CN102056474A - Component installation device - Google Patents

Component installation device Download PDF

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Publication number
CN102056474A
CN102056474A CN2010105435247A CN201010543524A CN102056474A CN 102056474 A CN102056474 A CN 102056474A CN 2010105435247 A CN2010105435247 A CN 2010105435247A CN 201010543524 A CN201010543524 A CN 201010543524A CN 102056474 A CN102056474 A CN 102056474A
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China
Prior art keywords
adsorption mouth
drive source
moving body
output
voice coil
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CN2010105435247A
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Chinese (zh)
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CN102056474B (en
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平冈浩次
高添秀一
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Juki Corp
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Juki Corp
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Publication of CN102056474B publication Critical patent/CN102056474B/en
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Abstract

The invention provides a component installation device, which can prevent the shaking up and down due to the separation of a rotating housing and a stopper, with the separation being caused by the inertia force generated by the speeding up and down of a motor moving up and down. The component installation device is used for installing absorbed components. The component installation device comprises a moving body which can be supported and be freely lifted, a first drive source enabling the moving body to lift, an adsorbing mouth which absorbing components by means of a front part, a second drive source, which enables the moving body to lift and is used as the drive source by which the components absorbed by the absorbing mouth can pressurize and be installed on an installing object, a transmission structure which transmits the drive of the second drive source to the absorbing mouth, a stopper, which is disposed on the moving body, and when the absorbing mouth declines abuts against the transmission structure at a regulated height to prevent the absorbing mouth from declining, and a control unit, which enables the output of the second drive source to increase and enables the stress force applied to the stopper to increase during the speeding up when the moving body only driven by the first drive power descends or during the speeding down when the moving body only driven by the first drive power rises.

Description

Apparatus for mounting component
Technical field
The present invention relates to a kind of apparatus for mounting component.
Background technology
Known a kind of electronic component mounting apparatus that electronic unit is installed to substrate.
Electronic component mounting apparatus has boarded head, and it has adsorption mouth, can move freely on X-Y plane.Receive electronic unit by adsorption mouth from feeder utilization absorption, boarded head is moved to the parts installation site of substrate, and make adsorption mouth discharge electronic unit, carry out the lift-launch of electronic unit thus.
On boarded head, be provided with adsorption mouth is risen, the mechanism that when the reception of electronic unit and when carrying adsorption mouth is descended.Specifically, boarded head has: move up and down motor, it moves up and down liftably supported movable carriage; Rotary shell, it is rotatable and can be supported up or down with respect to movable carriage, and can support adsorption mouth up or down; Voice coil motor, its driving shaft links with movable carriage, by moving up and down of driving shaft, via rotary shell adsorption mouth is moved up and down; And load cell, it is arranged on the rotary shell, and the load that the leading section in adsorption mouth is produced detects.
In above-mentioned boarded head, when substrate carries electronic unit, in order not make the rotary shell up-down vibration, utilize voice coil motor that this rotary shell is moved downwards, and with the retainer butt, under this state, utilize to move up and down motor movable carriage is descended.And, if utilize leading section that load cell detects adsorption mouth via electronic unit and substrate contacts, voice coil motor driven, to ascent direction so that detect the targeted loads that load becomes regulation, load regulation when carrying out component mounting thus (for example, with reference to patent documentation 1).
Patent documentation 1: TOHKEMY 2005-32860 communique
Summary of the invention
Yet, in existing electronic component mounting apparatus, as shown in figure 20, rise, thereby rotary shell is moved downwards by the output that makes voice coil motor, continue to push to retainer.
But, move up and down motor driven if make, then motor reel in the moving of downward direction, quicken or upward to move under the situation of deceleration, can be applied with the inertia force of direction to rotary shell, therefore, if voice coil motor is not pushed rotary shell downwards with the power greater than this inertia force, then rotary shell can separate with retainer and rocking about can't suppressing, and the precision during to component identification and lift-launch makes a very bad impression.
Therefore, the present invention proposes in order to solve above-mentioned problem, its purpose is, a kind of apparatus for mounting component is provided, and it can suppress to separate teetertottering of causing with retainer owing to the caused inertia force of the acceleration and deceleration that move up and down motor makes rotary shell.
In the technical scheme 1 record invention be a kind of apparatus for mounting component, it has: moving body, but its free lifting be supported on the framework; The 1st drive source, its output makes the driving of described moving body lifting; Adsorption mouth, but it is set to utilize leading section that parts are adsorbed with respect to described moving body free lifting; The 2nd drive source, it makes described adsorption mouth lifting, the drive source when installing as being pressurizeed on the mounting object thing by the parts of described adsorption mouth absorption; Transmission mechanism, it links described the 2nd drive source and described adsorption mouth, with described the 2nd drive source drives to described adsorption mouth transmission; And retainer, it is arranged on the described moving body, when described adsorption mouth descends, height and described transmission mechanism butt in regulation, thereby prevent the decline of described adsorption mouth, this apparatus for mounting component will be installed on the mounting object thing by the parts of described adsorption mouth absorption, it is characterized in that, has control unit, it is only in the acceleration when the described moving body that is undertaken by described the 1st drive source descends or in the deceleration when rising, the output of described the 2nd drive source is risen, make and utilize described transmission mechanism to increase to the plus-pressure that described retainer applies.
The invention of record is characterised in that in the apparatus for mounting component that technical scheme 1 is put down in writing, to have in the technical scheme 2: the load detecting unit, and the load that the parts on the described adsorption mouth of its subtend apply detects; And the 2nd control unit, it is under the situation of the threshold value that is surpassed regulation by the detected load in described load detecting unit, the output of described the 2nd drive source is risen, make and utilize described transmission mechanism to increase to the plus-pressure that described retainer applies, described the 2nd control unit, when the acceleration and deceleration of the described moving body that is undertaken by described the 1st drive source finish to become state with the certain speed lifting, make the output before the output of described the 2nd drive source returns to described moving body acceleration and deceleration.
