CN101968742B - Internal interlocking management method and device for simulation system - Google Patents
Internal interlocking management method and device for simulation system Download PDFInfo
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- CN101968742B CN101968742B CN 201010288680 CN201010288680A CN101968742B CN 101968742 B CN101968742 B CN 101968742B CN 201010288680 CN201010288680 CN 201010288680 CN 201010288680 A CN201010288680 A CN 201010288680A CN 101968742 B CN101968742 B CN 101968742B
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Abstract
The invention discloses an internal interlocking management method for a simulation system. The method comprises the following steps of: establishing a property prototype library; configuring interlocking information between simulation equipment according to the property prototype library; and transmitting the interlocking information to corresponding simulation equipment and allowing the simulation equipment to perform corresponding interlocking action according to the interlocking information. The invention also discloses an internal interlocking management device for the simulation system. The device comprises the property prototype library, a configuring module and an execution module. In the internal interlocking management method and the internal interlocking management device for the simulation system, an interlocking relation between the simulation equipment in the simulation system is configured flexibly and the simulation equipment fully simulates the function of an interlocking relation between the actual equipment while simulating according to the configured interlocking relation, so that high instantaneity, high adaptability and better simulation effect are achieved.
Description
Technical field
The present invention relates to Computer Applied Technology and semiconductor applications, particularly a kind of internal interlocking management method and device for analogue system.
Background technology
Along with the continuous lifting of integrated circuit (IC) chip integrated level and improving constantly of chip functions, people are more and more higher to the requirement of technique.In the research of semiconductor manufacturing equipment, development﹠ testing work, comprise the research and development of hardware and software.The middle major part that develops software is equipment control software, these softwares are when testing, need at first to verify under simulated environment, and be merely that some project development software test platforms are not only consuming time excessive but also reusability is very poor, for efficient and the existing problem of Exact Location System that improves software test, in the urgent need to a general software test platform system.The simulated program of all hardware of projects use need to be provided, the software that develops can be moved on this basis, thereby test.
In the research of semiconductor manufacturing equipment, development﹠ testing work, emulation has vital role.On the one hand, the complicacy due to production run control itself theoretical research is constantly proposed Secretary, and theoretical research need improve the utilization factor of equipment.Will be by means of emulation tool; On the other hand, in the face of various system controlling software bags, need ready-made emulation platform, reflect algorithm in the operating effect of actual production comprehensively, obtain the algorithm improvement strategy, the online method of adjustment of parameter of directive significance etc.The use of emulation platform, accurate testing apparatus Control System Software, can reduce the failure of Control System Software execution and integrated circuit fabrication process process, can solve the technology stability of integrated circuit technology equipment, reliability of technology, reduce the maintenance of equipment time, farthest improve the utilization factor of equipment.
Interlocking is the method that prevents from state machine occurring undesirable state, this method can be comprise electronics, electric or mechanical in equipment or system.In majority was used, interlocking was when it is triggered, was used for preventing that machine from injuring its operator or itself and stopping the equipment that machine moves.
The interlocking key element of system has comprised:
1) interlocking detector: comprise detecting temperature, pressure, position transducer.
2) interlocking opertaing device: the equipment that comprises the opertaing device parameters.
3) interlocking logical design: the action sequence of equipment room, the design of the logical relation of equipment room.
Towards the functional simulation of semiconductor manufacturing equipment the time, general is all the logical design of having adopted interlocking, action sequence and the logical relation design of equipment room have been comprised, owing to being content on software view fully, the extremely contact of behavior act of complicated coupling relation that therefore namely has between distinct device.In order to realize the interlocked relationship of clear logic, need to there be the subsystem of accurate management method clearly and configurable and Scalable Performance to support.
Summary of the invention
Purpose of the present invention is intended to solve at least one of above-mentioned technological deficiency.Proposed especially a kind of internal interlocking management method for analogue system, the function of complete Reality simulation equipment room interlocked relationship when simulation run realizes flexible configuration and processing to analogue system inner interlocked relation.
For achieving the above object, one aspect of the present invention has proposed a kind of internal interlocking management method for analogue system, comprises the steps:
Set up the attribute prototype library, described attribute prototype library comprises all properties value of described simulation subsystem and emulator, and wherein, analogue system comprises a plurality of simulation subsystems, and described simulation subsystem further comprises a plurality of emulators;
According to described attribute prototype library, configure the interlock information between described emulator; With
Described interlock information is sent to corresponding emulator, and described emulator is carried out corresponding interlocking action according to interlock information.
The internal interlocking management method that is used for analogue system according to the embodiment of the present invention, interlocked relationship between emulator in analogue system is carried out flexible configuration, and according to the interlocked relationship that configures, the function of complete Reality simulation equipment room interlocked relationship during the emulator simulation run.The internal interlocking management method of the relatively existing analogue system of the method has stronger have real-time, strong adaptability and better simulated effect.
The present invention has proposed a kind of inner interlocked management devices for analogue system on the other hand, comprising:
The attribute prototype library, described attribute prototype library comprises all properties value of described simulation subsystem and emulator, and wherein, described analogue system comprises a plurality of simulation subsystems, and described simulation subsystem further comprises a plurality of emulators;
Configuration module is used for according to the interlock information between the described emulator of described attribute prototype library configuration; With
Execution module is used for sending to from the interlock information of described configuration module corresponding emulator.
