CN102244349B - Neodymium-doped yttrium vanadate crystal all-solid-state laser with double-wavelength end pump - Google Patents
Neodymium-doped yttrium vanadate crystal all-solid-state laser with double-wavelength end pump Download PDFInfo
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- CN102244349B CN102244349B CN201110137541A CN201110137541A CN102244349B CN 102244349 B CN102244349 B CN 102244349B CN 201110137541 A CN201110137541 A CN 201110137541A CN 201110137541 A CN201110137541 A CN 201110137541A CN 102244349 B CN102244349 B CN 102244349B
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Abstract
The invention discloses a neodymium-doped yttrium vanadate crystal all-solid-state laser with double-wavelength end pump, relating to the technical field of all-solid-state lasers. The first pump light emitted by a first diode laser is transmitted to a beam combining plane mirror through a first laser energy transmitting fiber and a first coupling lens assembly; the second pump light emitted by a second diode laser is transmitted to the beam combining plane mirror through a second laser energy transmitting fiber and a second coupling lens assembly; the first pump light and the second pump light are combined on the beam combining plane mirror to obtain the combined pump light; the combined pump light is focalized in a laser gain dielectric crystal by a resonant cavity reflector; and the laser gain dielectric crystal absorbs the combined pump light, and when the combined pump light absorbed by the laser gain dielectric crystal reaches a threshold, the laser gain dielectric crystal generates stimulated radiation and forms laser oscillation in the resonant cavity to obtain laser of 1064nm and output the laser by a laser output mirror. Because the output power and heat effect are well balanced, the output and operation of the solid-state laser are optimum.
Description
Technical field
The present invention relates to the all-solid state laser technical field, particularly a kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping.
Background technology
For the solid state laser of LD (laser diode) pumping, use traditional 808nm pump mode in the oscillation light forming process, to produce great amount of heat.A series of thermal effects that these heats form in gain medium (comprise thermal lens, heat are moved back partially and thermally induced birefringence etc.) can change the solid state laser output characteristic significantly, for example: have a strong impact on laser beam quality and disturb laser output consumingly and reduce the average output power of laser.Moreover, too much heat deposition also can reduce the stability of laser resonant cavity, when serious even make solid state laser can not get steady running.Can find out that serious thermal effect becomes influences that all solid state laser is high-power, the main bottleneck of high efficiency and high light beam quality running.
Fundamentally, the thermal effect of solid state laser derives from following two basic physical processes but not the technology limitation: the Stokes conversion that the photon energy difference between (1) pump light and the oscillation light forms is the quantum defective; (2) conversion of the coupling between laser pumping energy level and the upper laser level is the quantum efficiency loss.Tradition 808nm pump mode be earlier with the gain media active ions from the ground state pumping to the energy level higher than last energy level, and then relax towards upper laser level after stimulated radiation and luminous.This pump mode once had the welcome that bigger absorption coefficient receives people because of gain medium to pump light; But because above-mentioned relaxation process is in the generation of the inner inevitably a large amount of heats that caused of gain medium; Cause solid state laser poor stability under the high-power running, problems such as inefficiency.Last century six the seventies; People are for the solid state laser problems of excessive heat that solves traditional pump mode and bring and proposed pump-coupling mode (direct pumping), the pump light that promptly adopts certain wavelength with active ions from the ground state level pump-coupling to upper laser level again through being excited radiation and luminous.This pump mode has correspondingly reduced the generation of heat because reduced relaxation process.The thermal effect problem of solid state laser has further been alleviated in the appearance of resonance pumping mode subsequently, (with the particle pump-coupling of the high Stark energy level of ground state to upper laser level).In recent years, the resonance pumping mode is higher because of quantum efficiency, produces heat deposition and has still less received extensive concern and obtained development apace.But, caused solid state laser not make full use of and reduced the whole light light conversion efficiency of solid state laser to pump light because that gain medium absorbs the used long wavelength's pump light of resonance pumping usually is relatively poor.At present, in order to improve the integral light light conversion efficiency of solid state laser under the resonance pumping, mainly improve the absorption efficiency of crystal with the increase crystal length to pump light through improving doping content.Cause concentration quenching easily but improve crystal doping concentration, can increase cavity loss and increase crystal length.And no matter improving doping content, still to increase length difficulty from crystal preparation is gone up bigger than making common crystal.