In the technical scheme 3 record invention be a kind of apparatus for mounting component, it has: moving body, but its free lifting be supported on the framework; The 1st drive source, its output makes the driving of described moving body lifting; Adsorption mouth, but it is set to utilize leading section that parts are adsorbed with respect to described moving body free lifting; The 2nd drive source, it makes described adsorption mouth lifting, becomes will be pressurizeed on the mounting object thing by the parts of described adsorption mouth absorption and drive source when installing; Transmission mechanism, it links described the 2nd drive source and described adsorption mouth, with described the 2nd drive source drives to described adsorption mouth transmission; And retainer, it is arranged on the described moving body, when described adsorption mouth descends, at height and the described transmission mechanism butt of regulation, thereby prevent the decline of described adsorption mouth, this apparatus for mounting component will be installed on the mounting object thing by the parts that described adsorption mouth is adsorbed, it is characterized in that, have: auxiliary pressue device, it utilizes and the different drive source of described the 2nd drive source, and the parts on the described adsorption mouth are applied plus-pressure; And Auxiliary Control Element, it only in the acceleration when the described moving body that is undertaken by described the 1st drive source descends or in the deceleration when rising, drives described auxiliary pressue device, and the plus-pressure to the parts on the described adsorption mouth is increased.
The effect of invention
According to the invention of record in the technical scheme 1, control unit only in the acceleration when the moving body that undertaken by the 1st drive source descends or in the deceleration when rising, rises the output of the 2nd drive source, makes and utilizes transmission mechanism to increase to the plus-pressure that retainer applies.
Thus, can only cause when teetertottering, plus-pressure is increased,, can realize high-precision component identification and lift-launch so can suppress to rock transmission mechanism is separated with moving body by the caused inertia force of the acceleration and deceleration of the 1st drive source.
According to the invention of record in the technical scheme 2, under the situation of the threshold value that is surpassed regulation by the detected load in load detecting unit, the 2nd control unit rises the output of the 2nd drive source, makes and utilizes transmission mechanism to increase to the plus-pressure that retainer applies.
Thus, the 2nd control unit, when the acceleration and deceleration of the moving body that is undertaken by the 1st drive source finish to become with the certain speed lifting, make the output of the 2nd drive source return to the preceding output of moving body acceleration and deceleration, therefore, can prevent to realize high-precision component identification and lift-launch because of applying the microvibration that unnecessary power produces.
According to the invention of record in the technical scheme 3, Auxiliary Control Element only in the acceleration when the moving body that undertaken by the 1st drive source descends or in the deceleration when rising, drives auxiliary pressue device, and plus-pressure is increased.
Thus, between the deceleration period when accelerating period when the moving body that is undertaken by the 1st drive source descends or rising, to transmission mechanism effect inertia force, therefore, can pass through the control of the auxiliary pressue device of Auxiliary Control Element, suppress rocking of transmission mechanism, can realize high-precision component identification and lift-launch.
Description of drawings
Fig. 1 is the oblique view of apparatus for mounting component.
Fig. 2 is the sectional side view of the lowering or hoisting gear of the state that separates with retainer of adsorption mouth.
Fig. 3 is the sectional side view of lowering or hoisting gear of the state of adsorption mouth and retainer butt.
Fig. 4 is the block diagram of the control structure of expression lowering or hoisting gear.
Fig. 5 is the framework of the control structure of expression voice coil motor.
Fig. 6 is the flow chart of the drive controlling of adsorption mouth.
Fig. 7 is the sequential chart of the output control of voice coil motor.
The flow chart of the Current Control when Fig. 8 is the acceleration when descending of movable carriage.
The flow chart of the Current Control when Fig. 9 is the deceleration when rising of movable carriage.
Figure 10 is the block diagram of the control structure of the voice coil motor of apparatus for mounting component in expression the 2nd execution mode.
Figure 11 is the sequential chart of the output control of voice coil motor in the 2nd execution mode.
Figure 12 is the flow chart of the Current Control the during acceleration and deceleration during movable carriage lifting in the 2nd execution mode.
Figure 13 is the sectional side view of the lowering or hoisting gear of the state that adsorption mouth is separated with retainer in the 3rd execution mode.
Figure 14 is the sectional side view of the lowering or hoisting gear of the state of adsorption mouth and retainer butt in the variation.
Figure 15 is the schematic diagram that utilizes as auxiliary pressue device in the variation under the solenoidal situation.
Figure 16 is the schematic diagram that utilizes as auxiliary pressue device in the variation under the situation of cam.
Figure 17 is the schematic diagram that utilizes as auxiliary pressue device in the variation under the situation of 2 permanent magnets.
Figure 18 is the schematic diagram that utilizes as auxiliary pressue device in the variation under the situation of electromagnet and permanent magnet.
Figure 19 is the schematic diagram that utilizes as auxiliary pressue device in the variation under the situation of cam and 2 magnets.
Figure 20 is the sequential chart of the output control of the voice coil motor in the existing apparatus for mounting component.
Embodiment
The execution mode of apparatus for mounting component involved in the present invention is described.
(the 1st execution mode)
The structure of<apparatus for mounting component 〉
As shown in Figure 1, apparatus for mounting component 100 is devices that the electronic unit (parts) that will supply with from assembly supply device is installed to substrate (mounting object thing).
Fig. 1 is the oblique view of electronic component mounting apparatus 100.Below, as shown shown in, with the substrate throughput direction on the horizontal plane as X-direction, will with the direction of substrate throughput direction quadrature as Y direction, will with the vertical of their quadratures as Z-direction.
