CN102007389B - Photometer - Google Patents

Photometer Download PDF

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Publication number
CN102007389B
CN102007389B CN200980113172.7A CN200980113172A CN102007389B CN 102007389 B CN102007389 B CN 102007389B CN 200980113172 A CN200980113172 A CN 200980113172A CN 102007389 B CN102007389 B CN 102007389B
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CN
China
Prior art keywords
light
wavelength
filter
photo detector
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200980113172.7A
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Chinese (zh)
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CN102007389A (en
Inventor
井崎雄三
鹤冈政义
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Topcon Corp
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Topcon Corp
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Publication of CN102007389A publication Critical patent/CN102007389A/en
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Publication of CN102007389B publication Critical patent/CN102007389B/en
Expired - Fee Related legal-status Critical Current
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

An optical receiver section (4) of a photometer (2) includes optical receiver elements (4a) disposed at a position corresponding to short wavelength-side light that is cut by a cut filter (26), wherein outputs from the optical receiver elements (4a) disposed at the position corresponding to the short wavelength-side light that is cut by the cut filter (26) are used as dark current outputs. An operational circuit (6) is provided with a correction circuit (30) that uses the dark current outputs to correct a photometer output from each of the optical receiver elements (4a) disposed at a position corresponding to long wavelength-side light rather than the short wavelength-side light to be cut.

