CN102059751A - System and method for recycling and supplying mortar to multi-wire cutting machines - Google Patents

System and method for recycling and supplying mortar to multi-wire cutting machines Download PDF

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Publication number
CN102059751A
CN102059751A CN 201110009506 CN201110009506A CN102059751A CN 102059751 A CN102059751 A CN 102059751A CN 201110009506 CN201110009506 CN 201110009506 CN 201110009506 A CN201110009506 A CN 201110009506A CN 102059751 A CN102059751 A CN 102059751A
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mortar
pumpback
storage tank
liquid
pipeline
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CN 201110009506
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CN102059751B (en
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杨国农
贺鹏
杨易
陈波
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XI'AN HUAJING ELECTRONIC TECHNOLOGY Co Ltd
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XI'AN HUAJING ELECTRONIC TECHNOLOGY Co Ltd
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Abstract

The invention discloses a system and method for recycling and supplying mortar to multi-wire cutting machines. The system comprises a finished product mortar storage tank, a main supply pipeline, an auxiliary reflowing pipeline, a branch supply pipeline, a waste liquid back-pumping main pipeline, a waste liquid back-pumping branch pipeline, a waste liquid recycling tank, a mortar separation and purification device, a silicon carbide dense mortar storage tank, a recycled liquid storage tank, a silicon carbide dense mortar pumping pipeline, a recycled liquid pumping pipeline, a cutting liquid supplementing pipeline and a silicon carbide micropowder supplementing pipeline. The method comprises the following steps of: firstly, supplying finished product mortar: reflowing the finished product cutting mortar before the mortar is supplied to the multi-wire cutting machines, supplying the finished product cutting mortar, completing the supplying of the mortar, and then continuously reflowing the finished product cutting mortar; secondly, recycling waste mortar; and thirdly, starting a stirrer of a mortar recycling device, separating and purifying the waste mortar, compounding and recycling the finished product cutting mortar. The system is reasonably designed, simply and conveniently operated, can simultaneously supply the mortar to a plurality of cutting machines without retaining the mortar in each pipeline.

Description

Multi-wire cutting machine mortar circulation and feed system and method
Technical field
The invention belongs to the cutting mortar and supply with technical field, especially relate to a kind of multi-wire cutting machine mortar circulation and feed system and method.
Background technology
Multi-thread cutting is one of very effective method of cutting large diameter silicon monocrystal rod.The multi-line cutting machine of Yi Juntuqiing (abbreviation scroll saw) is with its high production efficiency and piece rate in recent years, replace inner circle cutting machine gradually at the large-diameter silicon wafer manufacture field, institute's pellet has characteristics such as flexibility is little, angularity is little, the depth of parallelism is good, gross thickness tolerance (TTV) discreteness is little, cutting edge cutting loss is little, surface damage layer is shallow, the wafer surface roughness is little; Its cutting material cover all kinds semi-conducting material, as silicon, germanium, lithium niobate, GaAs, indium phosphide, synthetic cut stone, carborundum etc., therefore the application of multi-thread cutting technique also more and more widely.
Must use a kind of mobile mixed-abrasive-cutting mortar (hereinafter to be referred as mortar) that has in the multi-thread cutting.In the actual cutting process, mortar is taken to cutting area by reciprocating steel wire, the cut quality of the mortar decision silicon chip that is brought into; And steel wire with the grain type and the granularity that contain silicon carbide micro-powder in the mortar, be the key of decision cutting material finished product sheet any surface finish degree and cutting power.If the grain type rule of silicon carbide micro-powder, the finished product sheet surface smoothness that cuts out will be fine; The even particle size distribution of silicon carbide micro-powder can improve the cutting power of cutting machine.
During actual the cutting, can produce a large amount of waste mortars in the multi-thread cutting processing process, contain a large amount of silicon carbide blade material that has neither part nor lot in cutting in these waste mortars, meanwhile also produce a large amount of cutting waste liquors, its main component is polyethylene glycol and the composite mixture of several low quantity of surfactant.Because surfactant properties is to be easy to attached to silicon carbide, if adopt the off-line recovery that above-mentioned part surface activating agent is run off, not only produces serious environmental and pollute, and wasted a large amount of resources, increased production cost.At present, the cutting liquid technical formula of each family all is in highly confidential state, thus desire to reclaim liquid replenish the surfactant that runs off be difficult to accomplish additional fully, thereby seriously influenced the cut quality of mortar.As adopt the circulatory system directly to reclaim carborundum and cutting liquid, can guarantee that a large amount of active ingredient can not run off, not only avoided again in the processing procedure influence of return period to using avoided in the pollution of environment simultaneously, also can save a large amount of time and fund.
Multi-line cutting machine is to be the working cell with the unit, existing cutting mortar is to adopt manually mortar product to be injected the multi-wire cutting machine mortar jar, not only inefficiency, labour intensity are big, simultaneously may easily bring the solid matter in the environment into mortar accidentally because of manual operation, thereby have a strong impact on the quality of cutting silicon chip, cause environmental pollution in various degree.
Summary of the invention
Technical problem to be solved by this invention is at above-mentioned deficiency of the prior art, a kind of reasonable in design is provided, input cost is low, use is easy and simple to handle and pipeline in no slurries residual, can realize that the multi-wire cutting machine mortar that cutting machine is on the same stage supplied with synchronously circulates and feed system.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of multi-wire cutting machine mortar circulation and feed system is characterized in that: comprise the mortar product storage tank, main service, the auxiliary reflux pipeline, prop up service, waste liquid pumpback trunk line, waste liquid pumpback branch pipe(tube), the waste liquid recycling can that waste mortar after cutting is used to multi-line cutting machine reclaims and stores, waste mortar is separated purification processes and extracts the recycling carborundum that can come into operation once more in the waste mortar and the waste mortar of recycling slurries separates equipment for purifying, the carborundum underflow storage tank that recycling carborundum and recycling slurries are stored respectively and reclaim the liquid storage tank, the recycling carborundum underflow pump of carborundum underflow storage tank storage is delivered to the carborundum underflow pumping line of mortar product storage tank, the recovery liquid pump of the recycling slush pump of storing in the recovery liquid storage tank being delivered to the mortar product storage tank send pipeline, and in the mortar product storage tank, replenish the cutting liquid that cutting liquid and silicon carbide micro-powder are provided and replenish pipeline and the additional pipeline of silicon carbide micro-powder; In the tank body of described mortar product storage tank, carborundum underflow storage tank, recovery liquid storage tank and waste liquid recycling can electric mixer is installed all; Described main service is to acclivitous gradually pipeline one and the described angle α that is tilted between pipeline one and horizontal direction of being tilted to of liquid outlet by inlet 1Be 10 °<α 1<20 °; Described main service and mortar product storage tank liquid outlet join;
The inlet of described waste mortar separation equipment for purifying joins by the liquid outlet of waste liquid pumping line and waste liquid recycling can, the liquid outlet of one end of carborundum underflow pumping line and carborundum underflow storage tank joins and its other end stretches in the mortar product storage tank, and the recovery liquid pump send an end of pipeline to join with the liquid outlet that reclaims the liquid storage tank and its other end stretches in the mortar product storage tank; Described waste liquid pumping line, carborundum underflow pumping line and recovery liquid pump send and are separately installed with pumping equipment one, pumping equipment two and pumping equipment four on the pipeline, on the described main service supply pump is installed, on the described waste liquid pumpback trunk line pumpback pump is installed;
One end of described auxiliary reflux pipeline and the liquid outlet of main service joins and the two between return valve is installed, the other end of described auxiliary reflux pipeline stretches in the mortar product storage tank;
A described main service and a service are communicated with to be formed to the mortar service of multi-line cutting machine cutting with finished product cutting mortar is provided, described service comprise vertically to service and with the reverse U shape service that vertically joins to service, one end of described reverse U shape service is installed on the main service and it communicates with main service, the other end of described reverse U shape service with vertically join and vertically in the lower end of service stretches to the mortar jar of multi-line cutting machine to the upper end of service; A service control valve is installed on the described reverse U shape service;
Described waste liquid pumpback trunk line and waste liquid pumpback branch pipe(tube) are communicated with to be formed the mortar pumpback pipeline of the waste mortar pumpback after the multi-line cutting machine cutting use to the waste liquid recycling can, described waste liquid pumpback branch pipe(tube) comprise vertically to the pumpback pipeline and with the reverse U shape pumpback pipeline that vertically joins to the pumpback pipeline, one end of described reverse U shape pumpback pipeline is installed on the waste liquid pumpback trunk line and it communicates with waste liquid pumpback trunk line, the other end of described reverse U shape pumpback pipeline with vertically join and vertically in the lower end of pumpback pipeline stretches to the mortar jar of multi-line cutting machine to the upper end of pumpback pipeline; A pumpback pipeline control valve is installed on the described reverse U shape pumpback pipeline.
Above-mentioned multi-wire cutting machine mortar circulation and feed system is characterized in that: the described angle α that is tilted between pipeline one and horizontal direction 1Be 10 °<α 1<15 °.
Above-mentioned multi-wire cutting machine mortar circulation and feed system, it is characterized in that: the quantity of described multi-line cutting machine is many, the quantity of described service and waste liquid pumpback branch pipe(tube) be a plurality of and the two quantity all the quantity with multi-line cutting machine is identical, all identical and all parallel being installed on the main service of the mounting means of a plurality of services, all identical and all parallel being installed on the waste liquid pumpback trunk line of the mounting means of a plurality of waste liquid pumpback branch pipe(tube)s, the lower end of a plurality of services and a plurality of waste liquid pumpback branch pipe(tube)s stretches to respectively in the mortar jar of many multi-line cutting machines.