The inner interlocked management devices that is used for analogue system according to the embodiment of the present invention, interlocked relationship between emulator in analogue system is carried out flexible configuration, and according to the interlocked relationship that configures, the function of complete Reality simulation equipment room interlocked relationship during the emulator simulation run.The inner interlocked management devices of the relatively existing analogue system of this device has stronger have real-time, strong adaptability and better simulated effect.In addition, inner interlocked management devices of the present invention has extensibility, and the subsystem that it can be relevant to other and a complete functional simulation platform are used in conjunction with.
The aspect that the present invention adds and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or the additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Fig. 1 is the process flow diagram according to the internal interlocking management method that is used for analogue system of the embodiment of the present invention;
Fig. 2 is according to the configuration interlocking condition of the embodiment of the present invention and the process flow diagram of interlocking trigger command;
Fig. 3 is the process flow diagram according to the configuration interlocking action of the embodiment of the present invention;
Fig. 4 carries out the process flow diagram of interlocked relationship in Fig. 1;
Fig. 5 is the process flow diagram of judgement interlocking condition in Fig. 4; With
Fig. 6 is the schematic diagram according to the inner interlocked management devices that is used for analogue system of the embodiment of the present invention.
Embodiment
The below describes embodiments of the invention in detail, and the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the present invention, and can not be interpreted as limitation of the present invention.
For a better understanding of the present invention, below with reference to the internal interlocking management method that be used for analogue system of accompanying drawing description according to the embodiment of the present invention.
Manufacturing equipment a reality comprises a plurality of subsystems, a sub-systems and then comprise a plurality of equipment.Therefore, when utilizing analogue system to carry out emulation to above-mentioned manufacturing equipment, corresponding in analogue system have simulation subsystem and an emulator, and the relation of upper strata level distinctness helps to realize emulation logic.This internal interlocking management method can be used for multiple analogue system.In the following description, take towards the analogue system of semiconductor manufacturing equipment function as example, it will be appreciated that the present invention is not limited to for the analogue system to the semiconductor manufacturing equipment function.
As shown in Figure 1, the internal interlocking management method that is used for analogue system of the embodiment of the present invention comprises the steps:
S101: set up the attribute prototype library;
Because the internal interlocking management method of the embodiment of the present invention is mainly to realize in an analogue system, therefore the realization of this method based on the coupled relation between device parameter, attribute and the behavior of each emulator inside in analogue system, relates to logical relation and behavior between the inner different emulators of an analogue system.
At first, need to set up the attribute prototype library, comprise all properties value of simulation subsystem and emulator.Due to above-mentioned simulation subsystem and emulator corresponding be subsystem and the equipment of actual equipment, therefore, all properties value of simulation subsystem and emulator can characterize the subsystem of actual equipment and the attribute of equipment.
In the time need to managing the interlocked relationship in analogue system, can directly therefrom call required simulation subsystem and the property value of emulator.
S102: according to the attribute prototype library, the interlock information between the configuration emulator;
On the basis of the attribute prototype library of setting up in step 101, the interlock information between emulator is configured.
In user configured process, there is the interlocking condition if carry out the interlocking action between equipment, need first to configure interlocking condition and interlocking trigger command.Fig. 2 shows the process flow diagram of configuration interlocking condition and interlocking trigger command.
As shown in Figure 2, at first select the affiliated simulation subsystem of interlocking action in the dependency prototype library, read the property value of this simulation subsystem.After simulation subsystem is selected to complete, then the emulator under in the simulation subsystem of dependency prototype library under selecting, read the property value of this emulator.
If this emulator had been configured the interlocking condition, be written into corresponding configuration information.And the configuration information of this emulator is presented to the user with the form of visualization interface, determined the processing of this configuration information is moved by the user, comprise configuring careful edit-modify or deletion.After above-mentioned configuration information is processed, preserve the configuration information after processing.
In one embodiment of the invention, the configuration information of emulator being presented to the user with the form of visualization interface can adopt Visual C# to realize.
If this equipment was not configured the interlocking condition, it is restarted configuration.At first, the property value of the affiliated emulator of configuration, parameter value or the state value of emulator under comprising.Then, the interlocking condition between the configuration emulator.
When configuration interlocking condition, because each emulator has different emulator parameter and attribute, and then each emulator parameter and attribute have again different critical values, so the interlocking condition of each emulator is very complicated.Particularly, the interlocking condition of these emulators can be intersected parameter and the attribute that comprises a plurality of emulators.
For addressing the above problem, can adopt with single text character and combine, form the character string script of standard.Thereby user friendly operation and checking also can be good at parsing interlocking logic corresponding to above-mentioned interlocking condition.
According to the demand analysis that the parameter that may exist in analogue system is carried out, that the parametric classification of emulator is as follows:
The INTEGER:32bit signed integer;
DOUBLE: double-precision floating points;
STRING: character string;
BOOLEAN: Boolean type,
The parameter of above-mentioned emulator is preserved and is resolved with character string forms.
When the interlocking condition when being single, be example take the interlocking condition as pressure greater than 100, with pressure as a single character string, greater than "＞" as a character string, " 100 " then are combined as above-mentioned character string the script of " pressure＞100 " as a character string.
When the interlocking condition when being a plurality of, take interlocking condition pressure less than 200 and flow greater than 100 as example, first according to pressure less than 200 and flow be configured greater than 100 two single interlocking conditions, " AND " after configuration is completed in three kinds of logics of employing " AND; OR; XOR ", then next one interlocking condition is configured, at last these character strings are combined the script that becomes " pressure＜200 and flow＞100 ".
After having added above-mentioned interlocking condition, an interlocking trigger command that triggers this interlocking condition need to be set, this order is to be added by user oneself.The interlocking trigger command comprises that parameter or attribute by equipment satisfy the order that certain condition triggers.This just need to reserve storage space at emulator, and the user is added to the interlocking trigger command in storage space.
Take the interlocking condition as temperature greater than 100 and pressure be example less than 500, it is added an interlocking trigger command " Message1 "; Perhaps interlocking condition is closed condition, adds an interlocking trigger command " Message2 ".
After configuring the interlocking trigger command, will interlock condition and interlocking trigger command one by one corresponding afterwards preservation get final product.If the user need to revise and delete in this process, select corresponding operation to get final product.
The interlocking condition adopts XML document to manage and preserve, the below with interlocking condition pressure greater than 100, pressure less than 200 and flow be example greater than 100, the definition format of interlocking condition is described.
In above-mentioned XML document, the implication of each element and constraint are as follows:
＜SubsysCplCondition〉implication: represent whole interlocked relationship document, be the root node of XML tree construction, because a simulation subsystem has a lot of interlocked relationship, store these interlocked relationship with the form of chained list;
＜CouplingCondition〉implication: represent the interlocking condition of each configuration, comprise script and trigger command information;
＜script〉implication: the script information of configuration; Constraint: can only resolve parameter name and " and, or, xor " in following paramlist;
＜couplingcommand〉implication: trigger the order of interlocking condition;
＜paramlist〉implication: represent a device parameter title in configuration information, owing to may relating to a plurality of parameter names, therefore preserve with the form of chained list;
＜string〉implication: representing the concrete device parameter title in a configuration information, is all that character string type is preserved.
Definition format for the interlocking trigger command will illustrate with the definition format that interlocks action below in the lump.
Due to the interlocking behavior is that trigger command triggers startup.The type of trigger command comprises control command and interlocking trigger command.Wherein, control command is from the real system of described analogue system institute emulation.The interlocking trigger command is completed by configuration in above-mentioned steps.When the interlocking condition and after the configuration of interlocking trigger command is completed accordingly, further configuration is by the interlocking action of trigger command triggering emulator.
Fig. 3 shows the process flow diagram of configuration interlocking action.As shown in Figure 3, at first need to select affiliated simulation subsystem and emulator.If this equipment was configured, directly being written into configuration information gets final product, and the configuration information of this emulator is presented to the user with the form of visualization interface, determined the processing of this configuration information is moved by the user, comprise configuring careful edit-modify or deletion.
If this emulator was not configured the interlocking action, the interlocking behavior of selecting the type of trigger command to trigger by the user, the corresponding behavior of other equipment that needs at last the above-mentioned trigger command of configuration to trigger simultaneously.
When trigger command for interlocking during trigger command, the temperature take the interlocking condition as valve arrangement greater than 100 and pressure be example less than 500, this interlocking condition has a corresponding interlocking trigger command " Message1 ".When valve satisfied the interlocking condition, the state of MFC equipment must be in closed, and namely MFC equipment must be carried out and stop this behavior.
When trigger command was control command, when valve arrangement receives control command when closing, MFC equipment must be carried out and stop this action.
When configure trigger order and interlocking action, can the behavior of trigger command and corresponding emulator and emulator is corresponding one by one, embody with a data form, simultaneously they are deposited in the storage space of emulator according to the temporary transient serializing of priority time sequencing.The user need to edit or delete and can carry out very easily in the meantime, until the user preserves this configuration information, just preserves with the XML file layout of chained list.
For the classification of convenient a large amount of configuration informations with search, adopt the form of form to manage.Feeling after user configuration is completed has the place that needs modification, can edit and delete these configuration informations, recursive these configurations is operated.
Order and the behavioral data formal definition of trigger command and interlocking action are as follows:
In above-mentioned XML document, the implication of each element and constraint are as follows:
＜CouplingConfiglist〉implication: represent whole order and behavior document, be the root node of XML tree construction.Because an equipment has a lot of interlocked relationship, store these interlocked relationship with the form of chained list;
＜CouplingConfig〉implication: represent interlocking order and the behavior relation of each configuration, comprise the interlocking title, trigger interlocking device, trigger the interlocking order, the equipment that relates to and the behavior of equipment;
＜couplingName〉implication: the interlocking title, by user's configuration name, be convenient to distinguish; Constraint: can not case sensitive letter;
＜couplingDeviceName〉implication: the implementor name that triggers interlocking;
＜couplingCommandName〉implication: trigger the order of interlocking;
＜devicename〉implication: the title of the emulator that relates to;
＜deviceAction〉implication: the emulator behavior that relates to.
In the semiconductor manufacturing equipment of reality, a semiconductor manufacturing equipment subsystem has some equipment, and for functional simulation, the interlocked relationship between different equipment intersects will be very complicated.For fear of such complexity, take single subsystem as individual, preserve respectively its inside interlocked relationship of equipment separately, comprise interlocking condition, interlocking trigger command and corresponding interlocking action.The name of employing simulation subsystem is referred to as the file name of preservation, has namely facilitated checking of user, the calling logic when also having simplified operation.
Interlocked relationship management method for whole semiconductor manufacturing equipment functional simulation-oriented, when configuration, the configuration of interlocked relationship condition becomes the character string script of standard to realize with single group of text, and the form that is configured to chained list of interlocking trigger command and interlocking action embodies, information with configuration is kept at together with the form of xml file simultaneously, the XML file layout has concisely, the characteristics of easy care, helps to simplify exploitation, user friendlyly searches and reads.
By above-mentioned configuration to the interlocked relationship between emulator, provide visual operation in the mode at interface to the user, the user can complete for the editor of complicated interlocked relationship between the semiconductor emulator, deletion management function; And can in time provide information indicating to the user in layoutprocedure, check for the user; Can and be written into the preservation that configuration information is complete of certain data layout after configuration is completed, facilitate user's repetitive operation.
S103: interlock information is sent to corresponding emulator, and emulator is carried out corresponding interlocking action according to interlock information.
In conjunction with shown in Figure 4, on the basis that step 102 configuration is completed, the user can the very clear interlock information of knowing configuration, thereby carries out corresponding interlocking action according to interlock information.
Carry out the interlocking action in simulation subsystem, according to the difference of trigger command, be divided into two kinds of situations:
(1) trigger command is the interlocking trigger command
The user monitors the emulator attribute that configured, and simultaneously this emulator property value is judged whether to satisfy the interlocking condition.When this device attribute value reaches between the interlock region of configuration, just satisfied the interlocking condition, trigger simultaneously the interlocking trigger command, passed to corresponding emulator with interlocking the mode of trigger command with a kind of message transmission, moved to satisfy user's configuration requirement to carry out corresponding interlocking.
Fig. 5 shows the process flow diagram of judgement interlocking condition.As shown in Figure 5, at first obtain the interlocking condition.When the interlocking condition when being single, the interlocking condition script that at first needs to form after will configuration splits into substring one by one, the judgement relation character in the middle of extracting, such as: "＞" or "＜" or "=" etc.Then obtain parameter name and parameter value that above-mentioned judgement relation character is associated, namely judge the device parameter title of relation character front and the value corresponding to this parameter name of back.Because simulation subsystem at any time all at the parameter value that monitors this emulator, compares this parameter value that monitors and the property value that corresponding emulator configures.The value that this parameter value that for example will monitor is corresponding with the parameter name of configuration compares, if do not satisfy the interlocking condition, again goes to obtain coupling condition and judges, if satisfied the interlocking condition, finishes judgement, carries out next step operation.
When being a plurality of, at first carry out the pattern of single interlocking condition when the interlocking condition, needing to obtain the multiple parameter values of judgement, then adopt the pattern match of regular expression to judge.Regular expression refers to that one is used for describing or mates a series of single character strings that meet the character string of certain syntactic rule.In a lot of text editors or other instruments, regular expression is usually used to retrieve and/or replace the content of text that those meet certain pattern.A regular expression removes to mate a formula of a class character string exactly with certain pattern.
In this step, adopt the pattern match of regular expression obtain and judge and, or, these 3 conditions of xor, from left to right as much as possible remove accurately to mate target string, search all single interlocking conditions that occur between " and, or, xor ", at last these this use of parameter value that need to judge and just used and, this just uses or with or's, and this just uses xor with xor's, and this parameter value of supervision and the property value of emulator configuration are compared.The value that this parameter value that for example will monitor is corresponding with the parameter name of configuration compares.If do not satisfy condition, again go to obtain coupling condition and judge, if satisfied the interlocking Rule of judgment, finish judgement, carry out next step operation.
(2) trigger command is control command
The poll judgement is carried out in the order of this control command and configuration, if this control command is the order that is configured, given corresponding emulator with this command routing, carry out interlocking action corresponding to this emulator.
In simulation subsystem, the interlocking condition is intricate, in order to satisfy the condition of artificial actual system, has obtained accurately that the interlocked relationship condition is inadequate, and how to remove the behavior act of actuating equipment according to the interlocking condition that obtains is a very crucial problem.Therefore, the internal interlocking management method of the embodiment of the present invention adopts message to pass to mode trigger command is passed to corresponding emulator.
For each emulator, there are one or more external communication interfaces and control system to communicate, these communication modes are all to have concrete communication protocol to support, in this system, use these ready-made communication protocols to transmit the order that triggers interlocked relationship.Wherein, control system integration is on the physical device of analogue system institute emulation.And the emulator storehouse is reserved with the interface that transmits above-mentioned trigger command.
In configuration interlocking Rule of judgment, add an interlocking trigger command that triggers interlocked relationship under each interlocking Rule of judgment.Mentioned order is a character in fact just, comes the behavior act of triggering system interlocking according to this command name.When emulator had satisfied the interlocking condition, subsystem can send this order in inside to emulator self with the communication protocol that current emulator uses according to the trigger command of configuration, and this trigger command has only comprised the title of order in fact.After emulator is subject to this order, just as receiving the control command that external control system sends, remove to carry out corresponding action behavior.
After emulator receives trigger command, carry out corresponding interlocking action.When operation, when equipment has satisfied that the interlocking condition has triggered the order of interlocking condition or when receiving control command, must go fast to search this order whether in the order chained list that configured, simultaneously, after order meets the demands, also need to go fast to search corresponding equipment and equipment behavior, so just need this subsystem must go accurately in real time to carry out these operations.
In layoutprocedure in front, all orders and behavior configuration information are all the orderly forms that has been stored as chained list, and in the process of operation, these chained lists can read in Installed System Memory, each configuration information is all ordered arrangement, and being equivalent to each configuration information is all that a sequence number is arranged.Because all orders and behavior adopt the form of character string to store, so the internal interlocking management method of the embodiment of the present invention adopts a kind of method of character string fast finding to realize.
In one embodiment of the invention, the employing of the method for above-mentioned character string fast finding is that ELF Hash Function realizes.The below is an ELF Hash Function example:
When emulator obtains a command name, can go to search in command list (CLIST) by this algorithm immediately, if being present in the command list (CLIST) of configuration, this order carries out immediately according to configuration information, the device name that obtains relating to and device action, at this moment need to remove fast finding equipment in the equipment chained list according to device name, and carry out next step behavior according to the device action that obtains.
Because the interlocked relationship of a simulation subsystem can be very complicated, a lot of interlocked relationship can occur at one time, and like this for this subsystem, therefore the realization that all interlocking behaviors must real-time parallel adopts the method for multithreading to realize.
Thread is single sequential control flow process in program.Move simultaneously a plurality of threads and complete different work in single program, be called multithreading.The difference of thread and process is, subprocess and parent process have different codes and data space, and a plurality of threads are shared data space, and it is its Execution context that each thread has the execution stack of oneself and programmable counter.Multithreading is mainly in order to save CPU time, to bring into play and utilize, deciding as the case may be.The computed memory source of needs in service and the CPU of thread.Each order is a process, the logic behavior of judgement interlocking condition carries out on the system backstage, can follow the communications protocol that this equipment uses fully when sending the interlocking trigger command after satisfying condition, simultaneously, receiving order is also the identical mode that gets, for the conflict between thread, when clashing between two orders, can follow this communications protocol mechanism and go to avoid the communication conflict.
By adopting multithreading to accomplish that these all operations are all that real-time parallel occurs, the most natural situation near physical device has better simulated effect.
Carry out interlocking action operation part in above-mentioned steps in addition in logic the realization of the content of configuration, the user can be according to the deploy content of oneself, follow-up behavior judges whether interlocked relationship is correct to the emulator that feeds back, the generation of all coupling behaviors is all real-time generation, parallel processing, identical to accomplish with trying one's best of physical device.
According to the internal interlocking management method that is used for analogue system of the embodiment of the present invention, the interlocked relationship of system being integrated into unified description script manages, can flexible configuration, deletion, modification, preservation analogue system inner interlocked relation, and the function of complete Reality simulation equipment room interlocked relationship, have the characteristics of real-time, strong adaptability, closing to reality when device emulation moves.Because the needed hardware of different projects is different, even its using method of identical hardware is also different, internal interlocking management method of the present invention can flexible configuration satisfies the needs of project, have flexible configuration and the user friendly operation of extendible function and use, also be convenient to other manufacturers or self other product compatible.
The embodiment of the present invention has also proposed a kind of inner interlocked management devices for analogue system.As shown in Figure 6, this device 100 comprises attribute prototype library 110, configuration module 120 and execution module 130.
Attribute prototype library 110 comprises all properties value of simulation subsystem and emulator.Due to above-mentioned simulation subsystem and emulator corresponding be subsystem and the equipment of actual equipment, therefore, all properties value of simulation subsystem and emulator can characterize the subsystem of actual equipment and the attribute of equipment.In the time need to managing the interlocked relationship in analogue system, can directly therefrom call required simulation subsystem and the property value of emulator.
In user configured process, there is the interlocking condition if carry out the interlocking action between equipment, configuration module 120 need to first configure interlocking condition and interlocking trigger command.As shown in Figure 2, at first select the affiliated simulation subsystem of interlocking action in dependency prototype library 110, read the property value of this simulation subsystem.After simulation subsystem is selected to complete, then the emulator under in the simulation subsystem of dependency prototype library 110 under selecting, read the property value of this emulator.
If this emulator had been configured the interlocking condition, configuration module 120 is written into corresponding configuration information.And the configuration information of this emulator is presented to the user with the form of visualization interface, determined the processing of this configuration information is moved by the user, comprise configuring careful edit-modify or deletion.After above-mentioned configuration information is processed, the configuration information that configuration module 120 is preserved after processing.
If this equipment was not configured the interlocking condition, it is restarted configuration.At first, the property value of the affiliated emulator of configuration module 120 configurations, parameter value or the state value of emulator under comprising.Then, the interlocking condition between the configuration emulator.
When configuration interlocking condition, because each emulator has different emulator parameter and attribute, and then each emulator parameter and attribute have again different critical values, so the interlocking condition of each emulator is very complicated.Particularly, the interlocking condition of these emulators can be intersected parameter and the attribute that comprises a plurality of emulators.
For addressing the above problem, can adopt with single text character and combine, form the character string script of standard.Thereby user friendly operation and checking also can be good at parsing interlocking logic corresponding to above-mentioned interlocking condition.
According to the demand analysis that the parameter that may exist in analogue system is carried out, that the parametric classification of emulator is as follows:
The INTEGER:32bit signed integer;
DOUBLE: double-precision floating points;
STRING: character string;
BOOLEAN: Boolean type,
The parameter of above-mentioned emulator is preserved and is resolved with character string forms.
After having added above-mentioned interlocking condition, configuration module 120 need to arrange an interlocking trigger command that triggers this interlocking condition, and this order is to be added by user oneself.The interlocking trigger command comprises that parameter or attribute by equipment satisfy the order that certain condition triggers.This just need to reserve storage space at emulator, and the user is added to the interlocking trigger command in storage space.Wherein, interlocking condition adopts XML document to manage and preserve
Due to the interlocking behavior is that trigger command triggers startup.The type of trigger command comprises control command and interlocking trigger command.Wherein, control command is from the real system of described analogue system institute emulation.The interlocking trigger command is completed by configuration in above-mentioned steps.When the interlocking condition and after the configuration of interlocking trigger command is completed accordingly, further configuration is by the interlocking action of trigger command triggering emulator.
As shown in Figure 3, simulation subsystem and emulator under at first configuration module 120 needs to select.If this equipment was configured, directly being written into configuration information gets final product, and the configuration information of this emulator is presented to the user with the form of visualization interface, determined the processing of this configuration information is moved by the user, comprise configuring careful edit-modify or deletion.
If this emulator was not configured the interlocking action, the interlocking behavior of selecting the type of trigger command to trigger by the user, the corresponding behavior of other equipment that needs at last the above-mentioned trigger command of configuration to trigger simultaneously.
For the classification of convenient a large amount of configuration informations with search, adopt the form of form to manage.Think that the place that needs modification is arranged after configuration module 120 configuration is completed, the user can edit and delete these configuration informations, recursive these configurations is operated.
In the semiconductor manufacturing equipment of reality, a semiconductor manufacturing equipment subsystem has some equipment, and for functional simulation, the interlocked relationship between different equipment intersects will be very complicated.For fear of such complexity, take single subsystem as individual, preserve respectively its inside interlocked relationship of equipment separately, comprise interlocking condition, interlocking trigger command and corresponding interlocking action.The name of employing simulation subsystem is referred to as the file name of preservation, has namely facilitated checking of user, the calling logic when also having simplified operation.
Interlocked relationship management method and subsystem thereof for whole semiconductor manufacturing equipment functional simulation-oriented, when configuration, the configuration of interlocked relationship condition becomes the character string script of standard to realize with single group of text, and the form that is configured to chained list of interlocking trigger command and interlocking action embodies, information with configuration is kept at together with the form of xml file simultaneously, the XML file layout has concisely, the characteristics of easy care, helps to simplify exploitation, user friendlyly searches and reads.
By the configuration of the interlocked relationship between 120 pairs of emulators of above-mentioned configuration module, provide visual operation in the mode at interface to the user, the user can complete for the editor of complicated interlocked relationship between the semiconductor emulator, deletion management function; And can in time provide information indicating to the user in layoutprocedure, check for the user; Can and be written into the preservation that configuration information is complete of certain data layout after configuration is completed, facilitate user's repetitive operation.
After configuration was completed, the interlock information of execution module 130 modules of self-configuring in the future 120 sent to corresponding emulator.
In conjunction with shown in Figure 4, on the basis that configuration module 120 configuration is completed, can the very clear interlock information of knowing configuration, thus carry out corresponding interlocking action according to interlock information.
Carry out the interlocking action in simulation subsystem, according to the difference of trigger command, be divided into two kinds of situations:
(1) trigger command is the interlocking trigger command
The user monitors the emulator attribute that configured, and simultaneously this emulator property value is judged whether to satisfy the interlocking condition.When this device attribute value reaches between the interlock region of configuration, just satisfied the interlocking condition, trigger simultaneously the interlocking trigger command, passed to corresponding emulator with interlocking the mode of trigger command with a kind of message transmission, moved to satisfy user's configuration requirement to carry out corresponding interlocking.
As shown in Figure 5, at first obtain the interlocking condition.When the interlocking condition when being single, at first the interlocking condition script that forms after needing to configure splits into substring one by one, judgement relation character in the middle of extracting, then obtain parameter name and parameter value that above-mentioned judgement relation character is associated, namely judge the device parameter title of relation character front and the value corresponding to this parameter name of back.Because simulation subsystem at any time all at the parameter value that monitors this emulator, compares this parameter value that monitors and the property value that corresponding emulator configures.If do not satisfy the interlocking condition, again go to obtain coupling condition and judge, if satisfied the interlocking condition, finish judgement, carry out next step operation.
When being a plurality of, at first carry out the pattern of single interlocking condition when the interlocking condition, needing to obtain the multiple parameter values of judgement, then adopt the pattern match of regular expression to judge.Adopt the pattern match of regular expression to obtain and judge and, or, these 3 conditions of xor, from left to right as much as possible remove accurately to mate target string, search all single interlocking conditions that occur between " and; or; xor ", at last with these parameter value that need to judge this use and just use and, this use or just uses or, this just uses xor with xor's, and this parameter value of supervision and the property value of emulator configuration are compared.If do not satisfy condition, again go to obtain coupling condition and judge, if satisfied the interlocking Rule of judgment, finish judgement, carry out next step operation.
(2) trigger command is control command
The poll judgement is carried out in the order of this control command and configuration, if this control command is the order that is configured, given corresponding emulator with this command routing, carry out interlocking action corresponding to this emulator.
In simulation subsystem, the interlocking condition is intricate, in order to satisfy the condition of artificial actual system, has obtained accurately that the interlocked relationship condition is inadequate, and how to remove the behavior act of actuating equipment according to the interlocking condition that obtains is a very crucial problem.Therefore, the inner interlocked management devices of the embodiment of the present invention adopts message to pass to mode trigger command is passed to corresponding emulator.
For each emulator, there are one or more external communication interfaces and control system to communicate, these communication modes are all to have concrete communication protocol to support, in this system, use these ready-made communication protocols to transmit the order that triggers interlocked relationship.Wherein, control system integration is on the physical device of analogue system institute emulation.And the emulator storehouse is reserved with the interface that transmits above-mentioned trigger command.
When configuration interlocking Rule of judgment, add an interlocking trigger command that triggers interlocked relationship under each interlocking Rule of judgment.Mentioned order is a character in fact just, comes the behavior act of triggering system interlocking according to this command name.When emulator had satisfied the interlocking condition, subsystem can send this order in inside to emulator self with the communication protocol that current emulator uses according to the trigger command of configuration, and this trigger command has only comprised the title of order in fact.After emulator is subject to this order, just as receiving the control command that external control system sends, remove to carry out corresponding action behavior.
After emulator receives trigger command, carry out corresponding interlocking action.When operation, when equipment has satisfied that the interlocking condition has triggered the order of interlocking condition or when receiving control command, must go fast to search this order whether in the order chained list that configured, simultaneously, after order meets the demands, also need to go fast to search corresponding equipment and equipment behavior, so just need this subsystem must go accurately in real time to carry out these operations.
In layoutprocedure in front, all orders and behavior configuration information are all the orderly forms that has been stored as chained list, and in the process of operation, these chained lists can read in Installed System Memory, each configuration information is all ordered arrangement, and being equivalent to each configuration information is all that a sequence number is arranged.Because all orders and behavior adopt the form of character string to store, so the internal interlocking management method of the embodiment of the present invention adopts a kind of method of character string fast finding to realize.
In one embodiment of the invention, the employing of the method for above-mentioned character string fast finding is that ELF Hash Function realizes.
When emulator obtains a command name, can go to search in command list (CLIST) by this algorithm immediately, if being present in the command list (CLIST) of configuration, this order carries out immediately according to configuration information, the device name that obtains relating to and device action, at this moment need to remove fast finding equipment in the equipment chained list according to device name, and carry out next step behavior according to the device action that obtains.
Because the interlocked relationship of a simulation subsystem can be very complicated, a lot of interlocked relationship can occur at one time, and like this for this subsystem, therefore the realization that all interlocking behaviors must real-time parallel adopts the method for multithreading to realize.By adopting multithreading to accomplish that these all operations are all that real-time parallel occurs, the most natural situation near physical device has better simulated effect.
According to the inner interlocked management devices that is used for analogue system of the embodiment of the present invention, the interlocked relationship of system being integrated into unified description script manages, can flexible configuration, deletion, modification, preservation analogue system inner interlocked relation, and the function of complete Reality simulation equipment room interlocked relationship, have the characteristics of real-time, strong adaptability, closing to reality when device emulation moves.Because the needed hardware of different projects is different, even its using method of identical hardware is also different, internal interlocking management method of the present invention can flexible configuration satisfies the needs of project, have flexible configuration and the user friendly operation of extendible function and use, also be convenient to other manufacturers or self other product compatible.
Although illustrated and described embodiments of the invention, for the ordinary skill in the art, be appreciated that without departing from the principles and spirit of the present invention and can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is by claims and be equal to and limit.
Claims (10)
1. an internal interlocking management method that is used for analogue system, is characterized in that, comprises the steps:
Set up the attribute prototype library, described attribute prototype library comprises all properties value of simulation subsystem and emulator, and wherein, described analogue system comprises a plurality of simulation subsystems, and described simulation subsystem further comprises a plurality of emulators;
According to described attribute prototype library, configure the interlock information between described emulator, wherein, the interlock information between the described emulator of described configuration comprises: the property value of the described emulator of configuration, and the property value of described emulator comprises parameter value and the state value of described emulator; Configure interlocking condition and interlocking trigger command between described emulator; Configure the interlocking action between described emulator, described interlocking action is triggered by trigger command and starts, the type of described trigger command comprises control command and interlocking trigger command, described control command is from the real system of described analogue system institute emulation, and the interlocking action between wherein said configuration emulator also comprises: the attribute of selecting described simulation subsystem from described attribute prototype library; Further select the attribute of corresponding emulator in described simulation subsystem from described attribute prototype library; Judge whether described emulator has been configured the interlocking action; If described emulator does not configure, select the type of described trigger command, interlock accordingly action according to the type configuration of described trigger command; If emulator configures, be written into the interlocking action of configuration to described emulator; Preserve described interlocking action; With
Described interlock information is sent to corresponding emulator, described emulator is carried out corresponding interlocking action according to interlock information, wherein, described emulator is carried out corresponding interlocking action and is also comprised: when the type of described trigger command is control command, and when described control command is the order that has configured, described control command is sent to corresponding emulator, and described emulator is carried out the interlocking action corresponding with described control command; When the type of described trigger command is the interlocking trigger command, whether the property value that judges described emulator satisfies the interlocking condition, when satisfying the interlocking condition, trigger the interlocking trigger command corresponding with described interlocking condition, and described interlocking trigger command is sent to corresponding emulator, described emulator is carried out the interlocking action corresponding with described interlocking trigger command.
2. internal interlocking management method as claimed in claim 1, is characterized in that, the interlocking condition between described configuration emulator and interlocking trigger command also comprise:
Select the attribute of described simulation subsystem from described attribute prototype library;
Further select the attribute of corresponding emulator in described simulation subsystem from described attribute prototype library;
Judge whether described emulator has been configured the interlocking condition;
If described emulator does not configure, to described emulator configuration interlocking condition and interlocking trigger command corresponding to described interlocking condition; If described emulator configures, be written into interlocking condition and the interlocking trigger command of configuration to described emulator;
Preserve described interlocking condition and interlocking trigger command.
