CN102017236A - Electrode tool and method of manufacturing same - Google Patents
Electrode tool and method of manufacturing same Download PDFInfo
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- CN102017236A CN102017236A CN200680011081.9A CN200680011081A CN102017236A CN 102017236 A CN102017236 A CN 102017236A CN 200680011081 A CN200680011081 A CN 200680011081A CN 102017236 A CN102017236 A CN 102017236A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/04—Electrodes specially adapted therefor or their manufacture
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H2200/00—Specific machining processes or workpieces
- B23H2200/10—Specific machining processes or workpieces for making bearings
Abstract
A method of manufacturing an electrode tool increases the precision and quality of the tool conductive pattern, consequently improves the quality of processed groove pattern, improves the tool life and reduces the number of manufacturing processes compared to conventional electrode tool manufacturing methods. More specifically, an electrode blank is provided, and a thin film insulating resin coating is applied to a processing surface of the electrode blank by vapor deposition or vapor deposition polymerization. The thin film insulating resin coating is then easily removed from portions of the processing surface of the electrode blank by a process such as etching to thereby form a predetermined conductive pattern surface portion without the need for time consuming and expensive deep carving machining and additional processing.
Description
Technical background
The present invention relates to electrochemistry processing (ECM), the ECM electrode tool that more specifically relates to following formation: coated thin film insulating barrier on the electrode base, only remove and the predetermined corresponding film-insulated layer segment of instrument conductive pattern then, form predetermined instrument conductive pattern thus.
The machined electrode that traditional electrochemistry processing (ECM) instrument generally includes, they are used for forming specific channel patterns on workpiece, for example the dynamic pressure groove pattern on the used hydrodynamic pressure bearing in the harddisk memory.More specifically, in this bearing, will comprise that the rotating shaft of flange is assemblied in the hollow sleeve, form therein radially and thrust dynamic pressure groove.On with the surface that radially the sleeve direction is orientated, form the radial dynamic pressure groove, and going up formation thrust dynamic pressure groove with the surface (surface of the step that for example, in sleeve, forms) of axial sleeve direction orientation.Lubricating oil has been filled the minim gap between rotating shaft outer peripheral face and the sleeve inner peripheral surface.
Referring to Fig. 1, known traditional E CM method forms on the sleeve of this hydrodynamic pressure bearing radially and thrust dynamic pressure groove simultaneously, for example radially with thrust dynamic pressure groove 1a, 1b.ECM electrode tool (electrode tool) 2 inserts the internal diameter of sleeve 1 from larger diameter side.Electrode tool 2 has minor diameter and major diameter part 2c, 2d, and rises and descend with polyurethane resin brake 3.
On the outer surface of small diameter portion 2c, form instrument conductive pattern 2a, its corresponding to and form radial dynamic pressure groove 1a.On the shoulder between small diameter portion 2c and the major diameter part 2d, form instrument conductive pattern 2b, its corresponding to and form thrust dynamic pressure groove 1b.
When brake 3 axially cooperated with sleeve 1, the lower end of brake 3 tightly suppressed the upper end of sleeve 1.The flow path 5 of electrolyte 4 is formed by the space between the inner surface of the inner surface of the outer surface of electrode tool 2, brake 3 and sleeve 1.Electrolyte 4 is from brake top supply, the flow path 5 of flowing through, and discharge from the bottom of sleeve 1.
When having electrolyte 4 between sleeve 1 and electrode tool 2, the electrolyte 4 between the surface of the inner surface by sleeve 1 and instrument conductive pattern 2a, the 2b of electrode tool 2 applies the time that pulse direct current reaches appointment.Have only surface location facing to sleeve 1 inner surface of the instrument conductive pattern 2a, the 2b that expose by electrochemical dissolution, thereby on the inner surface of sleeve 1, form radial dynamic pressure groove 1a and thrust dynamic pressure groove 1b.Usually, the minimum widith of dynamic pressure groove is 40 microns to 50 microns.
As shown in Figure 2, by brake 12 is pressed to thrust plate 10, can realize on the thrust plate 10 of hydrodynamic pressure bearing similarly that the ECM of thrust dynamic pressure groove 10a forms.The electrode tool 11 that will comprise instrument conductive pattern 11a axially cooperates with thrust plate 10, so that instrument conductive pattern 11a is corresponding to the position that will form thrust dynamic pressure groove 10a on the thrust plate 10.
