CN101980024A - 矩形铂金薄膜二维风速风向传感器 - Google Patents
矩形铂金薄膜二维风速风向传感器 Download PDFInfo
- Publication number
- CN101980024A CN101980024A CN201010501561.1A CN201010501561A CN101980024A CN 101980024 A CN101980024 A CN 101980024A CN 201010501561 A CN201010501561 A CN 201010501561A CN 101980024 A CN101980024 A CN 101980024A
- Authority
- CN
- China
- Prior art keywords
- platinum film
- rectangle
- distribution
- platinum
- heating resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105015611A CN101980024B (zh) | 2010-09-29 | 2010-09-29 | 矩形铂金薄膜二维风速风向传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105015611A CN101980024B (zh) | 2010-09-29 | 2010-09-29 | 矩形铂金薄膜二维风速风向传感器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101980024A true CN101980024A (zh) | 2011-02-23 |
CN101980024B CN101980024B (zh) | 2012-05-02 |
Family
ID=43600540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010105015611A Expired - Fee Related CN101980024B (zh) | 2010-09-29 | 2010-09-29 | 矩形铂金薄膜二维风速风向传感器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101980024B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110207862A (zh) * | 2019-05-28 | 2019-09-06 | 北京航空航天大学 | 一种基于电阻抗层析成像的触觉压力传感器与信号采集方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5158801A (en) * | 1988-04-01 | 1992-10-27 | The United States Of America As Represented By The United States Administrator Of The National Aeronautics And Space Administration | Method of forming a multiple layer dielectric and a hot film sensor therewith |
JPH0921668A (ja) * | 1995-07-04 | 1997-01-21 | Ricoh Co Ltd | フローセンサ |
US20010015199A1 (en) * | 2000-01-14 | 2001-08-23 | Hitachi, Ltd. | Thermal type air flow sensor and control device for a vehicle |
-
2010
- 2010-09-29 CN CN2010105015611A patent/CN101980024B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5158801A (en) * | 1988-04-01 | 1992-10-27 | The United States Of America As Represented By The United States Administrator Of The National Aeronautics And Space Administration | Method of forming a multiple layer dielectric and a hot film sensor therewith |
JPH0921668A (ja) * | 1995-07-04 | 1997-01-21 | Ricoh Co Ltd | フローセンサ |
US20010015199A1 (en) * | 2000-01-14 | 2001-08-23 | Hitachi, Ltd. | Thermal type air flow sensor and control device for a vehicle |
Non-Patent Citations (2)
Title |
---|
《仪器仪表学报》 20030831 张昭勇等 "CMOS集成二维风速和风向传感器的研制" 340-342,347 1-2 第24卷, 第4期 2 * |
《电子器件》 20040930 程海洋等 "热薄膜温差型CMOS风速风向传感器的研究和实现" 486-489 1-2 第27卷, 第3期 2 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110207862A (zh) * | 2019-05-28 | 2019-09-06 | 北京航空航天大学 | 一种基于电阻抗层析成像的触觉压力传感器与信号采集方法 |
CN110207862B (zh) * | 2019-05-28 | 2020-07-03 | 北京航空航天大学 | 基于电阻抗层析成像的触觉压力传感器与信号采集方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101980024B (zh) | 2012-05-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20170122783A1 (en) | Sensor chip used for multi-physical quantity measurement and preparation method thereof | |
CN104698409B (zh) | 一种单芯片具有校准线圈/重置线圈的高强度磁场x轴线性磁电阻传感器 | |
CN104634833B (zh) | Mems电容式相对湿度传感器及其制备方法 | |
KR101339296B1 (ko) | 그래핀을 이용한 멀티터치 힘 또는 압력 감지 투명 터치스크린을 이용한 힘 측정방법 | |
CN203940940U (zh) | 一种用于多物理量测量的传感器芯片 | |
CN105841739B (zh) | 温湿度传感器及其制备方法、温湿度测量系统 | |
CN204924795U (zh) | 一种裂纹尖端应变场传感器 | |
CN106959169A (zh) | 一种新型多功能传感器芯片及其制备方法 | |
CN201867423U (zh) | 基于热损失工作方式的圆形铂金薄膜二维风速风向传感器 | |
CN106018504B (zh) | 一种土壤基质栽培多参数复合传感器的pH检测双补偿方法 | |
CN101980025B (zh) | 圆形铂金薄膜二维风速风向传感器 | |
JP2015068802A (ja) | 薄膜型水素ガスセンサ | |
CN104218147A (zh) | 磁传感器的制备方法以及磁传感器 | |
CN101980024B (zh) | 矩形铂金薄膜二维风速风向传感器 | |
CN205280640U (zh) | 电容式湿度传感器 | |
CN201867422U (zh) | 基于热损失工作方式的矩形铂金薄膜二维风速风向传感器 | |
CN105526983A (zh) | 一种气体流量传感器的结构及其制造方法 | |
CN105486728A (zh) | 电容式湿度传感器及其制造方法 | |
CN201867424U (zh) | 基于热损失工作方式的圆形硅膜二维风速风向传感器 | |
CN201867421U (zh) | 基于热损失工作方式的矩形硅膜二维风速风向传感器 | |
CN105043575B (zh) | 一种高灵敏度薄膜型电阻温度传感器制造方法 | |
CN101975870B (zh) | 矩形硅膜二维风速风向传感器 | |
CN110108751A (zh) | 一种可测量热导率和热扩散率的触觉传感器及测量方法 | |
CN101980026B (zh) | 圆形硅膜二维风速风向传感器 | |
RU150181U1 (ru) | Магниторезистивный преобразователь |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SOWTHEAST UNIV. Effective date: 20140813 Owner name: NANTONG DALISHEN CONSTRUCTION AND MACHINERY JOINT Free format text: FORMER OWNER: SOWTHEAST UNIV. Effective date: 20140813 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 210096 NANJING, JIANGSU PROVINCE TO: 226691 NANTONG, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140813 Address after: 226691, Nantong County, Jiangsu City, Haian Province, pier Town, pier West Village five groups Patentee after: NANTONG DALISHEN CONSTRUCTION AND MACHINERY JOINT VENTURE Patentee after: SOUTHEAST University Address before: 210096 Jiangsu city Nanjing Province four pailou No. 2 Patentee before: Southeast University |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120502 Termination date: 20210929 |
|
CF01 | Termination of patent right due to non-payment of annual fee |