CN102042798B - Preparation method of spreading resistance test sample and sample grinding and fixing device - Google Patents
Preparation method of spreading resistance test sample and sample grinding and fixing device Download PDFInfo
- Publication number
- CN102042798B CN102042798B CN2009101973731A CN200910197373A CN102042798B CN 102042798 B CN102042798 B CN 102042798B CN 2009101973731 A CN2009101973731 A CN 2009101973731A CN 200910197373 A CN200910197373 A CN 200910197373A CN 102042798 B CN102042798 B CN 102042798B
- Authority
- CN
- China
- Prior art keywords
- sample
- ground
- stationary installation
- bolt
- resistance test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The invention provides a preparation method of a spreading resistance test sample. The preparation method comprises the following steps: fixing a sample on a bevel of a sample table forming a fixed angle with the horizontal plane, and fixing the sample table on a sample grinding and fixing device; placing the sample grinding and fixing device on a coarse grinding tool so that the sample can be in contact with the coarse grinding tool at a specific angle to be coarsely ground; and placing the sample grinding and fixing device on a fine grinding tool so that the sample can be in contact with the fine grinding tool at a specific angle to be finely ground and polished. The preparation method of the spreading resistance test sample provided by the invention can be used for preparing a spreading resistance test sample with a target depth (epitaxial layer depth) of 10-600 mum; and compared with the preparation method of the prior art, by adopting the preparation method of the spreading resistance test sample provided by the invention, the preparation efficiency of the sample is obviously improved, and the cost is lower.
Description
Technical field
The present invention relates to the integrated circuit testing field, particularly a kind of spreading resistance test sample preparation method and sample grind stationary installation.
Background technology
Spreading resistance technology (spreading resistance profile; SRP) owing to its superior spatial resolution is applied in epitaxial wafer and the test of IC pattern piece more and more widely; The SRP technology both can have been measured the epitaxial wafer longitudinal electrical resistance and change, and also can measure epitaxy layer thickness, zone of transition and interlayer width etc.The measuring principle of SRP technology is as shown in Figure 1; Sample 1 is sticked on the sample stage 2 with fixed angle, grind out an inclined-plane 3, these inclined-plane 3 horizontal positioned; The angle at itself and epitaxial loayer 6 interfaces is α (α is similarly the fixed angle of sample stage 2); A pair of probe 4 is measured its spreading resistance value according to certain step pitch on sample inclined-plane 3, when probe 4 ran on substrate 5 interfaces of epitaxial loayer 6 and high-dopant concentration, the spreading resistance value reduced rapidly; And spreading resistance value numerical value change is no longer obvious when reaching substrate 5, so the corresponding sample degree of depth of spreading resistance value constant interval is its epitaxy layer thickness.The level run distance is n1 when supposing that probe test arrives substrate on inclined-plane 3, n be probe to measure dot number, then this moment corresponding epitaxial thickness H=n1sin α=nh, h=1sin α is called as the depth resolution of spreading resistance probe in the formula.The singularity of sample stage 2 is that its α value has fixing several angles, and the epitaxy layer thickness of the big more institute of angle energy measurement is dark more, therefore needs to select according to different epitaxial thicknesses the sample stage of different angles.But the maximum angle of the sample stage of fixed angle has only 11.53 to spend at present, this means assumes samples target depth (the epitaxial loayer degree of depth) when being 100um, before sample being carried out the spreading resistance test, needs the sample inclined-plane of preparation length greater than 500um.