Limit above-mentioned instrument conductive pattern on traditional E CM instrument by machined electrode.The common following formation of these electrodes: the electrode base is provided, uses small diameter solid cutter to carve the electrode base deeply then, to form electrode as the bossing in the required channel patterns.Then gained is carved the electrode base and placed anchor clamps, and fill anchor clamps with insulating resin.In case anchor clamps fill up resin and engraving electrode base is covered by resin, just apply vacuum to remove bubble from insulating resin.Carry out the hot curing program then with resin solidification.Behind resin solidification, remove mould, and remove excessive insulating resin by roughing.Then, by attrition process come out in the channel patterns surface, thereby finish manufacture process.
But the above-mentioned manufacture process that is used to form machined electrode has some relevant limit.Particularly, carve the electrode base deeply and must have 1.0 millimeters or littler groove diameter to form the required small diameter solid cutter of electrode.Therefore, because the small size of groove diameter, necessary process time is very long.In addition, small diameter solid cutter breaks easily owing to its minor diameter, therefore has the extremely short related tool life-span.This restriction causes the expensive of electrode tool autofrettage and the ECM method of using this instrument.In addition, although the existing littler and more accurate channel patterns of application need is reducing groove diametrically existence restriction.
In addition, remove excessive insulating resin, increased manufacturing cost and time owing to need remove the back at resin die.In addition, because the ratio of electrode base working depth and bossing width may be up to 25: 1, it is too thin that bossing becomes.Therefore, bossing is easy to avalanche, and/or forms the processing burr, produces the conductive pattern quality of difference thus.
In addition, the hot curing of insulating resin may cause the formation of bubble and aperture in the resin, thereby owing to the stray electrical current in the electrochemistry course of processing of dynamic pressure groove in the workpiece causes workpiece, defect.At last, because required number of steps in the electrode tool manufacturing, the instant realization of conductive pattern design alteration is debatable.
Brief summary of the invention
In order to overcome above-mentioned restriction, the invention provides the method for making electrode tool, it has improved the precision and the quality of instrument conductive pattern, and has reduced the manufacturing process number by eliminating technology consuming time (for example engraving, resin filling, hot curing and removal excess resin) deeply.
More specifically,, provide the electrode base, and the finished surface of electrode base is used the film-insulated coating that forms by insulating resin by vapour deposition or vapor deposition polymerization according to electrode tool autofrettage of the present invention.Method by etching and so on forms predetermined conductive pattern surface portion thus from the part finished surface removing films insulating coating of electrode base then, and does not need consuming time and expensive dark engraving machining before the using of insulating resin.
According to various other aspects more specifically of the present invention, can be from the part finished surface removing films insulating coating of electrode base, thus form the conductive pattern of the dynamic pressure groove pattern of process fluid hydrodynamic bearing.In addition, after getting on except film-insulated coating from the part finished surface of electrode base, can use coating for metal surfaces to conductive pattern, it can make the electrode base have better machinery, electricity and/or chemical characteristic, for example better better tolerance and the improved hardness and the resistance to wear of conductivity, better standard electrode potential, contact causes to electrolyte corrosion.In addition, can be before conductive pattern be used coating for metal surfaces, conductive pattern is used one or more layers metal coating, and it can make the electrode base have better machinery, electricity and/or chemical characteristic similarly, and/or improves the adherence of coating for metal surfaces and electrode base.
Film-insulated coating preferably has about 5 microns to 50 microns thickness, and coating for metal surfaces has the thickness that is less than or equal to film-insulated coating.If use the metal coating above one deck, then the gross thickness of metal coating is less than or equal to the thickness of film-insulated coating.
According to a further aspect in the invention, electrode tool comprises the electrode base that is formed and comprised finished surface by electric conducting material.The film-insulated resinous coat of vapour deposition or vapor deposition polymerization covers finished surface, but except the finished surface part of qualification conductive pattern.Conductive pattern is recessed with respect to film-insulated coating.Can comprise the coating for metal surfaces that can make the electrode base have better machinery, electricity and/or chemical characteristic, to cover conductive pattern.Between conductive pattern and coating for metal surfaces, can there be one or more layers can make the electrode base have better machinery, electricity and/or chemical characteristic equally similarly and/or can improves coating for metal surfaces and the adhesive metal coating of electrode base.The gross thickness of coating for metal surfaces and all other metal coatings is less than or equal to the thickness of film-insulated coating.
The accompanying drawing summary
Accompanying drawing is used for each embodiment of further illustration and explains fully according to each principle and advantage of the present invention, wherein similar reference number is meant identical or functionally similar element among each figure, and accompanying drawing is incorporated specification into as detailed below, and constitutes the part of specification.
