CN101997041B - 一种利用衬底进行加工的基板单元、基板结构及其制造方法 - Google Patents
一种利用衬底进行加工的基板单元、基板结构及其制造方法 Download PDFInfo
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- CN101997041B CN101997041B CN2010102584269A CN201010258426A CN101997041B CN 101997041 B CN101997041 B CN 101997041B CN 2010102584269 A CN2010102584269 A CN 2010102584269A CN 201010258426 A CN201010258426 A CN 201010258426A CN 101997041 B CN101997041 B CN 101997041B
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- 239000000758 substrate Substances 0.000 title claims abstract description 338
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 160
- 239000013078 crystal Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims description 88
- 239000000463 material Substances 0.000 claims description 66
- 238000005530 etching Methods 0.000 claims description 58
- 239000000203 mixture Substances 0.000 claims description 33
- 230000008569 process Effects 0.000 claims description 25
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 14
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 12
- 229920005591 polysilicon Polymers 0.000 claims description 12
- 238000001039 wet etching Methods 0.000 claims description 10
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 238000012545 processing Methods 0.000 abstract description 16
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- 238000005516 engineering process Methods 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 19
- 230000003287 optical effect Effects 0.000 description 16
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 16
- 230000001795 light effect Effects 0.000 description 11
- 238000001020 plasma etching Methods 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 229910006404 SnO 2 Inorganic materials 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
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- 239000000047 product Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US27435609P | 2009-08-17 | 2009-08-17 | |
US61/274,356 | 2009-08-17 | ||
US33534510P | 2010-01-06 | 2010-01-06 | |
US61/335,345 | 2010-01-06 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310232126.7A Division CN103515478A (zh) | 2009-08-17 | 2010-08-17 | 一种利用衬底进行绒面加工的基板单元及其形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101997041A CN101997041A (zh) | 2011-03-30 |
CN101997041B true CN101997041B (zh) | 2013-07-24 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010102584269A Expired - Fee Related CN101997041B (zh) | 2009-08-17 | 2010-08-17 | 一种利用衬底进行加工的基板单元、基板结构及其制造方法 |
CN201310232126.7A Pending CN103515478A (zh) | 2009-08-17 | 2010-08-17 | 一种利用衬底进行绒面加工的基板单元及其形成方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310232126.7A Pending CN103515478A (zh) | 2009-08-17 | 2010-08-17 | 一种利用衬底进行绒面加工的基板单元及其形成方法 |
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CN (2) | CN101997041B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103378211B (zh) * | 2012-04-19 | 2017-02-15 | 聚日(苏州)科技有限公司 | 太阳能电池单元及其制造方法 |
CN106033786B (zh) * | 2015-03-13 | 2018-07-06 | 聚日(苏州)科技有限公司 | 太阳能电池的制造方法 |
CN113611760B (zh) * | 2021-07-07 | 2022-07-26 | 中山德华芯片技术有限公司 | 一种锗太阳能电池及其制备方法和应用 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1070294A (ja) * | 1996-08-28 | 1998-03-10 | Sharp Corp | 太陽電池用基板およびその製造方法 |
US6207890B1 (en) * | 1997-03-21 | 2001-03-27 | Sanyo Electric Co., Ltd. | Photovoltaic element and method for manufacture thereof |
JP2005150614A (ja) * | 2003-11-19 | 2005-06-09 | Sharp Corp | 太陽電池及びその製造方法 |
CN100536176C (zh) * | 2006-02-23 | 2009-09-02 | 三洋电机株式会社 | 凹凸基板的制造方法和光生伏打元件的制造方法 |
CN101179100A (zh) * | 2007-01-17 | 2008-05-14 | 江苏林洋新能源有限公司 | 一种大面积低弯曲超薄型双面照光太阳能电池制作方法 |
CN201112399Y (zh) * | 2007-09-27 | 2008-09-10 | 江苏林洋新能源有限公司 | 具有浓硼浓磷扩散结构的太阳能电池 |
CN101414646A (zh) * | 2007-10-17 | 2009-04-22 | 倪党生 | 一种薄膜太阳能电池制造新工艺 |
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2010
- 2010-08-17 CN CN2010102584269A patent/CN101997041B/zh not_active Expired - Fee Related
- 2010-08-17 CN CN201310232126.7A patent/CN103515478A/zh active Pending
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Publication number | Publication date |
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CN101997041A (zh) | 2011-03-30 |
CN103515478A (zh) | 2014-01-15 |
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Owner name: SUNOVEL (SUZHOU) TECHNOLOGIES LIMITED Free format text: FORMER OWNER: ZHU HUILONG Effective date: 20121017 Free format text: FORMER OWNER: LUO ZHIJIONG YIN HAIZHOU Effective date: 20121017 |
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