Simultaneously, the invention also discloses a kind of the installation and lay and operating procedure is simple, it is convenient to realize and result of use is good multi-wire cutting machine mortar circulation and supply method, it is characterized in that this method may further comprise the steps:
Step 1, mortar product are supplied with, and its supply process is as follows:
101, agitator starts in the mortar product storage tank: open the interior electric mixer of being installed of mortar product storage tank and the finished product cutting mortar of storing in the mortar product storage tank is carried out continuous stirring, open return valve simultaneously, and close a service control valve and a pumpback pipeline control valve;
102, finished product cutting mortar refluxed before supply pump startup and mortar were supplied with: the startup supply pump is pumped the finished product cutting mortar of storing in the mortar product storage tank to main service, and be back in the mortar product storage tank by the auxiliary reflux pipeline that joins with main service, and by the auxiliary reflux pipeline finished product to be cut the return time that mortar refluxes in the mortar product storage tank be 3min~5min; After treating finished product cutting mortar backflow 3min~5min, the closing volume valve;
103, finished product cutting mortar is supplied with: open a service control valve of being installed on the service that leads in the mortar jar that needs the supply multi-line cutting machine, and the finished product cutting mortar uninterrupted pumping of storing in the mortar product storage tank is extremely needed to supply with in the mortar jar of multi-line cutting machine by a main service and a service, when the finished product cutting mortar quantity in the mortar jar furnishes good supplies to demand, finish the mortar that needs to supply with multi-line cutting machine and supply with process;
104, finished product cutting mortar refluxed after mortar was supplied with and finished: when treating that the need supply multi-line cutting machine described in the step 103 is finished cutting process, close supply pump earlier and open return valve, close a service control valve of being installed on the service again, make the finished product cutting mortar that remains in this moment in the main service all be back in the mortar product storage tank automatically by the main service that is tilted to laying;
Step 2, mortar reclaim, and its removal process is as follows:
201, pumpback pump startup: after treating that the multi-line cutting machine described in the step 103 is finished cutting process, open the pumpback pump;
202, pumpback valve opening and waste mortar pumpback: behind the pumpback pump startup, open a pumpback pipeline control valve of being installed on the waste liquid pumpback branch pipe(tube) that leads in the mortar jar that needs the pumpback multi-line cutting machine, and the continuous pumpback of waste mortar that will need splendid attire in the mortar jar of pumpback multi-line cutting machine by waste liquid pumpback trunk line and waste liquid pumpback branch pipe(tube) is to the waste liquid recycling can, in the mortar jar that will need the pumpback multi-line cutting machine waste mortar of splendid attire all find time and in waste liquid pumpback branch pipe(tube), be drawn into air after till;
203, pumpback pump and pumpback valve closing: after treating in waste liquid pumpback branch pipe(tube), to be drawn into air in the step 202, close a pumpback pipeline control valve of being installed on pumpback pump and the waste liquid pumpback branch pipe(tube);
Step 3, waste mortar separate purification, composite and recycling, and it separates purification, composite and recycling process is as follows:
301, agitator starts in the mortar reclaimer: start waste liquid recycling can, carborundum underflow storage tank and reclaim the electric mixer of being installed in the liquid storage tank;
302, waste mortar separate to be purified: start pumping equipment one and by the waste liquid pumping line with pumpback and be stored in waste mortar in the waste liquid recycling can and be pumped to described waste mortar and separate in the equipment for purifying and separate purification, and obtain recycling carborundum and recycling slurries, and isolated recycling carborundum and recycling slurries are stored to respectively in carborundum underflow storage tank and the recovery liquid storage tank;
303, finished product cutting mortar is composite: start pumping equipment two and pumping equipment four, and send pipeline that recycling carborundum and the recycling slurries that separate in the step 302 after purifying all are pumped in the mortar product storage tank with the recovery liquid pump by carborundum underflow pumping line, simultaneously according to the design proportioning of finished product cutting mortar and by carborundum underflow pumping line with reclaim liquid pump and send tubing pump to deliver to the recycling carborundum in the mortar product storage tank and the quantity of recycling slurries, calculating needs to replenish silicon carbide micro-powder quantity and the cutting liquid quantity that provides, and replenish pipeline by described silicon carbide micro-powder and in the mortar product storage tank, replenish the silicon carbide micro-powder that respective amount is provided and cut liquid with the additional pipeline of cutting liquid, uniformly mix by the electric mixer of installing in the mortar product storage tank afterwards, the finished product cutting mortar that obtains after composite is stand-by;
After the composite end of finished product cutting mortar, return step 1 again in the step 303, the mortar supply is carried out in circulation, the mortar recovery separates purification, composite and recycling with waste mortar.
Above-mentioned multi-wire cutting machine mortar circulation and supply method, it is characterized in that: the circulation of described multi-wire cutting machine mortar and feed system comprise also being vertically to what lay and return clean pipeline and be installed in back time clean valve on the clean pipeline that the upper end of described time clean pipeline and main service join and its lower end stretches in the mortar product storage tank;
When opening return valve in the step 101, close back clean valve; When closing the service control valve of being installed on the service in the step 104, open back clean valve, the finished product cutting mortar that remains in feasible this moment in the main service all is back in the mortar product storage tank automatically by main service and time clean pipeline that is tilted to laying.
Circulation of above-mentioned multi-wire cutting machine mortar and supply method is characterized in that: described waste liquid pumpback trunk line for by inlet to downward-sloping gradually being tilted to pipeline two and being tilted to angle α between pipeline two and horizontal direction of liquid outlet 2Be 10 °<α 2<20 °;
Behind the pumpback pipeline control valve that closing described in the step 203 installed on pumpback pump and the waste liquid pumpback branch pipe(tube), and treat pumpback to the waste mortar in the waste liquid pumpback branch pipe(tube) in step 202, be drawn into move in the waste liquid pumpback trunk line automatically under the air effect in the waste liquid pumpback branch pipe(tube) after, the waste mortar that moves in the waste liquid pumpback trunk line all flow in the waste liquid recycling can automatically by the waste liquid pumpback trunk line that is tilted to laying.
Above-mentioned multi-wire cutting machine mortar circulation and supply method, it is characterized in that: described multi-wire cutting machine mortar circulation also comprises pending liquid storage tank and the waste liquid storage tank that can not utilize slurries to store to not coming into operation once more with feed system, in described pending liquid storage tank and the waste liquid storage tank electric mixer is installed all; It is the two-stage centrifugal separation equipment that described waste mortar separates equipment for purifying, and it comprises the waste mortar of being stored in the waste liquid recycling can is carried out centrifugation and obtains recycling carborundum and centrifugal separation equipment two that the centrifugal separation equipment one of pending liquid and described pending liquid is further separated and obtains recycling slurries and can not utilize slurries; Described carborundum underflow storage tank and pending liquid storage tank join with two liquid outlets that are laid in centrifugal separation equipment one bottom by carborundum recovery channel and pending liquid recovery channel respectively; The liquid outlet of described pending liquid storage tank send the inlet of pipeline and centrifugal separation equipment two to join by pending liquid pump, two liquid outlets of centrifugal separation equipment two join with waste liquid storage tank and recovery liquid storage tank by waste liquid circulation duct and recovery liquid circulation duct respectively, and described pending liquid pump send pumping equipment three is installed on the pipeline.
Above-mentioned multi-wire cutting machine mortar circulation and supply method is characterized in that: described multi-wire cutting machine mortar circulation comprises also that with feed system it is 1.13g/cm that the recycling slurries that are installed in after separating on the recovery liquid circulation duct and to centrifugal separation equipment two further purify and obtain density 3The solid-liquid separating equipment of recycling slurries;
Carry out waste mortar in the step 302 and separate when purifying, it is as follows that its waste mortar separates purification process:
3021, first-stage centrifugal is separated: by the waste liquid pumping line waste mortar of storing in the waste liquid recycling can is pumped to and carries out the first-stage centrifugal separation in the centrifugal separation equipment one, and the silicon carbide micro-powder of particle diameter in the described waste mortar>4.5 μ m is separated, the silicon carbide micro-powder of described particle diameter>4.5 μ m is recycling carborundum, and first-stage centrifugal is separated recycling carborundum and the pending liquid that the back obtains be stored to respectively in carborundum underflow storage tank and the pending liquid storage tank, start the interior electric mixer of being installed of carborundum underflow storage tank and pending liquid storage tank simultaneously;
3022, secondary centrifugation: send pipeline to deliver to the pending liquid pump of storing in the pending liquid storage tank in the centrifugal separation equipment two and under 35 ℃~45 ℃ temperature conditions, carry out the secondary centrifugation by pending liquid pump, and the cutting liquid in the pending liquid and carborundum and silica flour are separated; The cutting liquid of centrifugal separation equipment two being separated by solid-liquid separating equipment further purifies simultaneously, and acquisition density is 1.13g/cm 3Recycling slurries, and the recycling slurries after solid-liquid separating equipment purified are stored to and reclaim in the liquid storage tank, and centrifugal separation equipment two and the isolated slurries that can not utilize of described solid-liquid separating equipment are stored in the waste liquid storage tank, start simultaneously and reclaim the electric mixer of being installed in liquid storage tank, pending liquid storage tank and the waste liquid storage tank.
