saidly coating chamber is vacuumized the air pressure of coating chamber<2 * 10 -3Pa.
CN200910241547XA 2009-11-25 2009-11-25 Coating film rotating device and method for side cylindrical surface of optical fiber Expired - Fee Related CN102071404B (en)

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CN102071404B CN102071404B (en) 2012-11-14

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103451603A (en) * 2013-08-28 2013-12-18 深圳大学 Side cylindrical surface coating device of cylinder and vacuum coating equipment
CN106319472A (en) * 2016-10-27 2017-01-11 中国电子科技集团公司第十三研究所 Fiber arc surface film coating fixture and using method
CN109536911A (en) * 2018-12-26 2019-03-29 北京航空航天大学 A kind of device for optical fiber side plated film
CN109989046A (en) * 2018-01-03 2019-07-09 宁波舜宇车载光学技术有限公司 Component filming equipment
CN110791743A (en) * 2019-12-09 2020-02-14 中国工程物理研究院总体工程研究所 Long optical fiber sensing device film coating tool and film coating method
CN113659428A (en) * 2021-09-07 2021-11-16 海特光电有限责任公司 Antireflection film plating device for cylindrical lens
TWI787558B (en) * 2019-02-14 2022-12-21 日商Towa股份有限公司 Workpiece holding part rotation unit and vacuum processing device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2194365Y (en) * 1994-07-13 1995-04-12 北京市天金机电新技术开发公司 Multi-function ion plating machine
CN2898012Y (en) * 2006-06-01 2007-05-09 河南农业大学 Rotary clamp with fibre-optic arc coated on surface
CN201087192Y (en) * 2007-08-03 2008-07-16 天津理工大学 Bioreactor with roller rotating and loading around ring shaped cultivation room

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103451603A (en) * 2013-08-28 2013-12-18 深圳大学 Side cylindrical surface coating device of cylinder and vacuum coating equipment
CN103451603B (en) * 2013-08-28 2015-12-23 深圳大学 A kind of cylindrical body lateral column face film coating apparatus and vacuum coating film equipment
CN106319472A (en) * 2016-10-27 2017-01-11 中国电子科技集团公司第十三研究所 Fiber arc surface film coating fixture and using method
CN106319472B (en) * 2016-10-27 2019-04-09 中国电子科技集团公司第十三研究所 Optical fiber arc surface coating clamp and application method
CN109989046A (en) * 2018-01-03 2019-07-09 宁波舜宇车载光学技术有限公司 Component filming equipment
CN109989046B (en) * 2018-01-03 2021-05-07 宁波舜宇车载光学技术有限公司 Component film coating equipment
CN109536911A (en) * 2018-12-26 2019-03-29 北京航空航天大学 A kind of device for optical fiber side plated film
TWI787558B (en) * 2019-02-14 2022-12-21 日商Towa股份有限公司 Workpiece holding part rotation unit and vacuum processing device
CN110791743A (en) * 2019-12-09 2020-02-14 中国工程物理研究院总体工程研究所 Long optical fiber sensing device film coating tool and film coating method
CN113659428A (en) * 2021-09-07 2021-11-16 海特光电有限责任公司 Antireflection film plating device for cylindrical lens
CN113659428B (en) * 2021-09-07 2023-02-28 海特光电有限责任公司 Antireflection film plating device for cylindrical lens

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