Please referring to Fig. 2, Fig. 2 is the spreading resistance test sample preparation method synoptic diagram that prior art adopted.As shown in Figure 2, sample 1 is secured on the inclined-plane of sample stage 2, and sample stage 2 is fixed on the weight 8 through bolt 7; Weight 8 is fixed in the set collar 10 on the arm 9; Bolt 7, weight 8, arm 9 and set collar 10 are formed sample and are ground stationary installation, and the below on sample stage 2 inclined-planes is a frosted glass rotating disk 11, under the pressure of weight 8; Sample 1 on the sample stage 2 begins sample 1 is ground when 11 rotations of frosted glass rotating disk with fixed angle contact frosted glass rotating disk 11.During grinding, it is motionless that sample grinds stationary installation, plays the fixation to sample 1.Usually also the diamond cream of 0.1um diameter and oil are mixed and made into the surface that abrasive material evenly is applied in frosted glass rotating disk 11 during grinding and grind, this method can make the sample inclined-plane that grinds out very level and smooth, but expends time in.Generally, preparation sample bevel angle is 11.5 degree, and the sample inclined-plane of length 500um need grind 10-15 minute.And the speed that angle grinds more greatly is also just slow more.Diamond cream can mix a large amount of sample chips after using a period of time, and after the oil volatilization abrasive material is become dry, thereby sample is caused damage, so just must change abrasive material after a period of time and proceed to grind again.So during with the sample inclined-plane of existing method preparation such as above-mentioned length, disappear duration and cost are high.Simultaneously; Above-mentioned sample grinds stationary installation and generally is fixed on the frosted glass rotating disk 11; Can't sample be ground stationary installation integral body and separate with frosted glass rotating disk 11 with sample 1, and this sample grinds the angle of 11 of height that stationary installation can't accurately adjust sample and sample and frosted glass rotating disks together with sample stage 2.
Summary of the invention
The technical matters that the present invention will solve provides a kind of sample and grinds stationary installation and a kind of spreading resistance test sample preparation method, to solve existing spreading resistance test sample preparation method inefficiency and the high problem of cost when preparing the sample inclined-plane of the big inclined-plane of degree of depth length.
For solving the problems of the technologies described above, the present invention provides a kind of spreading resistance test sample preparation method, may further comprise the steps:
Sample is fixed in to have on the inclined-plane of sample stage of fixed angle and said sample stage is fixed in sample with surface level grinds on the stationary installation;
Said sample is ground stationary installation be positioned on the corase grind grinding tool, make said sample to contact with said corase grind grinding tool, said sample is roughly ground with special angle;
Said sample is ground stationary installation be positioned on the fine grinding grinding tool, make said sample to contact with said fine grinding grinding tool, said sample is carried out the fine grinding polishing with special angle.
Optional, said the step that said sample is roughly ground is comprised: use mill said sample to be ground as said corase grind grinding tool.
Optional, said the step that said sample is roughly ground is also comprised: use said mill also to use fine lapping sand paper said sample to be ground after sample is ground as said corase grind grinding tool.
Optional; Said use mill comprises the step that said sample grinds: said sample is ground stationary installation be fixed on the said mill; Adjust height and level that said sample grinds stationary installation; Said sample is contacted with said mill with special angle, drive said mill then said sample is ground.
Optional; Said use fine lapping sand paper comprises the step that said sample grinds: said fine lapping sand paper is fixed on the rotating disk; Said sample is ground stationary installation to be fixed on the said fine lapping sand paper; Adjust height and level that said sample grinds stationary installation, said sample is contacted with said fine lapping sand paper with special angle, drive said rotating disk then said sample is ground.
Optional, at first use the bigger fine lapping sand paper of abrasive grains diameter to grind, then use the less fine lapping sand paper of abrasive grains diameter instead and grind.
Optional; The said step that said sample is carried out fine grinding polishing comprises: use the frosted glass rotating disk as said fine grinding grinding tool; Said sample is ground stationary installation to be fixed on the said frosted glass rotating disk; Adjust height and level that said sample grinds stationary installation, said sample is contacted with said frosted glass rotating disk with special angle, drive said frosted glass rotating disk then said sample is ground.
Optional, the surfaces coated of said frosted glass rotating disk is wiped with diamond cream and the oily abrasive material that is mixed and made into during grinding.
The present invention provides also a kind of and comprises sample holder for implementing the sample grinding stationary installation that above-mentioned spreading resistance test sample preparation method designs, and the milscale knob is installed, in order to the height and the level of regulating said sample holder on the end face of said sample holder; The bottom of said sample holder has wear-resisting leg; The center of said sample holder is provided with the bolt through hole; Said bolt through hole internal fixation has bolt; The top of said bolt is fixed on the end face of said sample holder; The bottom of said bolt protrudes in the bottom surface of said sample holder, and the bottom of said bolt has screw thread, is used for fixing sample.