Above-mentioned multi-wire cutting machine mortar circulation and supply method, it is characterized in that: described centrifugal separation equipment one and centrifugal separation equipment two are the automatic sedimentation type centrifuge, and described solid-liquid separating equipment is a flame filter press.
Above-mentioned multi-wire cutting machine mortar circulation and supply method, it is characterized in that: described multi-wire cutting machine mortar circulation also comprises master controller with feed system, described pumping equipment one, pumping equipment two, pumping equipment three, pumping equipment four, supply pump and pumpback pump are electrodynamic pump, described return valve, return clean valve, prop up the service control valve and prop up a pumpback pipeline control valve and be solenoid electric valve, described pumping equipment one, pumping equipment two, pumping equipment three, pumping equipment four, supply pump, the pumpback pump, return valve, return clean valve, prop up the service control valve, prop up the pumpback pipeline control valve, centrifugal separation equipment one and centrifugal separation equipment two and mortar product storage tank, the waste liquid recycling can, carborundum underflow storage tank, pending liquid storage tank, the electric mixer of being installed in waste liquid storage tank and the recovery liquid storage tank all joins with master controller and controls by master controller.
The present invention compared with prior art has the following advantages:
1, system structure design rationally, installation is laid convenient and input cost is low, uses easy and simple to handle.
2, present artificial separate unit is added and mortar that the separate unit draw out operation is changed into many multi-line cutting machines is supplied with process synchronously, and supply with automatically when having realized many multi-line cutting machines by the present invention, also the waste mortar in many multi-wire cutting machine mortar jars can be extracted out automatically and be collected, combine and additional a certain amount of carborundum and cutting liquid with cutting liquid removal process by the carborundum removal process again, thereby make the cutting liquid that can directly use; Supplying with many multi-line cutting machines by feed system again uses.
3, practical value height, many machines of the present invention's required cutting mortar in realizing multi-line cutting machine cutting solar energy-level silicon wafer and electron level silicon chip cutting process are feed system simultaneously, also by the circulatory system with the carborundum separated and collected and with can use cutting liquid to mix and allocate again, acquisition can be satisfied the regeneration mortar of solar energy-level silicon wafer and electron level silicon chip cutting use, supply with many multi-line cutting machines by feed system then and use, form the supply and the cyclic utilization system of mortar.Thereby, can directly mortar product be supplied with many multi-line cutting machines by the present invention, solve mortar product and supplied with the mortar inequality appears in process owing to batch operation a difficult problem; Simultaneously, again pending waste tank is arrived in the cutting waste liquor pumpback through the circulatory system, and be separated into carborundum and the pending liquid of particle diameter>4.5 μ m, and remove carborundum and the silica flour of particle diameter in the pending liquid<4.5 μ again by sedimentation separation, purifying and obtaining density is 1.13g/cm 3Cutting reclaim liquid, carborundum with particle diameter>4.5 μ m mixes with cutting liquid recovery liquid at last, and suitably replenish new carborundum powder and cutting liquid, make the regeneration mortar that satisfies solar energy-level silicon wafer and electron level silicon chip cutting use, thereby realized resource circulation utilization.
4, reduced environmental pollution, whole supply operation simultaneously and circulation removal process are onlinely in a complete alternation system to finish immediately, have avoided in the mortar roping process mortar product contaminated.Both reduce production cost, improved production efficiency again.
5, because currently used batch operation is supplied with to cause occurs residually in the pipeline, and make that mixing uneven cutting liquid directly enters the mortar jar of multi-line cutting machine, thereby have a strong impact on cut quality; And the cutting liquid that the present invention can avoid mixing inequality fully directly enters multi-line cutting machine, effectively guarantees the quality of the mortar of supplying with.Influence the mortar quality in order when to prevent from last time to supply with mortar in the pipeline have a small amount of mortar, adopt the mortar service to be equipped with a cover backflow subsidiary conduit simultaneously, when supplying with, at first opens by mortar the valve between service and backflow subsidiary conduit, allow a part of mortar in the service be back to the mortar product storage tank, close the pipeline return valve then by the backflow subsidiary conduit.
6, in the mortar product supply process, electronic or jettron valve is installed in U type pipeline and last U type pipeline top in the employing, and after finishing mortar supply process, the mortar in the mortar service flows back to automatically, and no mortar stockpiles.Simultaneously, service adopts input to be lower than the mode of output, after finishing defeated slurry process, opens return valve and makes and retain in ducted mortar and flow back to the mortar product jar automatically, has guaranteed can not retain mortar in the main service.In addition, be withdrawn into the waste mortar jar through the waste mortar after the multi-line cutting machine use by recovery channel, go up U type pipeline and go up the electronic or jettron valve of U type pipeline top installation because of each pumpback pipeline adopts, thereby after finishing mortar supply process, the ducted mortar of pumpback flows back to automatically, and no mortar stockpiles.
7, applied widely, be applicable to the silicon chip cutting of solar energy and electron trade and the surface finish processing of silicate material and ceramic product.
In sum, the present invention is reasonable in design, use is easy and simple to handle, can realize that many cutting machines are supplied with simultaneously and each pipeline in no mortar retain, when increasing work efficiency, reducing production costs, can effectively improve working environment, reduce environmental pollution, realize resource circulation utilization and set up complete production management system, fundamentally guaranteed the quality of the mortar of supplying with.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Description of drawings
Fig. 1 is the structural representation of mortar circulation of the present invention with feed system.
Method flow block diagram when Fig. 2 carries out the mortar circulation and supplies with for the present invention.
Description of reference numerals:
1-finished product slurry storage tank; The 2-supply pump; 3-master's service;
The 4-return valve; 5-auxiliary reflux pipeline; 6-props up service;
6-1-is vertically to service; 6-2-reverse U shape service; 7-returns clean valve;
8-returns clean pipeline; 9-pumpback pump; 10-waste liquid pumpback trunk line;
11-waste liquid recycling can; 12-waste liquid pumpback branch pipe(tube); 12-1-is vertically to the pumpback pipeline;
12-2-reverse U shape pumpback pipeline; 13-centrifugal separation equipment one; 14-carborundum underflow storage tank;
15-waste liquid pumping line; 16-pumping equipment one; 17-carborundum recovery channel;
The pending liquid recovery channel of 18-; 19-carborundum pumping equipment; The pending liquid pump of 20-send pipeline;
21-centrifugal separation equipment two; 22-waste liquid circulation duct; 23-waste liquid storage tank;
24-reclaims the liquid circulation duct; 25-reclaims the liquid storage tank; 26-reclaims liquid pump and send pipeline;
27-props up the service control valve; 28-props up the pumpback pipeline control valve; The 29-multi-line cutting machine;
30-mortar jar; The pending liquid storage tank of 31-; 32-pumping equipment two;
33-pumping equipment three; 34-pumping equipment four.
The specific embodiment
As shown in Figure 1 a kind of multi-wire cutting machine mortar circulation and feed system comprise mortar product storage tank 1, main service 3, auxiliary reflux pipeline 5, prop up service 6, waste liquid pumpback trunk line 10, waste liquid pumpback branch pipe(tube) 12, the waste liquid recycling can 11 that waste mortar after 29 cuttings are used to multi-line cutting machine reclaims and stores, waste mortar is separated purification processes and extracts the recycling carborundum that can come into operation once more in the waste mortar and the waste mortar of recycling slurries separates equipment for purifying, the carborundum underflow storage tank 14 that recycling carborundum and recycling slurries are stored respectively and reclaim liquid storage tank 25, the recycling carborundum underflow pump of carborundum underflow storage tank 14 storages is delivered to the carborundum underflow pumping line 19 of mortar product storage tank 1, the recovery liquid pump of the recycling slush pump that reclaims storage in the liquid storage tank 25 being delivered to mortar product storage tank 1 send pipeline 26, and in mortar product storage tank 1, replenish the cutting liquid that cutting liquid and silicon carbide micro-powder are provided and replenish pipeline and the additional pipeline of silicon carbide micro-powder.In the tank body of described mortar product storage tank 1, carborundum underflow storage tank 14, recovery liquid storage tank 25 and waste liquid recycling can 11 electric mixer is installed all.Described main service 3 is to acclivitous gradually pipeline one and the described angle α that is tilted between pipeline one and horizontal direction of being tilted to of liquid outlet by inlet 1Be 10 °<α 1<20 °.Described main service 3 joins with mortar product storage tank 1 liquid outlet.
The inlet that described waste mortar separates equipment for purifying joins by the liquid outlet of waste liquid pumping line 15 with waste liquid recycling can 11, the liquid outlet of one end of carborundum underflow pumping line 19 and carborundum underflow storage tank 14 joins and its other end stretches in the mortar product storage tank 1, and the recovery liquid pump send an end of pipeline 26 to join with the liquid outlet that reclaims liquid storage tank 25 and its other end stretches in the mortar product storage tank 1.Described waste liquid pumping line 15, carborundum underflow pumping line 19 and recovery liquid pump send and are separately installed with pumping equipment 1, pumping equipment 2 32 and pumping equipment 4 34 on the pipeline 26, on the described main service 3 supply pump 2 is installed, on the described waste liquid pumpback trunk line 10 pumpback pump 9 is installed.
One end of described auxiliary reflux pipeline 5 and the liquid outlet of main service 3 joins and the two between return valve 4 is installed, the other end of described auxiliary reflux pipeline 5 stretches in the mortar product storage tank 1.