Description

Light measurer
Technical field
The present invention relates to make from the light light splitting of determination object thing and measure the improvement of determinator of brightness etc. of the light of each wavelength.
Background technology
Known a kind of light measurer in the prior art, it makes brightness of each wavelength of measuring it from the wavelength light splitting of the light of determination object thing etc.
Light measurer as prior art, utilize diffraction grating that the light from the determination object thing is separated by wavelength, and received the light that separates by each wavelength by the solid photographic device as light accepting part, according to the brightness of measuring the light of each wavelength from the output of this solid photographic device, colourity etc.
In existing light measurer, even if do not incide the situation of each photo detector of light accepting part at light, also have dark current and export (dark current output) because of thermonoise from solid photographic device.
Thereby, a kind of light measurer of repeatedly measuring that constitutes is proposed, do not incide under the state of light accepting part at the light from the determination object thing, detection is from the dark current output of solid photographic device, subsequently, make the light from the determination object thing be incident on light accepting part and detect and export from the photometry of solid photographic device, obtain the difference of this photometry output and dark current output by computing, thereby by removing dark current output correction from the photometry output of each photo detector.
In addition, a kind of light measurer of measuring simultaneously structure is also proposed, end at light accepting part arranges cover body, and the light from the determination object thing is not incided on the photo detector that is coated by described cover body, detection simultaneously comes the dark current of the photo detector of free cover body coating to export and export from the photometry of each photo detector that does not have to be coated by cover body, and revise from the photometry of each photo detector and export (for example, with reference to patent documentation 1).
Patent documentation 1: Japanese kokai publication sho 58-158528 communique
Summary of the invention
Yet, be the light measurer of repeatedly measuring as its structure, although can micrometric measurement, the impropriety be to measure to expend time in.
In the light measurer of the structure of measuring at the same time, although can realize the raising of finding speed, yet its impropriety is and must cover body and the necessary structure that changes light accepting part be set to light accepting part.In addition, may not be the same from the dark current of each photo detector output, even if deduction is exported from the dark current of the photo detector that is coated by cover body and is obtained photometry output by correction without exception, also may not accurately remove dark current output, thereby be one of existing deficiency from the viewpoint of micrometric measurement.
Purpose of the present invention relates to a kind of light measurer, and it not only need not change the structure of existing light accepting part, and both can suppress to measure the reduction of precision, also can obtain to realize the effect of the raising of finding speed.
light measurer of the present invention is characterized in that, comprising: the light splitting light-metering optical system that the light from the determination object thing is carried out light splitting and carries out photometry, the light accepting part of the light that reception is separated by wavelength by this light splitting light-metering optical system, export the computing circuit of computing photometry characteristic according to the photometry of this light accepting part, described light splitting light-metering optical system has: the collimation lens that the light from the determination object thing is transformed into parallel beam, make the wavelength resolution element of the light beam decomposition of having passed through this collimation lens by wavelength, make each light beam that has decomposed by wavelength be gathered in respectively the light collecting lens of described light accepting part, the cut-off filter of the light of short wavelength's one side is compared in obstruct with visible light, described light accepting part has a plurality of photo detectors that receive respectively the light that has separated by wavelength, described a plurality of photo detector is corresponding with the position of the wavelength of the appointment of separated light and arrange along constant direction, and, described a plurality of photo detector is arranged on the position corresponding with the light of short wavelength's one side that is intercepted by described cut-off filter, the output that is configured in the locational photo detector corresponding with the light of short wavelength's one side that is intercepted by described cut-off filter as dark current output used, be provided with correction circuit in described computing circuit, this correction circuit is exported to revise with described dark current and is configured in and the photometry output that produces compared to corresponding locational each photo detector of the light of the wavelength of long wavelength's one side of the light of short wavelength's one side that is blocked.
In light measurer of the present invention, preferably, before described cut-off filter was arranged on collimation lens, this cut-off filter was to revise the coloured glass light filter of the susceptibility of each wavelength.
In light measurer of the present invention, preferably, after described cut-off filter was arranged on collimation lens, this cut-off filter was to revise the coloured glass light filter of the susceptibility of each wavelength.
In addition, in light measurer of the present invention, preferably, described cut-off filter intercepts the light of wavelength below 380nm.
