CN102021642A - Industrial furnace for producing crystalline material ingot - Google Patents
Industrial furnace for producing crystalline material ingot Download PDFInfo
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- CN102021642A CN102021642A CN2009101747482A CN200910174748A CN102021642A CN 102021642 A CN102021642 A CN 102021642A CN 2009101747482 A CN2009101747482 A CN 2009101747482A CN 200910174748 A CN200910174748 A CN 200910174748A CN 102021642 A CN102021642 A CN 102021642A
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Abstract
The invention relates to an industrial furnace for producing a crystalline material ingot through direct solidification, comprising a thermal insulation heating container, a first heating device, a second heating device and a cooling member, wherein the first heating device and the second heating device are used for defining a central space for holding a crystallization crucible; the cooling member comprises a heat release channel manufactured along the thickness of the container. The channel is provided with an entrance arranged below the second heating device and an exit which is arranged outside the container so as to transfer heat out of the container. The furnace also comprises a heat conduction material block, which is combined with the second heating device and is fixed at the position of the entrance facing the heat release channel through a member connected to the container. The heat conduction material block comprises a top surface facing the first heating device and an opposite bottom surface facing the entrance of the heat release channel; a thermal insulation seal element is arranged in the heat release channel; the thermal insulation seal element is pivotally arranged on the container around a pivoting pin so as to be changed between the open position and the closed position; and the open position makes the bottom surface of the heat conduction material block communicated with the outside of the container.
Description
Technical field
The present invention relates to a kind of industrial furnace that is used for producing the crystalline material ingot, comprising by direct curing:
The thermal isolation heating container, it defines cavity in inside,
First and second heating units, the two is arranged in the cavity and lays respectively at the top area and the bottom section of cavity, defining the central space that is used to receive the crystallization crucible,
And cooling component, it comprises the heat release passage of making along the thickness of container, has the inlet that is positioned at second heating unit below and reaches external container heat is shifted to the outlet of external container.
Background technology
File US6299682 has described a kind of method of using industrial furnace and producing the crystalline material ingot by direct curing of being used to, and this industrial furnace comprises the thermal isolation heating container of having integrated two graphite heating plates, a top board and base plates.The crystallization crucible is designed to be positioned between two hot-plates, is positioned on the cooling plate by gravity, and this cooling plate is equipped with the internal passages that is used for coolant flowing.This refrigerant can be a water or such as the such gas of argon gas.Cooling plate is positioned on the bottom hot plate by gravity, and this bottom hot plate is provided with and is used to the opening that allows the refrigerant supply pipe pass through.Supply pipe passes heating container via first channel, and the refrigerant that comes out from cooling plate freely flows (being subjected to the guiding of heating container bottom interior wall) and is discharged into external container by second passage.
According to described preparation method, be heated at crucible and obtained the crystalline material ingot by direct curing after cooling off up to material melts and via the bottom, to realize crystallisation process.Heating steps can be by only supplying top heat plate or supplying two hot-plates simultaneously and carry out.Realize by in the crystallization crucible, setting up thermal gradient by crystallisation step via the bottom heat release.The supply of bottom hot plate is carried out by cooling plate and by adjusting from the control of the downward heat release of crucible.
This industrial furnace be not entirely satisfactory aspect the layout of the layout of bottom heating unit and cooling plate.In fact the crystallization crucible is positioned on the cooling plate, and this cooling plate is positioned on the bottom hot plate.Thermal conduction in the cooling plate is very ineffective.And then, on the cooling plate edge, be possible only by the radiation heat release.Therefore cooling performance is restricted, and this means in order to improve cooling power, and must use complicated cooling system, it uses flowing coolant in the internal passages of cooling plate.But this cooling system structure and enforcement are very complicated, consider production, operation and maintenance aspect, and this stove is pretty troublesome.
Another kind of industrial furnace is described in file EP1162290, and wherein heating container is incorporated into bottom heating unit and top firing device, and each device is provided with a plurality of parallel horizontal heating rods.The crystallization crucible is positioned on the back up pad by gravity, and this back up pad is maintained at heating rod top one distance of bottom heating unit.Back up pad is made with thermally conductive material.The metal cools plate is equipped with and is used to allow refrigerant (water) mobile internal passages, and this metal cools plate is arranged in the heating rod below of bottom heating unit.Recoverable thermal isolation fin is arranged between the heating rod of cooling plate and bottom heating unit by horizontal translation, is designed to comprise the heat reflection surface towards the top surface of this fin of heating rod.
The shortcoming that this stove and accessory has is, although used the complicated technology scheme only to have very common performance.Particularly, the efficient of bottom heating unit is not good, and its heat adds quality not good (uniform defect).Cooling almost only realizes that by radiation the efficient of this stove and cooling performance are still very limited, this means in order to improve cooling power, and must use complicated cooling system, this cooling system uses flowing coolant in the internal passages of metal cools plate.But this cooling system structure and enforcement are very complicated, consider production, operation and maintenance aspect, and this stove is pretty troublesome.And then the effect of thermal isolation fin causes forming dust, and these dusts are easy to be deposited on the material in the crucible.Because no matter which kind of position heating container the thermal isolation fin is positioned at always be in communication with the outside, so the danger of dust deposit is always very big.