Electronic component mounting apparatus 100 is the devices that carry out various electro part carryings to substrate, have as shown in Figure 1: two groups of parts supply units, they are made of a plurality of electronic unit feeders 101 and feeder resettlement section 102, this electronic unit feeder 101 is supplied with the electronic unit that is carried, and this feeder resettlement section 102 is arranged and kept a plurality of electronic unit feeders 101; Substrate supply unit 103, it is along the X-direction conveying substrate; Substrate maintaining part 104, it is used for carrying out the electro part carrying operation to the substrate transport path that is arranged on this substrate supply unit 103 substrate midway; Lowering or hoisting gear 10, it liftably keeps 3 adsorption mouth 12 respectively; Boarded head 106, it fixes each lowering or hoisting gear 10, carries out the maintenance of electronic unit; As the X-Y portal frame 107 of boarded head travel mechanism, it drives conveying with boarded head 106 to comprising two groups of parts supply units and substrate maintaining part 104 optional position in interior operating area; Be a plurality of CCD cameras 108 as the shooting unit of 3 in this example, it carries on boarded head 106, and the electronic unit that is adsorbed mouth 12 absorption is taken; Take reflective mirror 120, it can utilize CCD camera 108 to take the image of the vertical lower that remains on the electronic unit on the adsorption mouth 12; And control unit 110, it carries out the action control of the each several part of apparatus for mounting component 100.
The control unit 110 of electronic component mounting apparatus 100 makes the electronic unit transport unit 101a attract electrons parts of each adsorption mouth 12 from electronic unit feeder 101.In addition, control unit 110, take the captured image data that obtains according to utilizing 108 pairs of each adsorption mouth 12 adsorbed electronic units of each CCD camera, carry out image processing, obtaining electronic unit is the angle at center with respect to the position of adsorption mouth leading section and with the center line of adsorption mouth, carry out adsorption mouth 12 with respect to the positioning correcting of substrate and make adsorption mouth 12 rotations and carry out the angle correct of electronic unit, thereby carry out the installation and control of electronic unit.
(lowering or hoisting gear of adsorption mouth)
Fig. 2 is the sectional side view of the lowering or hoisting gear 10 of adsorption mouth 12.As shown in Figure 2, the lowering or hoisting gear 10 of adsorption mouth 12 has: as the main body frame 11 of framework, it is fixedly supported on the boarded head 106; Adsorption mouth 12, it remains on the adsorption mouth retainer 13, utilizes its leading section absorption to keep electronic unit C; As the movable carriage 14 of moving body, it can be supported on the main body frame 11 up or down; The 1st moves up and down unit 20, and it drives movable carriage 14 along the vertical direction; The 2nd moves up and down unit 30, and it is arranged on the movable carriage 14, and adsorption mouth 12 is driven along the vertical direction via adsorption mouth retainer 13 from this movable carriage 14; Negative pressure feeding unit 40, it supplies with negative pressure to adsorption mouth 12; As the load cell 15 of load detecting unit, it detects the load that applies to adsorption mouth 12; And anglec of rotation regulon 50, it is the center with axle along the vertical direction, carries out the anglec of rotation of adsorption mouth 12 and regulates.Below, describe each several part in detail.
Main body frame 11 as noted above being fixedly supported on the boarded head 106 are carried to the receiving position of for example electronic unit C and the loading position of substrate along X-Y plane.
Movable carriage 14 can be supported on the bottom of main body frame 11 up or down via straight line guide portion 19.This movable carriage 14 is set at the 1st on the main body frame 11 and moves up and down unit 20 and drive along the vertical direction.
The 1st moves up and down unit 20 has: revolvingly driven type move up and down motor 21 (the 1st drive source), it is on the top of main body frame 11, with the state configuration of output shaft towards the below; Coding 22, it detects the anglec of rotation tolerance of motor; Ballscrew shaft 23, it links via shaft coupling and the output shaft that moves up and down motor 21, with state along the vertical direction, can be supported on the main body frame 11 with rotating freely; And ball-screw nut 24, it utilizes this ballscrew shaft 23 to apply and moves up and down.
Ball-screw nut 24 is fixed on the movable carriage 14, drives by the rotation that moves up and down motor 21, and is corresponding with anglec of rotation tolerance and carry out the location of the above-below direction of movable carriage 14.In addition, to control unit 110 (with reference to Fig. 4) output, control unit 110 can be discerned the current location of movable carriage 14 based on detection signal to encoder 22 with its detection signal, and moves up and down the action control of motor 21.
Adsorption mouth 12 is tubular bodies that the bottom front end more carefully forms, so that its leading section adsorbs maintenance towards the state of electronic unit C to electronic unit C.The upper end of adsorption mouth 12 and adsorption mouth retainer 13 link.
Adsorption mouth retainer 13 is arranged on the bottom of suction nozzle shaft 41 described later, is the cylindrical body that adsorption mouth 12 can freely be installed in the bottom with dismantling.
Negative pressure feeding unit 40 has: suction nozzle shaft 41, and its bottom and adsorption mouth retainer 13 link; And seal member 42, the upper end of itself and this suction nozzle shaft 41 links.Wherein, seal member 42 can connect not shown asepwirator pump or injector etc. as negative pressure source, and this negative pressure source is supplied with the negative pressure that is used to make adsorption mouth 12 attract electrons parts.
Suction nozzle shaft 41 adopts following structure, that is, its upper end extends near the top of main body frame 11, links via spline structure described later and anglec of rotation regulon 50, applies spinning movement by anglec of rotation regulon 50.That is, thus, can apply with the vertical above-below direction to adsorption mouth 12 is the spinning movement of axle, regulate adsorbed electronic unit towards.
In addition, the bottom of suction nozzle shaft 41 utilizes the air bearing 43 that is arranged on the movable carriage 14 to support, and can rotate around the axle of vertical above-below direction and move up and down.Air bearing 43 is internal diameter sleeves more bigger than the lower outer diameter of suction nozzle shaft 41, by to and suction nozzle shaft 41 between the gap air supply, suction nozzle shaft 41 can be remained on its center.Because above-mentioned air bearing 43 supports suction nozzle shaft 41 in the noncontact mode,, suction nozzle shaft 41 successfully is rotated and moves up and down so can not produce friction.
