CN102051575B - Magnesium oxide vapor deposition device - Google Patents
Magnesium oxide vapor deposition device Download PDFInfo
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- CN102051575B CN102051575B CN2011100025236A CN201110002523A CN102051575B CN 102051575 B CN102051575 B CN 102051575B CN 2011100025236 A CN2011100025236 A CN 2011100025236A CN 201110002523 A CN201110002523 A CN 201110002523A CN 102051575 B CN102051575 B CN 102051575B
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Abstract
The invention provides a magnesium oxide vapor deposition device which can prevent crack and deflection of ultrathin baseplate glass during vapor deposition process, so as to guarantee product qualification rate. The magnesium oxide vapor deposition device has convenience in operation and low cost, and comprises a substrate glass, a pair of pieces of ultrathin baseplate glass is placed on the substrate glass, an aluminium foil with two square holes covers the substrate glass and the centers of the square holes aim at the ultrathin baseplate glass; and the aluminium foil and the substrate glass are fixed on an aluminium plate below the substrate glass through substrate glass fixing clips, the ultrathin baseplate glass is fixed on the substrate glass through ultrathin baseplate glass fixing clips with aluminum pieces for padding, and the aluminium plate is fixed on an aluminum rack therebelow.
Description
Technical field
The present invention relates to a kind of magnesium vapour-deposition device, the magnesium vapour-deposition device that especially a kind of suitable ultrathin plasma indicating meter uses.
Background technology
Present shadow-mask type plasma magnesium vapour-deposition device; Be to use its front-back baseboard surface of the simple and easy covering of aluminium foil; Only exposing needs the magnesian zone of vapor deposition, with clip base plate glass is fixed on the aluminium frame then, puts into vapor deposition Natural manganese dioxide in the vacuum evaporation case at last.Because the base plate glass thickness of traditional plasma display panel reaches 2.8mm, it is good to have intensity, is difficult for breaking and characteristic such as warpage, thereby can adopts conventional shadow-mask type plasma magnesium vapour-deposition device.But for the ultrathin plasma display panel, base plate glass thickness is merely tens microns (so being referred to as ultra-thin base plate glass), and when receiving excessive pressure or distortion power, ultra-thin base plate glass will break.If when being applied to traditional plasma display magnesium vapour-deposition device in the ultrathin plasma indicating meter, can occur that ultra-thin base plate glass breaks and problem such as skew in evaporate process, product percent of pass is low.So the magnesium vapour-deposition device that the ultrathin plasma indicating meter uses not only need be protected ultra-thin base plate glass effectively, but also need to guarantee that ultra-thin base plate glass can not squint in whole evaporate process.
Summary of the invention
The purpose of this invention is to provide a kind of ultra-thin base plate glass and in evaporate process, can not break and squint, with the assurance product percent of pass, and magnesium vapour-deposition device simple to operate, with low cost.
This magnesium vapour-deposition device comprises a substrate glass, and the top of substrate glass is placed with a pair of ultra-thin base plate glass; The aluminium foil that has two square holes covers substrate glass, the ultra-thin base plate glass of square hole centrally aligned; Use substrate glass fixedly clip aluminium foil and substrate glass are fixed on the aluminium sheet of substrate glass bottom, by the ultra-thin base plate glass that is lined with aluminium flake fixedly clip that ultra-thin base plate glass is fixed on substrate is on glass, aluminium sheet is fixed on the aluminium frame of its underpart.
Beneficial effect of the present invention: apparatus of the present invention are on conventional oxidation magnesium evaporation coating device basis; Adopt the ultra-thin base plate glass of substrate glass support; Can protect and fix ultra-thin base plate glass effectively; Prevented ultra-thin base plate glass breaking and squint in evaporate process, guaranteed that product percent of pass is near 100%.Aluminium flake to ultra-thin base plate glass fixedly the power that produces of clip carry out dividing potential drop, prevent ultra-thin base plate glass fixedly clip when ultra-thin base plate glass stationary substrate is on glass, damage ultra-thin base plate glass by pressure.
Above-mentioned evaporation coating device is placed with the aluminum strip that extends along substrate glass width on two square hole intermediary aluminium foils, use substrate glass fixedly clip is fixed on aluminum strip, aluminium foil and substrate glass on the aluminium sheet, and the length of aluminum strip equals substrate glass width.Consider that the at high temperature softening warpage of aluminium foil can influence the magnesium vapour-deposition zone, on two square hole intermediary aluminium foils, place aluminum strip, and use substrate glass fixedly clip aluminum strip, aluminium foil and substrate glass are fixed on the aluminium sheet.That is to say that aluminum strip has two effects: prevent aluminium foil high temperature warpage, fixing ultra-thin base plate glass.