3. internal interlocking management method as claimed in claim 1 or 2, is characterized in that, described emulator comprises
Storage space is used for the sequencing according to the described interlocking condition of configuration, moves with the described interlocking condition of the XML stored in file format of chained list, the interlocking trigger command corresponding with described interlocking condition with interlocking corresponding to described interlocking trigger command.
4. internal interlocking management method as claimed in claim 1, is characterized in that, whether the described property value that judges emulator satisfies the interlocking condition also comprises:
According to the configuration interlock information, obtain the interlocking condition;
Described interlocking condition is split as single character string, extracts the judgement relation character;
Obtain the parameter name and the parameter value that are associated with described judgement relation character;
When described interlocking condition when being single, the property value of single parameter value and corresponding described emulator configuration is compared, when if described parameter value reaches between the interlock region of property value of described emulator configuration, the property value that judges described emulator satisfies the interlocking condition, otherwise again obtains the interlocking condition;
When described interlocking condition when being a plurality of, the pattern match of multiple parameter values being carried out regular expression is to obtain the single parameter value after pattern match, the property value of the single parameter value after described pattern match and corresponding described emulator configuration is compared, when if the single parameter value after described pattern match reaches between the interlock region of property value of described emulator configuration, the property value that judges described emulator satisfies the interlocking condition, otherwise again obtains the interlocking condition.
5. internal interlocking management method as claimed in claim 4, is characterized in that, when being a plurality of, described emulator adopts the corresponding a plurality of interlockings actions of multithreading executed in parallel when described interlocking condition.
6. an inner interlocked management devices that is used for analogue system, is characterized in that, comprising:
The attribute prototype library, described attribute prototype library comprises all properties value of simulation subsystem and emulator, and wherein, described analogue system comprises a plurality of simulation subsystems, and described simulation subsystem further comprises a plurality of emulators;
Configuration module, be used for according to the interlock information between the described emulator of described attribute prototype library configuration, wherein, described interlock information comprises the property value, the interlocking condition between described emulator of described emulator and the interlocking action between interlocking trigger command and described emulator, wherein, the property value of described emulator comprises parameter value and the state value of described emulator, described interlocking action is triggered by trigger command and starts, and the type of described trigger command comprises control command and interlocking trigger command; With
Execution module, be used for to send to corresponding emulator from the interlock information of described configuration module, wherein, described execution module is carried out corresponding interlocking action and is comprised: when the type of described trigger command is control command, and when described control command was the order that has configured, described execution module sent to corresponding emulator with described control command; When the type of described trigger command is the interlocking trigger command, described execution module judges whether the property value of described emulator satisfies the interlocking condition, when satisfying the interlocking condition, trigger the interlocking trigger command corresponding with described interlocking condition, and described interlocking trigger command is sent to corresponding emulator.
7. inner interlocked management devices as claimed in claim 6, is characterized in that, described configuration module configuration interlocking condition and interlocking trigger command comprise:
Select the attribute of described simulation subsystem from described attribute prototype library;
Further select the attribute of corresponding emulator in described simulation subsystem from described attribute prototype library;
Judge whether described emulator has been configured the interlocking condition;
If described emulator does not configure, to described emulator configuration interlocking condition and interlocking trigger command corresponding to described interlocking condition; If described emulator configures, be written into interlocking condition and the interlocking trigger command of configuration to described emulator;
Preserve described interlocking condition and interlocking trigger command.
8. inner interlocked management devices as claimed in claim 6, is characterized in that, described configuration module configuration interlocking action comprises:
Select the attribute of described simulation subsystem from described attribute prototype library;
Further select the attribute of corresponding emulator in described simulation subsystem from described attribute prototype library;
Judge whether described emulator has been configured the interlocking action;
If described emulator does not configure, select the type of described trigger command, interlock accordingly action according to the type configuration of described trigger command; If emulator configures, be written into the interlocking action of configuration to described emulator;
Preserve described interlocking action.
9. inner interlocked management devices as claimed in claim 6, is characterized in that, described configuration module judges whether the property value of emulator satisfies the interlocking condition and comprise:
According to the configuration interlock information, obtain the interlocking condition;
Described interlocking condition is split as single character string, extracts the judgement relation character;
Obtain the parameter name and the parameter value that are associated with described judgement relation character;
When described interlocking condition when being single, the property value of single parameter value and corresponding described emulator configuration is compared, when if described parameter value reaches between the interlock region of property value of described emulator configuration, the property value that judges described emulator satisfies the interlocking condition, otherwise again obtains the interlocking condition;
When described interlocking condition when being a plurality of, the pattern match of multiple parameter values being carried out regular expression is to obtain the single parameter value after pattern match, the property value of the single parameter value after described pattern match and corresponding described emulator configuration is compared, when if the single parameter value after described pattern match reaches between the interlock region of property value of described emulator configuration, the property value that judges described emulator satisfies the interlocking condition, otherwise again obtains the interlocking condition.
10. inner interlocked management devices as claimed in claim 9, is characterized in that, described emulator is carried out corresponding interlocking action according to control command or interlocking trigger command.
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| CN1845081A (en) * | 2006-02-24 | 2006-10-11 | 北京博联伟图科技有限公司 | Process monitoring method for embedded application software testing |
| CN101398669A (en) * | 2007-09-29 | 2009-04-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Mutual locking and alarming processing method and system |
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| CN101398669A (en) * | 2007-09-29 | 2009-04-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Mutual locking and alarming processing method and system |
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