Fig. 1 is at the power on diagrammatic partial cross section figure of conventional method of chemical process dynamic pressure groove of bearing sleeve;
Fig. 2 is at the power on diagrammatic partial cross section figure of conventional method of chemical process dynamic pressure groove of thrust plate;
Fig. 3 A-3D is the in regular turn sectional view of demonstration according to the method for the manufacturing electrode tool of first preferred embodiment of the present invention;
Fig. 4 is the table that is listed in the character of the thin dielectric film of using in the manufacture method described in Fig. 3 A-3D;
Fig. 5 is the enlarged photograph of the part of the electrode tool conductive pattern (metal coating of not using) that formed by the method shown in Fig. 3 A-3D;
Fig. 6 is the perspective view that has the sleeve electrode tool of the gained conductive pattern that is formed by method shown in Fig. 3 A-3D;
Fig. 7 A is the perspective view that has the thrust plate electrode tool of the gained conductive pattern that is formed by method shown in Fig. 3 A-3D;
Fig. 7 B is the amplification view of the gained conductive pattern on the thrust plate electrode shown in Fig. 7 A;
Fig. 8 shows for the electrode tool of being made by the method for first preferred embodiment according to the present invention with by two electrode tools making according to the method for second preferred embodiment of the present invention the figure of dynamic pressure groove working width time to time change;
Fig. 9 shows for the electrode tool of being made by the method for first preferred embodiment according to the present invention and two electrode tools being made by the method for second preferred embodiment according to the present invention, the figure of dynamic pressure groove depth process velocity time to time change;
Figure 10 A-10E is the sectional view in regular turn that shows the method for the manufacturing electrode tool of the 3rd preferred embodiment according to the present invention;
Figure 11 is the chemical structural drawing that is administered to the polyimide coating on the electrode tool of being made by the inventive method;
Figure 12 is the chemical structural drawing that is administered to PFA (perfluoro alkoxy-TFE copolymer) coating on the electrode tool of being made by the inventive method;
Figure 13 is the chemical structural drawing that is administered to FEP (tetrafluoraoethylene-hexafluoropropylene copolymer) coating on the electrode tool of being made by the inventive method;
Figure 14 is the table that is presented at carboxylic acid monomer's available in the vapor deposition polymerization method of making polyimide insulative layer example;
Figure 15 A-15C is a table of making the example of diamine monomer available in the used vapor deposition polymerization method of polyimide insulative layer on the electrode tool of being made by the inventive method.
DESCRIPTION OF THE PREFERRED
Describe the present invention now with reference to the accompanying drawings in detail.Omitted the explanation and the description of some contents, added these explanations and describe that to understand the present invention for those skilled in the art optional at this.In addition, in institute's drawings attached, similar reference number is meant similar parts.
Fig. 3 A-3D has shown the manufacture method of the electrode tool that uses in electrochemistry processing (ECM) method, first preferred embodiment wherein according to the present invention forms conductive pattern on the electrode base.Can use electrode tool, for example be used for processing dynamic pressure groove pattern on the hydrodynamic pressure bearing of harddisk memory with this conductive pattern.Each technology in this method is designated reference number 20,22,24 and 26 respectively in Fig. 3 A-3D.Electrode base 28 is provided in 20.Electrode base 28 comprises top finished surface (or the more general finished surface that is called) 30, can be the base material with excellent electrical conductivity characteristic.The exemplary base materials that can be used as the electrode base comprises copper, tungsten, phosphorus, bronze, brass, stainless steel, titanium alloy, copper-tungsten and cobalt alloy.
In 22, the finished surface 30 of electrode base 28 is used the film-insulated coating 32 that forms by insulating resin.Film-insulated coating 32 is preferably by known physical vapor deposition (PVD) method and is deposited on polyimide-based coating, the basic coating of tetrafluoraoethylene-hexafluoropropylene copolymer (FEP) or the basic coating of perfluoro alkoxy-TFE copolymer (PFA) on the finished surface 30.
In addition, the structure of polyimides, FEP and PFA base coating is presented at respectively among Figure 11,12 and 13.Symbol R and R ' among Figure 11 represent alkyl.Similarly, the symbol Rf among Figure 12 represents fluoroalkyl.
Carboxylic acid monomer shown in the table among Figure 14 is the example of monomer available in the vapor deposition polymerization method that the formation polyimide resin is used among the present invention.Material shown in Figure 14 comprises dehydration tetrabasic carboxylic acid, polyisocyanate compound and halogenated carboxylic acid.Especially, can use the dehydration tetrabasic carboxylic acid suitably.
Diamine monomer shown in the table of Figure 15 A-15C is other example of monomer available in the vapor deposition polymerization method that the formation polyimide resin is used among the present invention.
When using polyimide-based coating, use vapor deposition polymerization and follow-up dewatering process deposited coatings on finished surface 30 as film-insulated coating 32.More specifically, with two kinds of monomer dehydration carboxylic acid monomers and diamine monomer evaporation, and in about 200 ℃ of introducing vacuum chambers.Polymerization takes place then, thereby deposits the polyamic acid film on electrode base surface.Then about 300 ℃ with polyamic acid film dehydration and change into polyamide.
