CN103084967A - Grinding and buffing device for transmission electron microscope film sample - Google Patents

Grinding and buffing device for transmission electron microscope film sample Download PDF

Info

Publication number
CN103084967A
CN103084967A CN2013100150733A CN201310015073A CN103084967A CN 103084967 A CN103084967 A CN 103084967A CN 2013100150733 A CN2013100150733 A CN 2013100150733A CN 201310015073 A CN201310015073 A CN 201310015073A CN 103084967 A CN103084967 A CN 103084967A
Authority
CN
China
Prior art keywords
hole
cylindrical
grinding
center
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013100150733A
Other languages
Chinese (zh)
Other versions
CN103084967B (en
Inventor
杨晓琨
叶飞
蒋鑫
石国辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dalian University of Technology
Original Assignee
Dalian University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalian University of Technology filed Critical Dalian University of Technology
Priority to CN201310015073.3A priority Critical patent/CN103084967B/en
Publication of CN103084967A publication Critical patent/CN103084967A/en
Application granted granted Critical
Publication of CN103084967B publication Critical patent/CN103084967B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Sampling And Sample Adjustment (AREA)

Abstract

The invention discloses a grinding and buffing device for a transmission electron microscope film sample. The grinding and buffing device for the transmission electron microscope film sample is characterized in that four through holes are formed in a cylindrical basal body. Except a center through hole, other three through holes are evenly distributed around a center of a circle of the bottom of the cylindrical basal body. The three through holes fit in with three cylindrical support columns in a sliding mode. A cylindrical sleeve of each rotation screw is fixedly connected with one corresponding through hole in the cylindrical basal body through a bolt. A threaded through hole is formed in the center of each cylindrical sleeve and used for being inserted into one screw. A through hole which corresponds to the center through hole of the cylindrical basal body is formed in a right-angular frustum of a pyramid. The bolt penetrates the center through hole to enable the right-angular frustum of the pyramid to be fixedly connected with the cylindrical basal body. A semicircular groove and a two-third circular through hole are formed in the pointedness portion of the right-angular frustum of the pyramid. A differential head fits in with the right-angular frustum of the pyramid. The differential head is fixed by the semicircular groove and locked by the bolt. The grinding and buffing device for the transmission electron microscope film sample has the advantages of being simple in structure, low in construction cost, and capable of accurately controlling an angle of inclination of a wedge-shaped sample and improving efficiency of sample preparation and uniformity of sample grinding.