and, light measurer of the present invention is preferably: described correction circuit is connected with storage part, this storage part is preserved following output ratio to each photo detector, that is: the dark current that is configured in the locational photo detector corresponding with the light of short wavelength's one side that is intercepted by described cut-off filter is exported, with be configured in and output compared to corresponding locational each photo detector of the light of each wavelength of long wavelength's one side of the light of short wavelength's one side that is blocked, and be this each photo detector be not subject under the situation of illumination by measure the output obtained ratio, described correction circuit is according to above-mentioned ratio, obtains the dark current output that is configured in compared to locational each photo detector corresponding to the light of each wavelength of light long wavelength one side of short wavelength's one side.
By the present invention, not only need not change the structure of existing light accepting part, and both can suppress to measure the reduction of precision, also can obtain to realize the effect of the raising of finding speed.
Description of drawings
Fig. 1 means the key diagram of overview of the structure of light measurer of the present invention;
Fig. 2 means the optical characteristics figure of the transmissivity of cut-off filter of the present invention;
Fig. 3 is the vertical view of light accepting part of the present invention;
Fig. 4 means from the key diagram of an example of the dark current output of the circuit output of each photo detector of the present invention.
Description of reference numerals:
1 determination object thing
2 light measurers
4 light accepting parts
6 computing circuits
The 4a photo detector
15 light splitting light-metering optical systems
26 coloured glass light filters (cut-off filter)
27 collimation lenses
28 diffraction grating (wavelength resolution element)
30 correction circuits
Embodiment
Below, with reference to accompanying drawing the embodiment of of the present invention light measurer on one side be described on one side.
Embodiment
Fig. 1 means for example key diagram of the overview of the structure of light splitting radiometer of light measurer of the present invention.In Fig. 1, the 1st, the determination object things such as liquid crystal panel, signal lamp, cold-cathode tube, guiding lamp, LED, the 2nd, light measurer.
Light measurer 2 has optical system 3, light accepting part 4 and the circuit part 5 of the light that is received from determination object thing 1.Circuit part 5 has computing circuit 6, AC power supplies 7, DC-DC power supply 8, LCD display 9, operating key 10, external sync input connector 11, A/D converter 12, the CCD analog PCB (CCD simulate press circuit board) 13 that photometry characteristic (colour examining data (brightness, colourity, colour temperature)) is carried out computing based on the photometry output of light accepting part 4.
Computing circuit 6 is made of for example CPU.AC power supplies 7, DC-DC power supply 8 are used for providing electric power to computing circuit 6, and operating key 10 is used for to the computing circuit 6 desired various instructions of input photometry.LCD display 9 is used for showing photometry characteristic and other instruction.External sync input connector 11 is used for indicating the timing of mensuration with the mode of the luminous synchronised of determination object thing 1.CCD analog PCB 13 is used for the photometry output of simulation output light accepting part 4.A/D converter 12 is used for that this simulation output is converted to numeral and exports and input to computing circuit 6.
Optical system 3 is made of alignment optical system 14 and light splitting light-metering optical system 15 substantially.Alignment optical system 14 is made of object lens 16, catoptron with holes 17, completely reflecting mirror 18, relay lens 19,20, the shutter 21 of finding a view, eyepiece 22 substantially.Light from determination object thing 1 is directed to catoptron 17 with holes by object lens 16, guides to completely reflecting mirror 18 by these catoptron 17 reflections with holes.Guide to the light of this completely reflecting mirror 18, be relayed to position 1 with determination object thing 1 conjugation by relay lens 19,20, the picture of determination object thing 1 of position 1 that is relayed to this conjugation is through eyepiece 22 and person to be measured is registered to.The shutter 21 of finding a view has following effect, that is: can prevent when measuring the determination object thing 1 of ultralow brightness, and outer light is sneaked into light splitting light-metering optical system 15 through relay lens 20,19, completely reflecting mirror 18, catoptron with holes 17 from a side of eyepiece 22.
Light splitting light-metering optical system 15 had both had object lens 16, the catoptron with holes 17 that shares with alignment optical system 14, also had relay lens 23, fibre bundle 24, tower plate 25, coloured glass light filter 26, collimation lens 27, diffraction grating 28, light collecting lens 29.
Catoptron 17 with holes has opening 17a.This catoptron 17 with holes is used for adjusting lightness.Herein, have in advance four kinds of catoptrons with holes, what represent in Fig. 1 is that one of them catoptron with holes 17 is inserted in the situation among the light path of light splitting light-metering optical system 15.
Relay lens 23 is formed on the picture of determination object thing 1 the incident end face 24a of fibre bundle 24.Fibre bundle 24 plays and will mix and eliminate the function of its polarized light from the light of measuring object 1.Tower plate 25 has ND light filter 25c, the light shielding part 25d of the ND light filter 25b of transparent apertures 25a, 10 times of dim lights, 100 times of dim lights, and plays adjustment from the function of the light quantity of the light of the outgoing end face 24b outgoing of fibre bundle 24.The focus of collimation lens 27 is in the position of the outgoing end face 24b of fibre bundle 24, and has be transformed into the effect of parallel beam from the light of these fibre bundle 24 outgoing.
As shown in Figure 2, the a series of effects of coloured glass light filter 26 performance, for example have the susceptibility of revising each wavelength effect and as intercept compare with visible light short wavelength's one side for example the cut-off filter of the light of one side of the short wavelength below wavelength 380nm play a role.The transmissivity of this coloured glass light filter 26 is by wavelength set.
Diffraction grating 28 has the function as the wavelength resolution element, and the wavelength resolution element makes the light beam that has passed through collimation lens 27 decompose by wavelength.Light collecting lens 29 has makes each light beam that decomposes by wavelength gather respectively the effect of light accepting part 4.