Anglec of rotation regulon 50 has: angular adjustment motor 51 (rotary driving source), and it is on the top of main body frame 11, with the state configuration of output shaft towards the below; Encoder 52, it detects the anglec of rotation tolerance of motor; And splined nut 53, its bottom via the output shaft of shaft coupling and angular adjustment motor 51 links.
Above-mentioned angular adjustment motor 51 and splined nut 53, be configured in above-mentioned suction nozzle shaft 41 concentric position on, the outer peripheral face on the top of suction nozzle shaft 41 becomes the splined shaft chimeric with splined nut 53.Utilize above-mentioned splined shaft and splined nut 53, constitute spline structure.
Thus, suction nozzle shaft 41 is applied in the moment of torsion of angular adjustment motor 51, and can move up and down with respect to angular adjustment motor 51 and splined nut 53.
On the other hand, encoder 52 is exported the anglec of rotation tolerance of the output shaft of angular adjustment motor 51 to control unit 110, and control unit 110 can be rotated drive controlling based on this, so that the rotation that angular adjustment motor 51 produces the predetermined angular amounts.Its result, the rotation of carrying out adsorption mouth 12 from the output shaft of angular adjustment motor 51 via splined nut 53, suction nozzle shaft 41 and adsorption mouth retainer 13 drives, can regulate adsorption mouth 12 the adsorbed maintenance of leading section electronic unit C towards.
The 2nd moves up and down unit 30 has: voice coil motor 31 (the 2nd drive source), and itself and suction nozzle shaft 41 disposed adjacent are fixedly mounted on the top of movable carriage 14, have the output shaft that carries out reciprocating action along the vertical above-below direction; Carriage 32, its drop support keep load cell 15 on the bottom of the output shaft 31a of voice coil motor 31; Load arm 33, one end and suction nozzle shaft 41 link, and the other end is supported on the carriage 32; Pressing spring 34, it is arranged between load arm 33 and the load cell 15; And support spring 35, it is arranged between load arm 33 and the carriage 32.
One end of load arm 33 links via radial bearing 36 centre position with suction nozzle shaft 41, allows that this suction nozzle shaft 41 rotate around vertical axis, and on the vertical above-below direction, suction nozzle shaft 41 and load arm 33 move up and down integratedly.That is, utilize load arm 33 and radial bearing 36, the driving of voice coil motor 31 is transmitted to adsorption mouth 12.Therefore, by having load arm 33 and radial bearing 36 constitutes transmission mechanism 39.
In addition, load arm 33 is arranged on the upside of above-mentioned air bearing 43, become following structure, promptly, if adsorption mouth 12 and suction nozzle shaft 41 are descended with respect to movable carriage 14, then the upper end of load arm 33 and air bearing 43 is at the height butt of regulation, and further downwards the down maneuver of restriction.With reference to Fig. 3.That is, air bearing 43 has the effect as retainer, and restricted passage the 2nd moves up and down the down maneuver of the adsorption mouth 12 of carrying out unit 30.
Carriage 32 is the frame shape of rectangle, has top board 32a respect to one another and base plate 32b, and the bottom of the output shaft of the upper surface of top board 32a and voice coil motor 31 is fixedly connected, at the lower surface of top board 32a, fixedly installs load cell 15 down.In addition, the other end of load arm 33 between the lower surface as the load detecting face of the upper surface of the other end of this load arm 33 and load cell 15, disposes above-mentioned pressing spring 34 between the top board 32a and base plate 32b of carriage 32.In addition, between the upper surface of the base plate 32b of the lower surface of the other end of load arm 33 and carriage 32, dispose above-mentioned support spring 35.
By adopting the configuration that load arm 33 is utilized spring 34,35 clampings up and down, can utilize load cell 15 to detect the driving of the output shaft 31a by voice coil motor 31 and the load that applies to the upper surface of air bearing 43 from load arm 33.In addition, there is the load that applies from load arm 33 and is used for leading section in adsorption mouth 12, in the case, can also detect the load that adsorption mouth 12 applies to electronic unit when lift-launch the consistent situation of load of electronic unit to the substrate-side pressurization.
Control unit 110 has as shown in Figure 4: ROM 110a, and it is written into the control program of the various controls of carrying out adsorption mouth 12; CPU 110b, it is according to control program, and centralized control moves up and down the action of each several parts such as motor 21, voice coil motor 31, angular adjustment motor 51 and negative pressure feeding unit 40; And RAM 110c, its deal with data with CPU 110b is stored in the working region.
Be provided with simultaneously in control unit 110: set input unit 64, its input of carrying out the required data of this action control sets and action begins indication input etc.; Each drive circuit 61,62,63, it drives each motor 21,31,51 according to the control signal from this control unit 110; And each input circuit 65,66,67, its with the output of encoder 22,52, load cell 15 as detection signal, to these control unit 110 inputs.
As shown in Figure 5, control unit 110 is connected with the controller 60 of voice coil motor 31 usefulness, and under the time management of being undertaken by compressing time management department 68, the output of 110 pairs of voice coil motors 31 of control unit is controlled.
Specifically, by carry out the program that is stored among the ROM 110a by CPU 110b, thereby control unit 110 only by move up and down in the acceleration when descending of movable carriage 14 that motor 21 carries out or deceleration when rising in, the output of voice coil motor 31 is risen, make and utilize transmission mechanism 39 (load arm 33 and radial bearing 36) to increase to the plus-pressure that air bearing 43 applies.