When using FEP base coating or PFA base coating as film-insulated coating 32, use vapour deposition process deposited coatings on finished surface 30, wherein, for example, acrylate monomer is evaporated, and with its vapor phases of irradiation such as electron beam, beam-plasma, ultraviolet rays, to promote the polymerization on the finished surface 30.
The conventional method that forms film-insulated coating on electrode base finished surface is known, comprises, for example, electro-deposition, dry then or form etchant resist with resin solution coating electrode base.But, it is more favourable forming film-insulated coating 32 by vapour deposition or vapor deposition polymerization on the finished surface 30 of electrode base 28 as mentioned above, because it provides better film thickness control, more uniform film thickness, and stronger adherence between film and the finished surface 30, produced longer life tools thus.
Film-insulated coating 32 preferably has about 5 microns to 50 microns relevant thickness, and can bear about 200 ℃ continuous duty temperature on being deposited on finished surface 30 time.Its electrical isolation capabilities is equivalent at 25 ℃ 10 at least
12The volume resistance of Ω.The exemplary performance value of above-mentioned film-insulated coating material is summarised in the table shown in Figure 4.Film-insulated coating 32 should have about 5 microns minimum thickness, to guarantee high-quality ECM processing.Film-insulated coating 32 needs not exceed 50 microns, because form greater than 50 microns film difficult and consuming time.
Because deposit film insulating coating 32 is made the required technology number of electrode tool and reduced by this way,, therefore do not need follow-up excess resin to remove because do not need to be used for the anchor clamps disposed that insulating resin is filled purposes.In addition, bubble and the aperture eliminated in the prior art manufacture method in the curing process with insulating resin form relevant problem, because hot curing no longer is necessary technology.
Referring now to Fig. 3 C,, in 24, only in the part corresponding, from finished surface 30 removing films insulating coatings 32 with the required conductive pattern 34 that as shown in Fig. 3 C, comprises exemplary current-carrying part 36a-36d.In other words, the finished surface 30 of electrode base 28 comes out through film-insulated coating 32 in the mode that limits conductive pattern 34.Can be by one of many methods, comprise for example meticulous etching, laser processing, accurate sandblast or even use small diameter solid cutter to grind, remove film-insulated coating 32.Therefore the gained expose portion of finished surface 30 defines required conductive pattern 34, and it is the recess patterns that is lower than film-insulated coating 32 remainders.
Fig. 5 is the photo at 37 exemplary conductive pattern by getting in touch above that technology 24 that Fig. 3 C describes forms.More specifically, this high resolution picture has shown the groove with about 100 to 250 microns width and about 15 micrometer depth, and it has the instrument conductive pattern that forms by etch thin film dielectric polyimide base coating on the finished surface of as above getting in touch the described electrode base of Fig. 3 C.Photo shows that method of the present invention can form the conductive pattern of high accuracy and minimum fluffing.
Referring now to Fig. 3 D,, in 26, on the conductive pattern 34 of electrode base 28, uses for example coating for metal surfaces of platinum, gold, silver, rhodium, palladium, ruthenium, chromium or nickel (metal coating) 38 by for example plating, electroless plating or vapour deposition.As a result, conductive surface, for example the exemplary conductive surface 36a shown in Fig. 3 D caves in when being not so good as not use metal coating 38.For example, if use the SUS304 stainless steel to form electrode base 28, and form film-insulated coating 32 by the vapor deposition polymerization method by the about 15 microns polyimide film of thickness, then can on electrode base 28, form metal coating 38 by for example about 10 microns platinum coating of thickness by galvanoplastic.
More specifically, when the assembly with electrode and film-insulated coating is immersed in the high alkalinity platinum plating solution of the six hydroxyl platinic acid that contain appropriate amount, can form above-mentioned metal coating 38, and thus at 80 ℃ bath temperature and 1.5A/dm
2The processing conditions of current density under on the exposure finished surface 30 of electrode base 28, form thick 10 microns platinum coating.Make the difference in height on surface of surface behind the plating and film-insulated coating 32 bigger if desired, can be by the only about 1 micron platinum coating of electroless plating process coating thickness on finished surface 30.
In addition, when using titanium alloy to replace stainless steel as the material of electrode base 28 and when using platinum to form metal coating 38, the gained electrode tool has excellent corrosion resistance, and regardless of alkalescence or acidity that electrolyte is, can combine with multiple electrolyte to be used for the ECM method.