Optional, also be provided with pad on the bolt hole of said sample holder end face.
Optional, said milscale knob is one or more.
Sample provided by the invention grind stationary installation can be flexibly the also height of high-precision adjusting sample and the angle between sample and grinding tool; This sample grinds stationary installation can be separated with grinding tool; Can be used in different grinding tools and carry out sample and grind, and take and lay very convenient.Spreading resistance test sample preparation method provided by the invention can prepare target depth (the epitaxial loayer degree of depth) and be the spreading resistance specimen of 10um to 600um; And preparation method than prior art; The specimen required time that adopts spreading resistance test sample preparation method of the present invention to prepare the same target degree of depth obviously reduces; Thereby significantly improved the preparation efficiency of sample; Adopt spreading resistance test sample preparation method of the present invention only need smear a diamond cream simultaneously, do not need more to renew abrasive material, thereby adopt spreading resistance test sample preparation method cost of the present invention also cheaper as abrasive material.
Description of drawings
Fig. 1 is a spreading resistance commercial measurement principle schematic;
Fig. 2 is the spreading resistance test sample preparation method synoptic diagram that prior art adopted;
Fig. 3 is that the employed sample of the inventive method grinds stationary installation top surface structure synoptic diagram;
Fig. 4 looks up structural representation for the bottom surface that the employed sample of the inventive method grinds stationary installation;
Fig. 5 is the cross-sectional view that the employed sample of the inventive method grinds stationary installation.
Embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, does detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
A kind of sample of the present invention grinds stationary installation and spreading resistance test sample preparation method multiple substitute mode capable of using realizes; Be to explain below through preferred embodiment; Certainly the present invention is not limited to this specific embodiment, and the general replacement that the one of ordinary skilled in the art knew is encompassed in protection scope of the present invention undoubtedly.
Secondly, the present invention utilizes synoptic diagram to describe in detail, and when the embodiment of the invention was detailed, for the ease of explanation, synoptic diagram disobeyed that general ratio is local amplifies, should be with this as to qualification of the present invention.
When preparation spreading resistance specimen, at first need sample is fixed on the inclined-plane of the sample stage with fixed angle inclined-plane and said sample stage is fixed in sample to grind on the stationary installation and can grind to sample.See also Fig. 3, Fig. 4 and Fig. 5, Fig. 3 is that the employed sample of the inventive method grinds stationary installation top surface structure synoptic diagram; Fig. 4 looks up structural representation for the bottom surface that the employed sample of the inventive method grinds stationary installation; Fig. 5 is the cross-sectional view that the employed sample of the inventive method grinds stationary installation.Like Fig. 3, Fig. 4 and shown in Figure 5, this sample grinds stationary installation and comprises sample holder 12, and milscale knob 13 is installed on the end face of said sample holder 12, and in order to regulate the height and the level of sample holder 12, said milscale knob is one or more; The center of said sample holder 12 is provided with the bolt through hole; Bolt 14 is fixed in the bolt through hole; The top of said bolt 14 is fixed on the end face of said sample holder; The bottom of said bolt 14 protrudes in the bottom surface of said sample holder, and the bottom of said bolt 14 has screw thread, and sample stage 2 is fixed on the said bolt 14 through said screw thread; The bottom of said sample holder 12 has wear-resisting leg 15, and when sample was ground, sample ground stationary installation and is positioned on the grinding tools 16 such as mill or sand paper, and said wear-resisting leg 15 supports sample grinding stationary installation and directly contacts with said grinding tool 16; The inclined-plane of said sample stage 2 is towards said grinding tool 16, and sample 1 is fixed on the inclined-plane of said appearance platform 2.With said bolt 14 fixing with said bolt hole in the time, also can on the bolt hole of said sample holder 12 end faces, increase pad 17 to regulate the height of said sample stage 2.
Sample of the present invention grind stationary installation can be flexibly the also height of high-precision adjusting sample and the angle between sample and grinding tool; This sample grinds stationary installation can be separated with grinding tool; Can be used in different grinding tools and carry out the sample grinding; And take and lay very conveniently, being applicable in the specimen preparation process needs to change the sample preparation methods that different grinding tools grinds sample.
