CN102034680A - 晶圆的干燥方法 - Google Patents
晶圆的干燥方法 Download PDFInfo
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CN2009101967196A CN102034680A (zh) | 2009-09-29 | 2009-09-29 | 晶圆的干燥方法 |
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CN2009101967196A CN102034680A (zh) | 2009-09-29 | 2009-09-29 | 晶圆的干燥方法 |
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CN102034680A true CN102034680A (zh) | 2011-04-27 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103307856A (zh) * | 2012-03-16 | 2013-09-18 | 东莞新科技术研究开发有限公司 | 真空干燥装置 |
CN110473811A (zh) * | 2019-08-22 | 2019-11-19 | 上海华力集成电路制造有限公司 | 提高刷片机湿法清洗后干燥能力的装置及方法 |
CN114322468A (zh) * | 2022-03-10 | 2022-04-12 | 广州粤芯半导体技术有限公司 | 一种晶片干燥方法 |
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2009
- 2009-09-29 CN CN2009101967196A patent/CN102034680A/zh active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103307856A (zh) * | 2012-03-16 | 2013-09-18 | 东莞新科技术研究开发有限公司 | 真空干燥装置 |
CN110473811A (zh) * | 2019-08-22 | 2019-11-19 | 上海华力集成电路制造有限公司 | 提高刷片机湿法清洗后干燥能力的装置及方法 |
CN114322468A (zh) * | 2022-03-10 | 2022-04-12 | 广州粤芯半导体技术有限公司 | 一种晶片干燥方法 |
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Free format text: FORMER OWNER: WUXI HUARUN SHANGHUA TECHNOLOGY CO., LTD. Effective date: 20120312 |
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Free format text: CORRECT: ADDRESS; FROM: 214061 WUXI, JIANGSU PROVINCE TO: 214028 WUXI, JIANGSU PROVINCE |
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TA01 | Transfer of patent application right |
Effective date of registration: 20120312 Address after: 214028 Wuxi provincial high tech Industrial Development Zone, Hanjiang Road, No. 5, Jiangsu, China Applicant after: Wuxi CSMC Semiconductor Co., Ltd. Address before: 214061 No. 5 Hanjiang Road, national hi tech Industrial Development Zone, Wuxi, Jiangsu, China Applicant before: Wuxi CSMC Semiconductor Co., Ltd. Co-applicant before: Wuxi Huarun Shanghua Technology Co., Ltd. |
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Application publication date: 20110427 |