As shown in Figure 3, light accepting part 4 shape that is rectangle, and along laterally having n photo detector such as 128,256,512,1024 etc. longitudinally has m photo detector such as 128,256,512,1024 etc.Herein, the photo detector 4a of horizontal direction is corresponding with the position of the wavelength of the appointment of separated light and photo detector that arrange along constant direction.Photo detector 4a concentrates in together and forms a circuit (1 ラ イ Application) longitudinally, and the output of every the circuit corresponding with the position of each wavelength is input in computing circuit 6 through A/D converter 12.This light accepting part 4 (photo detector) comprises and is configured in the locational photo detector corresponding with the light of short wavelength's one side that is intercepted by coloured glass light filter 26.For example, expression has the photo detector 4a of four circuits in Fig. 3, the photo detector 4a of described four circuits is configured in wavelength on the light of short wavelength's one side below 380nm corresponding position, is configured in the output that each circuit of the locational photo detector 4a corresponding with the light of short wavelength's one side that is intercepted by described coloured glass light filter 26 produces and exports to use as dark current.
Be provided with correction circuit 30 in computing circuit 6.correction circuit 30 is connected with storage part 31, described storage part 31 is preserved following output ratio to each photo detector 4a, that is: the dark current that is configured in the locational photo detector 4a corresponding with the light of short wavelength's one side that is intercepted by coloured glass light filter 26 is exported, with be configured in and the output of locational each photo detector 4a that the light (this light is compared to the light of short wavelength's one side that is intercepted by coloured glass light filter 26) of each wavelength of long wavelength's one side is corresponding between ratio, and be and be not subject at this each photo detector 4a under the situation of illumination by the ratio of measuring between the output of obtaining.
To be configured in locational each photo detector 4a corresponding with the light (this light is compared to the light of short wavelength's one side that is intercepted by coloured glass light filter 26) of each wavelength of long wavelength's one side and to be in the situation that is not subject to illumination in order to make, for example light measurer 2 is configured in the darkroom, measures simultaneously thus the output of each photo detector 4a of light accepting part 4.
The dark current of each circuit of each photo detector 4a is exported as shown in Figure 4, and each photo detector 4a exists each individual existence of fluctuation or light accepting part 4 to fluctuate.Obtain in advance the dark current output of described each photo detector 4a by mensuration.Be taken as X if will be configured in the dark current output of the circuit of the locational photo detector 4a corresponding with the light of short wavelength's one side that is intercepted by coloured glass light filter 26 0The dark current output that is used for for example a certain circuit among the circuit of photo detector 4a (that is: be configured in the locational photo detector 4a corresponding with the light of the wavelength that is not intercepted by coloured glass light filter 26) of the actual photometry of visible light is taken as X, and it is than being X/X 0This numeric ratio X/X 0The mode of each circuit with correspondence is stored in storage part 31.Correction circuit 30 is according to numeric ratio X/X 0Obtain the dark current output of the circuit of each photo detector 4a.
Here, if the photometry output from the circuit of certain photo detector (it is represented by Reference numeral 4b) during with a certain measure is taken as y, the dark current output from the circuit of the photo detector that represents with Reference numeral 4b that will be when this is measured is taken as y ', will be when this be measured and the dark current output of the circuit of the photo detector that light short wavelength's one side that be blocked is corresponding be taken as y "
Formula is designated as y '=y " * (X/X 0),
Correction circuit 30 is according to above-mentioned formula, the revised dark current output y ' that inscribes when a certain measure each circuit of each photo detector 4a is carried out computing, and by the photometry output y of dark current output y ' correction from the circuit of each photo detector 4a, thereby calculate accurate photometry characteristic.
Revise like this, even if in the situation that there is fluctuation in the output of the dark current of the circuit of each photo detector 4a, also can accurately revise.In addition, even if in the situation that because thermonoise makes dark current output existence change, also can accurately revise.
In addition, for the dark current output X of the circuit of the photo detector 4a corresponding with the light of short wavelength's one side that is intercepted 0, also can use the mean value of the dark current output of a plurality of circuits.For example, four circuits in short-and-medium wavelength one side of Fig. 3 are expressed as the circuit corresponding with the light of the wavelength that is intercepted by coloured glass light filter 26, but, in this case, can obtain the dark current output summation of these four circuits, this dark current output summation is exported to use as average dark current divided by the numerical value that obtains after 4.
In the above-described embodiments, use the solid photographic device of CCD as photo detector, but can use the photo detectors such as other CMOS.In addition, in the present embodiment, use the wave filter of the wavelength that intercepts short wavelength's one side and utilized the field of measuring short wavelength's one side of wavelength, thereby obtain dark current output, but also can adopt following structure, that is: the light filter that uses obstruct to measure the wavelength of long wavelength's one side of wavelength (for example greatly about the wavelength more than 780nm or large wavelength more than 830nm) detects dark current and exports and revise.And, can also utilize bandpass optical filter, detect dark current output with short wavelength's one side and long wavelength one side two sides, and then be used for revising.In addition, after cut-off filter also can be configured in collimation lens.