Perhaps, can use the metal of the single layer alloy formation that wherein is mixed with multiple metal to replace above-mentioned metal to form metal coating 38.For example, for gold-plated, can be according to required physical property, for example the hardness of coating and resistance to wear are used the billon that contains about silver of 0.1 to 0.5%, copper, nickel, cobalt or iridium.This hard alloy is gold-plated to be compared with the proof gold plating, and hardness is risen to twice, and wear-resisting life rises to three times.In addition, the cost of this plating is lower than platinum plating.Also can use other metal according to purposes.For example, can on conductive pattern 34, carry out chromium plating or nickel plating with improve hardness with to contact the tolerance of the corrosion that causes by electrolyte, and rhodanizing shows the hardness of about Hv800 to 1000, and this is the hardness suitable with chromium plating, shows in addition and similar good electrical of platinum and chemical property.
Point out at this, using coating for metal surfaces on the depression conductive pattern on the exposure finished surface of aforesaid electrode base is very easy to implement, because the selecteed metal that is used for metal coating is compared with the metal that is used to form the electrode base, show favorable mechanical, electricity and/or chemical characteristic, well tolerable property and the improved hardness and the resistance to wear of for example good conductivity, good standard electrode potential, contact causes to electrolyte corrosion.According to its desired thickness, metal coating makes effectively because of removing the surperficial concavity that film-insulated coating causes and minimizes or eliminate fully, therefore because the improved chemical characteristic and the suitable combination of cup depth, fragment and other material of accuracy that otherwise reduces the channel patterns of transfer can not adhere on the conductive pattern surface.In addition, because the metal of platinum and so on has relevant high standard electrode potential, metal coating helps improving channel patterns and shifts precision, and it is again in the transfer precision that has improved working width aspect the conductive pattern width of electrode tool.
Can be presented in Fig. 6 and 7 by the exemplary electrode instrument that above-mentioned manufacture method is made.More specifically, exemplary sleeve electrode 40 shown in Fig. 6 comprises film-insulated coating 32 and conductive pattern 34a, 34b, conductive pattern 34a, 34b comprise metal coating 38, be respectively applied for and form radial dynamic pressure groove pattern and thrust dynamic pressure groove pattern on the workpiece (not shown).Exemplary thrust plate electrode 42 shown in Fig. 7 A and the 7B also comprises film-insulated coating 32 and conductive pattern 34c, and conductive pattern 34c comprises metal coating 38, is used for forming on the workpiece (not shown) thrust dynamic pressure groove.Those of skill in the art will recognize that said method can be used for making the electrode of any structural type, thereby compare, required technology number is reduced to reaches 2/3 with traditional ECM electrode tool autofrettage.
Referring again to Fig. 3 A-3C, the method for making the ECM electrode tool according to second preferred embodiment of the present invention is described now.Particularly, in method,, make electrode tool by implementing process 20,22 and 24 only according to second embodiment.Eliminated the technology of the interpolation metal coating 38 shown in 26 among Fig. 3 D.Although the gained electrode tool does not comprise metal coating 38, and the therefore electrode tool not as making according to first preferred embodiment on precision, some autofrettage when for needs manufacturing cost being minimized is still acceptable.The difference of the gained electrode tool of making according to first and second embodiments of the invention described above is discussed now.
Fig. 8 and 9 shows for the electrode tool of being made by the method for first preferred embodiment according to the present invention and two electrode tools being made by the method for second preferred embodiment according to the present invention, dynamic pressure groove working width over time with dynamic pressure groove depth process velocity figure over time.In Fig. 8 and 9, three electrodes have identical as shown in Figure 5 conductive pattern and the thick 15 microns identical polyimide insulative coating of using by the vacuum moulding machine polymerization.Data and curves 48 and 52 is corresponding to the SUS304 electrode tool of making according to the method for second embodiment, do not comprise metal coating (electrode tool A).Data and curves 44 and 50 is corresponding to the brass electrode instrument of making according to the method for second embodiment, do not comprise metal coating (electrode tool B).Data and curves 46 and 54 is corresponding to the SUS304 electrode tool of making according to the method for first embodiment and have the about 10 microns platinum coating of thickness (electrode tool C).
With containing 15 weight %NaNO
3Electrolyte, with 0.05 millimeter machining gap between the electrolyte flow rate of 8 to 12 meter per seconds and electrode surface and the phosphor bronze workpiece, use the ECM test of each electrode tool A, B and C.For each electrode tool, process 20 workpiece continuously and form the dynamic pressure groove.Because the width of conductive pattern is non-constant, be the width and the degree of depth of the dynamic pressure groove that on each processing work, is processed into of 200 microns position measurement at corresponding conductive pattern width.It is directly corresponding with the width of the dynamic pressure groove that is processed into because measure simplification to select this position to be.