A described main service 3 and a service 6 are communicated with to be formed to the mortar service of multi-line cutting machine 29 cuttings with finished product cutting mortar is provided, described service 6 comprise vertically to service 6-1 and with the reverse U shape service 6-2 that vertically joins to service 6-1, the end of described reverse U shape service 6-2 is installed on the main service 3 and it communicates with main service 3, the other end of described reverse U shape service 6-2 with vertically join and vertically in the lower end of service 6-1 stretches to the mortar jar 30 of multi-line cutting machine 29 to the upper end of service 6-1; A service control valve 27 is installed on the described reverse U shape service 6-2.
Described waste liquid pumpback trunk line 10 and waste liquid pumpback branch pipe(tube) 12 are communicated with to be formed the mortar pumpback pipeline of the waste mortar pumpback after the multi-line cutting machine 29 cutting uses to waste liquid recycling can 11, described waste liquid pumpback branch pipe(tube) 12 comprise vertically to pumpback pipeline 12-1 and with the reverse U shape pumpback pipeline 12-2 that vertically joins to pumpback pipeline 12-1, the end of described reverse U shape pumpback pipeline 12-2 is installed on the waste liquid pumpback trunk line 10 and it communicates with waste liquid pumpback trunk line 10, the other end of described reverse U shape pumpback pipeline 12-2 with vertically join and vertically in the lower end of pumpback pipeline 12-1 stretches to the mortar jar 30 of multi-line cutting machine 29 to the upper end of pumpback pipeline 12-1; A pumpback pipeline control valve 28 is installed on the described reverse U shape pumpback pipeline 12-2.
Described auxiliary reflux pipeline 5 cut mortar before multi-line cutting machine 29 is supplied with at finished product, the finished product cutting mortar that retains before in the main service 3 is back to the quality of mortar product storage tank 1 with the finished product cutting mortar of assurance supply multi-line cutting machine 29, and correspondence is provided with the inlet that send pipeline 26 and the additional pipeline of described silicon carbide micro-powder to install for auxiliary reflux pipeline 5, carborundum underflow pumping line 19, recovery liquid pump on the cover of described mortar product storage tank 1.Described mortar product storage tank 1 is the finished product cutting mortar that auxiliary reflux pipeline 5 is refluxed, the recycling carborundum underflow of carborundum underflow pumping line 19 pumpings, reclaim the recycling slurries that liquid pump send pipeline 26 pumpings, described silicon carbide micro-powder replenishes the silicon carbide micro-powder that pipeline replenishes to be provided, cutting liquid replenishes pipeline and the finished product cutting mortar that retains in the cutting liquid that provides and the mortar product storage tank 1 is provided evenly mixes and form the finished product cutting mortar after composite and synchronously formation finished product is cut the storage tank that slurries are stored.When specifically laying, the described angle α that is tilted between pipeline one and horizontal direction 1Be 10 °<α 1<15 °.
Described mortar product storage tank 1, mortar service, auxiliary reflux pipeline 5, mortar pumpback pipeline, waste liquid recycling can 11 separate equipment for purifying and form when supplying with finished products cutting mortars to multi-line cutting machine 29 with waste mortar, the waste mortar after 29 cuttings are used to multi-line cutting machine reclaim with separate purification after the mortar that comes into operation once more supply with and cyclic utilization system.
The quantity of described multi-line cutting machine 29 is many, the quantity of described service 6 and waste liquid pumpback branch pipe(tube) 12 be a plurality of and the two quantity all the quantity with multi-line cutting machine 29 is identical, all identical and all parallel being installed on the main service 3 of the mounting means of a plurality of services 6, all identical and all parallel being installed on the waste liquid pumpback trunk line 10 of the mounting means of a plurality of waste liquid pumpback branch pipe(tube)s 12, the lower end of a plurality of services 6 and a plurality of waste liquid pumpback branch pipe(tube)s 12 stretches to respectively in the mortar jar 30 of many multi-line cutting machines 29.That is to say that the present invention can realize that the cutting mortar of many multi-line cutting machines 29 supplies with synchronously.In the present embodiment, the quantity of described multi-line cutting machine 29 is three, and three multi-line cutting machines 29 are respectively multi-line cutting machine 1,2 and No. 3.
In the present embodiment, the circulation of described multi-wire cutting machine mortar and feed system comprise also being vertically to what lay and return clean pipeline 8 and be installed in back time clean valve 7 on the clean pipeline 8 that the upper end of described time clean pipeline 8 and main service 3 join and its lower end stretches in the mortar product storage tank 1.
During actual the laying, described waste liquid pumpback trunk line 10 for by inlet to downward-sloping gradually being tilted to pipeline two and being tilted to angle α between pipeline two and horizontal direction of liquid outlet 2Be 10 °<α 2<20 °.In the present embodiment, the described angle that is tilted to pipeline one and is tilted between pipeline two and horizontal direction is 12 °.In the actual use, can adjust accordingly with the angle of inclination that is tilted to pipeline two being tilted to pipeline one according to concrete actual needs.
Simultaneously, described multi-wire cutting machine mortar circulation also comprises pending liquid storage tank 31 and the waste liquid storage tank 23 that can not utilize slurries to store to not coming into operation once more with feed system, in described pending liquid storage tank 31 and the waste liquid storage tank 23 electric mixer is installed all.It is the two-stage centrifugal separation equipment that described waste mortar separates equipment for purifying, and it comprises the waste mortars of being stored in the waste liquid recycling can 11 are carried out centrifugation and obtain recycling carborundum and centrifugal separation equipment 2 21 that the centrifugal separation equipment 1 of pending liquid and described pending liquid is further separated and obtains recycling slurries and can not utilize slurries.Described carborundum underflow storage tank 14 and pending liquid storage tank 31 join with two liquid outlets that are laid in centrifugal separation equipment one 13 bottoms by carborundum recovery channel 17 and pending liquid recovery channel 18 respectively.The liquid outlet of described pending liquid storage tank 31 send the pipeline 20 and the inlet of centrifugal separation equipment 2 21 to join by pending liquid pump, two liquid outlets of centrifugal separation equipment 2 21 join with waste liquid storage tank 23 and recovery liquid storage tank 25 by waste liquid circulation duct 22 and recovery liquid circulation duct 24 respectively, and described pending liquid pump send pumping equipment 3 33 is installed on the pipeline 20.
In the present embodiment, described multi-wire cutting machine mortar circulation comprises also that with feed system it is 1.13g/cm that the recycling slurries that are installed in after separating on the recovery liquid circulation duct 24 and to centrifugal separation equipment 2 21 further purify and obtain density 3The solid-liquid separating equipment of recycling slurries.
In the present embodiment, described centrifugal separation equipment 1 and centrifugal separation equipment 2 21 are the automatic sedimentation type centrifuge, and centrifugal separation equipment 2 21 is 4.5 automatic sedimentation type centrifuge for draw ratio; Described solid-liquid separating equipment is a flame filter press.Described multi-wire cutting machine mortar circulation also comprises master controller with feed system, described pumping equipment 1, pumping equipment 2 32, pumping equipment 3 33, pumping equipment 4 34, supply pump 2 and pumpback pump 9 are electrodynamic pump, described return valve 4, return clean valve 7, prop up service control valve 27 and prop up a pumpback pipeline control valve 28 and be solenoid electric valve, described pumping equipment 1, pumping equipment 2 32, pumping equipment 3 33, pumping equipment 4 34, supply pump 2, pumpback pump 9, return valve 4, return clean valve 7, prop up service control valve 27, prop up pumpback pipeline control valve 28, centrifugal separation equipment 1 and centrifugal separation equipment 2 21 and mortar product storage tank 1, waste liquid recycling can 11, carborundum underflow storage tank 14, pending liquid storage tank 31, the electric mixers of being installed in waste liquid storage tank 23 and the recovery liquid storage tank 25 all join with master controller and control by master controller.In the actual use, a service control valve 27 and a pumpback pipeline control valve 28 also can adopt pneumatic control valve.
As shown in Figure 2 a kind of multi-wire cutting machine mortar circulation and feed system method may further comprise the steps:
Step 1, mortar product are supplied with, and its supply process is as follows:
101, agitator starts in the mortar product storage tank: open the mortar product storage tank 1 interior electric mixer of being installed and the finished product cutting mortar of storing in the mortar product storage tank 1 is carried out continuous stirring, open return valve 4 simultaneously, and close a service control valve 27 and a pumpback pipeline control valve 28.
102, supply pump starts and the backflow of mortar supply finished product cutting before mortar: start supply pump 2 the mortar product storage tank 1 interior finished product cutting mortar of storing is pumped to main service 3, and be back in the mortar product storage tank 1 by the auxiliary reflux pipeline 5 that joins with main service 3, and by auxiliary reflux pipeline 5 finished product to be cut the return time that mortar refluxes in mortar product storage tank 1 be 3min~5min; After treating finished product cutting mortar backflow 3min~5min, closing volume valve 4.
During actual the use, described supply pump 2 is membrane pump, screw pump or positive displacement pump (as the ball-type pump etc.), also can adopt the pumping mode of many supply pumps 2 parallel connections.Should check whether return valve 4 is opened before opening supply pump 2, have only return valve 4 complete openings just can open supply pump 2, and open supply pump 2 backs and required finished product cutting mortar is sent in mortar product storage tank 1 the main service 3 by supply pump 2.Simultaneously, the finished product cutting mortar of sending in the main service 3 is back in the mortar product storage tank 1 by auxiliary reflux pipeline 5, and the electric mixer in the mortar product storage tank 1 is in stirring.
