CN102021517A - Screen mesh type evaporating source in OLED preparing process and evaporating method - Google Patents
Screen mesh type evaporating source in OLED preparing process and evaporating method Download PDFInfo
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- CN102021517A CN102021517A CN 201010525440 CN201010525440A CN102021517A CN 102021517 A CN102021517 A CN 102021517A CN 201010525440 CN201010525440 CN 201010525440 CN 201010525440 A CN201010525440 A CN 201010525440A CN 102021517 A CN102021517 A CN 102021517A
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Abstract
The invention relates to a screen mesh type evaporating source in OLED preparing process and an evaporating method. The evaporating source comprises a vacuum chamber and a heat source, a wire mesh crucible, a mask plate and a substrate which are arranged in the vacuum chamber one by one from upper to lower, wherein organic or metallic materials are arranged in or on the wire mesh crucible; the mask plate is tightly clung on the substrate; and a required pattern is formed on the substrate through the mask plate in the evaporating downwards process caused by heating the organic or metallic materials in the wire mesh crucible with the heat source. Compared with the prior art, the invention has the advantages that in the manufacturing process of large-size organic devices (such as OLED color television) the mask plate is tightly clung on the substrate so the product is difficult to deform and the product yield is efficiently increased. Compared with the laser transferring technique, the method of the invention is low in cost and can completely realize vacuum technique.
Description
Technical field
The present invention relates to silk screen type evaporation source and method of evaporating in a kind of OLED processing procedure, belong to demonstration, luminous, photoelectricity, electric light transformation applications field, be mainly used in preparation of devices, silk screen type evaporation source and method of evaporating in particularly a kind of large size OLED preparation process for preparing with vacuum evaporation technology.Its advantage is to be difficult for taking place deformation with respect to traditional method mask in processing procedure, thereby improves the production yield of device.
Background technology
The organic electroluminescent technology, because material is extensive, the luminous efficiency height, characteristics such as the device of making is frivolous, power saving reduce power consumption, luminous, response speed are fast, and obtain rapid progress and widespread use.But because what mainly select for use aspect material at present is small molecule material, corresponding is vacuum evaporation technology, and the layout that is adopted in traditional technology is to be followed successively by substrate, mask, evaporation source (containing material, crucible, heating source) from top to bottom.Small size device reaches a standard substantially, and as 11 inches OLED colour television sets of Sony volume production, but cost is higher, makes price up to 2500 U.S. dollars.The factor that influences the product yield has a lot, but crucial be the mask technology, in the traditional method, mask places the substrate below, because deformation very easily takes place gravity, produces error in the use, and its yield is descended.
The laser transfer technology is also arranged certainly at present, can realize large-size substrate preparation, but still immature, especially the big cost height of the difficulty of preparation technology of intermediate transfer body.
Summary of the invention
The objective of the invention is to overcome the shortcoming of above-mentioned prior art, provide a kind of and overcome or reduce mask deformation, improve silk screen type evaporation source and method of evaporating in the OLED preparation process of yield of large-sized monitor substrate.
For achieving the above object, silk screen type evaporation source of the present invention comprises vacuum chamber and places thermal source, wire cloth crucible, mask and the substrate that sets gradually in the vacuum chamber from top to bottom, organic or metallic substance places on wire cloth crucible or its, and mask is close on the substrate.
Wire cloth crucible of the present invention particle proterties organic according to difference or metallic substance adopts the wire cloth crucible of different meshes and shape.
The silk screen type method of evaporating of invention is: thermal source produces downward evaporative process to the heating of the organic or metallic substance in the wire cloth crucible, forms required figure through mask on substrate.
The present invention compares with traditional way, particularly in large size organic assembly (as the OLED color TV) preparation process, because mask is close to substrate and is placed on the substrate, is difficult for producing deformation, can effectively improve the product yield.It is lower that the present invention and laser transfer technology are compared cost, and existing vacuum technique can be realized fully.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention;
Fig. 2 is the structural representation of wire cloth crucible of the present invention.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
Referring to Fig. 1,2, the present invention includes vacuum chamber and place thermal source 1, wire cloth crucible 3, mask 4 and the substrate 5 that sets gradually in the vacuum chamber from top to bottom, organic or metallic substance 2 places on wire cloth crucible 3 or its, and mask 4 is close on the substrate 5.Described wire cloth crucible 3 particle proterties organic according to difference or metallic substance adopts the wire cloth crucible of different meshes and shape, its meshcount of wire cloth crucible should be more than 200 orders, then should consider the wetting property in evaporative process and suitably select the metal block material.