Spreading resistance test sample preparation method of the present invention may further comprise the steps:
At first, sample is fixed on the inclined-plane of the sample stage with fixed angle and said sample stage is fixed in sample grind on the stationary installation.When being fixed in the sample stage inclined-plane, can use by said sample wax that sample is sticked on the sample stage inclined-plane.
Secondly, said sample is ground stationary installation be positioned on the corase grind grinding tool, make said sample to contact with said corase grind grinding tool, said sample is roughly ground with special angle.Preferably; At first use mill said sample to be ground as the corase grind grinding tool; Said sample is ground stationary installation to be fixed on the mill; The said sample of adjustment grinds the height and the level of stationary installation before grinding, and said sample is contacted with said mill with special angle, drives said mill then said sample is ground.During grinding, the rotating speed that the bevel depth that grinds according to said sample needs is selected said mill with grind revolution, adopt jogging speed (10 rev/mins) to roughly grind 4 to 5 usually and change and get final product; Then use fine lapping sand paper sample to be ground as the corase grind grinding tool; Said fine lapping sand paper is fixed on the rotating disk; Said sample is ground stationary installation to be fixed on the said fine lapping sand paper; The said sample of same adjustment grinds the height and the level of stationary installation before grinding, and said sample is contacted with said fine lapping sand paper with special angle, drives said rotating disk then said sample is ground.Preferably; At first use the fine lapping sand paper of big (like 30um) of abrasive grains diameter; Rotating speed grinds for 50 rev/mins, then uses the fine lapping sand paper of abrasive grains diameter less (like 15um and 6um) instead, and rotating speed grinds for 30 rev/mins; Level and smooth basically up to the sample inclined-plane, have till the tangible reflected light.If the sample bevel depth that need grind hour also can not adopt mill to grind earlier and directly use fine lapping sand paper that sample is ground, the height that in using mill and process that fine lapping sand paper grinds, also can grind stationary installation to sample and level are regulated with the moment and are kept sample to contact with fixed angle with grinding tool.
At last, said sample is ground stationary installation be positioned on the fine grinding grinding tool, make said sample to contact with said fine grinding grinding tool, said sample is carried out the fine grinding polishing with special angle.Use the frosted glass rotating disk as said fine grinding grinding tool; Said sample is ground stationary installation to be fixed on the frosted glass rotating disk; The said sample of adjustment grinds the height and the level of stationary installation before grinding; Said sample is contacted with the frosted glass rotating disk with special angle, drive said frosted glass rotating disk then said sample is ground.Said frosted glass disc surfaces is coated with the diamond cream and the oily abrasive material that is mixed and made into by the 0.1um diameter during grinding.
When sample is roughly ground, preferably use like Fig. 3 sample extremely shown in Figure 5 and grind stationary installation, when sample is carried out the fine grinding polishing, both can adopt like Fig. 3 sample extremely shown in Figure 5 and grind stationary installation, also can use sample grinding stationary installation as shown in Figure 2.
If then can repeat above-mentioned steps to the grinding of sample is not in place.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.
Claims (11)
1. spreading resistance test sample preparation method may further comprise the steps:
Sample is fixed in to have on the inclined-plane of sample stage of fixed angle and said sample stage is fixed in sample with surface level grinds on the stationary installation;
Said sample is ground stationary installation be positioned on the corase grind grinding tool, make said sample to contact with said corase grind grinding tool, said sample is roughly ground with special angle;
Said sample is ground stationary installation be positioned on the fine grinding grinding tool, make said sample to contact with said fine grinding grinding tool, said sample is carried out the fine grinding polishing with special angle;
Said sample grinds stationary installation, comprises sample holder, the milscale knob is installed, in order to the height and the level of regulating said sample holder on the end face of said sample holder; The bottom of said sample holder has wear-resisting leg; The center of said sample holder is provided with the bolt through hole; Said bolt through hole internal fixation has bolt; The top of said bolt is fixed on the end face of said sample holder; The bottom of said bolt protrudes in the bottom surface of said sample holder, and the bottom of said bolt has screw thread, is used for fixing sample.
