CN103084967B - Grinding and buffing device for transmission electron microscope film sample - Google Patents

Grinding and buffing device for transmission electron microscope film sample Download PDF

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Publication number
CN103084967B
CN103084967B CN201310015073.3A CN201310015073A CN103084967B CN 103084967 B CN103084967 B CN 103084967B CN 201310015073 A CN201310015073 A CN 201310015073A CN 103084967 B CN103084967 B CN 103084967B
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China
Prior art keywords
cylindrical
hole
sample
screw
grinding
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Expired - Fee Related
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CN201310015073.3A
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Chinese (zh)
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CN103084967A (en
Inventor
杨晓琨
叶飞
蒋鑫
石国辉
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Dalian University of Technology
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Dalian University of Technology
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Publication of CN103084967B publication Critical patent/CN103084967B/en
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Abstract

The invention discloses a grinding and buffing device for a transmission electron microscope film sample. The grinding and buffing device for the transmission electron microscope film sample is characterized in that four through holes are formed in a cylindrical basal body. Except a center through hole, other three through holes are evenly distributed around a center of a circle of the bottom of the cylindrical basal body. The three through holes fit in with three cylindrical support columns in a sliding mode. A cylindrical sleeve of each rotation screw is fixedly connected with one corresponding through hole in the cylindrical basal body through a bolt. A threaded through hole is formed in the center of each cylindrical sleeve and used for being inserted into one screw. A through hole which corresponds to the center through hole of the cylindrical basal body is formed in a right-angular frustum of a pyramid. The bolt penetrates the center through hole to enable the right-angular frustum of the pyramid to be fixedly connected with the cylindrical basal body. A semicircular groove and a two-third circular through hole are formed in the pointedness portion of the right-angular frustum of the pyramid. A differential head fits in with the right-angular frustum of the pyramid. The differential head is fixed by the semicircular groove and locked by the bolt. The grinding and buffing device for the transmission electron microscope film sample has the advantages of being simple in structure, low in construction cost, and capable of accurately controlling an angle of inclination of a wedge-shaped sample and improving efficiency of sample preparation and uniformity of sample grinding.