Referring to Fig. 8, on the phosphor bronze workpiece material, form channel patterns and collect graphical data by operating three electrode tool A, B and C.Phosphor bronze material as workpiece material often shows high sag, has improved the manufacturing width in the normal ECM course of processing thus.
As among Fig. 8 shown in 44 and 48, by the workpiece channel patterns that the electrode tool of making by the method for above-mentioned second preferred embodiment and comprise brass electrode base and SUS304 stainless steel electrode base is respectively made, between 20 samples, show the little change of working width.
Shown in 46, compare with arbitrary electrode tool of making according to the method for second preferred embodiment, by make by the method for above-mentioned first preferred embodiment and comprise SUS304 stainless steel electrode base and be administered to workpiece channel patterns that the electrode tool of the platinum coating on the conductive pattern makes and between 20 samples, show littler working width and change.As shown in the figure, although among the 44-48 on the sample increase of working width all minimum, the working width that the electrode tool of making by the method for first preferred embodiment is realized is only about half of for the electrode tool made by the method for second preferred embodiment.
Particularly, the average working width of electrode tool C is about 440 microns, and electrode tool A and B are about 840 microns.The increase that this means electrode tool C working width is the only about half of of electrode tool A and B.Therefore, electrode tool C is showing higher precision aspect the conductive pattern transfer.This high accuracy is in that to make very fine dynamic pressure groove (when for example minimum widith is 20 microns or littler dynamic pressure groove) extremely important.For example, in order to form 20 microns wide grooves, the electrode tool of electrode tool C and so on must have wide 10 microns conductive pattern, and the electrode tool of electrode tool A and B and so on needs wide 5 microns conductive pattern, and this difficulty is made manyly.
By implementing the manufacture method of first and second preferred embodiments, can with the cost effective and efficient manner expansion of gained electrode tool working width be minimized largely.To shift in the accuracy be important in the formation that is minimized in meticulous dynamic pressure groove of working width and improving channel patterns.
Referring to Fig. 9, to measure and the relevant experimental data of the working depth of time per unit on the phosphor bronze workpiece, it is equivalent to the electrode depth process velocity.Data shown in 50 and 52 are the above-mentioned electrode tool A that makes of the method for second preferred embodiment according to the present invention and the data of B, and the data shown in 54 are data of the above-mentioned electrode tool C that makes according to the method for first preferred embodiment of the present invention.Shown in 50 and 52, between 20 samples, show the little change of working depth by electrode tool A and B (comprising respectively) the workpiece channel patterns of making by SUS304 stainless steel and the electrode base that forms by the brass electrode base.Therefore, being compared with the electrode tool that tradition is made by the electrode tool that the method for second preferred embodiment is made, is the more cost effective and efficient manner that realizes the consistency result aspect working depth.
The mean depth process velocity of electrode tool C is about 50 microns in 20 samples, and electrode A and B's is about 25 microns.Electrode tool C also shows higher processing throughput, because deep processing speed is the twice of electrode tool A and B.Therefore, by using the electrode tool A that makes by the method for first preferred embodiment, can improve ECM productivity ratio owing to the raising of gash depth process velocity.
Referring to Figure 10 A-10E, the method for electrode tool used in the ECM method that is manufactured on the specific channel patterns of formation on the workpiece of the 3rd preferred embodiment according to the present invention is described now.Particularly, in method according to the 3rd embodiment, not only implement shown in the connection with figures 3A-3C and described technology 20,22 and 24, also by the additional process shown in 56 and 57---wherein before using (first) metal coating 38, use other or second metal coating 58, make electrode tool thus instrument conductive pattern 34.
Can use second metal coating 58, make first metal coating 38 when using with the flush that remains film-insulated coating 32 or almost flush.According to this method, second metal coating 58 can be for example golden layer, and it is hard like that not as platinum, and has lower associated conductivity and cost.Before deposition first metal coating 38, shown in 56, deposit second metal coating 58.Because gold is more cheap than platinum, the method shown in Figure 10 A-10E of implementing has reduced total manufacturing cost, simultaneously the operating parameter of the general improvements that still maintenance is relevant with the electrode tool of making according to the method for above getting in touch described second preferred embodiment of Fig. 3 A-3D.
Perhaps, be noted that and use silver, and the rhodium layer that can use about 1 micron or littler thickness is as first metal coating 38, with the silver-colored variable color (blackening) that prevents to cause conductivity to reduce as second metal coating 58.In addition, the quantity of different metal coating is not limited to two-layer.Can on conductive pattern, use the different metal coating that multilayer is made of single kind metal or alloy.
