CN2194365Y - Multifunctional ion film plating machine - Google Patents
Multifunctional ion film plating machine Download PDFInfo
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- CN2194365Y CN2194365Y CN 94215328 CN94215328U CN2194365Y CN 2194365 Y CN2194365 Y CN 2194365Y CN 94215328 CN94215328 CN 94215328 CN 94215328 U CN94215328 U CN 94215328U CN 2194365 Y CN2194365 Y CN 2194365Y
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- 238000007747 plating Methods 0.000 title description 2
- 230000008020 evaporation Effects 0.000 claims abstract description 38
- 238000001704 evaporation Methods 0.000 claims abstract description 38
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 57
- 238000009413 insulation Methods 0.000 claims description 41
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 31
- 239000010949 copper Substances 0.000 claims description 31
- 229910052802 copper Inorganic materials 0.000 claims description 31
- 229910052715 tantalum Inorganic materials 0.000 claims description 21
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 21
- 229910000831 Steel Inorganic materials 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 17
- 239000010959 steel Substances 0.000 claims description 17
- 238000012856 packing Methods 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000003638 chemical reducing agent Substances 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 239000002826 coolant Substances 0.000 claims description 5
- 238000005034 decoration Methods 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 3
- 239000012774 insulation material Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 abstract description 7
- 239000012528 membrane Substances 0.000 abstract description 5
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 230000007123 defense Effects 0.000 abstract description 2
- 238000009713 electroplating Methods 0.000 abstract description 2
- 238000005240 physical vapour deposition Methods 0.000 abstract description 2
- 230000008569 process Effects 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 2
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
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Abstract
The utility model relates to an ion coating machine for electroplating, in particular to a physical vapor deposition multifunctional ion coating machine. The utility model discloses constitute by host computer, electrical apparatus switch board and power cabinet three major parts. It features that both the hollow cathode gun and the magnetic control arc evaporation source are installed in the same vacuum chamber, so that the evaporation modes of hollow cathode ion plating and magnetic control arc ion plating are integrated into one body, and it has reliable technological performance, simple structure, convenient operation and low noise. The utility model discloses can plate simple substance membrane, plate compound membrane, still can plate compound membrane, and the rete is fine and close even, adhesive force is strong, good, the pollution-free of process repeatability, can extensively be applicable to machinery, electron, shipbuilding, light industry, national defense industry etc..
Description
The utility model relates to a kind of as the ion film coating machine of electroplating usefulness, particularly a kind of multifunction ion coating equipment of physical vapor deposition.
Ion-plating technique is at home and abroad applied already; Particularly titanium nitride membrane is owing to have golden yellow color and luster and higher hardness, and is developing faster; Domestic and international existing filming equipment has only the evaporation mode of a provenance; The evaporation mode of one provenance is a hallow cathode deposition, HCD, and the evaporation mode of another provenance is a magnetron arc ion plating, and processing performance poor reliability, structure are complicated, operation inconvenience, and existing plated film industry adopts pneumatic scratch start, and needs to increase source of the gas, and noise is bigger.
The purpose of this utility model is to be multifunction ion coating equipment one, that processing performance is reliable, simple in structure, easy to operate, noise is little for a kind of evaporation mode with hallow cathode deposition, HCD and magnetron arc ion plating two provenances is provided.
The utility model connects following technical scheme and realizes.Get power cabinet ready, electric control cabinet, the self-control main frame, main frame is by harmonic speed reducer, end socket, bell jar, hoisting appliance, water jacketed copper crucible, thermal baffle, the hollow cathode rifle, rubber hose, shaft coupling, ring flange, transmission shaft, well heater, shift fork, work rest, viewing window, cavity cap, thermopair, the magnetic control arc evaporation source, the scratch start device, sealing-ring, the chassis, frame, diffusion pump, topping-up pump, diffusion pump, the inlet pipe joint, the water outlet joint, junction block, electrical equipment control cabinet equipment master switch, the power cabinet terminal stud, the electric control cabinet junction block, the power cabinet junction block is formed, hollow cathode rifle and magnetic control arc evaporation source all are contained in the same vacuum chamber, end socket adopts double-deck water wall structure, the dynamic seal transmission shaft is equipped with at the center above end socket, be fixed on the end socket by ring flange, harmonic speed reducer is passed to transmission shaft by shaft coupling with power, a shift fork is housed below transmission shaft is used to stir the work rest rotation, rotating speed can be from 0 rev/min of free adjustment to 8.5 rev/min, work rest is realized rotation again by rolling resistance in revolution, the rotation rotating speed can transfer to 10 rev/mins automatically from 0 rev/min, one group of well heater of recess packing at end socket, hoisting appliance is fixed on the base of frame, the top of the elevating lever of hoisting appliance and end socket overlap joint, can make the end socket free lifting, the chassis is installed in the top of frame, be tightly connected with sealing-ring and bell jar around the last plane on chassis, and above bell jar, be tightly connected with end socket, form vacuum chamber, magnetic control arc evaporation source on a water-cooled copper crucible and two is being housed on the chassis, side at each evaporation source respectively is equipped with a scratch start device, thermopair also is housed on the chassis, the vacuum ionization gauge, cavity cap, on the chassis and be shaped on two inlet mouths, be fixed with three root posts on the chassis, fixing the guide rail that supplies the work rest rotation on three root posts; Conveniently detachable decoration door all is housed around the frame, diffusion pump is housed in frame, mechanical pump, topping-up pump, outlet pipeline, suction culvert, admission passage, junction block is equipped with two viewing windows in the left side and the right on of vacuum chamber, a hollow cathode rifle is housed in the right astern of vacuum chamber, power supply is provided by 380V power electrical network, adopt the quad line directly to be connected on the electric control cabinet junction block, behind electrical equipment control cabinet equipment master switch, be connected on the power cabinet, three pairs of positive and negative power supply cabinet terminal studs of output on power cabinet, the cold copper crucible of the anodal water receiving of wherein a pair of positive and negative power supply cabinet terminal stud, negative pole connects the hollow cathode rifle, other two pairs of positive and negative power supply cabinet terminal studs with two positive poles also together, be connected on the outer wall of bell jar, two negative poles are connected on respectively on two magnetic control arc evaporation sources, the startup of control power supply also is housed between electric control cabinet and power cabinet, the control line of the power adjustment of control magnetic control arc evaporation source and hollow cathode rifle, each motor in the main control system is housed between electric control cabinet and main frame, all kinds of valves, the start and stop of well heater, the control high pressure, the control line of the start and stop of bias voltage, high pressure, the negative pole of bias voltage is connected on the work rest, positive pole is connected on cavity cap, promptly constitutes the multifunction ion coating equipment.