Description

A kind of grinding and polishing device for transmission electron microscope film sample
Technical field
The present invention relates to a kind of grinding and polishing device for transmission electron microscope film sample.
Background technology
It is large and evenly and without thin (electron beam is transparent) district of artificial defect that desirable transmission electron microscope film sample requires to have area, preparing such sample will thinning through multiprogramming, the general first step is mechanical pre-thinning (grinding), next step just can be carried out thinning after requiring at least to be ground to about 30 μm, therefore mechanical lapping is one of committed step of preparing of transmission electron microscope film sample, and good milling tool is also particularly important.
Although the requirement of hand lapping device to operator is higher, due to its more economically, thus apply comparatively extensive.At present, the grinding and polishing device of the transmission electron microscope film sample preparation that market is sold, or expensive, efficiency is lower, or complex structure, operation inconvenience.Wherein, for the grinding of wedge shaped sample, most milling tool have employed multiple differential head and carries out angular adjustment, does not so not only greatly improve efficiency and the precision of grinding, adds the manufacturing cost of instrument on the contrary.And an innovation of the present invention is just only to adopt a differential head to control the angle of inclination of wedge shaped sample, make precision is guaranteed while, the manufacturing cost of device is greatly saved.
Summary of the invention
The present invention is directed to the deficiency of existing hand lapping instrument, provide a kind of and significantly can save manufacturing cost and improve the grinding and polishing device for transmission electron microscope film sample of grinding efficiency.
The present invention is achieved through the following technical solutions:
For a grinding and polishing device for transmission electron microscope film sample, this grinding and polishing device comprises cylindrical base, three cylindrical columns, three rotary screws, right angle terrace with edge and differential heads.
Cylindrical base has four through holes, and except central through hole, its excess-three through hole is uniformly distributed around the center of circle bottom cylindrical base, and three through holes and three cylindrical columns are slidably matched.
Rotary screw, comprise cylindrical sleeve and screw rod two part, cylindrical sleeve is fixedly connected with respective through hole on cylindrical base by screw, and the center of cylindrical sleeve has tapped through hole, passes in and out for screw rod.
Right angle terrace with edge has the through hole corresponding with the through hole at cylindrical base center, and it is fixedly connected with cylindrical base through central through hole by bolt; The edges and corners of right angle terrace with edge have semi-circular recesses and 2/3rds manholes.
Differential head coordinates with right angle terrace with edge, is fixed by semi-circular recesses, and utilizes screw lock.
It is simple that the present invention has structure, and cost is low, can to advantages such as wedge shaped sample grind with carrying out micron level.Its great advantage can control comparatively accurately the angle of inclination of wedge shaped sample, thus increase the efficiency of sample preparation, and improve the uniformity of sample grinding.
Accompanying drawing explanation
Fig. 1 is structure sectional view of the present invention.
Fig. 2 is structure top view of the present invention.
Fig. 3 is the structure top view of right angle terrace with edge.
Fig. 4 is the structure left view of right angle terrace with edge.
In figure: 1 cylindrical base; 2 cylinder pillars; 3 rotary screws; 4 right angle terrace with edges; 5 differential heads;
6 samples; 2/7ths three manholes; 8 semi-circular recesses.
Detailed description of the invention
Specific embodiments of the invention are described in detail below in conjunction with technical scheme and accompanying drawing.
Embodiment
As shown in Figure 1 and Figure 2, a kind of grinding and polishing device for transmission electron microscope film sample, bottom cylindrical base 1, the center of circle is equidistant is uniformly distributed for three cylindrical columns 2, and the through hole corresponding on cylindrical base 1 is slidably matched; Three rotary screws 3, comprise cylindrical sleeve and screw rod two parts, and wherein cylindrical sleeve is fixedly connected with by screw with respective through hole on cylindrical base 1, and cylindrical sleeve center has tapped through hole, can for screw rod turnover;
This right angle terrace with edge 4 there is the through hole corresponding with cylindrical base 1 central through hole, utilizes bolt to pass through hole and with nut, it be fixedly connected with cylindrical base 1; The corner angle outer rim position of right angle terrace with edge 4 has semi-circular recesses 8 and 2/3rds manholes 7;
A differential head 5 coordinates with right angle terrace with edge 4, is fixed, and utilize screw lock by semi-circular recesses 8.
During operation, three of rotary screw 3 cylindrical sleeves to be inserted into respectively on cylindrical base 1 in corresponding through hole and to fix with holding screw, then screw rod being screwed in sleeve.Cylindrical columns 2 is inserted in the through hole of cylindrical base 1 again, and by regulating rotary screw 3 to regulate three outer elongations of cylindrical columns 2, makes the bottom surface of three cylindrical columns 2 in same level.After leveling, right angle terrace with edge 4 is connected with cylindrical base 1, and fixes with screw bolt and nut, then differential head 5 is put on right angle terrace with edge 4 in corresponding semi-circular recesses 8, and use screw lock.Again sample 6 is put in 2/3rds manholes 7 of right angle terrace with edge 4.Utilize differential head 5 to regulate the extension of sample 6, after making it to reach the position of needs, with screw lock sample 6.Finally grind.During grinding, the cylindrical columns 2 of this device is placed in sand paper or has in the plane of sand paper, carrying out linear reciprocating motion by hand-held cylindrical base 1 can wear into wedge shape by sample 6, can also do the motion of " 8 " type and carry out thinning and polishing to sample 6.
Apparatus of the present invention structure is simple, and cost is low, has easy assembling, easy-operating feature, and the angle of inclination of the adjustment of differential head to wedge shaped sample can be utilized to control comparatively accurately.