Evaporative process of the present invention is as follows: organic or metallic substance 2 heating in 1 pair of wire cloth crucible 3 of thermal source, produce downward evaporative process, and on substrate 5, form required figure through mask 4.
The present invention is a key part with the wire cloth crucible, the evaporation mechanism that arranges again, and layout is for being followed successively by heating source, silk screen crucible, mask and substrate from top to bottom.Thermal source heating of metal silk screen crucible makes wherein organic or metallic substance evaporates downwards, is deposited on the substrate through mask, forms respective graphical.Because the electroluminescent organic materials is Powdered, frictional force can rest on the wire cloth crucible (or with volatile organic solvent organic materials is stirred into bulk) more greatly between the particle, metallic substance generally all is block, and nature can carry with the wire cloth crucible.During fabricate devices, about 10-4Pa, can open evaporation source, material to be plated is evaporated from the top down, meet the cold film forming on the substrate that is deposited on when vacuum tightness.Because with substrate support mask, gravity can only make mask be adjacent to substrate more and deformation can not take place, and makes contraposition accurately improve the product yield like this.The present invention is especially with the obvious advantage in the large-sized monitor preparation.The present invention is having innovation aspect the evaporation unit layout, removes the silk screen crucible is had relatively high expectations, and the existing vacuum technique in other aspects all can be realized, can significantly reduce production costs, and can make OLED colour television set volume production early.
Claims (3)
1. the silk screen type evaporation source in the OLED preparation process, it is characterized in that: comprise vacuum chamber and place thermal source (1), wire cloth crucible (3), mask (4) and the substrate (5) that sets gradually in the vacuum chamber from top to bottom, organic or metallic substance (2) places on wire cloth crucible (3) or its, and mask (4) is close on the substrate (5).
2. the silk screen type evaporation source in the OLED preparation process according to claim 1 is characterized in that: described wire cloth crucible (3) particle proterties organic according to difference or metallic substance adopts the wire cloth crucible of different meshes and shape.
3. the method for evaporating of the silk screen type evaporation source in the OLED preparation process as claimed in claim 1, it is characterized in that: thermal source (1) heats the organic or metallic substance (2) in the wire cloth crucible (3), produce downward evaporative process, go up at substrate (5) through mask (4) and form required figure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010525440 CN102021517A (en) | 2010-10-29 | 2010-10-29 | Screen mesh type evaporating source in OLED preparing process and evaporating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010525440 CN102021517A (en) | 2010-10-29 | 2010-10-29 | Screen mesh type evaporating source in OLED preparing process and evaporating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102021517A true CN102021517A (en) | 2011-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010525440 Pending CN102021517A (en) | 2010-10-29 | 2010-10-29 | Screen mesh type evaporating source in OLED preparing process and evaporating method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115927864A (en) * | 2022-12-21 | 2023-04-07 | 核工业理化工程研究院 | Lower nozzle evaporation device for metal evaporation and purification method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1468972A (en) * | 2003-06-04 | 2004-01-21 | 深圳市创欧科技有限公司 | Evaporating and coating apparatus for making organic electroluminescent display |
| CN2618925Y (en) * | 2003-05-08 | 2004-06-02 | 深圳市创欧科技有限公司 | Steam plating device for making organic electroluminescence display device |
| US20070283890A1 (en) * | 2006-06-13 | 2007-12-13 | Seuk Hwan Park | Evaporation source |
| CN101378107A (en) * | 2008-09-27 | 2009-03-04 | 彩虹集团公司 | Method for forming organic luminous layer of OLED display device |
-
2010
- 2010-10-29 CN CN 201010525440 patent/CN102021517A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2618925Y (en) * | 2003-05-08 | 2004-06-02 | 深圳市创欧科技有限公司 | Steam plating device for making organic electroluminescence display device |
| CN1468972A (en) * | 2003-06-04 | 2004-01-21 | 深圳市创欧科技有限公司 | Evaporating and coating apparatus for making organic electroluminescent display |
| US20070283890A1 (en) * | 2006-06-13 | 2007-12-13 | Seuk Hwan Park | Evaporation source |
| CN101378107A (en) * | 2008-09-27 | 2009-03-04 | 彩虹集团公司 | Method for forming organic luminous layer of OLED display device |
Non-Patent Citations (1)
| Title |
|---|
| 《陕西科技大学学报》 20070228 牟强，王秀峰，李志宇 用于OLED的高导电阴极的制备与特性研究 第61-63页 1-3 第24卷, 第1期 2 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115927864A (en) * | 2022-12-21 | 2023-04-07 | 核工业理化工程研究院 | Lower nozzle evaporation device for metal evaporation and purification method thereof |
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Application publication date: 20110420 |