The hollow cathode rifle is by cover, hold-down nut, sealing-ring in rubber fittings, sealing-ring, hold-down nut, nut, pad, gun back end weld assembly, the insulation, fixedly tantalum pipe nut, the nut that insulate, ring flange, insulation covering, sealing-ring, insulation covering, round nut, insulating mat, insulation tube, tantalum pipe, rifle front end weld assembly are formed, the stage casing of the hollow resistance utmost point rifle ring flange and bell jar sealed attachment, the afterbody of hollow cathode rifle is equipped with rubber fittings.Rubber is taken over head and is linked with the pressure-resistant plastic flexible pipe, plastic hose and piezo electric valve link, then by linking from dynamic pressure controller and gas cylinder, can be with the input of the argon gas in gas cylinder tantalum pipe, for the hollow cathode rifle provides working gas, the other end of rubber fittings is pressed on the afterbody of gun back end with the hold-down nut sealing, afterbody in the rear end also is equipped with the two-pad that double nut compresses, the anode connector of primary source output is housed in the middle of two-pad, the double-deck water cooling plant that can lead to recirculated cooling water is adopted in the rear end of rifle, and use sealing-ring, cover in the insulation, insulation nut and the insulation of rifle forward end seal compress with hold-down nut, and gun back end weld assembly and rifle front end weld assembly are become one, head in the rear end is equipped with a fixedly tantalum pipe nut, fixedly the endoporus of tantalum pipe nut and tantalum pipe outer wall compress, and make tantalum pipe level insert rifle front end center, and rifle front end head is installed in the vacuum chamber, and two insulation coverings are arranged, with the insulation of rifle stage casing, and, compress with round nut then with the sealing-ring sealing.
Water jacketed copper crucible, by the crucible upper body, the water proof cover, water inlet pipe and water outlet pipe, the crucible chassis, permanent magnet, setting nut, copper pipe is formed, water jacketed copper crucible is to be welded into hollow water-cooled bowl shaped structure by red copper, in its water-cooled space, water inlet pipe and water outlet pipe is housed, the high purity graphite crucible of in bowl shaped structure, can packing into, in the high purity graphite crucible respectively according to the processing requirement different metallic substance of packing into, below water jacketed copper crucible, be welded with two copper pipes that can feed water coolant, the bottom of adjacent water jacketed copper crucible is the crucible chassis, the permanent magnet that focuses under the conduct is housed in the crucible chassis, the setting nut that can regulate focusing is housed below permanent magnet:
The magnetic control arc evaporation source is by target, last bell housing, following bell housing, magnet steel, sealing-ring, the insulated enclosure cover, sealing-ring, ring flange, insulating mat, round nut, slide block, screw rod, fixed block, capping, screw, packing ring, the target body that target stand is formed and by nut, packing ring, end cap, Decorative Cover, overcoat, line holds group, traveller, solenoid valve base, scratch start device sealing-ring, steady brace, insulation covering, round nut, the magnetic valve seat of honour, return spring, spring protecting sleeve, bolt, carriage release lever, the scratch start silk, the scratch start device that the screw insulation covering is formed is contained in jointly on the ring flange and constitutes the device of one, the front end of target body is by covering shielding on the target, following shielding, the insulated enclosure cover, sealing-ring constitutes, the target body front end and with the ring flange sealing-ring, the insulating mat insulated enclosure, be fixed on the ring flange with round nut, bell housing up and down is housed around target, on, following bell housing and between use thread connection, target is consumed gradually and is reduced when height like this, can adjust the height of bell housing at any time, when accomplishing the height reduction of target, last screening height is aligned downwards, do not influence the evaporation angle, what the insulated enclosure cover between ring flange and target body adopted is high-temperature insulation material, the rear end of target body is by target stand, cylindrical magnet steel, slide block, screw rod is formed, target stand is the double-deck water-cooling structure that can feed cooling circulating water, a cylindrical magnet steel is equipped with at the center of target stand, magnet steel, regulate and to do at the target stand center by screw rod, following motion, screw head and slide block thread connection, slide block connects with magnet steel magnetic force, slide block is by the fixed block guiding movement, afterbody at screw rod has a screwdriver mouth, the screwdriver mouth is positioned at the outside of vacuum chamber, and is parallel with capping; Scratch start device and target body are with being contained on the ring flange, and insulate with insulation covering, the magnetic valve seat of honour is passed ring flange and is fixed as one with round nut and ring flange, the lower end at the magnetic valve seat of honour and solenoid valve base thread connection, there is a traveller at the center of solenoid valve base, the threaded hole of traveller and carriage release lever tail end are with thread connection together, move up and down at the solenoid valve base center, around the solenoid valve base line is housed and holds group, an online outer overcoat and the Decorative Cover of being equipped with of group that hold, and tighten by nut and solenoid valve base, on the carriage release lever top scratch start silk is housed, scratch start silk free bend is near the target surface, and fix with bolt and carriage release lever, return spring and spring protecting sleeve are housed on carriage release lever, when line holds group is met striking utmost point input≤750V after through 5 Ω resistance by the power cabinet positive pole power supply open circuit voltage, when making coil winding feed electric current, under the effect of current field, make carriage release lever produce downward pulling force, carriage release lever drives traveller, move downward at the solenoid valve base center, at this moment return spring is compacted, the scratch start silk contacts with target, electric current increases during scratch start, loss of voltage, and at this moment line holds the decline of group voltage, magnetic field disappears, under the effect of spring restorer, carriage release lever is mentioned reset, the scratch start silk leaves target surface, the moment of leaving target surface at the scratch start silk produces arc light, play the scratch start purpose, magnetic control arc target body and arc ignitor also are equipped with screw insulation covering ［ 336 ］ and vacuum chamber insulated enclosure to the ring flange absolute seal on the screw hole on the ring flange.
The utility model all is contained in the same vacuum chamber hollow cathode rifle and magnetic control arc evaporation source, thereby the evaporation mode with hallow cathode deposition, HCD and magnetron arc ion plating two provenances is one, and processing performance is reliable, and is simple in structure, easy to operate, and noise is minimum; Two evaporation sources of magnetic control arc are contained on the coating chamber chassis, each evaporation source power 1～2.5kW, a hollow cathode rifle peak power 7.5kW, 6.5kW commonly used; The utility model can plate simple substance film, plating compound film, also can plate composite membrane, and rete is fine and close evenly, strong adhesion, good process repeatability, pollution-free, extensively reach and be used for machinery, electronics, shipbuilding, light industry, chemical industry, national defense industry etc., also can use for research and teaching.
Below in conjunction with drawings and Examples the utility model is described in further detail:
Fig. 1 is the utility model structural representation
Fig. 2-a is the utility model hollow cathode rifle structural representation
Fig. 2-b is the utility model water jacketed copper crucible structural representation
Fig. 3 is the utility model magnetic control arc evaporation source structural representation
Referring to figs. 1 through Fig. 3, get electric control cabinet ［ 2 ］ ready, power cabinet ［ 3 ］, the self-control main frame, main frame is by harmonic speed reducer ［ 101 ］, end socket ［ 102 ］, bell jar ［ 103 ］, hoisting appliance ［ 104 ］, water jacketed copper crucible ［ 105 ］, thermal baffle ［ 106 ］, hollow cathode rifle ［ 107 ］, rubber hose ［ 108 ］, shaft coupling ［ 109 ］, ring flange ［ 110 ］, transmission shaft ［ 111 ］, well heater ［ 112 ］, shift fork ［ 113 ］, work rest ［ 114 ］, viewing window ［ 115 ］, cavity cap ［ 116 ］, thermopair ［ 117 ］, magnetic control arc evaporation source ［ 118 ］, scratch start device ［ 119 ］, sealing-ring ［ 120 ］, chassis ［ 121 ］, frame ［ 122 ］, diffusion pump ［ 123 ］, topping-up pump ［ 124 ］, mechanical pump ［ 125 ］, admission passage ［ 126 ］, outlet pipeline ［ 127 ］, suction culvert ［ 128 ］, junction block ［ 129 ］, electrical equipment control cabinet equipment master switch ［ 130 ］, power cabinet terminal stud ［ 131 ］, electric control cabinet junction block ［ 132 ］, power cabinet junction block ［ 133 ］, decorate door ［ 134 ］, vacuum ionization gauge ［ 135 ］, the main frame ［ 1 ］ that piezo electric valve ［ 136 ］ is formed, hollow cathode rifle ［ 107 ］ and magnetic control arc evaporation source ［ 118 ］ all are contained in the same vacuum chamber, end socket ［ 102 ］ adopts double-deck water wall structure, at the center, top of end socket ［ 102 ］ dynamic seal transmission shaft ［ 111 ］ is housed, be fixed on the end socket ［ 102 ］ by ring flange ［ 110 ］, harmonic speed reducer ［ 101 ］ is passed to transmission shaft ［ 111 ］ by shaft coupling ［ 109 ］ with power, a shift fork ［ 113 ］ is housed in the below of transmission shaft ［ 111 ］ is used to stir work rest ［ 114 ］ rotation, rotating speed can be from 0 rev/min of free adjustment to 8.5 rev/min, work rest ［ 114 ］ is realized rotation again by rolling resistance in revolution, the rotation rotating speed can transfer to 10 rev/mins automatically from 0 rev/min, one group of well heater of recess packing ［ 112 ］ at end socket ［ 102 ］, hoisting appliance ［ 104 ］ is fixed on the base of frame ［ 122 ］, the top of the elevating lever of hoisting appliance ［ 104 ］ and end socket ［ 102 ］ overlap joint, can make end socket ［ 102 ］ free lifting, chassis ［ 121 ］ is installed in the top of frame ［ 122 ］, be tightly connected with sealing-ring ［ 120 ］ and bell jar ［ 103 ］ around the last plane on chassis ［ 121 ］, and be tightly connected with end socket ［ 102 ］ in bell jar ［ 103 ］ top, form vacuum chamber, magnetic control arc evaporation source ［ 118 ］ on a water-cooled copper crucible ［ 105 ］ and two is being housed on chassis ［ 121 ］, side at each evaporation source ［ 118 ］ respectively is equipped with a scratch start device ［ 119 ］, thermopair ［ 117 ］ also is housed on chassis ［ 121 ］, vacuum ionization gauge ［ 135 ］, cavity cap ［ 116 ］, two inlet mouths are gone up and be shaped in ［ 121 ］ on the chassis, the chassis is fixed with three root posts on ［ 121 ］, is fixing the guide rail that supplies work rest ［ 114 ］ rotation on three root posts; Conveniently detachable decoration door ［ 134 ］ all is housed around the frame ［ 122 ］, diffusion pump ［ 123 ］ is housed in frame ［ 122 ］, mechanical pump ［ 125 ］, topping-up pump ［ 124 ］, outlet pipeline ［ 127 ］, suction culvert ［ 128 ］, admission passage ［ 126 ］, junction block ［ 129 ］, two viewing windows ［ 115 ］ are equipped with in left side and right at vacuum chamber, a hollow cathode rifle ［ 107 ］ is housed in the right astern of vacuum chamber, power supply is provided by 380V power electrical network, adopt the quad line directly to be connected on the electric control cabinet junction block ［ 132 ］, behind electrical equipment control cabinet equipment master switch ［ 130 ］, be connected on the power cabinet ［ 3 ］, go up output three pairs of positive and negative power supply cabinet terminal studs ［ 131 ］ at power cabinet ［ 3 ］, the cold copper crucible of the anodal water receiving of wherein a pair of positive and negative power supply cabinet terminal stud ［ 131 ］ ［ 105 ］, negative pole connects hollow cathode rifle ［ 107 ］, other two pairs of positive and negative power supply cabinet terminal studs ［ 131 ］ with two positive poles also together, be connected on the outer wall of bell jar ［ 103 ］, two negative poles are connected on respectively on two magnetic control arc evaporation sources ［ 118 ］, the startup of control power supply also is housed between electric control cabinet ［ 2 ］ and power cabinet ［ 3 ］, the control line of the power adjustment of control magnetic control arc evaporation source ［ 118 ］ and hollow cathode rifle ［ 107 ］, between electric control cabinet ［ 2 ］ and main frame ［ 1 ］, each motor in the main control system ［ 1 ］ is housed, all kinds of valves, the start and stop of well heater, the control high pressure, the control line of the start and stop of bias voltage, high pressure, the negative pole of bias voltage is connected on the work rest ［ 114 ］, positive pole is connected on cavity cap ［ 116 ］, promptly constitutes the multifunction ion coating equipment.
Hollow cathode rifle ［ 107 ］ is by rubber fittings ［ 201 ］, sealing-ring ［ 202 ］, hold-down nut ［ 203 ］, nut ［ 204 ］, pad ［ 205 ］, gun back end weld assembly ［ 206 ］, cover ［ 207 ］ in the insulation, hold-down nut ［ 208 ］, sealing-ring ［ 209 ］, fixing tantalum pipe nut ［ 210 ］, insulation nut ［ 211 ］, ring flange ［ 212 ］, insulation covering ［ 213 ］, sealing-ring ［ 214 ］, insulation covering ［ 215 ］, round nut ［ 216 ］, insulating mat ［ 217 ］, insulation tube ［ 218 ］, tantalum pipe ［ 219 ］, rifle front end weld assembly ［ 220 ］ is formed, the stage casing of hollow cathode rifle ［ 107 ］ ring flange ［ 212 ］ and bell jar ［ 103 ］ sealed attachment, the afterbody of hollow cathode rifle ［ 107 ］ is equipped with rubber fittings ［ 201 ］.Rubber is taken over head ［ 201 ］ and is linked with pressure-resistant plastic flexible pipe ［ 108 ］, plastic hose ［ 108 ］ links with piezo electric valve ［ 136 ］, then by linking from dynamic pressure controller ［ 108 ］ and gas cylinder ［ 136 ］, can be with the input of the argon gas in gas cylinder tantalum pipe ［ 219 ］, for hollow cathode rifle ［ 107 ］ provides working gas, the other end of rubber fittings ［ 201 ］ also is equipped with the two-pad ［ 205 ］ that double nut ［ 204 ］ compresses with the afterbody of afterbody in the rear end that hold-down nut ［ 203 ］ sealing is pressed on gun back end, the anode connector of primary source output is housed in the middle of two-pad ［ 205 ］, the double-deck water cooling plant that can lead to recirculated cooling water is adopted in the rear end of rifle, and with sealing-ring ［ 209 ］, cover ［ 207 ］ in the insulation, insulation nut ［ 211 ］ and the insulation of rifle forward end seal, compress with hold-down nut ［ 208 ］, gun back end weld assembly rifle front end weld assembly ［ 220 ］ is become one, head in the rear end is equipped with a fixedly tantalum pipe nut ［ 210 ］, fixedly the endoporus of tantalum pipe nut ［ 210 ］ and tantalum pipe ［ 219 ］ outer wall compress, make tantalum pipe level insert rifle front end center, rifle front end head is installed in the vacuum chamber, and two insulation coverings ［ 213 ］ are arranged, ［ 215 ］ with the insulation of rifle stage casing, and, use round nut ［ 216 ］ to compress then with sealing-ring ［ 214 ］ sealing.
Water jacketed copper crucible ［ 105 ］, by crucible upper body ［ 221 ］, water proof cover ［ 222 ］, water inlet pipe and water outlet pipe ［ 223 ］, crucible chassis ［ 224 ］, permanent magnet ［ 225 ］, setting nut ［ 226 ］, copper pipe ［ 227 ］ is formed, water-cooled copper crucible ［ 105 ］ is to be welded into hollow water-cooled bowl shaped structure by red copper, water inlet pipe and water outlet pipe ［ 223 ］ is housed in its water-cooled space, the high purity graphite crucible of in bowl shaped structure, can packing into, in the high purity graphite crucible respectively according to the processing requirement different metallic substance of packing into, be welded with two copper pipes ［ 227 ］ that can feed water coolant in the below of water jacketed copper crucible ［ 105 ］, the bottom of adjacent water jacketed copper crucible ［ 105 ］ is crucible chassis ［ 224 ］, the permanent magnet ［ 225 ］ that focuses under the conduct is housed in crucible chassis ［ 224 ］, the setting nut ［ 226 ］ that can regulate focusing is housed in the below of permanent magnet ［ 225 ］.
Magnetic control arc evaporation source ［ 118 ］ is by target ［ 301 ］, last bell housing ［ 302 ］, following bell housing ［ 303 ］, magnet steel ［ 304 ］, sealing-ring ［ 305 ］, insulated enclosure cover ［ 306 ］, sealing-ring ［ 307 ］, ring flange ［ 308 ］, insulating mat ［ 309 ］, round nut ［ 310 ］, slide block ［ 311 ］, screw rod ［ 312 ］, fixed block ［ 313 ］, capping ［ 314 ］, screw ［ 315 ］, packing ring ［ 316 ］, the target body that target stand ［ 317 ］ is formed and by nut ［ 318 ］, packing ring ［ 319 ］, end cap ［ 320 ］, Decorative Cover ［ 321 ］, overcoat ［ 322 ］, line holds group ［ 323 ］, traveller ［ 324 ］, solenoid valve base ［ 325 ］, scratch start device sealing-ring ［ 326 ］, steady brace ［ 327 ］, insulation covering ［ 328 ］, round nut ［ 329 ］, the magnetic valve seat of honour ［ 330 ］, return spring ［ 331 ］, spring protecting sleeve ［ 332 ］, bolt ［ 333 ］, carriage release lever ［ 334 ］, scratch start silk ［ 335 ］, the target spot arc device that screw insulation covering ［ 336 ］ is formed is contained in a ring flange ［ 308 ］ jointly and goes up and the device of formation one, the front end of target body is by target ［ 301 ］, on cover shielding ［ 302 ］, following shielding ［ 303 ］, insulated enclosure cover ［ 306 ］, sealing-ring ［ 305 ］ constitutes, the target body front end and with ring flange ［ 308 ］ with sealing-ring ［ 307 ］, insulating mat ［ 309 ］ insulated enclosure, be fixed on the ring flange ［ 308 ］ with round nut ［ 310 ］, bell housing ［ 302 ］ up and down is housed around target ［ 301 ］, ［ 303 ］, on, use thread connection between following bell housing ［ 302 ］ and ［ 303 ］, target is consumed gradually and is reduced when height like this, can adjust the height of bell housing ［ 302 ］ at any time, when accomplishing the height reduction of target, last shielding ［ 302 ］ is aligned highly downwards, do not influence the evaporation angle, what the insulated enclosure cover ［ 306 ］ between ring flange ［ 308 ］ and target body adopted is high-temperature insulation material, the rear end of target body is by target stand ［ 317 ］, cylindrical magnet steel ［ 304 ］, slide block ［ 311 ］, screw rod ［ 312 ］ is formed, target stand is the double-deck water-cooling structure that can feed cooling circulating water, a cylindrical magnet steel ［ 304 ］ is equipped with at the center of target stand ［ 317 ］, magnet steel ［ 304 ］ is regulated and can be done at target stand ［ 317 ］ center by screw rod ［ 312 ］, following motion, screw rod ［ 312 ］ head and slide block ［ 311 ］ thread connection, slide block ［ 311 ］ connects with magnet steel ［ 304 ］ magnetic force, slide block ［ 311 ］ is by fixed block ［ 313 ］ guiding movement, afterbody at screw rod ［ 312 ］ has a screwdriver mouth, the screwdriver mouth is positioned at the outside of vacuum chamber, and is parallel with capping ［ 314 ］; Scratch start device and target body are with being contained on the ring flange ［ 308 ］, and insulate with insulation covering ［ 328 ］, the magnetic valve seat of honour ［ 330 ］ is passed ring flange ［ 308 ］ and is fixed as one with round nut ［ 329 ］ and ring flange ［ 308 ］, the lower end at the magnetic valve seat of honour ［ 330 ］ and solenoid valve base ［ 325 ］ thread connection, there is a traveller ［ 324 ］ at the center of solenoid valve base ［ 325 ］, the threaded hole of traveller ［ 324 ］ with carriage release lever ［ 334 ］ tail end with thread connection, move up and down at solenoid valve base ［ 325 ］ center, around the solenoid valve base ［ 325 ］ line is housed and holds group ［ 323 ］, an online outer overcoat ［ 322 ］ and the Decorative Cover ［ 321 ］ of being equipped with of group ［ 323 ］ that hold, and tighten by nut ［ 318 ］ and solenoid valve base ［ 325 ］, on carriage release lever ［ 334 ］ top scratch start silk ［ 335 ］ is housed, scratch start silk ［ 335 ］ free bend is near target ［ 301 ］ surface, and fix with bolt ［ 333 ］ and carriage release lever ［ 334 ］, return spring ［ 331 ］ and spring protecting sleeve ［ 332 ］ are housed on carriage release lever ［ 334 ］, when line hold group ［ 323 ］ by power cabinet ［ 3 ］ the anodal power supply open circuit voltage that meets striking utmost point input≤750V after through 5 Ω resistance, when making coil winding ［ 323 ］ produce electric current, under the effect of current field, make carriage release lever ［ 334 ］ produce downward pulling force, carriage release lever ［ 334 ］ drives traveller ［ 324 ］, move downward at solenoid valve base ［ 325 ］ center, at this moment return spring ［ 331 ］ is compacted, scratch start silk ［ 335 ］ contacts with target ［ 301 ］, electric current increases during scratch start, loss of voltage, at this moment line holds the decline of group ［ 323 ］ voltage, magnetic field disappears, under the effect of spring restorer, carriage release lever ［ 334 ］ is mentioned to be resetted, scratch start silk ［ 335 ］ leaves target surface, the moment of leaving target surface at scratch start silk ［ 335 ］ produces arc light, play the scratch start purpose, magnetic control arc target body and arc ignitor also are equipped with screw insulation covering ［ 336 ］ and vacuum chamber insulated enclosure to ring flange ［ 308 ］ absolute seal on the screw hole on the ring flange ［ 308 ］.
The preparation of rete is finished in vacuum chamber, and the highest attainable vacuum of vacuum chamber can reach 2 * 10
-3Pa is evacuated to 6.7 * 10 from atmosphere
-3Pa≤30 minute, two magnetic control arc evaporation source power are 1～2.5kw, hollow cathode rifle ［ 107 ］ peak power can reach 7.5kw, normal power 6.5kw, the heated baking device is housed on the end socket of vacuum chamber, power is 5kw, 400 ℃ of top temperatures, adjustable auto-controlled, work rest ［ 114 ］ can be realized the rotation of revolving round the sun, rotating speed is adjustable, fill part a homogeneity that guarantees the preparation rete, the plated zone of vacuum chamber is 4400mm * 160mm, high pressure also is housed in vacuum chamber bombards 0～1000V can be in harmonious proportion workpiece negative bias 0～200V adjustable, all devices are arranged safe and reasonable, can fully guarantee the coating process requirement.
According to processing requirement, on main frame, be connected to water route, gas circuit, circuit.The water source adopts common daily tap water, is connected on the frame water-in ［ 128 ］, and outlet is connected on the water port ［ 127 ］, and water main inlet port is divided into three tunnel feedwater in machine is worn, supply with diffusion pump respectively, bell jar and negative electrode rifle, magnetic control electromagnetism evaporation source; The diffusion pump water coolant, directly feeds behind the floating rly. of water by magnetic valve; Negative electrode rifle and magnetic control arc evaporation source water coolant are connected in series magnetic valve in the loop; water floats rly., makes in the water route water shortage like this or can both report to the police automatically or quit work automatically when cutting off the water, and has automatic provide protection; in the water route, also be provided with manually-operated gate, use in order to emergent.
Source of the gas can directly be supplied with by gas cylinder according to different processing requirements, is provided with three road admission passages on main frame, can feed three kinds of gases simultaneously, and wherein two kinds by chassis input vacuum chamber, and one the road imports vacuum chamber from the negative electrode gun back end by mass flowmeter.
Well heater ［ 112 ］ is the well heater of 5kw, on hoisting appliance ［ 104 ］, the upper and lower limit bit switch is housed, be used to limit the lifting distance of heat exchanger head, safe and reliable to guarantee end socket ［ 102 ］, hoisting appliance is realized the upper and lower mobile of elevating lever by the motor pulley deceleration device; Frame is to be welded by angle steel, channel-section steel, can adorn aluminium alloy housing and ornamental strip at the outside surface of frame, around the frame conveniently detachable decoration door is installed all, makes frame firmly practical and attractive in appearance.
Claims (4)
1, a kind of multifunction ion coating equipment, comprise electric control cabinet [2], power cabinet [3], it is characterized in that described multifunction ion coating equipment also comprises by harmonic speed reducer [101], end socket [102], bell jar [103], hoisting appliance [104], water jacketed copper crucible [105], thermal baffle [106], hollow cathode rifle [107], rubber hose [108], shaft coupling [109], ring flange [110], transmission shaft [111], well heater [112], shift fork [113], work rest [114], viewing window [115], cavity cap [116], thermopair [117], magnetic control arc evaporation source [118], scratch start device [119], sealing-ring [120], chassis [121], frame [122], diffusion pump [123], topping-up pump [124], mechanical pump [125], admission passage [126], outlet pipeline [127], suction culvert [128], junction block [129], electrical equipment control cabinet equipment master switch [130], power cabinet terminal stud [131], electric control cabinet junction block [132], power cabinet junction block [133], decorate door [134], vacuum ionization gauge [135], the main frame [1] that piezo electric valve [136] is formed, hollow cathode rifle [107] and magnetic control arc evaporation source [118] all are contained in the same vacuum chamber, end socket [102] adopts double-deck water wall structure, at the center, top of end socket [102] dynamic seal transmission shaft [111] is housed, be fixed on the end socket [102] by ring flange [110], harmonic speed reducer [101] is passed to transmission shaft [111] by shaft coupling [109] with power, a shift fork [113] is housed in the below of transmission shaft [111] is used to stir work rest [114] rotation, rotating speed can be from 0 rev/min of free adjustment to 8.5 rev/min, work rest [114] is realized rotation again by rolling resistance in revolution, the rotation rotating speed can transfer to 10 rev/mins automatically from 0 rev/min, one group of well heater of recess packing [112] at end socket [102], hoisting appliance [104] is fixed on the base of frame [122], the top of the elevating lever of hoisting appliance [104] and end socket [102] overlap joint, can make end socket [102] free lifting, chassis [121] is installed in the top of frame [122], be tightly connected with sealing-ring [120] and bell jar [103] around the last plane on chassis [121], and be tightly connected with end socket [102] in bell jar [103] top, form vacuum chamber, magnetic control arc evaporation source [118] on a water-cooled copper crucible [105] and two is being housed on chassis [121], side at each evaporation source [118] respectively is equipped with a scratch start device [119], thermopair [117] also is housed on chassis [121], vacuum ionization gauge [135], cavity cap [116], two inlet mouths are gone up and be shaped in [121] on the chassis, the chassis is fixed with three root posts on [121], is fixing the guide rail that supplies work rest [114] rotation on three root posts; Conveniently detachable decoration door [134] all is housed around the frame [122], diffusion pump [123] is housed in frame [122], mechanical pump [125], topping-up pump [124], outlet pipeline [127], suction culvert [128], admission passage [126], junction block [129], two viewing windows [115] are equipped with in left side and right at vacuum chamber, a hollow cathode rifle [107] is housed in the right astern of vacuum chamber, power supply is provided by 380V power electrical network, adopt the quad line directly to be connected on the electric control cabinet junction block [132], behind electrical equipment control cabinet equipment master switch [130], be connected on the power cabinet [3], go up output three pairs of positive and negative power supply cabinet terminal studs [131] at power cabinet [3], the cold copper crucible of the anodal water receiving of wherein a pair of positive and negative power supply cabinet terminal stud [131] [105], negative pole connects hollow cathode rifle [107], other two pairs of positive and negative power supply cabinet terminal studs [131] with two positive poles also together, be connected on the outer wall of bell jar [103], two negative poles are connected on respectively on two magnetic control arc evaporation sources [118], the startup of control power supply also is housed between electric control cabinet [2] and power cabinet [3], the control line of the power adjustment of control magnetic control arc evaporation source [118] and hollow cathode rifle [107], between electric control cabinet [2] and main frame [1], each motor in the main control system [1] is housed, all kinds of valves, the start and stop of well heater, the control high pressure, the control line of the start and stop of bias voltage, high pressure, the negative pole of bias voltage is connected on the work rest [114], positive pole is connected on cavity cap [116], promptly constitutes the multifunction ion coating equipment.
2, multifunction ion coating equipment as claimed in claim 1, it is characterized in that described hollow cathode rifle ［ 107 ］ is by rubber fittings ［ 201 ］, sealing-ring ［ 202 ］, hold-down nut ［ 203 ］, nut ［ 204 ］, pad ［ 205 ］, gun back end weld assembly ［ 206 ］, cover ［ 207 ］ in the insulation, hold-down nut ［ 208 ］, sealing-ring ［ 209 ］, fixing tantalum pipe nut ［ 210 ］, insulation nut ［ 211 ］, ring flange ［ 212 ］, insulation covering ［ 213 ］, sealing-ring ［ 214 ］, insulation covering ［ 215 ］, round nut ［ 216 ］, insulating mat ［ 217 ］, insulation tube ［ 218 ］, tantalum pipe ［ 219 ］, rifle front end weld assembly ［ 220 ］ is formed, the stage casing of hollow cathode rifle ［ 107 ］ ring flange ［ 212 ］ and bell jar ［ 103 ］ sealed attachment, the afterbody of hollow cathode rifle ［ 107 ］ is equipped with rubber fittings ［ 201 ］, rubber fittings ［ 201 ］ links with pressure-resistant plastic flexible pipe ［ 108 ］, plastic hose ［ 108 ］ links with piezo electric valve ［ 136 ］, then by linking from dynamic pressure controller and gas cylinder, can be with the input of the argon gas in gas cylinder tantalum pipe ［ 219 ］, for hollow cathode rifle ［ 107 ］ provides working gas, the other end of rubber fittings ［ 201 ］ is pressed on the afterbody of gun back end with hold-down nut ［ 203 ］ sealing, afterbody in the rear end also is equipped with the two-pad ［ 205 ］ that double nut ［ 204 ］ compresses, the anode connector of primary source output is housed in the middle of two-pad ［ 205 ］, the double-deck water cooling plant that can lead to recirculated cooling water is adopted in the rear end of rifle, and with sealing-ring ［ 209 ］, cover ［ 207 ］ in the insulation, insulation nut ［ 211 ］ and the insulation of rifle forward end seal, compress with hold-down nut ［ 208 ］, gun back end weld assembly ［ 206 ］ and rifle front end weld assembly ［ 220 ］ are become one, head in the rear end is equipped with a fixedly tantalum pipe nut ［ 210 ］, fixedly the endoporus of tantalum pipe nut ［ 210 ］ and tantalum pipe ［ 219 ］ outer wall compress, make tantalum pipe level insert rifle front end center, rifle front end head is installed in the vacuum chamber, and two insulation coverings ［ 213 ］ are arranged, ［ 215 ］ with the insulation of rifle stage casing, and, use round nut ［ 216 ］ to compress then with sealing-ring ［ 214 ］ sealing.
3, multifunction ion coating equipment as claimed in claim 1, it is characterized in that described water jacketed copper crucible ［ 105 ］, by crucible upper body ［ 221 ］, water proof cover ［ 222 ］, water inlet pipe and water outlet pipe ［ 223 ］, crucible chassis ［ 224 ］, permanent magnet ［ 225 ］, setting nut ［ 226 ］, copper pipe ［ 227 ］ is formed, water-cooled copper crucible ［ 105 ］ is to be welded into hollow water-cooled bowl shaped structure by red copper, water inlet pipe and water outlet pipe ［ 223 ］ is housed in its water-cooled space, the high purity graphite crucible of in bowl shaped structure, can packing into, in the high purity graphite crucible respectively according to the processing requirement different metallic substance of packing into, be welded with two copper pipes ［ 227 ］ that can feed water coolant in the below of water jacketed copper crucible ［ 105 ］, the bottom of adjacent water jacketed copper crucible ［ 105 ］ is crucible chassis ［ 224 ］, the permanent magnet ［ 225 ］ that focuses under the conduct is housed in crucible chassis ［ 224 ］, the setting nut ［ 226 ］ that can regulate focusing is housed in the below of permanent magnet ［ 225 ］.
4, multifunction ion coating equipment as claimed in claim 1, it is characterized in that described magnetic control arc evaporation source ［ 118 ］ is by target ［ 301 ］, last bell housing ［ 302 ］, following bell housing ［ 303 ］, magnet steel ［ 304 ］, sealing-ring ［ 305 ］, insulated enclosure cover ［ 306 ］, sealing-ring ［ 307 ］, ring flange ［ 308 ］, insulating mat ［ 309 ］, round nut ［ 310 ］, slide block ［ 311 ］, screw rod ［ 312 ］, fixed block ［ 313 ］, capping ［ 314 ］, screw ［ 315 ］, packing ring ［ 316 ］, the target body that target stand ［ 317 ］ is formed and by nut ［ 318 ］, packing ring ［ 319 ］, end cap ［ 320 ］, Decorative Cover ［ 321 ］, overcoat ［ 322 ］, line holds group ［ 323 ］, traveller ［ 324 ］, solenoid valve base ［ 325 ］, scratch start device sealing-ring ［ 326 ］, steady brace ［ 327 ］, insulation covering ［ 328 ］, round nut ［ 329 ］, the magnetic valve seat of honour ［ 330 ］, return spring ［ 331 ］, spring protecting sleeve ［ 332 ］, bolt ［ 333 ］, carriage release lever ［ 334 ］, scratch start silk ［ 335 ］, the scratch start device that screw insulation covering ［ 336 ］ is formed is contained in a ring flange ［ 308 ］ jointly and goes up and the device of formation one, the front end of target body is by target ［ 301 ］, on cover shielding ［ 302 ］, following shielding ［ 303 ］, insulated enclosure cover ［ 306 ］, sealing-ring ［ 305 ］ constitutes, the target body front end and with ring flange ［ 308 ］ with sealing-ring ［ 307 ］, insulating mat ［ 309 ］ insulated enclosure, be fixed on the ring flange ［ 308 ］ with round nut ［ 310 ］, bell housing ［ 302 ］ up and down is housed around target ［ 301 ］, ［ 303 ］, on, use thread connection between following bell housing ［ 302 ］ and ［ 303 ］, target is consumed gradually and is reduced when height like this, can adjust the height of bell housing ［ 302 ］ at any time, when accomplishing the height reduction of target, last shielding ［ 302 ］ is aligned highly downwards, do not influence the evaporation angle, what the insulated enclosure cover ［ 306 ］ between ring flange ［ 308 ］ and target body adopted is high-temperature insulation material, the rear end of target body is by target stand ［ 317 ］, cylindrical magnet steel ［ 304 ］, slide block ［ 311 ］, screw rod ［ 312 ］ is formed, target stand is the double-deck water-cooling structure that can feed cooling circulating water, a cylindrical magnet steel ［ 304 ］ is equipped with at the center of target stand ［ 317 ］, magnet steel ［ 304 ］ is regulated and can be done at target stand ［ 317 ］ center by screw rod ［ 312 ］, following motion, screw rod ［ 312 ］ head and slide block ［ 311 ］ thread connection, slide block ［ 311 ］ connects with magnet steel ［ 304 ］ magnetic force, slide block ［ 311 ］ is by fixed block ［ 313 ］ guiding movement, afterbody at screw rod ［ 312 ］ has a screwdriver mouth, the screwdriver mouth is positioned at the outside of vacuum chamber, and is parallel with capping ［ 314 ］; Scratch start device and target body are with being contained on the ring flange ［ 308 ］, and insulate with insulation covering ［ 328 ］, the magnetic valve seat of honour ［ 330 ］ is passed ring flange ［ 308 ］ and is fixed as one with round nut ［ 329 ］ and ring flange ［ 308 ］, the lower end at the magnetic valve seat of honour ［ 330 ］ and solenoid valve base ［ 325 ］ thread connection, there is a traveller ［ 324 ］ at the center of solenoid valve base ［ 325 ］, the threaded hole of traveller ［ 324 ］ with carriage release lever ［ 334 ］ tail end with thread connection, move up and down at solenoid valve base ［ 325 ］ center, around the solenoid valve base ［ 325 ］ line is housed and holds group ［ 323 ］, an online outer overcoat ［ 322 ］ and the Decorative Cover ［ 321 ］ of being equipped with of group ［ 323 ］ that hold, and tighten by nut ［ 318 ］ and solenoid valve base ［ 325 ］, on carriage release lever ［ 334 ］ top scratch start silk ［ 335 ］ is housed, scratch start silk ［ 335 ］ free bend is near target ［ 301 ］ surface, and fix with bolt ［ 333 ］ and carriage release lever ［ 334 ］, return spring ［ 331 ］ and spring protecting sleeve ［ 332 ］ are housed on carriage release lever ［ 334 ］, when line hold group ［ 323 ］ by power cabinet ［ 3 ］ the anodal power supply open circuit voltage that meets striking utmost point input≤750V after through 5 Ω resistance, when making coil winding ［ 323 ］ feed electric current, under the effect of current field, make carriage release lever ［ 334 ］ produce downward pulling force, carriage release lever ［ 334 ］ drives traveller ［ 324 ］, move downward at solenoid valve base ［ 325 ］ center, at this moment return spring ［ 331 ］ is compacted, scratch start silk ［ 335 ］ contacts with target ［ 301 ］, electric current increases during scratch start, loss of voltage, at this moment line holds the decline of group ［ 323 ］ voltage, magnetic field disappears, under the effect of spring restorer, carriage release lever ［ 334 ］ is mentioned to be resetted, scratch start silk ［ 335 ］ leaves target surface, the moment of leaving target surface at scratch start silk ［ 335 ］ produces arc light, play the scratch start purpose, magnetic control arc target body and arc ignitor also are equipped with screw insulation covering ［ 336 ］ and vacuum chamber insulated enclosure to ring flange ［ 308 ］ absolute seal on the screw hole on the ring flange ［ 308 ］.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94215328 CN2194365Y (en) | 1994-07-13 | 1994-07-13 | Multifunctional ion film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94215328 CN2194365Y (en) | 1994-07-13 | 1994-07-13 | Multifunctional ion film plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2194365Y true CN2194365Y (en) | 1995-04-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94215328 Expired - Fee Related CN2194365Y (en) | 1994-07-13 | 1994-07-13 | Multifunctional ion film plating machine |
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| Country | Link |
|---|---|
| CN (1) | CN2194365Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100336935C (en) * | 2004-02-03 | 2007-09-12 | 旺宏电子股份有限公司 | Physical gaseous phase deposition technology and its equipment |
| CN102040185B (en) * | 2009-10-23 | 2012-09-26 | 中芯国际集成电路制造(上海)有限公司 | Manufacturing method of load bearing wafer and load bearing wafer |
| CN102071404B (en) * | 2009-11-25 | 2012-11-14 | 中国科学院半导体研究所 | Coating film rotating device and method for side cylindrical surface of optical fiber |
| CN107059143A (en) * | 2016-12-13 | 2017-08-18 | 无锡南方声学工程有限公司 | A kind of sealing structure of vacuum cleaning oven |
| CN108342699A (en) * | 2018-02-11 | 2018-07-31 | 中国科学院上海光学精密机械研究所 | Comprehensive deposition filming equipment and comprehensive film plating process |
| CN108385065A (en) * | 2018-05-23 | 2018-08-10 | 北京铂阳顶荣光伏科技有限公司 | A kind of equipment and method of controlling security with evaporation source |
-
1994
- 1994-07-13 CN CN 94215328 patent/CN2194365Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100336935C (en) * | 2004-02-03 | 2007-09-12 | 旺宏电子股份有限公司 | Physical gaseous phase deposition technology and its equipment |
| CN102040185B (en) * | 2009-10-23 | 2012-09-26 | 中芯国际集成电路制造(上海)有限公司 | Manufacturing method of load bearing wafer and load bearing wafer |
| CN102071404B (en) * | 2009-11-25 | 2012-11-14 | 中国科学院半导体研究所 | Coating film rotating device and method for side cylindrical surface of optical fiber |
| CN107059143A (en) * | 2016-12-13 | 2017-08-18 | 无锡南方声学工程有限公司 | A kind of sealing structure of vacuum cleaning oven |
| CN108342699A (en) * | 2018-02-11 | 2018-07-31 | 中国科学院上海光学精密机械研究所 | Comprehensive deposition filming equipment and comprehensive film plating process |
| CN108342699B (en) * | 2018-02-11 | 2020-06-30 | 中国科学院上海光学精密机械研究所 | Comprehensive deposition coating equipment and comprehensive coating method |
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