At this moment, control unit 110 with by moving up and down acceleration when descending of movable carriage 14 that motor 21 carries out, the size of deceleration when the rising ground that is directly proportional, the output of voice coil motor 31 is controlled.That is, the acceleration-deceleration of movable carriage 14 is big more, and is also big more to the inertia force of transmission mechanism 39 effects, therefore, the output of voice coil motor 31 is increased, make and utilize transmission mechanism 39 to increase, thereby suppress by rocking that inertia force causes to the pressing force that air bearing 43 applies.
The drive controlling of<adsorption mouth 〉
Below, with reference to the flow chart of Fig. 6, illustrate with electronic unit C when substrate carries, the drive controlling method of the adsorption mouth 12 that CPU 110b is performed.This is the processing of being undertaken by by the established procedure of storing among the CPU 110b execution ROM 110a.
In addition,, will be in following state here as prerequisite, promptly, adsorption mouth 12 is carried out the absorption of electronic unit C, utilized 51 pairs of adsorption mouth 12 of angular adjustment motor leading section electronic unit C towards regulating, boarded head 106 is delivered to the state of the loading position of substrate.
Make to move up and down motor 21 and drive, the height Z3 of the leading section that makes adsorption mouth 12 when boarded head 106 is carried drops to predefined altitude datum Z2 (step S1) at a high speed.At this moment, voice coil motor (VCM) 31 is in non-driven state (output V0), and adsorption mouth 12 is positioned at the position that descends most with respect to movable carriage 14,, is in the state of the upper surface butt of load arm 33 and air bearing 43 that is.In addition, height Z2 is set at when the height of the voice coil motor 31 down position for non-driven state and adsorption mouth 12 are positioned at, and the bottom of adsorption mouth 12 can not arrive the height of electronic unit C.In addition, the detection load of the load cell 15 under the above-mentioned state is L0.
Then,, judge whether the leading section of adsorption mouth 12 arrives height Z2 (step S2), be judged to be (step S2 under the situation that does not have to arrive based on the output of encoder 22; ), do not return step S1.
The leading section that is judged to be adsorption mouth 12 arrived the height Z2 situation under (step S2; Be), the leading section of adsorption mouth 12 is stopped at height Z2, and the output of voice coil motor 31 rises to output valve V1, thereby make this voice coil motor 31 effect rising actuating forces (step S3).The output valve V1 of the voice coil motor 31 of this moment is to confirm the predefined output valve of operation by actuating force described later, in more detail, is the output valve that load arm 33 is separated with the upper surface of air bearing 43 just.
In addition, when the leading section that makes adsorption mouth 12 stops at height Z2, can be to adsorption mouth 12 effects inertia force downwards, but because load arm 33 is in the state with the upper surface butt of air bearing 43, so adsorption mouth 12 can not move downwards owing to this inertia force, and the situation that adsorption mouth 12 contacts with electronic unit C can not take place.For the plus-pressure control here, record and narrate in the back.
Then, make to move up and down motor 21 drivings, begin the low speed decline (step S4) of adsorption mouth 12.At this moment, the output of voice coil motor 31 remains V1.In addition, " low speed " of the adsorption mouth 12 among this step S4 descends, and expression is compared the relative meaning slowly with " at a high speed " decline among the step S1.
Then, based on the variation from the output of load cell 15, whether the leading section of judging adsorption mouth 12 is via electronic unit C and substrate contacts (step S5).Here, be not changed to from L0 under the situation of L1, be not judged to be adsorption mouth 12 not and substrate contacts (step S5 in variation from the output of load cell 15; ), do not carry out this step S5 repeatedly.
On the other hand, be changed under the situation of L1 from L0, be judged to be adsorption mouth 12 and substrate contacts (step S5 in variation from the output of load cell 15; Be), the Z axle height of this moment is stored among the RAM 110c as Z0, and, make the decline actuating force of voice coil motor 31 effect output valve V2, so that electronic unit C is with the load and the substrate butt (step S6) of regulation.
Then,, judge whether the leading section of adsorption mouth 12 arrives height Z1 (step S7), be judged to be (step S7 under the situation that does not have to arrive based on the output of encoder 22; ), do not carry out this step S7 repeatedly.
The leading section that is judged to be adsorption mouth 12 arrived the height Z1 situation under (step S7; Be), make to move up and down motor 21 and stop and keeping this height Z1, and, the output of voice coil motor 31 is remained V2, remain L2 (step S8) with output with load cell 15.In addition, even the leading section of adsorption mouth 12 does not arrive height Z1, also can begin the output of voice coil motor 31 is remained V2 from step S6.
Then, judge from the leading section of adsorption mouth 12 to arrive T pressing time (step S9) that height Z1 has begun whether to pass through regulation do not having (step S9 under the situation of process; ), do not carry out this step S9 repeatedly.And, passed through regulation pressing time T situation under (step S9; Be), make to move up and down motor 21 drivings, after the leading section low speed that makes adsorption mouth 12 rises to height Z2, rise to height Z3 (step S10) at a high speed.In addition, meanwhile the output of voice coil motor 31 is returned to V0.
By above step, finish the drive controlling of the adsorption mouth 12 of electronic unit C when substrate carries.
<utilize the plus-pressure control that voice coil motor carries out 〉
(when adsorption mouth descends at a high speed)
Shown in the sequential chart of Fig. 7, under the drive controlling of being undertaken by CPU 110b, the accelerated period chien shih output of voice coil motor 31 when movable carriage 14 descends is at a high speed risen, and makes and utilizes load arm 33 to increase to the plus-pressure that air bearing 43 applies.
This is by the processing shown in the flow chart of the Fig. 8 that is undertaken by the established procedure of storing among the CPU 110b execution ROM 110a.Judge whether to arrive the beginning timing (step S21) of the output rising that makes voice coil motor 31.
Judge to arrive under the beginning situation regularly (step S21: be), calculate from what send voice coil motor 31 and push sign on to making the time till movable carriage 14 begins to quicken, the accelerating time of movable carriage 14 and the total ascent time t1 (step S22) that has considered the tolerance limit time of surplus.