Description

A kind of grinding and polishing device for the TEM Thin membrane sample
Technical field
The present invention relates to a kind of grinding and polishing device for the TEM Thin membrane sample.
Background technology
Desirable transmission electron microscope film sample requirement has area greatly and evenly and unmanned thin (electron beam is transparent) district for defective, preparing such sample will be through the attenuate of multiprogramming, the general first step is mechanical pre-thinning (grinding), just can carry out next step attenuate after requiring to be ground at least about 30 μ m, therefore mechanical lapping is one of committed step of transmission electron microscope film sample preparation, and good milling tool is also particularly important.
Although the hand lapping device is had relatively high expectations to the operator's, due to its more economically, thereby use comparatively extensive.At present, the grinding and polishing device of the transmission electron microscope film sample preparation of selling on market, or expensive, efficient is lower, or complex structure, operation inconvenience.Wherein, for the grinding of wedge shaped sample, most milling tool has adopted a plurality of differential heads to carry out angular adjustment, does not so not only greatly improve efficient and the precision of grinding, and has increased on the contrary the manufacturing cost of instrument.And an innovation of the present invention just is only to adopt a differential head to control the angle of inclination of wedge shaped sample, makes in the guaranteed while of precision, and the manufacturing cost of device is greatly saved.
Summary of the invention
The present invention is directed to the deficiency of existing hand lapping instrument, a kind of grinding and polishing device that is used for the TEM Thin membrane sample that can significantly save manufacturing cost and improve grinding efficiency is provided.
The present invention is achieved through the following technical solutions:
A kind of grinding and polishing device for the TEM Thin membrane sample, this grinding and polishing device comprise cylindrical base, three cylindrical columns, three rotary screws, right angle terrace with edge and differential heads.
Cylindrical base has four through holes, and except central through hole, its excess-three through hole evenly distributes around the center of circle of cylindrical base bottom, and three through holes and three cylindrical columns are slidably matched.
Rotary screw comprises cylindrical sleeve and screw rod two parts, and cylindrical sleeve is fixedly connected with respective through hole on cylindric matrix by screw, and the center of cylindrical sleeve has tapped through hole, for the screw rod turnover.
The through hole corresponding with the through hole at cylindric matrix center arranged on the right angle terrace with edge, and bolt passes central through hole it is fixedly connected with cylindric matrix; The edges and corners of right angle terrace with edge have semi-circular recesses and 2/3rds manholes.
The differential head coordinates with the right angle terrace with edge, fixes by semi-circular recesses, and utilizes screw lock.
The present invention has simple in structure, and cost is low, can carry out to wedge shaped sample the advantages such as micron level ground grinding.Its great advantage is can control comparatively accurately the angle of inclination of wedge shaped sample, thereby increases the efficient of sample preparation, and improves the uniformity that sample grinds.
Description of drawings
Fig. 1 is structure cutaway view of the present invention.
Fig. 2 is structure top view of the present invention.
Fig. 3 is the structure top view of right angle terrace with edge.
Fig. 4 is the structure left view of right angle terrace with edge.
In figure: 1 cylindrical base; 2 cylinder pillars; 3 rotary screws; 4 right angle terrace with edges; 5 differential heads;
6 samples; 2/7ths three manholes; 8 semi-circular recesses.
The specific embodiment
Be described in detail specific embodiments of the invention below in conjunction with technical scheme and accompanying drawing.
Embodiment
As shown in Figure 1 and Figure 2, a kind of grinding and polishing device for the TEM Thin membrane sample, three cylindrical columns 2 be around the cylindrical base 1 equidistant even distribution in the center of circle, bottom, and with cylindrical base 1 on corresponding through hole be slidably matched; Three rotary screws 3 comprise cylindrical sleeve 3-1 and screw rod 3-2 two parts, and wherein on cylindrical sleeve 3-1 and cylindrical base 1, respective through hole is fixedly connected with by screw, and cylindrical sleeve 3-1 center has tapped through hole, can be for screw rod 3-2 turnover;
The through hole corresponding with cylindrical base 1 central through hole arranged on this right angle terrace with edge 4, utilize bolt to pass through hole and with nut, it be fixedly connected with cylindrical base 1; Have semi-circular recesses 8 and 2/3rds manholes 7 on the corner angle outer rim position of right angle terrace with edge 4;
A differential head 5 coordinates with right angle terrace with edge 4, and is fixing by semi-circular recesses 8, and utilizes screw lock.
During operation, three cylindrical sleeve 3-1 of rotary screw 3 be inserted into respectively on cylindrical base 1 in corresponding through hole and fix with holding screw, then screw rod 3-2 being screwed in sleeve.Again cylindrical columns 2 is inserted in the through hole of cylindrical base 1, and regulates three outer elongations of cylindrical columns 2 by regulating rotary screw 3, make the bottom surface of three cylindrical columns 2 on same level.After leveling, right angle terrace with edge 4 is connected with cylindrical base 1, and fixes with screw bolt and nut, then differential head 5 is put on right angle terrace with edge 4 in corresponding semi-circular recesses 8, and use screw lock.Again sample 6 is put in 2/3rds manholes 7 of right angle terrace with edge 4.Utilize differential head 5 to regulate the extension of sample 6, after making it to reach the position that needs, with screw lock sample 6.Grind at last.During grinding, the cylindrical columns 2 of this device be placed in sand paper or have on the plane of sand paper, carrying out linear reciprocating motion by hand-held cylindrical base 1 and sample 6 can be worn into wedge shape, can also do the motion of " 8 " type sample 6 is carried out attenuate and polishing.
Apparatus of the present invention are simple in structure, and cost is low, have easy assembling, easy-operating characteristics, and can utilize the adjusting of differential head that the angle of inclination of wedge shaped sample is controlled comparatively accurately.

Claims (1)

1. grinding and polishing device that is used for the TEM Thin membrane sample, it is characterized in that: this grinding and polishing device comprises cylindrical base (1), three cylindrical columns (2), three rotary screws (3), right angle terrace with edge (4); 2/3rds manholes (7) on differential head (5) and right angle terrace with edge (4) and semi-circular recesses (8).
Cylindrical base (1) has four through holes, and except central through hole, its excess-three through hole evenly distributes around the center of circle of cylindrical base (1) bottom, and three through holes and three cylindrical columns (2) are slidably matched;
Rotary screw (3) comprises cylindrical sleeve (3-1) and screw rod (3-2) two parts, cylindrical sleeve (3-1) is fixedly connected with by the upper respective through hole of screw and cylindrical base (1), the center of cylindrical sleeve (3-1) has tapped through hole, for screw rod (3-2) turnover;
The through hole corresponding with the through hole at cylindric matrix (1) center arranged on right angle terrace with edge (4), and bolt passes central through hole it is fixedly connected with cylindrical base (1); The edges and corners of right angle terrace with edge (4) have semi-circular recesses (8) and 2/3rds manholes (7);
Differential head (5) coordinates with right angle terrace with edge (4), and is fixing by semi-circular recesses (8), and utilizes screw lock.
CN201310015073.3A 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample Expired - Fee Related CN103084967B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310015073.3A CN103084967B (en) 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310015073.3A CN103084967B (en) 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample

Publications (2)

Publication Number Publication Date
CN103084967A true CN103084967A (en) 2013-05-08
CN103084967B CN103084967B (en) 2015-04-08

Family

ID=48198357

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310015073.3A Expired - Fee Related CN103084967B (en) 2013-01-16 2013-01-16 Grinding and buffing device for transmission electron microscope film sample

Country Status (1)

Country Link
CN (1) CN103084967B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110174424A (en) * 2019-04-25 2019-08-27 南方科技大学 Preparation method of transmission electron microscope sample

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559349A (en) * 1968-01-25 1971-02-02 Takahiro Imahashi Faceting machine
FR2252166A1 (en) * 1973-11-23 1975-06-20 Arnold Franz
CN101249633A (en) * 2008-03-20 2008-08-27 山东理工大学 Novel precision grinding polishers
CN102042798A (en) * 2009-10-19 2011-05-04 中芯国际集成电路制造(上海)有限公司 Preparation method of spreading resistance test sample and sample grinding and fixing device
CN203045494U (en) * 2013-01-16 2013-07-10 大连理工大学 Grinding and polishing device for transmission electron microscope film sample

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559349A (en) * 1968-01-25 1971-02-02 Takahiro Imahashi Faceting machine
FR2252166A1 (en) * 1973-11-23 1975-06-20 Arnold Franz
CN101249633A (en) * 2008-03-20 2008-08-27 山东理工大学 Novel precision grinding polishers
CN102042798A (en) * 2009-10-19 2011-05-04 中芯国际集成电路制造(上海)有限公司 Preparation method of spreading resistance test sample and sample grinding and fixing device
CN203045494U (en) * 2013-01-16 2013-07-10 大连理工大学 Grinding and polishing device for transmission electron microscope film sample

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110174424A (en) * 2019-04-25 2019-08-27 南方科技大学 Preparation method of transmission electron microscope sample

Also Published As

Publication number Publication date
CN103084967B (en) 2015-04-08

Similar Documents

Publication Publication Date Title
CN104551900B (en) Silicon carbide wafer bevel grinding, milling and polishing machine and operation method thereof
CN203109645U (en) Adjustable floating cushion head
CN104259981B (en) The bulb ball bowl automatic grinding machine of press pressure machine sliding block assembly
CN106181692A (en) A kind of multi-surface grinding attachment
CN103084967B (en) Grinding and buffing device for transmission electron microscope film sample
CN203045494U (en) Grinding and polishing device for transmission electron microscope film sample
CN110587389A (en) 360-degree universal fixed-point grinding tool rest for ball
CN202123408U (en) Glass edge polishing mechanism of glass edging machine
CN206795551U (en) Novel planar grinder
CN203031392U (en) Chisel edge grinding seat of drill grinder
CN206066195U (en) A kind of gem processing polishing grinding equipment
CN103170886B (en) The linear contact lay grinding and polishing apparatus of a kind of sphere and planar optical elements and method
CN210997819U (en) 360-degree universal fixed-point grinding tool rest for ball
CN208012600U (en) High-precision leaning surface reference transfer device convenient to adjust
CN103506927B (en) A kind of polishing machine material containing block
CN207206155U (en) Angular adjustment apparatus, bistrique and grinder
CN203804348U (en) Simple angle adjusting mechanism for grinding wheel head
CN208697010U (en) A kind of precision drill gun dismembyator
CN212145775U (en) Edge grinding device for corners of plate glass
CN102049716B (en) Adjustable pressure device used for polishing heavy-calibre plane optical element
CN208729424U (en) A kind of mineral surface polishing instrument
CN209727580U (en) Rotatable guide tracked metallographic grind away device
CN208483650U (en) Cutting and grinding device
CN203266414U (en) Digital control grinding wheel dressing device
CN103940649A (en) Specimen pre-grinding machine with pre-grinding thickness control device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150408

Termination date: 20180116