103, finished product cutting mortar is supplied with: open a service control valve 27 of being installed on the service 6 that leads in the mortar jar 30 that needs supply multi-line cutting machine 29, and the finished product of storing in the mortar product storage tank 1 is cut the mortar uninterrupted pumping to needing to supply with in the mortar jar 30 of multi-line cutting machine 29 by a main service 3 and a service 6, when the finished product cutting mortar quantity in mortar jar 30 furnishes good supplies to demand, finish the mortar that needs to supply with multi-line cutting machine 29 and supply with process.
In the present embodiment, specifically be a service control valve 27 of being installed on the service 6 of opening in the mortar jar 30 that leads to 1,2 and No. 3 multi-line cutting machine.During actual the use, closing volume valve 4 and open a service control valve 27 after, finished product cutting mortar will inject in the mortar jar 30 of 1,2 and No. 3 multi-line cutting machine stand-by automatically.
104, finished product cutting mortar refluxed after mortar was supplied with and finished: when treating that the need supply multi-line cutting machine 29 described in the step 103 is finished cutting process, close supply pump 2 earlier and open return valve 4, close a service control valve 27 of being installed on the service 6 again, make the finished product cutting mortar that remains in this moment in the main service 3 all be back in the mortar product storage tank 1 automatically by the main service 3 that is tilted to laying.
In the actual use, mortar is at first opened return valve 4 after supplying with and finishing, and closes a service control valve 27 of being installed on each service 6 again, increases to prevent mortar service pressure.
In the present embodiment, when opening return valve 4 in the step 101, close back clean valve 7; When closing the service control valve installed on the service 6 27 in the step 104, open back clean valve 7, the finished products cutting mortar that remains in feasible this moment in the main service 3 all is back in the mortar product storage tank 1 automatically by main service 3 and time clean pipeline 8 that is tilted to laying.
During practical operation, open back behind the clean valve 7 can so that the finished product cutting mortar that retains in the mortar service (specifically being main service 3) get back to fully in the mortar product storage tank 1; Because the mode that main service 3 adopts input to be lower than output is installed, thereby after finishing defeated slurry process, when opening back clean valve 7, the mortar that retains in the main service 3 can flow back to mortar product storage tank 1 automatically, guarantee that no mortar retains in the main service 3, and time saving and energy saving.
Because employing reverse U shape service 6-2 is connected between main service 3 and the service 6, and reverse U shape service 6-2 is positioned at main service 3 tops, prop up service control valve 27 simultaneously and be installed in reverse U shape service 6-2 (being U type pipeline) middle part, and reverse U shape service 6-2 can effectively prevent the residual accumulation of mortar in the service 6.
Step 2, mortar reclaim, and its removal process is as follows:
201, pumpback pump startup: after treating that the multi-line cutting machine 29 described in the step 103 is finished cutting process, open pumpback pump 9.
202, pumpback valve opening and waste mortar pumpback: after pumpback pump 9 starts, open a pumpback pipeline control valve 28 of being installed on the waste liquid pumpback branch pipe(tube) 12 that leads in the mortar jar 30 that needs pumpback multi-line cutting machine 29, and the continuous pumpback of waste mortar that will need splendid attires in the mortar jar 30 of pumpback multi-line cutting machine 29 by waste liquid pumpback trunk line 10 and waste liquid pumpback branch pipe(tube) 12 is to waste liquid recycling can 11, in the mortar jar 30 that will need pumpback multi-line cutting machine 29 waste mortar of splendid attire all find time and in waste liquid pumpback branch pipe(tube) 12, be drawn into air after till.
203, pumpback pump and pumpback valve closing: after treating in waste liquid pumpback branch pipe(tube) 12, to be drawn into air in the step 202, close a pumpback pipeline control valve 28 of being installed on pumpback pump 9 and the waste liquid pumpback branch pipe(tube) 12.
In the present embodiment, behind the pumpback pipeline control valve 28 that closing described in the step 203 installed on pumpback pump 9 and the waste liquid pumpback branch pipe(tube) 12, and treat pumpback to the waste mortars in the waste liquid pumpback branch pipe(tube) 12 in step 202, be drawn into move in the waste liquid pumpback trunk line 10 automatically under air effect waste liquid pumpback branch pipe(tube) 12 in after, move to waste liquid pumpback trunk line 10 interior waste mortars and all flow in the waste liquid recycling can 11 automatically by the waste liquid pumpback trunk line 10 that is tilted to laying.
In the actual use, after 1,2 and No. 3 multi-line cutting machine is finished cutting process, directly turn back to waste liquid recycling can 11 in pending by waste liquid pumpback branch pipe(tube) 12 and waste liquid pumpback trunk line 10 the useless cutting liquid (being waste mortar) in the mortar jar 30 of 1,2 and No. 3 multi-line cutting machine by pumpback pump 9.Described pumpback pump 9 is membrane pump, screw pump or positive displacement pump (as ball-type pump etc.), also can adopt the pumping mode of many pumpback pump 9 parallel connections.
Equally, owing to adopt reverse U shape pumpback pipeline 12-2 to connect between waste liquid pumpback branch pipe(tube) 12 and the waste liquid pumpback trunk line 10, and reverse U shape pumpback pipeline 12-2 is positioned at waste liquid pumpback trunk line 10 tops, prop up pumpback pipeline control valve 28 simultaneously and be installed in reverse U shape pumpback pipeline 12-2 (being U type pipeline) middle part, reverse U shape pumpback pipeline 12-2 can effectively prevent the residual accumulation of mortar in the waste liquid pumpback branch pipe(tube) 12.
In the actual pumpback process, should at first open pumpback pump 9 before the waste mortar pumpback in the mortar jar 30 of multi-line cutting machine 29, opening on the waste liquid pumpback branch pipe(tube) 12 that leads to the mortar jar 30 that needs extract out institute then installs and props up a pumpback pipeline control valve 28, after treating that waste mortar all exhausts and has a spot of air to enter pumpback pipeline (specifically being waste liquid pumpback branch pipe(tube) 12), can close ducted pumpback pipeline control valve 28 of each mortar pumpback, in case waste liquid is deposited in the pumpback pipeline.After the complete pumpback of waste mortar goes out in the mortar jar 30 that needs pumpback, can open the pumpback pipeline control valve 28 on the pumpback pipeline of each multi-line cutting machine 29 once more, make a spot of air enter mortar pumpback pipeline, utilize air that mortar pumpback pipeline is comprised that the remaining waste mortar in the waste liquid pumpback trunk line 10 brings back in the waste liquid recycling can 11 fully.
Step 3, waste mortar separate purification, composite and recycling, and it separates purification, composite and recycling process is as follows:
301, agitator starts in the mortar reclaimer: start waste liquid recycling can 1, carborundum underflow storage tank 14 and reclaim the electric mixer of being installed in the liquid storage tank 25.
302, waste mortar separate to be purified: start pumping equipment 1 and by waste liquid pumping line 15 with pumpback and be stored in waste mortars in the waste liquid recycling can 11 and be pumped to described waste mortar and separate in the equipment for purifying and separate purification, and obtain recycling carborundum and recycling slurries, and isolated recycling carborundum and recycling slurries are stored to respectively in carborundum underflow storage tank 14 and the recovery liquid storage tank 25.
In the present embodiment, carry out waste mortar and separate when purifying, it is as follows that its waste mortar separates purification process:
3021, first-stage centrifugal is separated: by waste liquid pumping line 15 waste mortar of storing in the waste liquid recycling can 11 is pumped to and carries out the first-stage centrifugal separation in the centrifugal separation equipment 1, and the silicon carbide micro-powder of particle diameter in the described waste mortar>4.5 μ m is separated, the silicon carbide micro-powder of described particle diameter>4.5 μ m is recycling carborundum, and first-stage centrifugal is separated recycling carborundum and the pending liquid that the back obtains be stored to respectively in carborundum underflow storage tank 14 and the pending liquid storage tank 31, start carborundum underflow storage tank 14 and the pending liquid storage tank 31 interior electric mixers of being installed simultaneously.
3022, secondary centrifugation: send pipeline 20 to deliver to the pending liquid pumps of storage in the pending liquid storage tank 31 in the centrifugal separation equipment 2 21 and under 35 ℃~45 ℃ temperature conditions, carry out the secondary centrifugation by pending liquid pump, and the cutting liquid in the pending liquid and carborundum and silica flour are separated; The cutting liquid of centrifugal separation equipment 2 21 being separated by solid-liquid separating equipment further purifies simultaneously, and acquisition density is 1.13g/cm 3Recycling slurries, and the recycling slurries after solid-liquid separating equipment purified are stored to and reclaim in the liquid storage tank 25, and centrifugal separation equipment 2 21 and the isolated slurries that can not utilize of described solid-liquid separating equipment are stored in the waste liquid storage tank 23, start simultaneously and reclaim the electric mixer of being installed in liquid storage tank 25, pending liquid storage tank 31 and the waste liquid storage tank 23.