After the calculating of total ascent time t1, make the electric current that flows into to voice coil motor 31 increase (step S23).Here, the recruitment of electric current is with the size of movable carriage 14 acceleration, promptly to move up and down the rotary acceleration of the ballscrew shaft 23 that motor 21 applies corresponding and determine.Specifically, in the mode that is directly proportional with the size of the acceleration of movable carriage 14, the magnitude of current that flows into voice coil motor 31 is increased.
Then, judge the beginning of rising from the output that makes voice coil motor 31 regularly begins whether to have passed through total ascent time t1 (step S24).Being judged as under the situation that has regularly begun to pass through total ascent time t1 from beginning (step S24: be), make the current value (step S25) before the electric current that voice coil motor 31 flows into returns to increase.
(when rising at a high speed behind the adsorption mouth attract electrons parts)
Shown in the sequential chart of Fig. 7, under the drive controlling of being undertaken by CPU 110b, handle by the flow chart shown in the flow chart of Fig. 9, make voice coil motor 31 between the deceleration period when movable carriage 14 rises at a high speed, output is risen, load arm 33 is increased to the plus-pressure that air bearing 43 applies.
Judge whether to arrive the beginning timing (step S31) of the output rising that makes voice coil motor 31.
Judging under the situation that arrives the beginning timing (step S31: be), calculate movable carriage 14 deceleration time, considered the total ascent time t2 of the tolerance limit time of surplus, and push sign on to the time t3 (step S32) that makes till movable carriage 14 reduces speed now from what send voice coil motor 31.
Then, judge the beginning of rising from the output that makes voice coil motor 31 regularly begins whether to have passed through time t3 (step S33).
Be judged as under the situation that has regularly begun to pass through time t3 from beginning (step S33: be), making the electric current that flows into voice coil motor 31 increase (step S34).Here, the recruitment of electric current is with the size of the deceleration of movable carriage 14, promptly to move up and down the rotary acceleration of the ballscrew shaft 23 that motor 21 applies corresponding and determine.Specifically, in the mode that is directly proportional with the size of the acceleration of movable carriage 14, the magnitude of current that flows into voice coil motor 31 is increased.
Then, judge the beginning of rising from the output that makes voice coil motor 31 regularly begins whether to have passed through the time (t2+t3) (step S35).
Be judged as under the situation that has regularly begun to pass through time (t2+t3) from beginning (step S35: be), the electric current that flows into voice coil motor 31 is returned to increases preceding current value (step S36).
<action effect 〉
According to above-mentioned apparatus for mounting component 100, control unit 110 only by move up and down in the acceleration when descending of movable carriage 14 that motor 21 carries out or deceleration when rising in, the output of voice coil motor 31 is risen, make and utilize transmission mechanism 39 to increase to the plus-pressure that air bearing 43 applies.
Thus, can only cause when teetertottering, plus-pressure is increased, therefore can suppress to rock in that transmission mechanism 39 is separated with movable carriage 14, and can suppress the heating of voice coil motor 31, can realize that province can quantize.
Thus, the high accuracy in the time of can guaranteeing component mounting, and can not impact parts on every side owing to the influence of heating.
In addition, owing to can suppress heating, so do not need the voice coil motor that uses specified output big, weight that can restraining device increases and cost increase.
In addition, owing to suppress to rock, so the acceleration-deceleration when moving up and down movable carriage 14 liftings that motor 21 carries out can also be increased.
In addition, the ground because control unit 110 is directly proportional with the size of deceleration when moving up and down acceleration when descending of movable carriage 14 that motor 21 carries out, rising, output to voice coil motor 31 is controlled, so can be corresponding and obtain suitable output with the acceleration-deceleration of movable carriage 14, can prevent the heating that causes by excessive output, and realize economizing and to quantize.In addition, can prevent the output deficiency of voice coil motor 31.
In addition, because control unit 110 is when the state that finishes by the acceleration and deceleration that move up and down the movable carriage 14 that motor 21 carries out to become with the certain speed lifting, make the output of voice coil motor 31 return to the preceding output of movable carriage 14 acceleration and deceleration, so rising or falling speed is become certain this point as triggering, and the output of voice coil motor 31 is restored, therefore, also can prevent because of applying the microvibration that unnecessary power produces.
(the 2nd execution mode)
Below, the 2nd execution mode of apparatus for mounting component is described.The difference of the 2nd execution mode and the 1st execution mode is as the timing that the output that makes voice coil motor 31 is risen, to replace the sign on of pushing of voice coil motor 31, and adopt the detected value of load cell 15.Its reason is, usually load arm 33 is pushed under the situation of air bearing 43, load cell 15 detects certain load value, but owing to for movable carriage 14 is descended at a high speed under the situation about quickening, and under the situation of slowing down in order to rise at a high speed, can be to load arm 33 effects inertia force upward, so increase by load cell 15 detected load values.The variation of this detection load is compared with preset threshold, will the output of voice coil motor 31 be risen above the situation of threshold value as triggering.In addition,, mark identical label, omit explanation for the structure identical with the 1st execution mode.
As shown in figure 10, be connected with in compressing time management department 68 and push regularly test section 69 of beginning, it is used for detecting pushes beginning regularly.Therefore, begin regularly test section 69 by having control unit 110, compressing time management department 68 and pushing, and constitute the 2nd control unit.
In pushing beginning timing test section 69, judge by load cell 15 detected loads whether surpass pre-set threshold, being judged as detected load, send the signal of this situation of expression to compressing time management department 68 above under the situation of threshold value.Compressing time management department 68 sends signals to control unit 110, so that the output of voice coil motor 31 is risen beginning regularly the timing that test section 69 receives signal from pushing.