Claims (1)

1. for a grinding and polishing device for transmission electron microscope film sample, it is characterized in that: this grinding and polishing device comprises cylindrical base (1), three cylindrical columns (2), three rotary screws (3), right angle terrace with edge (4); 2/3rds manholes (7) on differential head (5) and right angle terrace with edge (4) and semi-circular recesses (8);
Cylindrical base (1) has four through holes, and except central through hole, its excess-three through hole is uniformly distributed around the center of circle of cylindrical base (1) bottom, and three through holes and three cylindrical columns (2) are slidably matched;
Rotary screw (3) comprises cylindrical sleeve and screw rod two part, and cylindrical sleeve is fixedly connected with by the upper respective through hole of screw and cylindrical base (1), and the center of cylindrical sleeve has tapped through hole, passes in and out for screw rod;
Right angle terrace with edge (4) has the through hole corresponding with the through hole at cylindric matrix (1) center, and it is fixedly connected with cylindrical base (1) through central through hole by bolt; The edges and corners of right angle terrace with edge (4) have semi-circular recesses (8) and 2/3rds manholes (7); Differential head (5) coordinates with right angle terrace with edge (4), is fixed, and utilize screw lock by semi-circular recesses (8);
Three cylindrical sleeves of rotary screw 3 to be inserted into respectively on cylindrical base 1 in corresponding through hole and to fix with holding screw, and screw rod is screwed in sleeve; Cylindrical columns 2 is inserted in the through hole of cylindrical base 1, and by regulating rotary screw 3 to regulate three outer elongations of cylindrical columns 2, makes the bottom surface of three cylindrical columns 2 in same level; Right angle terrace with edge 4 is connected with cylindrical base 1, and fixes with screw bolt and nut, then is put into by differential head 5 on right angle terrace with edge 4 in corresponding semi-circular recesses 8, and by screw lock; Sample 6 is put in 2/3rds manholes 7 of right angle terrace with edge 4; Utilize differential head 5 to regulate the extension of sample 6, after making it to reach the position of needs, with screw lock sample 6; During grinding, the cylindrical columns 2 of this device is placed in sand paper or has in the plane of sand paper, carry out linear reciprocating motion by hand-held cylindrical base 1 and wear into wedge shape by sample 6, or do " 8 " type motion thinning and polishing is carried out to sample 6.
CN201310015073.3A 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample Expired - Fee Related CN103084967B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310015073.3A CN103084967B (en) 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310015073.3A CN103084967B (en) 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample

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CN103084967A CN103084967A (en) 2013-05-08
CN103084967B true CN103084967B (en) 2015-04-08

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110174424A (en) * 2019-04-25 2019-08-27 南方科技大学 Transmitted electron microscope sample preparation method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559349A (en) * 1968-01-25 1971-02-02 Takahiro Imahashi Faceting machine
FR2252166A1 (en) * 1973-11-23 1975-06-20 Arnold Franz
CN101249633A (en) * 2008-03-20 2008-08-27 山东理工大学 Novel precision grinding polishers
CN102042798A (en) * 2009-10-19 2011-05-04 中芯国际集成电路制造(上海)有限公司 Preparation method of spreading resistance test sample and sample grinding and fixing device
CN203045494U (en) * 2013-01-16 2013-07-10 大连理工大学 Grinding and polishing device for transmission electron microscope film sample

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559349A (en) * 1968-01-25 1971-02-02 Takahiro Imahashi Faceting machine
FR2252166A1 (en) * 1973-11-23 1975-06-20 Arnold Franz
CN101249633A (en) * 2008-03-20 2008-08-27 山东理工大学 Novel precision grinding polishers
CN102042798A (en) * 2009-10-19 2011-05-04 中芯国际集成电路制造(上海)有限公司 Preparation method of spreading resistance test sample and sample grinding and fixing device
CN203045494U (en) * 2013-01-16 2013-07-10 大连理工大学 Grinding and polishing device for transmission electron microscope film sample

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Granted publication date: 20150408

Termination date: 20180116