Summary of the invention
For the crystal that utilizes common doping content and length is realized the optimization of solid state laser running and output, simplified design the invention provides a kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping, sees hereinafter for details and describes:
A kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping; Said all solid state laser comprises: first diode laser, second diode laser, the first laser energy-transmission optic fibre, the second laser energy-transmission optic fibre, the first coupled lens group, the second coupled lens group of arranging in order, close bundle level crossing, cavity mirror, gain medium crystal and laser output mirror
First pump light that said first diode laser sends is transferred to the said bundle level crossing that closes through said first laser energy-transmission optic fibre and the said first coupled lens group; Second pump light that said second diode laser sends is transferred to the said bundle level crossing that closes through said second laser energy-transmission optic fibre and the said second coupled lens group; Said first pump light and said second pump light close bundle at the said bundle level crossing place of closing, and obtain the pump light that closes behind the bundle; The said pump light that closes behind the bundle focuses on the inside of said gain medium crystal through said cavity mirror; Said gain medium crystal absorbs the said pump light that closes behind the bundle; When the said pump light after closing bundle that absorbs when said gain medium crystal reaches threshold value; Said gain medium crystal produces stimulated radiation and in resonant cavity, forms laser generation, obtains 1064nm laser and passes through said laser output mirror output;
Wherein, said gain medium crystal is the yttrium vanadate crystal of neodymium-doped, and the centre wavelength of said first pump light is 808nm, and the centre wavelength of said second pump light is 914nm; The said left side plating 914nm high permeability optical medium film that closes the bundle level crossing; Right side plating 914nm high permeability, 808nm high reflectance optical medium film; Said cavity mirror is plano-concave mirror or average mirror; The left side plating 808nm of said cavity mirror, 914nm high permeability optical medium film; Right side plating 808nm, 914nm high permeability, 1064nm high reflectance optical medium film; Said laser output mirror is recessed flat mirror or average mirror; The concave surface of said laser output mirror is coated with the optical medium film of the part transmitance of 1064nm oscillation light wave band.
According to power output-heat deposition power curve, the best proportioning of the relative scale of said first pump light and said second pump light is specially:
When the heat of restriction during smaller or equal to first set-point, said first pump light that said first set-point is corresponding and the relative scale of said second pump light are best proportioning; Or,
When the power output of restriction during more than or equal to second set-point, said first pump light that said second set-point is corresponding and the relative scale of said second pump light are best proportioning.
The beneficial effect of technical scheme provided by the invention is:
The invention provides a kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping; The present invention has broken the notion of traditional single wavelength pumping; Proposed from the novel concept of improving the laser output performance of gain medium energy level angle consideration; Various in the past pump modes are compared, and the dual wavelength pumping becomes even more ideal pump mode and might be used widely in future; Secondly; The present invention is through the relative scale of adjustment first pump light and second pump light; Balance power output and thermal effect well; Make solid-state laser output and running reach optimum efficiency, help the development and the application of all solid state, high power, high light beam quality and compact type laser; The present invention utilizes 808nm and two kinds of wavelength pump lights of 914nm pumping laser crystal simultaneously; Under the low heat production characteristics of high light light conversion efficiency that makes full use of the 808nm pumping and 914nm pumping, utilize the crystal of common doping content and length promptly can obtain the optimization effect that laser is exported; Not only overcome traditional pumping serious thermal effect problem for a long time, also solved the problem of resonance pumping low light light conversion efficiency simultaneously.
Description of drawings
Fig. 1 is the structural representation of yttrium vanadate crystal all solid state laser of the neodymium-doped of a kind of dual wavelength end pumping provided by the invention.
In the accompanying drawing, the list of parts of each label representative is following:
1: the first diode laser; 2: the second diode lasers;
3: the first laser energy-transmission optic fibres; 4: the second laser energy-transmission optic fibres;
5: the first coupled lens groups; 6: the second coupled lens groups;
7: close the bundle level crossing; 8: cavity mirror;
9: the gain medium crystal; 10: laser output mirror.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, will combine accompanying drawing that embodiment of the present invention is done to describe in detail further below.