Above-mentioned evaporation coating device, substrate glass are the high and resistant to elevated temperatures substrate glass of planeness.Substrate glass requires planeness high, high temperature resistant as the supporting body of ultra-thin base plate glass, can select soda-lime glass, PD200 glass etc. for use.
Above-mentioned evaporation coating device, two square hole between centers equal the ultra-thin base plate glass length of side.
Above-mentioned evaporation coating device, the substrate reference point that is used for confirming the vapor deposition zone that is carved with on glass.
Above-mentioned evaporation coating device, substrate glass fixedly clip and ultra-thin base plate glass fixedly the clip place bore position from substrate glass sideline apart from difference greater than the width of substrate glass and half of ultra-thin base plate glass length of side difference, and less than the length of clip.Be in order to be suitable for unified clip, to make things convenient for producing device like this.The ultra-thin base plate glass of vapor deposition can compactness be arranged, and has therefore saved aluminium foil and substrate glass material, reduction means volume.Can guarantee that in addition substrate glass do not run into ultra-thin base plate glass (substrate glass fixedly clip pressure is very big, can pressure break ultra-thin base plate glass) when fixedly clip is pressed onto substrate glass.
Description of drawings
Fig. 1 is a ultrathin plasma indicating meter magnesium vapour-deposition device synoptic diagram.
Fig. 2 is magnesium vapour-deposition device synoptic diagram in evaporate process.
Among the figure, aluminium sheet 1, substrate glass 2, aluminium foil 3, aluminium frame 4, aluminum strip 5, aluminium flake 6, ultra-thin base plate glass 7, substrate glass is clip 8 fixedly, and ultra-thin base plate glass is clip 9 fixedly, and aluminium sheet is clip 10 fixedly, Natural manganese dioxide sputtering source 11, electron beam gun 12.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
Ultra-thin shadow mask plasma indicating meter magnesium vapour-deposition device as shown in Figure 1; Comprise substrate glass 2; Substrate glass 2 tops are placed with a pair of ultra-thin base plate glass 7, with alcohol ultra-thin base plate glass are fixed on the substrate glass 2, then with the aluminium foil that has two square holes 3 parcel substrate glass 2; Place aluminum strip 5 in aluminium foil 3 midline; By two substrate glass fixedly clip 8 aluminum strip 5, aluminium foil 3, substrate glass 2 are fixed on the aluminium sheet 1, again with four ultra-thin base plate glass fixedly clip 9 through aluminium flake 6 aluminium foil 3, ultra-thin base plate glass are fixed on the substrate glass 2, again by aluminium sheet fixedly clip 10 aluminium sheet 1 is fixed on the aluminium frame 4.
Specify as follows:
In this evaporation coating device, on schedule earlier, be used for confirming the riding position of ultra-thin base plate glass in substrate token-based on glass.Ultra-thin base plate glass be placed in substrate on glass after, wrap up hour offset in order to prevent ultra-thin base plate glass at aluminium foil, available syringe drips several alcohol to be fixed in ultra-thin base plate glass edge.On aluminium foil, carve and get two length of sides and equal the square hole that the sealing-in edge is long, spacing equals the ultra-thin base plate glass length of side, it is on glass to be wrapped in substrate then, guarantees that square hole center and ultra-thin base plate glass center are identical.
Consider that the at high temperature softening warpage of aluminium foil can influence the magnesium vapour-deposition zone; Need on the aluminium foil midline between two square holes, place the width value that a length equals substrate glass; Width is moderate; Thick is the aluminum strip of 1-2mm thickness, through two substrate glass fixedly the clip substrate glass that will be enclosed with aluminium foil be fixed on the aluminium sheet together with aluminum strip.Then with the ultra-thin base plate glass that is lined with aluminium flake fixedly clip that ultra-thin base plate glass is fixed on substrate is on glass, at last aluminium sheet is fixed on the aluminium frame.
As shown in Figure 1; Substrate glass fixedly used (on the aluminium sheet) the boring A of clip to the substrate glass edge apart from B and ultra-thin base plate glass fixedly used (on aluminium sheet) the boring C of clip to the difference of the distance B of substrate glass edge should be greater than the width F difference of ultra-thin base plate glass length of side E and substrate glass half the; And less than substrate glass fixedly the length G of clip (substrate glass fixedly clip and ultra-thin base plate glass fixedly the length of clip be G), that is: G＞B-D＞(F-E)/2.
Referring to Fig. 2, above-mentioned magnesium vapour-deposition device in the vacuum evaporation case during vapor deposition, be positioned at Natural manganese dioxide sputtering source 11 directly over one meter carry out, the square hole of aluminium foil is down.There is electron beam gun 12 Natural manganese dioxide sputtering source 11 belows.