<plus-pressure the control undertaken by voice coil motor 〉
In the 2nd execution mode, when voice coil motor 31 descends at a high speed in adsorption mouth, and when rising at a high speed behind the adsorption mouth attract electrons parts, output is risen.In addition, all whether the load detecting value of load cell 15 is judged that above threshold value this point is identical,, therefore, describe when only adsorption mouth being descended at a high speed so flow chart is also identical.
Shown in the sequential chart of Figure 11, under the drive controlling of CPU 110b, utilize the processing shown in the flow chart of Figure 12, accelerating period and the movable carriage 14 between deceleration period when at a high speed rising of voice coil motor 31 when movable carriage 14 descends at a high speed, output is risen, make and utilize load arm 33 to increase to the plus-pressure that air bearing 43 applies.
If the accelerating period when descending at a high speed with movable carriage 14 is that example describes, then judge by load cell 15 detected load values whether surpass threshold value (step S41).
Surpass under the situation of threshold value (step S41: be) by load cell 15 detected load values in judgement, make the electric current that flows into to voice coil motor 31 increase (step S42).Here, the recruitment of electric current is with the size of movable carriage 14 acceleration, promptly to move up and down the rotary acceleration of the ballscrew shaft 23 that motor 21 applies corresponding and determine.Specifically, in the mode that the acceleration with movable carriage 14 is directly proportional, the magnitude of current that flows into voice coil motor 31 is increased.
Then, judge by load cell 15 detected load values whether surpass threshold value (step S43).
Judging by load cell 15 detected load values above (step S43: not), make the current value (step S44) before the electric current that voice coil motor 31 flows into returns to increase under the situation of threshold value.
<action effect 〉
According to above-mentioned apparatus for mounting component 100, have the action effect identical with the 1st execution mode, and under the situation of the threshold value that surpasses regulation by load cell 15 detected loads, control unit 110 rises the output of voice coil motor 31, makes to utilize transmission mechanism 39 to increase to the plus-pressure that air bearing 43 applies.
Thus, as long as owing to will carry out the control of voice coil motor 31 as triggering, therefore do not need to make in advance the computing etc. of timing of the output rising of voice coil motor 31 by the detection that load cell 15 carries out.
(the 3rd execution mode)
The structure of<apparatus for mounting component 〉
Below, the 3rd execution mode of apparatus for mounting component is described.The difference of the 3rd execution mode and the 1st execution mode is, the stressed rising that applies to air bearing 43 for load arm 33, not to control realization, but utilize the drive source different to carry out with voice coil motor 31 by the output of 110 pairs of voice coil motors 31 of control unit.Therefore, in the present embodiment, only the difference of explanation and the 1st execution mode for the identical label of other structures marks, omits explanation.
As shown in figure 13, at the upper surface of movable carriage 14, be provided with auxiliary pressue device 80, push downwards its upper end with the output shaft 31a of voice coil motor 31, and the electronic unit C on the adsorption mouth 12 is applied plus-pressure.Auxiliary pressue device 80 is made of for example cylinder, and is flexible by making piston rod, thereby can move between the position of position that the upper end of the output shaft 31a of voice coil motor 31 is pushed and separation.
Auxiliary pressue device 80 is controlled by 110 pairs of drivings of control unit.Auxiliary pressue device 80 is under the control of control unit 110, only by move up and down in the acceleration when descending of movable carriage 14 that motor 21 carries out or deceleration when rising in drive, push upper end to the output shaft 31a of voice coil motor 31, and plus-pressure is increased.Therefore, control unit 110 works as Auxiliary Control Element.
In addition, because timing and the time of utilizing the upper end of the output shaft 31a of auxiliary 80 pairs of voice coil motors 31 of pressue device to push are identical with the 1st execution mode, so omit explanation.
In addition, control unit 110 can be when making adsorption mouth 12 move to the installation site, move up and down in utilization auxiliary pressue device 80 is driven, thereby plus-pressure is increased, also can after voice coil motor 31 makes the decline of adsorption mouth 12 be prevented by air bearing 43, auxiliary pressue device 80 be driven.
In the case, if adopt the method that movable carriage is descended continuously, then can shorten parts the time that is spent is installed, after temporarily utilizing air bearing 43 to prevent, make under the situation that auxiliary pressue device 80 drives, can prevent adsorption mouth 12 excessive descent and parts and substrate are bumped.
<variation 〉
In addition, auxiliary pressue device 80 is not limited to the upper end of the output shaft 31a of voice coil motor 31 is pushed, and as shown in figure 14, also can push the upper end of the suction nozzle shaft 41 (suction nozzle shaft) that supports adsorption mouth 12.
In the case, owing to angular adjustment motor 51 can't be arranged on the top of suction nozzle shaft 41, so can constitute, angular adjustment motor 51 is arranged on the main body frame 11 of side of splined nut 53, utilize belt wheel 51a and driving-belt 51b to transmit and drive.
In addition, auxiliary pressue device 80 is not limited to cylinder, as shown in figure 15, also can use solenoid 81.
In addition, as shown in figure 16, also can be by making cam 82 rotations that link with drive source such as motor, thus the output shaft 31a and the suction nozzle shaft 41 of voice coil motor 31 are pushed.
In addition, as shown in figure 17, go up the 1st magnet 85 that setting is made of permanent magnet, the 2nd magnet 86 that is made of permanent magnet is set on output shaft 31a or suction nozzle shaft 41 at the piston rod 84 (pressurised driving portion) of cylinder 83.At this moment, the homopolarity of the 1st magnet 85 and the 2nd magnet 86 relatively disposes.In addition, also can make air cylinder driven, by making the 1st magnet 85 and the 2nd magnet 86 approaching, thereby between two magnets, produce repulsive force, utilize this repulsive force that output shaft 31a or suction nozzle shaft 41 are moved downwards.
In addition, as shown in figure 18, the 1st magnet is made of electromagnet 87, electromagnet 87 is driven, by and the 2nd magnet 86 near and between two magnets, produce repulsive force, utilize this repulsive force that output shaft 31a or suction nozzle shaft 41 are moved downwards.
In addition, as shown in figure 19, on the rotating shaft 91 of motor 90, cam 92 is set, the 1st magnet 93 is set on this cam 92, the 2nd magnet 94 is set on output shaft 31a or suction nozzle shaft 41.In addition, motor 90 is driven, by making the 1st magnet 93 and the 2nd magnet 94 approaching, thereby between two magnets, produce repulsive force, utilize this repulsive force to make output shaft 31a or suction nozzle shaft 41 mobile downwards.Certainly, two magnets are set to, and homopolarity is relative toward each other the time.
<action effect 〉
According to above-mentioned apparatus for mounting component 100, control unit 110 moves up and down motor 21 when making movable carriage 14 liftings to altitude datum in utilization, makes auxiliary pressue device 80 drive and make plus-pressure to increase.
Thus, can only cause when teetertottering, plus-pressure is increased, therefore can suppress to rock in that transmission mechanism 39 is separated with movable carriage 14, and can suppress the heating of voice coil motor 31, can realize that province can quantize.
Thus, the high accuracy in the time of can guaranteeing component mounting, and can not impact parts on every side owing to the influence of heating.
In addition, because by moving up and down movable carriage 14 that motor 21 carries out between the accelerating period or the deceleration period when rising when descending, to transmission mechanism 39 effect inertia force, thus the control of 110 pairs of auxiliary pressue devices 80 of control unit can be passed through, and suppress rocking of transmission mechanism 39.
In addition, push by making auxiliary 80 pairs of suction nozzle shaft 41 of pressue device, thereby can directly transmit plus-pressure to adsorption mouth 12.
In addition, owing to push by the output shaft 31a that makes auxiliary 80 pairs of voice coil motors 31 of pressue device, thereby can push suction nozzle shaft 41 indirectly via transmission mechanism 39,, suction nozzle shaft 41 be pushed so collision that can be when eliminating is pushed etc. means on the basis of reason.
In addition, suction nozzle shaft 41 or output shaft 31a are pressurizeed by the repulsive force that utilizes magnet, thus different with the situation that they are directly pushed, collision excessive descent that can be when not pushing.
Thus, can realize stable pressurization.
<other 〉
In addition, the present invention is not limited to above-mentioned execution mode.For example, above-mentioned load arm 33 butt downwards that adopted, the structure that 15 pairs of loads upward of load cell detect, but also above-mentioned above-below direction can be put upside down.In the case, the positive and negative counter-rotating of output valve of voice coil motor 31 and load cell 15.
In addition, as the time that makes the electric current increase that flows into to voice coil motor 31, adopt to have the tolerance limit time of surplus, but might not need like this, also the acceleration or the deceleration of movable carriage 14 can be finished this point as triggering, and make current value return to original value.

Claims (3)

1. apparatus for mounting component, it has:
Moving body, but its free lifting be supported on the framework;
The 1st drive source, its output makes the driving of described moving body lifting;
Adsorption mouth, but it is set to utilize leading section that parts are adsorbed with respect to described moving body free lifting;
The 2nd drive source, it makes described adsorption mouth lifting, the drive source when installing as being pressurizeed on the mounting object thing by the parts of described adsorption mouth absorption;
Transmission mechanism, it links described the 2nd drive source and described adsorption mouth, with described the 2nd drive source drives to described adsorption mouth transmission; And
Retainer, it is arranged on the described moving body, and when described adsorption mouth descended, described transmission mechanism was at height and this retainer butt of regulation, thereby prevented the decline of described adsorption mouth,
This apparatus for mounting component will be installed on the mounting object thing by the parts of described adsorption mouth absorption,
It is characterized in that,
Have control unit, it only in the acceleration when the described moving body that is undertaken by described the 1st drive source descends or in the deceleration when rising, rises the output of described the 2nd drive source, makes and utilizes described transmission mechanism to increase to the plus-pressure that described retainer applies.
2. apparatus for mounting component according to claim 1 is characterized in that having:
The load detecting unit, the load that the parts on the described adsorption mouth of its subtend apply detects; And
The 2nd control unit, it rises the output of described the 2nd drive source under the situation of the threshold value that is surpassed regulation by the detected load in described load detecting unit, and make and utilize described transmission mechanism to increase to the plus-pressure that described retainer applies,
Described the 2nd control unit when the acceleration and deceleration of the described moving body that is undertaken by described the 1st drive source finish to become state with the certain speed lifting, makes the output before the output of described the 2nd drive source returns to described moving body acceleration and deceleration.
3. apparatus for mounting component, it has:
Moving body, but its free lifting be supported on the framework;
The 1st drive source, its output makes the driving of described moving body lifting;
Adsorption mouth, but it is set to utilize leading section that parts are adsorbed with respect to described moving body free lifting;
The 2nd drive source, it makes described adsorption mouth lifting, becomes will be pressurizeed on the mounting object thing by the parts of described adsorption mouth absorption and drive source when installing;
Transmission mechanism, it links described the 2nd drive source and described adsorption mouth, with described the 2nd drive source drives to described adsorption mouth transmission; And
Retainer, it is arranged on the described moving body, when described adsorption mouth descends, at the height and the described transmission mechanism butt of regulation, thereby prevents the decline of described adsorption mouth,
This apparatus for mounting component will be installed on the mounting object thing by the parts of described adsorption mouth absorption,
It is characterized in that having:
Auxiliary pressue device, it utilizes and the different drive source of described the 2nd drive source, and the parts on the described adsorption mouth are applied plus-pressure; And
Auxiliary Control Element, it only in the acceleration when the described moving body that is undertaken by described the 1st drive source descends or in the deceleration when rising, drives described auxiliary pressue device, and the plus-pressure to the parts on the described adsorption mouth is increased.
CN201010543524.7A 2009-11-10 2010-11-10 Component installation device Active CN102056474B (en)

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