Referring to above, those of skill in the art will recognize that method of the present invention because the part thin film dielectric material that only requires to remove the coated electrode base to limit the conductive pattern surface portion, no longer needs to be used for the small diameter solid cutter of the pattern engraving of projected electrode.Owing to do not need small diameter solid cutter, eliminated the cost of toppling over the raising that causes broken by grinding tool and the projected electrode that ground equally.Owing to can the method by etching and so on form figure, can make now that the traditional small diameter solid cutter of use can not make meticulousr and the figure of miniaturization more.
In addition, manufacture method of the present invention has removed that traditional electrode instrument autofrettage required pattern engraving, insulating resin are filled and the rough technology of removing and so on of excessive insulating resin, so cost reduces and the instrument time of delivery improves.Because it is final technology that the pattern of the inventive method forms technology, only just can realize the pattern change rapidly, and not need to change any technology formerly by changing this final technology, therefore can carry out design alteration immediately.Along this clue, therefore regardless of design, machined electrode base in the same manner before using thin film dielectric material, the manufacturing productivity ratio and the flexibility that improve the ECM electrode tool thus.
The disclosure is intended to explain how to form and use various embodiments of the present invention, rather than limit or be not to limit the invention to disclosed exact form.Can make amendment or change according to above-mentioned instruction.Select and describe these embodiments so that the best exemplified of principle of the present invention and practical application thereof to be provided, and make those of ordinary skills can be to adapt to specific expectation purposes and according to reasonable, legal and when the amplitude of giving is explained, fall into and use the present invention by various embodiments in the claims or the determined scope of the invention of its all counterparts and evolutionary mode.
Claims (20)
1. make the method for electrode tool, comprising:
The electrode that is formed by electric conducting material base is provided;
By one of vapour deposition or vapor deposition polymerization the finished surface of electrode base is used film-insulated resinous coat; With
From the part finished surface removing films insulating coating of electrode base, to form conductive pattern.
2. the method for claim 1, wherein said part finished surface removing films insulating coating from the electrode base comprises part finished surface removing films insulating coating from the electrode base to form conductive pattern, to be formed for the conductive pattern of fluid dynamic pressure groove pattern in the process fluid hydrodynamic bearing.
3. the method for claim 1 further is included in after the part finished surface removing films insulating resin coating of electrode base, uses coating for metal surfaces on conductive pattern.
4. the method for claim 3 wherein saidly is included in to use on the conductive pattern and comprises at least a metal coating that is selected from the metal of the group of being made up of platinum, gold, silver, rhodium, palladium, ruthenium, chromium and nickel using coating for metal surfaces on the conductive pattern.
5. the method for claim 3 further is included in and uses the other different metal coating of one deck at least before using coating for metal surfaces on the conductive pattern on conductive pattern.
6. the method for claim 5 wherein saidly is included in and uses one of Jin Heyin on the conductive pattern using at least a other different metal coating on the conductive pattern.
7. the process of claim 1 wherein that described finished surface to the electrode base uses film-insulated resinous coat and comprise and use one of the polyimide-based coating of film, the basic coating of tetrafluoraoethylene-hexafluoropropylene copolymer (FEP) and the basic coating of perfluoro alkoxy-TFE copolymer (PFA).
8. the process of claim 1 wherein describedly provides the electrode base that is formed by electric conducting material to comprise the electrode that is formed by the electric conducting material that is selected from the group of being made up of copper, tungsten, phosphorus, bronze, brass, stainless steel, iron-copper, titanium alloy, copper-tungsten and cobalt alloy base is provided.
9. the process of claim 1 wherein that described part finished surface removing films insulating resin coating from the electrode base comprises by the film-insulated coating of one of meticulous etching, laser, accurate sandblast and grinding removal to form conductive pattern.
10. the process of claim 1 wherein that described finished surface to the electrode base uses film-insulated resinous coat and comprise that it is about 5 microns to 50 microns film-insulated resinous coat that the finished surface of electrode base is used thickness.
11. the method for claim 3, the wherein said coating for metal surfaces of using on conductive pattern comprises conductive pattern is used the metal coating that thickness is less than or equal to film-insulated coating layer thickness.
12. the method for claim 5, the wherein said other different metal coating of one deck of using on conductive pattern at least comprises conductive pattern used a plurality of metal coatings, makes the gross thickness of all metal coatings of comprising described face coat be less than or equal to the thickness of film-insulated coating.
13. the method for claim 3, the wherein said coating for metal surfaces of using on conductive pattern comprises that the conductive pattern that thickness is substantially equal to film-insulated coating layer thickness uses metal coating.
14. be formed for the method for the electrode tool of electrochemistry processing, this method comprises:
The electrode that is formed by electric conducting material base is provided;
By one of vapour deposition or vapor deposition polymerization the finished surface of electrode base is used film-insulated resinous coat; With
From the part finished surface removing films insulating coating of electrode base, to be formed for the conductive pattern of process fluid hydrodynamic bearing dynamic pressure groove pattern; With
On conductive pattern, use coating for metal surfaces.