Summary of the invention
The purpose of this invention is to provide a kind of industrial furnace, be used for producing the crystalline material ingot with simple and cheap design, this industrial furnace performance can improve.
Remarkable part according to industrial furnace of the present invention is that it comprises:
The heat conducting material piece, it merges second heating unit, and is positioned in the bottom section of the inlet of heat release passage, and has towards the top surface of first heating unit and relative basal surface towards the inlet of heat release passage,
The thermal isolation sealing element is assembled to the heat release passage, and is articulated on the container around pivotal pin, and changing between open position and off-position, this open position makes the external communications of basal surface and container of piece.
Because the bottom heating unit is incorporated in the heat conducting material piece, so efficient and the homogeneity of the heating phase of being undertaken by conduction improve.The efficient of stove and cooling performance aspect, particularly the homogeneity aspect improves, and need not use complicated cooling system.When sealing element was shown in an open position, heat release was carried out by the heat conducting material piece with by radiation.Owing to carry out heat absorption, the heat by radiation delivery will be bled off so simply the basal surface of crucible is contacted the basal surface that just is enough to carry out from crucible with the cooling gas that is positioned at the heating container outside by conduction.Make moving sealing element and compare the dust that has also limited generation when sealing element moves by rotation by translation execution start.And sealing element guarantees that heating container is closed when it is in the closed position, and this has reduced the danger of the deposition dust on the material in crucible.
According to preferred embodiment, the heat transfer material piece is made with graphite.
The other technologies feature can be used singly or in combination:
Second heating unit comprises a plurality of graphite rods that are powered, and each rod is contained in the receiver hole that is manufactured in the heat transfer material piece,
The heat transfer material piece is fixed with respect to heating container, and described top surface reception crystallization crucible,
Transom between heat transfer material piece and the heating container comprises containment member, and the sealing member is carried out the tight seal of the inlet of heat release passage by the basal surface of heat transfer material piece.
Description of drawings
To more be expressly understood other advantages and feature from the following description of the specific embodiment of the invention, described embodiment only is the purpose of non-limitative example and is presented among appended attached Fig. 1 and 2,
Attached Fig. 1 and 2 has schematically shown the example according to industrial furnace of the present invention in cross section longitudinally respectively in the off-position of sealing element and open position.
Embodiment
In Fig. 1 and 2, the industrial furnace 10 that is used for producing by direct curing the crystalline material ingot according to the present invention comprises thermal isolation heating container 11.Heating container 11 inside define a cavity, and this cavity comprises two eclipsed tight seal zones, is respectively top area and bottom section.
The bottom section of cavity diapire 14 by container 11 in the base section of cavity limits.Thickness along container 11 is made heat release passage 15, passes diapire 14 or rather and makes the heat release passage.Heat release passage 15 comprise inlet 16 on the one hand and comprise on the other hand outlet 17, this inlet be manufactured on diapire 14 in the surface in cavity bottom zone, this outlet be manufactured on diapire 14 in the surface of container 11 outsides.Outlet 17 outwards opens into the outside of container 11 thus, heat is shifted to container 11 outsides.
The heat conducting material piece 18 that merges second heating unit 19 is firmly held in the bottom section of cavity and is positioned at towards the position of the inlet 16 of heat release passage 15.In order to carry out the fixing of heat conducting material piece 18, be used to be connected to the member of container 11.In the example shown, the whole bottom section of heat conducting material piece 18 cavity fillings and by gravity be positioned at diapire 14 on the surface in cavity bottom zone.Be used to be connected to the member of container 11 therefore here only by diapire 14 formation.But, can allow the only bottom section of cavity filling partly of heat conducting material piece 18, possible is the vertical gap that has insertion with respect to diapire 14.In this case, the member that is used to connect can form by the outstanding fixed block 18 of side direction, and this protuberance is arranged as from the surface towards cavity of container side wall and hangs.
By this layout of heat conducting material piece 18, second heating unit 19 is disposed in the cavity, or rather in the base section of cavity.This distance between first and second heating units 12,19 makes it possible to limit the central authorities reception space 20 of crystallization crucible 21.The inlet 16 of heat release passage 15 also is arranged in the below of second heating unit 19 that is incorporated into piece 18, so that vertically heat release in a downward direction, forming thus equally also is the thermal gradient of vertical direction, to obtain the crystallisation process of the vertical guiding in central authorities receive space 20.
As illustrated in fig. 1 and 2, heat conducting material piece 18 has towards the planar top surface 22 of first heating unit 12 and relative emerge 23 towards the inlet 16 of heat release passage 15.Be arranged in concrete structure on the diapire 14 at heat conducting material piece 18, the tight seal of the inlet 16 of heat release passage 15 is automatically realized by the basal surface 23 of heat conducting material piece 18.Be used at the member that connects between heat conducting material piece 18 and the heating container 11 more under the complicated situation, can allow these members comprise the suitable seal member, to guarantee the tight seal of the inlet 16 of heat release passage 15 by the basal surface 23 of heat conducting material piece 18.But, come sealed entry 16 to be still a kind of possibility by basal surface 23.