2. spreading resistance test sample preparation method as claimed in claim 1 is characterized in that, the said step that said sample is roughly ground comprises: use mill as said corase grind grinding tool said sample to be ground.
3. spreading resistance test sample preparation method as claimed in claim 2; It is characterized in that the said step that said sample is roughly ground also comprises: use said mill that sample is ground and also use fine lapping sand paper said sample to be ground afterwards as said corase grind grinding tool.
4. spreading resistance test sample preparation method as claimed in claim 2; It is characterized in that; Said use mill comprises the step that said sample grinds: said sample is ground stationary installation be fixed on the said mill; Adjust height and level that said sample grinds stationary installation, said sample is contacted with said mill with special angle, drive said mill then said sample is ground.
5. spreading resistance test sample preparation method as claimed in claim 3; It is characterized in that; Said use fine lapping sand paper comprises the step that said sample grinds: said fine lapping sand paper is fixed on the rotating disk, said sample is ground stationary installation be fixed on the said fine lapping sand paper, adjust height and level that said sample grinds stationary installation; Said sample is contacted with said fine lapping sand paper with special angle, drive said rotating disk then said sample is ground.
6. spreading resistance test sample preparation method as claimed in claim 5 is characterized in that, at first uses the bigger fine lapping sand paper of abrasive grains diameter to grind, and then uses the less fine lapping sand paper of abrasive grains diameter instead and grinds.
7. spreading resistance test sample preparation method as claimed in claim 1; It is characterized in that; The said step that said sample is carried out fine grinding polishing comprises: use the frosted glass rotating disk as said fine grinding grinding tool, said sample is ground stationary installation be fixed on the said frosted glass rotating disk, adjust height and level that said sample grinds stationary installation; Said sample is contacted with said frosted glass rotating disk with special angle, drive said frosted glass rotating disk then said sample is ground.
8. spreading resistance test sample preparation method as claimed in claim 7 is characterized in that, the surfaces coated of said frosted glass rotating disk is wiped with diamond cream and the oily abrasive material that is mixed and made into during grinding.
9. one kind is ground stationary installation for implementing the sample that spreading resistance test sample preparation method as claimed in claim 1 designs; Comprise sample holder; The milscale knob is installed, in order to the height and the level of regulating said sample holder on the end face of said sample holder; The bottom of said sample holder has wear-resisting leg; The center of said sample holder is provided with the bolt through hole; Said bolt through hole internal fixation has bolt; The top of said bolt is fixed on the end face of said sample holder; The bottom of said bolt protrudes in the bottom surface of said sample holder, and the bottom of said bolt has screw thread, is used for fixing sample.
10. sample as claimed in claim 9 grinds stationary installation, it is characterized in that, also is provided with pad on the bolt through hole of said sample holder end face.
11. sample as claimed in claim 9 grinds stationary installation, it is characterized in that said milscale knob is one or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101973731A CN102042798B (en) | 2009-10-19 | 2009-10-19 | Preparation method of spreading resistance test sample and sample grinding and fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101973731A CN102042798B (en) | 2009-10-19 | 2009-10-19 | Preparation method of spreading resistance test sample and sample grinding and fixing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102042798A CN102042798A (en) | 2011-05-04 |
| CN102042798B true CN102042798B (en) | 2012-05-23 |
Family
ID=43909158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101973731A Active CN102042798B (en) | 2009-10-19 | 2009-10-19 | Preparation method of spreading resistance test sample and sample grinding and fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102042798B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853789A (en) * | 2011-06-28 | 2013-01-02 | 上海华碧检测技术有限公司 | Calibration method of epitaxial layer junction depth dyeing |