Realize the optimization of solid state laser running and output for the crystal that utilizes common doping content and length; Simplified design; The embodiment of the invention provides a kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping, referring to Fig. 1, sees hereinafter for details and describes:
A kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping; This all solid state laser comprises: first diode laser of arranging in order 1, second diode laser 2, the first laser energy-transmission optic fibre 3, the second laser energy-transmission optic fibre 4, the first coupled lens group 5, the second coupled lens group 6, close bundle level crossing 7, cavity mirror 8, gain medium crystal 9 and laser output mirror 10
The first pump light warp first laser energy-transmission optic fibre 3 that first diode laser 1 sends and the first coupled lens group 5 are transferred to closes bundle level crossing 7; The second pump light warp second laser energy-transmission optic fibre 4 that second diode laser 2 sends and the second coupled lens group 6 are transferred to closes bundle level crossing 7; First pump light and second pump light close bundle closing bundle level crossing 7 places, obtain the pump light that closes behind the bundle; Close pump light behind the bundle and focus on the inside of gain medium crystal 9 through cavity mirror 8; The pump light behind the bundle is closed in 9 absorptions of gain medium crystal; When gain medium crystal 9 absorb close pump light behind the bundle and reach threshold value the time; Gain medium crystal 9 produces stimulated radiation and in resonant cavity, forms laser generation, obtains 1064nm laser and passes through laser output mirror 10 outputs;
Wherein, gain medium crystal 9 is Nd:YVO
4(yttrium vanadate crystal of neodymium-doped), the centre wavelength of first pump light are 808nm, and the centre wavelength of second pump light is 914nm; Close the left side plating 914nm high permeability optical medium film of bundle level crossing 7; Right side plating 914nm high permeability, 808nm high reflectance optical medium film; Cavity mirror 8 is plano-concave mirror or average mirror; The left side plating 808nm of cavity mirror 8,914nm high permeability optical medium film; Right side plating 808nm, 914nm high permeability, 1064nm high reflectance optical medium film; Laser output mirror 10 is recessed flat mirror or average mirror; The concave surface of laser output mirror 10 is coated with the optical medium film of the part transmitance of 1064nm oscillation light wave band.
Wherein, the ratio of transmitance confirms that according to the calculating in the practical application when specifically realizing, the embodiment of the invention does not limit this.
Wherein, choosing of first pump light and the second pump light relative scale can be confirmed by the power output-heat deposition power curve of all solid state laser.Under given total power input, first pump light and the second pump light relative scale are corresponding to specific power output and heat deposition power.When first pump light and the second pump light relative scale change continuously, confirm that according to the full curve that forms the best proportioning of first pump light and the second pump light relative scale is specially:
When the heat of restriction during smaller or equal to first set-point, first pump light that first set-point is corresponding and the relative scale of second pump light are best proportioning; Or,
When the power output of restriction during more than or equal to second set-point, first pump light that second set-point is corresponding and the relative scale of second pump light are best proportioning.
Wherein, the value of threshold value, first set-point and second set-point is set according to the needs in the practical application, and when specifically realizing, the embodiment of the invention does not limit this.
Wherein, when specifically realizing, first diode laser 1 and second diode laser 2 adopt continuation mode work or pulse mode work.
Wherein, the optical axis of gain medium crystal 9 (C axle) direction is placed or horizontal positioned straight up.
Below with the feasibility of the yttrium vanadate crystal all solid state laser of a neodymium-doped of simply verifying a kind of dual wavelength end pumping that the embodiment of the invention provides; Doping content with gain medium crystal 9 in the embodiment of the invention is 0.5%, and specification is 3 * 3 * 10mm
3, the focal length of the first coupled lens group 5, the second coupled lens group 6 is 25mm, and the wire core diameter of the first laser energy-transmission optic fibre 3, the second laser energy-transmission optic fibre 4 is 400 μ m, and numerical aperture 0.22 sees hereinafter for details and describes for example describes:
The centre wavelength of first pump light is 808nm, and the centre wavelength of second pump light is 914nm, adopts continuously or pulse mode work.The first pump light warp first laser energy-transmission optic fibre 3 and the first coupled lens group 5 are transferred to closes bundle level crossing 7; The second pump light warp second laser energy-transmission optic fibre 4 that second diode laser 2 sends and the second coupled lens group 6 are transferred to closes bundle level crossing 7; The pump light that closes behind the bundle focuses in the gain medium crystal 9 through cavity mirror 8, and the spot radius after the focusing is 200 μ m; Produce population inversion behind the gain medium crystal 9 absorptive pumping light; Because the plated film of cavity mirror 8 and laser output mirror 10 design; To make 1064nm laser in the chamber, form vibration and also constantly be exaggerated, at last by laser output mirror 10 output 1064nm laser.Through above-mentioned verification experimental verification the feasibility of all solid state laser that provides of the embodiment of the invention, satisfied the needs in the practical application.
In sum; The embodiment of the invention provides a kind of yttrium vanadate crystal all solid state laser of neodymium-doped of dual wavelength end pumping; The embodiment of the invention has been broken the notion of traditional single wavelength pumping, has proposed to consider from gain medium energy level angle, improves the novel concept of laser output performance; Various in the past pump modes are compared, and the dual wavelength pumping becomes even more ideal pump mode and might be used widely in future; Secondly; The embodiment of the invention is through the relative scale of adjustment first pump light and second pump light; Balance power output and thermal effect well; Make solid-state laser output and running reach optimum efficiency, help the development and the application of all solid state, high power, high light beam quality, compact type laser; The embodiment of the invention is utilized 808nm and two kinds of wavelength pump lights of 914nm pumping laser crystal simultaneously; Under the low heat production characteristics of high light light conversion efficiency that makes full use of the 808nm pumping and 914nm pumping, utilize the crystal of common doping content and length promptly can obtain the optimization effect that laser is exported; Not only overcome traditional pumping serious thermal effect problem for a long time, also solved the problem of resonance pumping low light light conversion efficiency simultaneously.
It will be appreciated by those skilled in the art that accompanying drawing is the sketch map of a preferred embodiment, the invention described above embodiment sequence number is not represented the quality of embodiment just to description.
The above is merely preferred embodiment of the present invention, and is in order to restriction the present invention, not all within spirit of the present invention and principle, any modification of being done, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (2)
1. the yttrium vanadate crystal all solid state laser of the neodymium-doped of a dual wavelength end pumping; It is characterized in that; Said all solid state laser comprises: first diode laser, second diode laser, the first laser energy-transmission optic fibre, the second laser energy-transmission optic fibre, the first coupled lens group, the second coupled lens group, close bundle level crossing, cavity mirror, gain medium crystal and laser output mirror
First pump light that said first diode laser sends is transferred to the said bundle level crossing that closes through said first laser energy-transmission optic fibre and the said first coupled lens group; Second pump light that said second diode laser sends is transferred to the said bundle level crossing that closes through said second laser energy-transmission optic fibre and the said second coupled lens group; Said first pump light and said second pump light close bundle at the said bundle level crossing place of closing, and obtain the pump light that closes behind the bundle; The said pump light that closes behind the bundle focuses on the inside of said gain medium crystal through said cavity mirror; Said gain medium crystal absorbs the said pump light that closes behind the bundle; When the said pump light after closing bundle that absorbs when said gain medium crystal reaches threshold value; Said gain medium crystal produces stimulated radiation and in resonant cavity, forms laser generation, obtains 1064nm laser and passes through said laser output mirror output;
Wherein, said gain medium crystal is the yttrium vanadate crystal of neodymium-doped, and the centre wavelength of said first pump light is 808nm, and the centre wavelength of said second pump light is 914nm; The said left side plating 914nm high permeability optical medium film that closes the bundle level crossing; Right side plating 914nm high permeability, 808nm high reflectance optical medium film; Said cavity mirror is plano-concave mirror or average mirror; The left side plating 808nm of said cavity mirror, 914nm high permeability optical medium film; Right side plating 808nm, 914nm high permeability, 1064nm high reflectance optical medium film; Said laser output mirror is recessed flat mirror; The concave surface of said laser output mirror is coated with the optical medium film of the part transmitance of 1064nm oscillation light wave band.
2. the yttrium vanadate crystal all solid state laser of the neodymium-doped of a kind of dual wavelength end pumping according to claim 1; It is characterized in that; According to power output-heat deposition power curve, the best proportioning of the relative scale of said first pump light and said second pump light is specially:
When the heat of restriction during smaller or equal to first set-point, said first pump light that said first set-point is corresponding and the relative scale of said second pump light are best proportioning; Or,
When the power output of restriction during more than or equal to second set-point, said first pump light that said second set-point is corresponding and the relative scale of said second pump light are best proportioning.
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| CN108663381A (en) * | 2018-05-09 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | One kind mixing iron laser crystal defect inspection method and device |
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| CN103532003B (en) * | 2013-10-17 | 2016-05-25 | 天津大学 | A kind of side-pump laser module of dual wavelength synthetic pumping |
| CN104538823B (en) * | 2014-12-23 | 2017-09-26 | 中国科学院上海光学精密机械研究所 | With band pumping Er:The 1617nm passive Q-regulaitng lasers of YAG crystal |
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| CN107516812A (en) * | 2017-09-28 | 2017-12-26 | 中国计量科学研究院 | Laser |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101257184A (en) * | 2008-03-04 | 2008-09-03 | 天津大学 | Dual wavelength synthetic pumping compact type laser system |
| CN101350493A (en) * | 2008-08-28 | 2009-01-21 | 福州高意通讯有限公司 | Method for reducing laser oscillatory threshold of quasi three energy level or three energy level laser gain medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101257184A (en) * | 2008-03-04 | 2008-09-03 | 天津大学 | Dual wavelength synthetic pumping compact type laser system |
| CN101350493A (en) * | 2008-08-28 | 2009-01-21 | 福州高意通讯有限公司 | Method for reducing laser oscillatory threshold of quasi three energy level or three energy level laser gain medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108663381A (en) * | 2018-05-09 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | One kind mixing iron laser crystal defect inspection method and device |
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