In fact, central authorities' reception space is limited at the bottom by the top surface 22 of heat conducting material piece 18.Because it is towards first heating unit 12, so when the crystallization crucible was placed in the central authorities reception space 20, top surface 22 was thus also vertically towards crystallization crucible 21.In the concrete Change Example that is fixed, top surface 22 is carried out the reception of crystallization crucibles 21 demonstrating that heat conducting material piece 18 presses diapire 14.But, can allow the motion and/or allow industrial furnace 10 incorporate into to be used for crystallization crucible 21 is vertically remained on the member (not shown) of tool top surface 22 1 distances in cavity vertically of heat conducting material piece.
Heat conducting material piece 18 is for example made with graphite.And a kind of simple substitution embodiment comprises use second heating unit 19, and this heating unit comprises a plurality of graphite rods that are powered (electrically supplied graphite bar).In this case, each rod is contained in the receiver hole, and this hole is manufactured in the heat conducting material piece 18.First heating unit 12 can further comprise a plurality of graphite rods that are powered, and for example is fixed firmly to the roof 13 of heating container 11.
According to the present invention, thermal isolation sealing element 24 is equipped with heat release passage 15.Sealing element 24 is articulated on the container 11 around pivotal pin 25, and changing between open position (Fig. 1) and off-position (Fig. 2), this open position makes the external communications of basal surface 23 with container 11 of piece 18.The pivot control of sealing element 24 realizes by any suitable member.
Shown in alternative embodiment in, sealing element 24 is flat covers, its by hang from diapire 14 protuberance 26 that be articulated in diapire 14 on the surface of container 11.By this way, sealing element 24 is carried out the tight seal of the outlet 17 of heat release passage 15 in off-position.But sealing element 24 is not restrictive along this location of heat release passage 15.Sealing element 24 for example can be arranged in the inlet 16 of heat release passage 15 and export mid-way between 17, or sealing element 24 can be designed to carry out in off-position the tight seal of the inlet 16 of heat release passage 15.
As a result, regardless of its position, sealing element 24 can comprise a plurality of parts that can relative to each other move, and for example by closing the formed part of fin, described fin is around separately for example horizontally disposed in parallel with each other pivotal pin and independent the pivot.
Claims (5)
1. an industrial furnace (10) is used for producing the crystalline material ingot by direct curing, comprising:
Thermal isolation heating container (11), its inside limits a cavity,
First and second heating units (12,19) are arranged in the cavity and lay respectively in the top area and bottom section of cavity, defining the central space (20) that is used to receive crystallization crucible (21),
Cooling component comprises the heat release passage of making along the thickness of container (11) (15), and this passage has the inlet (16) that is positioned at second heating unit (19) below and reach container (11) outside heat being shifted to the outlet (17) of container (11) outside,
It is characterized in that this industrial furnace comprises:
Heat conducting material piece (18), it merges described second heating unit (19), and be positioned in the bottom section of the inlet (16) of heat release passage (15), and have towards the top surface (22) of first heating unit (12) and relative basal surface (23) towards the inlet (16) of heat release passage (15)
Thermal isolation sealing element (24), be assembled to heat release passage (15), and be articulated on the container (11) around pivotal pin (25), changing between open position and off-position, this open position makes the external communications of basal surface (23) Yu container (11) of piece (18).
2. industrial furnace as claimed in claim 1 is characterized in that, heat conducting material piece (18) is made with graphite.
3. as each described industrial furnace in claim 1 or 2, it is characterized in that second heating unit (19) comprises a plurality of graphite rods that are powered, each rod is contained in the receiver hole, and this receiver hole is fabricated in the heat conducting material piece (18).
4. as each described industrial furnace in the claim 1 to 3, it is characterized in that heat conducting material piece (18) is fixing with respect to heating container (11), and the top surface of heat conducting material piece (22) is carried out the reception of crystallization crucible (21).
5. industrial furnace according to any one of claims 1 to 4, it is characterized in that, transom between heat conducting material piece (18) and the heating container (11) comprises containment member, and the sealing member is carried out the tight seal of the inlet (16) of heat release passage (15) by the basal surface (23) of heat conducting material piece (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101747482A CN102021642A (en) | 2009-09-17 | 2009-09-17 | Industrial furnace for producing crystalline material ingot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101747482A CN102021642A (en) | 2009-09-17 | 2009-09-17 | Industrial furnace for producing crystalline material ingot |
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| Publication Number | Publication Date |
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| CN102021642A true CN102021642A (en) | 2011-04-20 |
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| CN2009101747482A Pending CN102021642A (en) | 2009-09-17 | 2009-09-17 | Industrial furnace for producing crystalline material ingot |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342526A (en) * | 2019-08-09 | 2021-02-09 | Asm Ip私人控股有限公司 | Heater assembly including cooling device and method of using same |
-
2009
- 2009-09-17 CN CN2009101747482A patent/CN102021642A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342526A (en) * | 2019-08-09 | 2021-02-09 | Asm Ip私人控股有限公司 | Heater assembly including cooling device and method of using same |
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Application publication date: 20110420 |