303, finished product cutting mortar is composite: start pumping equipment 2 32 and pumping equipment 4 34, and send pipeline 26 that recycling carborundum and the recycling slurries that separate in the step 302 after purifying all are pumped in the mortar product storage tank 1 with the recovery liquid pump by carborundum underflow pumping line 19, simultaneously according to the design proportioning of finished product cutting mortar and by carborundum underflow pumping line 19 with reclaim liquid pump and send pipeline 26 to be pumped to the recycling carborundum in the mortar product storage tank 1 and the quantity of recycling slurries, calculating needs to replenish silicon carbide micro-powder quantity and the cutting liquid quantity that provides, and replenish pipeline by described silicon carbide micro-powder and in mortar product storage tank 1, replenish the silicon carbide micro-powder that respective amount is provided and cut liquid with the additional pipeline of cutting liquid, uniformly mix by the electric mixer of installing in the mortar product storage tank 1 afterwards, obtaining finished product after composite, to cut mortar stand-by.
After the composite end of finished product cutting mortar, return step 1 again in the step 303, the mortar supply is carried out in circulation, the mortar recovery separates purification, composite and recycling with waste mortar.
To sum up, the actual separation when purifying, adopt the automatic sedimentation type centrifuge that the silicon carbide micro-powder of particle diameter in the waste mortar>4.5 μ m is separated earlier, and collect spendable silicon carbide micro-powder and pending liquid, then 35~45 ℃ adopt down draw ratios be 4.5 automatic sedimentation type centrifuge with pending liquid in carborundum and the silica flour of particle diameter<4.5 μ m separate with cutting liquid, further purify by flame filter press again and reclaim cutting liquid, obtain density and reach 1.13g/cm 3Recovery liquid, at last with the silicon carbide micro-powder of isolated particle diameter>4.5 μ m with reclaim liquid and mix, suitably replenish new silicon carbide micro-powder and new cutting liquid again and stir, promptly make finished product and cut mortar and deposit in the mortar product storage tank 1 for use.Afterwards, by feed system finished product is cut mortar and be supplied in many multi-line cutting machines 29, realize the supply process of cutting mortar recycling.
In the present embodiment, at first the new mortar of preparation 1200L in mortar product storage tank 1 continues to stir 30min to guarantee that carborundum reaches fine dispersion in the finished product cutting mortar; Open return valve 4 and supply pump 2 successively, treat that finished product cutting mortar flows into auxiliary reflux pipeline 5 from main service 3 by return valve 4, enter again in the mortar product storage tank 1 behind the 5min, open a service control valve 27 of being installed on the service 6 that leads to 1,2 and No. 3 multi-line cutting machine, make finished product cutting mortar inject the mortar jar 30 of multi-line cutting machine 20, close the service control valve 27 on the inverted U pipeline when reaching requirement, promptly finish automatic supply mortar process.1, finishes the cutting task behind 2 and No. 3 multi-line cutting machine 8h, start pumpback pump 9 this moment, open the pumpback pipeline control valve 28 on the waste liquid pumpback branch pipe(tube) 12 that leads to 1,2 and No. 3 multi-line cutting machine simultaneously, when little air to be had enters waste liquid pumpback branch pipe(tube) 12, close a pumpback pipeline control valve 28, finish the supply and the cyclic process of whole mortar.
Separate when purifying, adopt pumping equipment 1, waste liquid is separated into thick slurry of carborundum and the pending liquid of particle diameter>4.5 μ m with the waste mortar injection automatic sedimentation type centrifuge of 2000L/h flow with storage in the waste liquid recycling can 11; Afterwards with pumping equipment 2 32 with the 2000L/h flow with temperature be 35~45 ℃ pending liquid to inject draw ratio be 4.5 automatic sedimentation type centrifuge, to separate carborundum powder and the silica flour of particle diameter in the pending liquid<4.5 μ m, acquisition density is 1.13g/cm 3Recovery liquid, to reclaim liquid again and reclaim in carborundum (particle diameter>4.5 μ m) the injection mortar product storage tank 1 and fully mix, density measurement, new carborundum amount of calculate to need replenishing and new cutting liquid measure are also replenished pipeline and cutting liquid by carborundum and are replenished pipeline and replenish, and add fully to stir the 4h cutting mortar that gets product in the mortar product storage tank 1.In the above-mentioned multi-line cutting machine cutting process, mortar supply with whole operations of reclaiming two important steps with circulation realized online, carry out continuously.During practical operation, can adjust accordingly above-mentioned parameter according to the concrete needs of reality.
The above; it only is preferred embodiment of the present invention; be not that the present invention is imposed any restrictions, everyly any simple modification that above embodiment did, change and equivalent structure changed, all still belong in the protection domain of technical solution of the present invention according to the technology of the present invention essence.

Claims (10)

1. a multi-wire cutting machine mortar circulates and feed system, it is characterized in that: comprise mortar product storage tank (1), main service (3), auxiliary reflux pipeline (5), prop up service (6), waste liquid pumpback trunk line (10), waste liquid pumpback branch pipe(tube) (12), the waste liquid recycling can (11) that waste mortar after cutting is used to multi-line cutting machine (29) reclaims and stores, waste mortar is separated purification processes and extracts the recycling carborundum that can come into operation once more in the waste mortar and the waste mortar of recycling slurries separates equipment for purifying, the carborundum underflow storage tank (14) that recycling carborundum and recycling slurries are stored respectively and reclaim liquid storage tank (25), the recycling carborundum underflow pump of carborundum underflow storage tank (14) storage is delivered to the carborundum underflow pumping line (19) of mortar product storage tank (1), the recovery liquid pump that the recycling slush pump that will reclaim storage in the liquid storage tank (25) is delivered to mortar product storage tank (1) send pipeline (26), and in mortar product storage tank (1), replenish the cutting liquid that cutting liquid and silicon carbide micro-powder are provided and replenish pipeline and the additional pipeline of silicon carbide micro-powder; In the tank body of described mortar product storage tank (1), carborundum underflow storage tank (14), recovery liquid storage tank (25) and waste liquid recycling can (11) electric mixer is installed all; Described main service (3) is to acclivitous gradually pipeline one and the described angle α that is tilted between pipeline one and horizontal direction of being tilted to of liquid outlet by inlet 1Be 10 °<α 1<20 °; Described main service (3) joins with mortar product storage tank (1) liquid outlet;
The inlet that described waste mortar separates equipment for purifying joins by the liquid outlet of waste liquid pumping line (15) with waste liquid recycling can (11), the liquid outlet of one end of carborundum underflow pumping line (19) and carborundum underflow storage tank (14) joins and its other end stretches in the mortar product storage tank (1), and the recovery liquid pump send an end of pipeline (26) to join with the liquid outlet that reclaims liquid storage tank (25) and its other end stretches in the mortar product storage tank (1); Described waste liquid pumping line (15), carborundum underflow pumping line (19) and recovery liquid pump send and are separately installed with pumping equipment one (16), pumping equipment two (32) and pumping equipment four (34) on the pipeline (26), supply pump (2) is installed on the described main service (3), pumpback pump (9) is installed on the described waste liquid pumpback trunk line (10);
The liquid outlet of one end of described auxiliary reflux pipeline (5) and main service (3) join and the two between return valve (4) is installed, the other end of described auxiliary reflux pipeline (5) stretches in the mortar product storage tank (1);
A described main service (3) and a service (6) are communicated with to be formed to the mortar service of multi-line cutting machine (29) cutting with finished product cutting mortar is provided, described service (6) comprise vertically to service (6-1) and with the reverse U shape service (6-2) that vertically joins to service (6-1), one end of described reverse U shape service (6-2) is installed in that main service (3) is gone up and it communicates with main service (3), the other end of described reverse U shape service (6-2) and vertically joining and vertically in the lower end of service (6-1) stretches to the mortar jar (30) of multi-line cutting machine (29) to the upper end of service (6-1); A service control valve (27) is installed on the described reverse U shape service (6-2);
Described waste liquid pumpback trunk line (10) and waste liquid pumpback branch pipe(tube) (12) are communicated with to be formed the mortar pumpback pipeline of the waste mortar pumpback after multi-line cutting machine (29) the cutting use to waste liquid recycling can (11), described waste liquid pumpback branch pipe(tube) (12) comprise vertically to pumpback pipeline (12-1) and with the reverse U shape pumpback pipeline (12-2) that vertically joins to pumpback pipeline (12-1), one end of described reverse U shape pumpback pipeline (12-2) is installed in that waste liquid pumpback trunk line (10) is gone up and it communicates with waste liquid pumpback trunk line (10), the other end of described reverse U shape pumpback pipeline (12-2) and vertically joining and vertically in the lower end of pumpback pipeline (12-1) stretches to the mortar jar (30) of multi-line cutting machine (29) to the upper end of pumpback pipeline (12-1); A pumpback pipeline control valve (28) is installed on the described reverse U shape pumpback pipeline (12-2).
2. according to described multi-wire cutting machine mortar circulation of claim 1 and feed system, it is characterized in that: the described angle α that is tilted between pipeline one and horizontal direction 1Be 10 °<α 1<15 °.
3. according to claim 1 or 2 described multi-wire cutting machine mortar circulation and feed systems, it is characterized in that: the quantity of described multi-line cutting machine (29) is many, the quantity of described service (6) and waste liquid pumpback branch pipe(tube) (12) be a plurality of and the two quantity all the quantity with multi-line cutting machine (29) is identical, all identical and all parallel being installed on the main service (3) of the mounting means of a plurality of services (6), all identical and all parallel being installed on the waste liquid pumpback trunk line (10) of the mounting means of a plurality of waste liquid pumpback branch pipe(tube)s (12), the lower end of a plurality of services (6) and a plurality of waste liquid pumpback branch pipe(tube)s (12) stretches to respectively in the mortar jar (30) of many multi-line cutting machines (29).
4. one kind is utilized multi-wire cutting machine mortar circulation as claimed in claim 1 and the method that feed system circulates and supplies with mortar, it is characterized in that this method may further comprise the steps:
Step 1, mortar product are supplied with, and its supply process is as follows:
101, agitator starts in the mortar product storage tank: open the interior electric mixer of being installed of mortar product storage tank (1) and the finished product cutting mortar of storing in the mortar product storage tank (1) is carried out continuous stirring, open return valve (4) simultaneously, and close a service control valve (27) and a pumpback pipeline control valve (28);
102, supply pump starts and the backflow of mortar supply finished product cutting before mortar: start supply pump (2) the interior finished product cutting mortar of storing of mortar product storage tank (1) is pumped to main service (3), and be back in the mortar product storage tank (1) by the auxiliary reflux pipeline (5) that joins with main service (3), and by auxiliary reflux pipeline (5) finished product to be cut the return time that mortar refluxes in mortar product storage tank (1) be 3min~5min; After treating finished product cutting mortar backflow 3min~5min, closing volume valve (4);
103, finished product cutting mortar is supplied with: open a service control valve (27) of being installed on the service (6) that leads in the mortar jar (30) that needs supply multi-line cutting machine (29), and the finished product cutting mortar uninterrupted pumping of storing in the mortar product storage tank (1) is extremely needed to supply with in the mortar jar (30) of multi-line cutting machine (29) by a main service (3) and a service (6), when the finished product cutting mortar quantity in mortar jar (30) furnishes good supplies to demand, finish the mortar that needs to supply with multi-line cutting machine (29) and supply with process;
104, finished product cutting mortar refluxed after mortar was supplied with and finished: treat that the need supply multi-line cutting machines (29) described in the step 103 are when finishing cutting process, close supply pump (2) earlier and open return valve (4), close a service control valve (27) of being installed on the service (6) again, make the finished product cutting mortar that remains in this moment in the main service (3) all be back to automatically in the mortar product storage tank (1) by the main service (3) that is tilted to laying;
Step 2, mortar reclaim, and its removal process is as follows:
201, pumpback pump startup: after treating that the multi-line cutting machine described in the step 103 (29) is finished cutting process, open pumpback pump (9);
202, pumpback valve opening and waste mortar pumpback: after pumpback pump (9) starts, open a pumpback pipeline control valve (28) of being installed on the waste liquid pumpback branch pipe(tube) (12) that leads in the mortar jar (30) that needs pumpback multi-line cutting machine (29), and the continuous pumpback of waste mortar of the interior splendid attire of mortar jar (30) that will need pumpback multi-line cutting machine (29) by waste liquid pumpback trunk line (10) and waste liquid pumpback branch pipe(tube) (12) is to waste liquid recycling can (11), in the mortar jar (30) that will need pumpback multi-line cutting machine (29) waste mortar of splendid attire all find time and in waste liquid pumpback branch pipe(tube) (12), be drawn into air after till;
203, pumpback pump and pumpback valve closing: after treating in waste liquid pumpback branch pipe(tube) (12), to be drawn into air in the step 202, close a pumpback pipeline control valve (28) of being installed on pumpback pump (9) and the waste liquid pumpback branch pipe(tube) (12);
Step 3, waste mortar separate purification, composite and recycling, and it separates purification, composite and recycling process is as follows:
301, agitator starts in the mortar reclaimer: start waste liquid recycling can (11), carborundum underflow storage tank (14) and reclaim the electric mixer of being installed in the liquid storage tank (25);
302, waste mortar separate to be purified: start pumping equipment one (16) and by waste liquid pumping line (15) with pumpback and be stored in waste mortar in the waste liquid recycling can (11) and be pumped in the described waste mortar separation equipment for purifying and separate purification, and obtain recycling carborundum and recycling slurries, and isolated recycling carborundum and recycling slurries are stored to respectively in carborundum underflow storage tank (14) and the recovery liquid storage tank (25);
303, finished product cutting mortar is composite: start pumping equipment two (32) and pumping equipment four (34), and send pipeline (26) that recycling carborundum and the recycling slurries that separate in the step 302 after purifying all are pumped in the mortar product storage tank (1) with the recovery liquid pump by carborundum underflow pumping line (19), send pipeline (26) to be pumped to the interior recycling carborundum of mortar product storage tank (1) and the quantity of recycling slurries according to the design proportioning of finished product cutting mortar and by carborundum underflow pumping line (19) and recovery liquid pump simultaneously, calculating needs to replenish silicon carbide micro-powder quantity and the cutting liquid quantity that provides, and replenish pipeline by described silicon carbide micro-powder and in mortar product storage tank (1), replenish the silicon carbide micro-powder that respective amount is provided and cut liquid with the additional pipeline of cutting liquid, uniformly mix by the electric mixer of installing in the mortar product storage tank (1) afterwards, obtaining finished product after composite, to cut mortar stand-by;
After the composite end of finished product cutting mortar, return step 1 again in the step 303, the mortar supply is carried out in circulation, the mortar recovery separates purification, composite and recycling with waste mortar.
5. according to described multi-wire cutting machine mortar circulation of claim 4 and supply method, it is characterized in that: the circulation of described multi-wire cutting machine mortar and feed system comprise also being vertically to what lay and return clean pipeline (8) and be installed in back time clean valve (7) on the clean pipeline (8) that the upper end of described time clean pipeline (8) and main service (3) join and its lower end stretches in the mortar product storage tank (1);
When opening return valve (4) in the step 101, close back clean valve (7); When closing the service control valve of being installed on the service (6) (27) in the step 104, open back clean valve (7), make the finished product cutting mortar that remains in this moment in the main service (3) all be back to automatically in the mortar product storage tank (1) by main service (3) and time clean pipeline (8) that is tilted to laying.
6. according to claim 4 or circulation of 5 described multi-wire cutting machine mortars and supply methods, it is characterized in that: described waste liquid pumpback trunk line (10) for by inlet to downward-sloping gradually being tilted to pipeline two and being tilted to angle α between pipeline two and horizontal direction of liquid outlet 2Be 10 °<α 2<20 °;
Behind the pumpback pipeline control valve (28) that closing described in the step 203 installed on pumpback pump (9) and the waste liquid pumpback branch pipe(tube) (12), and treat the waste mortar of pumpback to the waste liquid pumpback branch pipe(tube) (12) in step 202, be drawn into move in the waste liquid pumpback trunk line (10) automatically under air effect waste liquid pumpback branch pipe(tube) (12) in after, move to the interior waste mortar of waste liquid pumpback trunk line (10) and all flow to automatically in the waste liquid recycling can (11) by the waste liquid pumpback trunk line (10) that is tilted to laying.
7. according to claim 4 or 5 described multi-wire cutting machine mortar circulation and supply methods, it is characterized in that: described multi-wire cutting machine mortar circulation also comprises pending liquid storage tank (31) and the waste liquid storage tank (23) that can not utilize slurries to store to not coming into operation once more with feed system, in described pending liquid storage tank (31) and the waste liquid storage tank (23) electric mixer is installed all; It is the two-stage centrifugal separation equipment that described waste mortar separates equipment for purifying, and it comprises the waste mortar of being stored in the waste liquid recycling can (11) is carried out centrifugation and obtains recycling carborundum and centrifugal separation equipment two (21) that the centrifugal separation equipment of pending liquid one (13) and described pending liquid is further separated and obtains recycling slurries and can not utilize slurries; Described carborundum underflow storage tank (14) and pending liquid storage tank (31) join with two liquid outlets that are laid in centrifugal separation equipment one (13) bottom by carborundum recovery channel (17) and pending liquid recovery channel (18) respectively; The liquid outlet of described pending liquid storage tank (31) send the pipeline (20) and the inlet of centrifugal separation equipment two (21) to join by pending liquid pump, two liquid outlets of centrifugal separation equipment two (21) join with waste liquid storage tank (23) and recovery liquid storage tank (25) by waste liquid circulation duct (22) and recovery liquid circulation duct (24) respectively, and described pending liquid pump send pumping equipment three (33) is installed on the pipeline (20).
8. according to described multi-wire cutting machine mortar circulation of claim 7 and supply method, it is characterized in that: described multi-wire cutting machine mortar circulation comprises also that with feed system it is 1.13g/cm that the recycling slurries that are installed in after separating on the recovery liquid circulation duct (24) and to centrifugal separation equipment two (21) further purify and obtain density 3The solid-liquid separating equipment of recycling slurries;
Carry out waste mortar in the step 302 and separate when purifying, it is as follows that its waste mortar separates purification process:
3021, first-stage centrifugal is separated: by waste liquid pumping line (15) waste mortar of storing in the waste liquid recycling can (11) is pumped to and carries out the first-stage centrifugal separation in the centrifugal separation equipment one (13), and the silicon carbide micro-powder of particle diameter in the described waste mortar>4.5 μ m is separated, the silicon carbide micro-powder of described particle diameter>4.5 μ m is recycling carborundum, and first-stage centrifugal is separated recycling carborundum and the pending liquid that the back obtains be stored to respectively in carborundum underflow storage tank (14) and the pending liquid storage tank (31), start the interior electric mixer of being installed of carborundum underflow storage tank (14) and pending liquid storage tank (31) simultaneously;
3022, secondary centrifugation: send pipeline (20) to deliver to the pending liquid pump of storage in the pending liquid storage tank (31) in the centrifugal separation equipment two (21) and under 35 ℃~45 ℃ temperature conditions, carry out the secondary centrifugation by pending liquid pump, and the cutting liquid in the pending liquid and carborundum and silica flour are separated; The cutting liquid of centrifugal separation equipment two (21) being separated by solid-liquid separating equipment further purifies simultaneously, and acquisition density is 1.13g/cm 3Recycling slurries, and the recycling slurries after solid-liquid separating equipment purified are stored to and reclaim in the liquid storage tank (25), and centrifugal separation equipment two (21) and the isolated slurries that can not utilize of described solid-liquid separating equipment are stored in the waste liquid storage tank (23), start simultaneously and reclaim the electric mixer of being installed in liquid storage tank (25), pending liquid storage tank (31) and the waste liquid storage tank (23).