Among the present invention, the supporting body of the substrate glass of aluminium sheet.Substrate glass is the supporting body of ultra-thin base plate glass, can select soda-lime glass, PD200 glass etc. for use, and this substrate glass requires planeness high, high temperature resistant.Aluminium foil is used to protect the zone of ultra-thin base plate glass and controlled oxidation magnesium vapor deposition.Clip (comprising the fixedly fixing fixing clip of clip, aluminium sheet of clip, ultra-thin base plate glass of substrate glass) plays fixed action.Outstanding being put in the vacuum evaporation case of aluminium frame support aluminium sheet.Aluminum strip can prevent aluminium foil high temperature warpage and influence the vapor deposition zone, also plays the effect of fixing ultra-thin base plate glass.Aluminium flake to ultra-thin base plate glass fixedly the power that produces of clip carry out dividing potential drop.
The present invention is directed to traditional plasma display magnesium vapour-deposition device when being applied in the ultrathin plasma indicating meter; Can occur that ultra-thin base plate glass breaks and problem such as skew in evaporate process, provide a kind of ultrathin plasma indicating meter, simple to operate, with low cost and success ratio of being applicable near 100% magnesium vapour-deposition device.
The present invention adopts the interlayer of flexible good and high temperature resistant, free of contamination aluminium foil and good rigidly, planeness height and resistant to elevated temperatures substrate glass composition on conventional oxidation magnesium evaporation coating device basis, protect and fix ultra-thin base plate glass effectively.Confirmed each bore position simultaneously, aluminium sheet size, ultra-thin base plate glass is further protected and fix to square hole size, and the spacing of two square holes, realized the magnesium vapour-deposition purpose efficiently, have practical, success ratio height, low cost and other advantages.
Claims (5)
1. magnesium vapour-deposition device, it is characterized in that: comprise a substrate glass, the top of substrate glass is placed with a pair of ultra-thin base plate glass; The aluminium foil that has two square holes covers substrate glass, the ultra-thin base plate glass of square hole centrally aligned; Use substrate glass fixedly clip aluminium foil and substrate glass are fixed on the aluminium sheet of substrate glass bottom, by the ultra-thin base plate glass that is lined with aluminium flake fixedly clip that ultra-thin base plate glass is fixed on substrate is on glass, aluminium sheet is fixed on the aluminium frame of its underpart.
2. evaporation coating device as claimed in claim 1; It is characterized in that: on two square hole intermediary aluminium foils, be placed with the aluminum strip that extends along substrate glass width; Use substrate glass fixedly clip is fixed on aluminum strip, aluminium foil and substrate glass on the aluminium sheet, and the length of aluminum strip equals substrate glass width.
3. evaporation coating device as claimed in claim 1 is characterized in that: substrate glass is the high and resistant to elevated temperatures substrate glass of planeness.
4. evaporation coating device as claimed in claim 1 is characterized in that: the substrate reference point that is used for confirming the vapor deposition zone that is carved with on glass.
5. evaporation coating device as claimed in claim 1; It is characterized in that: substrate glass fixedly clip and ultra-thin base plate glass fixedly the clip place bore position from substrate glass sideline apart from difference greater than the width of substrate glass and half of ultra-thin base plate glass length of side difference, and less than the fixing length of clip of substrate glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100025236A CN102051575B (en) | 2011-01-07 | 2011-01-07 | Magnesium oxide vapor deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100025236A CN102051575B (en) | 2011-01-07 | 2011-01-07 | Magnesium oxide vapor deposition device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102051575A CN102051575A (en) | 2011-05-11 |
| CN102051575B true CN102051575B (en) | 2012-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100025236A Expired - Fee Related CN102051575B (en) | 2011-01-07 | 2011-01-07 | Magnesium oxide vapor deposition device |
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| Country | Link |
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| CN (1) | CN102051575B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101565813A (en) * | 2009-05-18 | 2009-10-28 | 南京华显高科有限公司 | MgO film electron beam evaporation method and device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4254925B2 (en) * | 2004-03-08 | 2009-04-15 | 株式会社日立プラズマパテントライセンシング | Method for forming protective film of plasma display panel |
| JP4516870B2 (en) * | 2004-07-06 | 2010-08-04 | 株式会社アルバック | Method for simultaneously forming vapor deposition film on a plurality of substrates and transport tray |
| CN202039119U (en) * | 2011-01-07 | 2011-11-16 | 东南大学 | Magnesium oxide evaporation device |
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2011
- 2011-01-07 CN CN2011100025236A patent/CN102051575B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101565813A (en) * | 2009-05-18 | 2009-10-28 | 南京华显高科有限公司 | MgO film electron beam evaporation method and device |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2004-183105A 2004.07.02 |
| JP特开2006-45664A 2006.02.16 |
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| CN102051575A (en) | 2011-05-11 |
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