15. the method for claim 14 further is included in to use on the conductive pattern and uses the other different metal coating of one deck at least before the coating for metal surfaces on conductive pattern.
16. electrode tool comprises:
Form and comprise the electrode base of finished surface by electric conducting material; With
Be used to cover the vapour deposition or the film-insulated resinous coat of vapor deposition polymerization of finished surface, do not comprise its removed part that exposes finished surface in the mode that limits conductive pattern.
17. the electrode tool of claim 16, wherein said conductive pattern is recessed with respect to film-insulated coating.
18. the electrode tool of claim 16 further comprises the coating for metal surfaces that covers described conductive pattern.
19. the electrode tool of claim 18 further comprises the other different metal coating of one deck at least between conductive pattern and coating for metal surfaces.
20. the electrode tool of claim 19, wherein the gross thickness of the other different metal coating of coating for metal surfaces and described one deck at least is substantially equal to film-insulated resin-coated thickness.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005101229A JP2006281333A (en) | 2005-03-31 | 2005-03-31 | Electro-chemical machining electrode tool and manufacturing method thereof |
| JP101229/2005 | 2005-03-31 | ||
| PCT/US2006/003488 WO2006107382A2 (en) | 2005-03-31 | 2006-02-02 | Electrode tool and method of manufacturing same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102017236A true CN102017236A (en) | 2011-04-13 |
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ID=37073893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200680011081.9A Pending CN102017236A (en) | 2005-03-31 | 2006-02-02 | Electrode tool and method of manufacturing same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2006281333A (en) |
| CN (1) | CN102017236A (en) |
| WO (1) | WO2006107382A2 (en) |
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| CN104191053A (en) * | 2014-07-31 | 2014-12-10 | 广东工业大学 | Method for manufacturing micro-electrolysis cathode movable template |
| CN104439572A (en) * | 2013-09-13 | 2015-03-25 | 通用电气公司 | Electroerosion machining system and method |
| CN104526093A (en) * | 2014-08-22 | 2015-04-22 | 华侨大学 | Method of manufacturing cathode for surface texture micro-electrochemical machining |
| CN110964888A (en) * | 2019-12-25 | 2020-04-07 | 深圳市富优驰科技有限公司 | Method for removing parylene on surface of stainless steel part |
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| DE102007022483B4 (en) * | 2007-05-14 | 2018-12-27 | Minebea Mitsumi Inc. | Electrode, tool and process for the electrochemical machining of a metallic workpiece |
| US8329021B2 (en) | 2010-10-28 | 2012-12-11 | Palmaz Scientific, Inc. | Method for mass transfer of micro-patterns onto medical devices |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1174583A (en) * | 1997-08-28 | 1999-03-16 | Ricoh Co Ltd | Structure working method |
| JP2002079425A (en) * | 2000-09-06 | 2002-03-19 | Koyo Seiko Co Ltd | Hydrodynamic groove machining device for hydrodynamic bearing |
| AU2003218654A1 (en) * | 2002-02-15 | 2003-09-04 | Minebea Co., Ltd. | Method for manufacturing an electrode for the electrochemical machining of a workpiece and an electrode manufactured according to this method |
-
2005
- 2005-03-31 JP JP2005101229A patent/JP2006281333A/en active Pending
-
2006
- 2006-02-02 WO PCT/US2006/003488 patent/WO2006107382A2/en active Application Filing
- 2006-02-02 CN CN200680011081.9A patent/CN102017236A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104439572A (en) * | 2013-09-13 | 2015-03-25 | 通用电气公司 | Electroerosion machining system and method |
| CN104439572B (en) * | 2013-09-13 | 2017-09-12 | 通用电气公司 | Galvano-cautery system of processing and method |
| CN104191053A (en) * | 2014-07-31 | 2014-12-10 | 广东工业大学 | Method for manufacturing micro-electrolysis cathode movable template |
| CN104526093A (en) * | 2014-08-22 | 2015-04-22 | 华侨大学 | Method of manufacturing cathode for surface texture micro-electrochemical machining |
| CN104526093B (en) * | 2014-08-22 | 2017-01-11 | 华侨大学 | Method of manufacturing cathode for surface texture micro-electrochemical machining |
| CN110964888A (en) * | 2019-12-25 | 2020-04-07 | 深圳市富优驰科技有限公司 | Method for removing parylene on surface of stainless steel part |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006281333A (en) | 2006-10-19 |
| WO2006107382A2 (en) | 2006-10-12 |
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