9. according to described multi-wire cutting machine mortar circulation of claim 8 and supply method, it is characterized in that: described centrifugal separation equipment one (13) and centrifugal separation equipment two (21) are the automatic sedimentation type centrifuge, and described solid-liquid separating equipment is a flame filter press.
10. according to described multi-wire cutting machine mortar circulation of claim 8 and supply method, it is characterized in that: described multi-wire cutting machine mortar circulation also comprises master controller with feed system, described pumping equipment one (16), pumping equipment two (32), pumping equipment three (33), pumping equipment four (34), supply pump (2) and pumpback pump (9) are electrodynamic pump, described return valve (4), return clean valve (7), prop up service control valve (27) and prop up a pumpback pipeline control valve (28) and be solenoid electric valve, described pumping equipment one (16), pumping equipment two (32), pumping equipment three (33), pumping equipment four (34), supply pump (2), pumpback pump (9), return valve (4), return clean valve (7), prop up service control valve (27), prop up pumpback pipeline control valve (28), centrifugal separation equipment one (13) and centrifugal separation equipment two (21) and mortar product storage tank (1), waste liquid recycling can (11), carborundum underflow storage tank (14), pending liquid storage tank (31), the electric mixer of being installed in waste liquid storage tank (23) and the recovery liquid storage tank (25) all joins with master controller and controls by master controller.
CN201110009506A 2011-01-17 2011-01-17 System and method for recycling and supplying mortar to multi-wire cutting machines Expired - Fee Related CN102059751B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102294760A (en) * 2011-07-29 2011-12-28 英利能源(中国)有限公司 Silicon block size cutting dynamic replacing system
CN102343633A (en) * 2011-09-27 2012-02-08 苏州大学 Slicing device
CN102528956A (en) * 2012-02-08 2012-07-04 上海晔宗光伏科技有限公司 Modular combined on-line recycling treatment system for drained slurry generated by cutting silicon crystal using multi-wire-saw
CN102649295A (en) * 2012-06-07 2012-08-29 无锡隆基硅材料有限公司 On-line mortar recycling system
CN102657976A (en) * 2012-05-28 2012-09-12 宜兴中瑞光伏有限公司 Secondary filter-press separating device and separating method for cutting fluid
CN102909794A (en) * 2011-08-01 2013-02-06 苏州东泰太阳能科技有限公司 Multi-wire cutting process for silicon wafers
CN103085184A (en) * 2011-10-28 2013-05-08 江苏阳帆机电设备制造有限公司 Mortar recycling device
CN103660050A (en) * 2012-09-03 2014-03-26 苏州协鑫光伏科技有限公司 Silicon wafer multi-wire cutting machine diamond wire cutting liquid system
CN103934910A (en) * 2014-05-08 2014-07-23 常州有则科技有限公司 Heat cycle mortar online recycling machine
CN104258992A (en) * 2014-10-30 2015-01-07 台州市双辉机械设备有限公司 Magnetic mud separation system of cutting equipment and separation method
CN105269703A (en) * 2015-10-30 2016-01-27 浙江辉弘光电能源有限公司 Cutting fluid circulation device used for silicon wafer sawing machine
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CN105773430A (en) * 2016-04-29 2016-07-20 浙江金瑞泓科技股份有限公司 On-line mortar recycling device
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CN112008903A (en) * 2020-09-03 2020-12-01 晶海洋半导体材料(东海)有限公司 Cutting fluid supply device and silicon wafer cutting equipment

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09168971A (en) * 1995-10-04 1997-06-30 Nippei Toyama Corp Slurry management system and slurry managing method for wire saw
JPH10202497A (en) * 1997-01-13 1998-08-04 Shin Etsu Handotai Co Ltd Drive restarting method at time of wire cutting of semiconductor slice device and its device
CN1413807A (en) * 2002-09-27 2003-04-30 广东科达机电股份有限公司 Backwater control system of water cut-off machine
JP2008200772A (en) * 2007-02-16 2008-09-04 Sharp Corp Wire saw, and method of reuse of slurry using the same
JP2008213111A (en) * 2007-03-06 2008-09-18 Sharp Corp Multi-wire saw and slurry supply method
CN201279740Y (en) * 2008-10-24 2009-07-29 陈波 Automatic sand draining mechanism of water cutting equipment
US20090293369A1 (en) * 2008-05-30 2009-12-03 Cabot Microeletronics Corporation Wire saw slurry recycling process
WO2010111291A2 (en) * 2009-03-25 2010-09-30 Applied Materials, Inc. Point of use recycling system for cmp slurry

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09168971A (en) * 1995-10-04 1997-06-30 Nippei Toyama Corp Slurry management system and slurry managing method for wire saw
JPH10202497A (en) * 1997-01-13 1998-08-04 Shin Etsu Handotai Co Ltd Drive restarting method at time of wire cutting of semiconductor slice device and its device
CN1413807A (en) * 2002-09-27 2003-04-30 广东科达机电股份有限公司 Backwater control system of water cut-off machine
JP2008200772A (en) * 2007-02-16 2008-09-04 Sharp Corp Wire saw, and method of reuse of slurry using the same
JP2008213111A (en) * 2007-03-06 2008-09-18 Sharp Corp Multi-wire saw and slurry supply method
US20090293369A1 (en) * 2008-05-30 2009-12-03 Cabot Microeletronics Corporation Wire saw slurry recycling process
CN201279740Y (en) * 2008-10-24 2009-07-29 陈波 Automatic sand draining mechanism of water cutting equipment
WO2010111291A2 (en) * 2009-03-25 2010-09-30 Applied Materials, Inc. Point of use recycling system for cmp slurry

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《制造业自动化》 20100630 党兰焕,等 多线切割机砂浆控制系统研究 第32卷, 第6期 2 *

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CN102294760A (en) * 2011-07-29 2011-12-28 英利能源(中国)有限公司 Silicon block size cutting dynamic replacing system
CN102909794A (en) * 2011-08-01 2013-02-06 苏州东泰太阳能科技有限公司 Multi-wire cutting process for silicon wafers
CN102343633A (en) * 2011-09-27 2012-02-08 苏州大学 Slicing device
CN102343633B (en) * 2011-09-27 2014-11-05 苏州大学 Slicing device
CN103085184A (en) * 2011-10-28 2013-05-08 江苏阳帆机电设备制造有限公司 Mortar recycling device
CN102528956A (en) * 2012-02-08 2012-07-04 上海晔宗光伏科技有限公司 Modular combined on-line recycling treatment system for drained slurry generated by cutting silicon crystal using multi-wire-saw
CN102657976A (en) * 2012-05-28 2012-09-12 宜兴中瑞光伏有限公司 Secondary filter-press separating device and separating method for cutting fluid
CN102649295A (en) * 2012-06-07 2012-08-29 无锡隆基硅材料有限公司 On-line mortar recycling system
CN103660050B (en) * 2012-09-03 2016-03-09 苏州协鑫光伏科技有限公司 Multi-wire cutting machine for silicon wafer diamond wire cutting liquid system
CN103660050A (en) * 2012-09-03 2014-03-26 苏州协鑫光伏科技有限公司 Silicon wafer multi-wire cutting machine diamond wire cutting liquid system
CN103934910A (en) * 2014-05-08 2014-07-23 常州有则科技有限公司 Heat cycle mortar online recycling machine
CN103934910B (en) * 2014-05-08 2015-11-04 常州有则科技有限公司 Thermal cycle mortar online recycling machine
CN104258992A (en) * 2014-10-30 2015-01-07 台州市双辉机械设备有限公司 Magnetic mud separation system of cutting equipment and separation method
CN105269698A (en) * 2015-10-30 2016-01-27 浙江辉弘光电能源有限公司 Cutting fluid circulating device for multi-wire sawing machine
CN105269703A (en) * 2015-10-30 2016-01-27 浙江辉弘光电能源有限公司 Cutting fluid circulation device used for silicon wafer sawing machine
CN105773430A (en) * 2016-04-29 2016-07-20 浙江金瑞泓科技股份有限公司 On-line mortar recycling device
CN105773430B (en) * 2016-04-29 2017-08-25 浙江金瑞泓科技股份有限公司 The device that a kind of online mortar is recycled
CN107009534A (en) * 2017-05-12 2017-08-04 江苏有则科技集团有限公司 A kind of liquid-phase treatment system
CN108972920A (en) * 2018-07-20 2018-12-11 江苏吉星新材料有限公司 A kind of central liquid supply system and its technique of intelligence sapphire slices system
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CN112008903A (en) * 2020-09-03 2020-12-01 晶海洋半导体材料(东海)有限公司 Cutting fluid supply device and silicon wafer cutting equipment

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