Claims (4)

1. a light measurer, is characterized in that, comprising:
The light splitting light-metering optical system that light from the determination object thing is carried out light splitting and carries out photometry;
The light accepting part of the light that reception is separated by wavelength by this light splitting light-metering optical system;
Export the computing circuit of computing photometry characteristic according to the photometry of this light accepting part,
Described light splitting light-metering optical system has:
Light from the determination object thing is transformed into the collimation lens of parallel beam;
Make the wavelength resolution element of the light beam decomposition of having passed through this collimation lens by wavelength;
Make each light beam that has decomposed by wavelength be gathered in respectively the light collecting lens of described light accepting part;
The cut-off filter of the light of short wavelength's one side is compared in obstruct with visible light,
Described light accepting part has a plurality of photo detectors that receive respectively the light that separates by wavelength,
Described a plurality of photo detector is corresponding with the position of the wavelength of the appointment of separated light and arrange along constant direction, and described a plurality of photo detectors are arranged on the position corresponding with the light of short wavelength's one side that is intercepted by described cut-off filter,
The output that is configured in the locational photo detector corresponding with the light of short wavelength's one side that is intercepted by described cut-off filter as dark current output used,
be provided with correction circuit in described computing circuit, described correction circuit is connected with storage part, this storage part is preserved following output ratio to each photo detector, that is: the dark current that is configured in the locational photo detector corresponding with the light of short wavelength's one side that is intercepted by described cut-off filter is exported, with be configured in and output compared to corresponding locational each photo detector of the light of each wavelength of long wavelength's one side of the light of short wavelength's one side that is blocked, and be this each photo detector be not subject under the situation of illumination by measure the output obtained ratio, described correction circuit is according to above-mentioned ratio, obtains the dark current output that is configured in compared to corresponding locational each photo detector of the light of each wavelength of light long wavelength one side of short wavelength's one side.
2. light measurer according to claim 1, is characterized in that, before described cut-off filter was arranged on collimation lens, this cut-off filter was to revise the coloured glass light filter of the susceptibility of each wavelength.
3. light measurer according to claim 1, is characterized in that, after described cut-off filter was arranged on collimation lens, this cut-off filter was to revise the coloured glass light filter of the susceptibility of each wavelength.
4. light measurer according to claim 1 and 2, is characterized in that, described cut-off filter intercepts the light of wavelength below 380nm.
CN200980113172.7A 2008-04-15 2009-03-30 Photometer Expired - Fee Related CN102007389B (en)

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JP2008105267 2008-04-15
JP2008-105267 2008-04-15
PCT/JP2009/056437 WO2009128338A1 (en) 2008-04-15 2009-03-30 Photometer

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CN102007389B true CN102007389B (en) 2013-05-15

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JP5150939B2 (en) * 2008-10-15 2013-02-27 大塚電子株式会社 Optical characteristic measuring apparatus and optical characteristic measuring method
JP5738073B2 (en) * 2011-05-27 2015-06-17 株式会社トプコン Photometric device
KR102024812B1 (en) * 2017-10-31 2019-11-04 주식회사 맥사이언스 Apparatus and Method for measuring Chromatic-luminance and Spectral-radiance simultaneously

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GB2119086A (en) * 1982-04-24 1983-11-09 Bodenseewerk Perkin Elmer Co Reduction of measuring errors in spectrophotometers
US5801829A (en) * 1995-02-25 1998-09-01 Hewlett-Packard Company Method for measurment and compensation of stray light in a spectrometer
CN1637402A (en) * 2003-12-26 2005-07-13 株式会社拓普康 Measuring apparatus and method for dichroism

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Title
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JP昭58-158528A 1983.09.20

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WO2009128338A1 (en) 2009-10-22
KR20100106619A (en) 2010-10-01
CN102007389A (en) 2011-04-06
JPWO2009128338A1 (en) 2011-08-04
KR101239573B1 (en) 2013-03-18

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