CN102027564B - 对物体进行预处理和涂覆的装置和方法 - Google Patents

对物体进行预处理和涂覆的装置和方法 Download PDF

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Publication number
CN102027564B
CN102027564B CN200980115777XA CN200980115777A CN102027564B CN 102027564 B CN102027564 B CN 102027564B CN 200980115777X A CN200980115777X A CN 200980115777XA CN 200980115777 A CN200980115777 A CN 200980115777A CN 102027564 B CN102027564 B CN 102027564B
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China
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magnetron
hppms
electrode
anode
coating
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CN200980115777XA
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Chinese (zh)
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CN102027564A (zh
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雷纳·克雷默
沃尔特·马伊
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Cemecon AG
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Cemecon AG
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3473—Composition uniformity or desired gradient

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
CN200980115777XA 2008-04-28 2009-04-28 对物体进行预处理和涂覆的装置和方法 Active CN102027564B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008021128.1 2008-04-28
DE102008021128 2008-04-28
PCT/EP2009/003082 WO2009132822A2 (de) 2008-04-28 2009-04-28 Vorrichtung und verfahren zum vorbehandeln und beschichten von körpern

Publications (2)

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CN102027564A CN102027564A (zh) 2011-04-20
CN102027564B true CN102027564B (zh) 2013-05-22

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CN200980115777XA Active CN102027564B (zh) 2008-04-28 2009-04-28 对物体进行预处理和涂覆的装置和方法

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Country Link
US (1) US9812299B2 (enExample)
EP (1) EP2272080B1 (enExample)
JP (1) JP5448232B2 (enExample)
CN (1) CN102027564B (enExample)
DE (1) DE202009018428U1 (enExample)
WO (1) WO2009132822A2 (enExample)

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CN106119792A (zh) * 2015-04-27 2016-11-16 先进能源工业公司 速率增强的脉冲dc溅射系统

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DE202010001497U1 (de) * 2010-01-29 2010-04-22 Hauzer Techno-Coating B.V. Beschichtungsvorrichtung mit einer HIPIMS-Leistungsquelle
JP5765627B2 (ja) * 2010-09-27 2015-08-19 日立金属株式会社 耐久性に優れる被覆工具およびその製造方法
DE102011117177A1 (de) 2011-10-28 2013-05-02 Oerlikon Trading Ag, Trübbach Verfahren zur Bereitstellung sequenzieller Leistungspulse
HUE025643T2 (en) * 2011-04-20 2016-04-28 Oerlikon Surface Solutions Ag Truebbach Procedure for securing successive power pulses
BRPI1102335A2 (pt) 2011-05-27 2013-06-25 Mahle Metal Leve Sa elemento dotado de pelo menos uma superfÍcie de deslizamento com um revestimento para uso em um motor de combustço interna ou em um compressor
EP2761050B1 (en) * 2011-09-30 2021-08-25 CemeCon AG Coating of substrates using hipims
DE102011117994A1 (de) * 2011-11-09 2013-05-16 Oerlikon Trading Ag, Trübbach HIPIMS-Schichten
JP5344204B2 (ja) * 2012-03-05 2013-11-20 三菱マテリアル株式会社 表面被覆切削工具
US9264150B2 (en) * 2012-03-28 2016-02-16 Globalfoundries Inc. Reactive metal optical security device and methods of fabrication and use
DE102012013577A1 (de) * 2012-07-10 2014-01-16 Oerlikon Trading Ag, Trübbach Hochleistungsimpulsbeschichtungsmethode
US9126273B2 (en) 2012-12-17 2015-09-08 Kennametal Inc Tool for the cutting machining of workpieces and process for coating substrate bodies
EP2784799B1 (en) * 2013-03-28 2022-12-21 CemeCon AG Dense, hard coatings on substrates using HIPIMS
DE102013106351A1 (de) * 2013-06-18 2014-12-18 Innovative Ion Coatings Ltd. Verfahren zur Vorbehandlung einer zu beschichtenden Oberfläche
US9677168B2 (en) 2013-10-08 2017-06-13 TPK America, LLC Touch panel and method for manufacturing the same
US20150354054A1 (en) * 2014-06-06 2015-12-10 Applied Materials, Inc. Cooled process tool adapter for use in substrate processing chambers
FR3025929B1 (fr) * 2014-09-17 2016-10-21 Commissariat Energie Atomique Gaines de combustible nucleaire, procedes de fabrication et utilisation contre l'oxydation.
DE102014115492A1 (de) 2014-10-24 2016-04-28 Cemecon Ag Verfahren und Vorrichtung zur Erzeugung einer elektronischen Entladung
US11049702B2 (en) 2015-04-27 2021-06-29 Advanced Energy Industries, Inc. Rate enhanced pulsed DC sputtering system
KR102369132B1 (ko) * 2015-11-10 2022-02-28 산드빅 인터렉츄얼 프로퍼티 에이비 코팅용 표면을 전처리하는 방법
BR112018009585B1 (pt) 2015-11-12 2022-12-27 Oerlikon Surface Solutions Ag, Pfãffikon Arranjo de pulverização e método de pulverização para distribuição otimizada do fluxo de energia
US10612132B2 (en) 2015-11-27 2020-04-07 Cemecon Ag Coating a body with a diamond layer and a hard material layer
US20180108519A1 (en) * 2016-10-17 2018-04-19 Applied Materials, Inc. POWER DELIVERY FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING (HiPIMS)
KR101885123B1 (ko) * 2017-03-31 2018-08-03 한국알박(주) 마그네트론 스퍼터링 장치의 자석 제어 시스템
CN109112496B (zh) * 2018-09-26 2020-11-24 武汉华星光电半导体显示技术有限公司 磁控溅射设备及去除基板上氧化层的方法
DE102019124616A1 (de) 2019-09-12 2021-03-18 Cemecon Ag Mehrlagige Beschichtung
WO2021215953A1 (ru) * 2020-04-20 2021-10-28 Акционерное Общество "Твэл" Способ ионно-плазменного нанесения коррозионностойких пленочных покрытий на изделия из циркониевых сплавов
CN112708854A (zh) * 2020-12-19 2021-04-27 合肥开泰机电科技有限公司 一种用于大面积钎焊的真空镀膜结构
WO2023099757A1 (en) * 2021-12-03 2023-06-08 Université De Namur A process for depositing a coating on a substrate by means of pvd methods and the coating obtained by said process

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CN106119792B (zh) * 2015-04-27 2021-07-13 先进工程解决方案全球控股私人有限公司 速率增强的脉冲dc溅射系统

Also Published As

Publication number Publication date
DE202009018428U1 (de) 2011-09-28
CN102027564A (zh) 2011-04-20
US20110180389A1 (en) 2011-07-28
JP2011518950A (ja) 2011-06-30
EP2272080A2 (de) 2011-01-12
US9812299B2 (en) 2017-11-07
EP2272080B1 (de) 2012-08-01
WO2009132822A2 (de) 2009-11-05
JP5448232B2 (ja) 2014-03-19
WO2009132822A3 (de) 2010-01-21

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