| CN102513923A (en) * | 2011-12-28 | 2012-06-27 | 彩虹集团公司 | Sample tray for precision grinding and polishing machine |
| CN103084967B (en) * | 2013-01-16 | 2015-04-08 | 大连理工大学 | Grinding and buffing device for transmission electron microscope film sample |
| CN104810239B (en) * | 2014-01-23 | 2017-08-29 | 中芯国际集成电路制造(上海)有限公司 | A kind of preparation method of Spreading resistance sample |
| CN108267348A (en) * | 2017-12-29 | 2018-07-10 | 北京智芯微电子科技有限公司 | The nano high-precision preparation method of IC product cross sections |
| CN110634776B (en) * | 2019-09-18 | 2022-03-01 | 西安奕斯伟材料科技有限公司 | Preparation device and preparation method of silicon wafer sample |
| CN112025469B (en) * | 2020-09-10 | 2022-06-10 | 西安奕斯伟材料科技有限公司 | Device, equipment and method for angle polishing of silicon wafer sample |
| CN113049881A (en) * | 2021-04-09 | 2021-06-29 | 中国电子技术标准化研究院 | Extension resistance tester for epitaxial layer of integrated circuit |
| US11841296B2 (en) | 2021-12-02 | 2023-12-12 | Globalfoundries U.S. Inc. | Semiconductor substrates for electrical resistivity measurements |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2657857Y (en) * | 2003-11-14 | 2004-11-24 | 顾印利 | Flat surface sample polishing machine |
| CN2930961Y (en) * | 2006-08-23 | 2007-08-08 | 南阳金冠电气有限公司 | Piezoresistive wafer double-surface grinding machine |
-
2009
- 2009-10-19 CN CN2009101973731A patent/CN102042798B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2657857Y (en) * | 2003-11-14 | 2004-11-24 | 顾印利 | Flat surface sample polishing machine |
| CN2930961Y (en) * | 2006-08-23 | 2007-08-08 | 南阳金冠电气有限公司 | Piezoresistive wafer double-surface grinding machine |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2006-165262A 2006.06.22 |
| 江苏省电子工业综合研究所.用单点扩展电阻探针测量硅电阻率.《江苏电子 专题资料 半导体器件与工艺》.1978,第75页. * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102042798A (en) | 2011-05-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102042798B (en) | Preparation method of spreading resistance test sample and sample grinding and fixing device | |
| KR100737879B1 (en) | Method of manufacturing semiconductor wafer | |
| CN102089121B (en) | Wafer polishing method and double side polishing apparatus | |
| KR101669491B1 (en) | Apparatus and method for double-side polishing of work | |
| CN102157157B (en) | Glass substrate for magnetic recording medium, and method for manufacturing same | |
| CN107505248B (en) | A kind of nanometer of cutting-in high speed single-point scratching experimental rig and its test method | |
| KR20150065682A (en) | Methods of polishing sapphire surfaces | |
| WO2014002467A1 (en) | Method for polishing work and work polishing device | |
| CN103630453B (en) | One can control high-precision grinding study mechanism experimental provision | |
| CN103231302A (en) | Method for obtaining super-smooth surface low-sub-surface-damage crystal | |
| EP2035190A1 (en) | Compressible abrasive article | |
| KR20130094676A (en) | Cmp groove depth and conditioning disk monitoring | |
| CN107457616A (en) | A kind of diamond crystal surface chemical mechanical polishing method based on nano-nickel powder | |
| US20230339064A1 (en) | Intergrated machining device for grinding and polishing diamond and method thereof | |
| CN104493683A (en) | Method for testing film grinding speed | |
| CN113686679A (en) | High-speed mechanical scribing test method and device for semiconductor crystal | |
| CN107081657B (en) | Automatic grinding device of disk sample | |
| JP2022519889A (en) | A polishing element having a precisely molded feature part, a polishing article manufactured from the polishing element, and a method for manufacturing the polishing article. | |
| Kang et al. | Study on grinding performance of soft abrasive wheel for silicon wafer | |
| Zheng et al. | Finishing of display glass for mobile electronics using 3M Trizact diamond tile abrasive pads | |
| CN205600498U (en) | High -speed machining and automatic measure integration equipment | |
| Mess et al. | Vertical differential displacements at a pad/sapphire interface during polishing | |
| Jeong et al. | A study on pressure distribution for uniform polishing of sapphire substrate | |
| Choi et al. | Pad surface and coefficient of friction correlation analysis during friction between felt pad and single-crystal silicon | |
| CN102626896A (en) | Silicon chip polishing method for cutting polishing cloth of fixed plate edge |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |