WO2012037796A1

WO2012037796A1 - Simulation platform for integrated circuit manufacturing equipment

Info

Publication number: WO2012037796A1
Application number: PCT/CN2011/071276
Authority: WO
Inventors: 徐华; 王巍; 高士云; 李博; 李垒; 赖太阳; 邹龙庆
Original assignee: 清华大学
Priority date: 2010-09-21
Filing date: 2011-02-24
Publication date: 2012-03-29

Abstract

A simulation platform for an integrated circuit manufacturing equipment is provided, which includes: multiple instruments to be simulated, multiple board cards and a simulation computer. The simulation computer communicates with the multiple instruments to be simulated via the multiple board cards, so as to simulate the multiple instruments to be simulated. The simulation computer includes: a protocol layer processor for establishing multiple communication protocols in the simulation platform, generating a protocol layer configuration file corresponding to the multiple communication protocols, and communicating with the multiple instruments to be simulated via the multiple board cards according to the multiple communication protocols; a device layer processor for establishing multiple equipments in the simulation platform, generating a device layer configuration file corresponding to the multiple equipments, loading the protocol layer configuration file corresponding to the multiple equipments according to the established multiple equipments, managing the multiple equipments, and simulating the device layer; a subsystem layer processor for establishing multiple subsystems in the simulation platform, generating a subsystem layer configuration file corresponding to the multiple subsystems, managing the multiple subsystems and the equipments in each subsystem, and simulating the subsystem layer; and a system layer processor for establishing multiple systems in the simulation platform, generating a system layer configuration file corresponding to the multiple systems, according to the established multiple systems, loading the subsystem layer configuration file, which is corresponding to the subsystem in one or more systems, to one or more systems, managing the multiple systems and the subsystems in each system, and simulating the system layer.

Description

Simulation platform for integrated circuit manufacturing equipment

The invention belongs to the field of computer application technology and integrated circuit equipment, and particularly relates to a simulation platform for an integrated circuit manufacturing device for simulating an instrument in integrated circuit manufacturing. Background technique

With the increasing integration of integrated circuit chips and the continuous improvement of chip functions, people are increasingly demanding processes. The two main issues facing the research and development of integrated circuit manufacturing equipment include:

1) In the development of integrated circuit equipment, not only the development of the hardware part, but also the development of the control software system for the equipment. At present, most of the device control software needs to be verified in the simulation environment when testing. In many cases, the development tasks are very diverse. It is not only time-consuming and reusable to develop a software testing platform for a single project, so there is a problem that the software testing efficiency is low and the positioning system positioning accuracy is not high.

2) After the hardware platform is built, it is limited to hardware conditions, so it is necessary to run hardware tests. Due to the limitations of the test conditions, it is not possible to predict the possible failures in advance. Therefore, there is a problem that the development cost of the integrated circuit manufacturing equipment is high and the development cycle is long.

In the research, development and testing of integrated circuit manufacturing equipment, simulation plays an important role in the following aspects:

In the first aspect, due to the complexity of the production process control itself, new requirements are constantly put forward for theoretical research, and theoretical research needs to rely on simulation tools.

In the second aspect, in the face of various system control software packages, an off-the-shelf simulation platform is needed to fully reflect the effect of the algorithm in the actual production operation, and the guiding algorithm improvement strategy and parameter online adjustment method are obtained.

The use of the simulation platform can accurately test the equipment control system software, which can reduce the failure of the control system software execution and the integrated circuit manufacturing process, can solve the process stability of the integrated circuit process equipment, process reliability, reduce equipment maintenance time, and maximize the degree Improve equipment utilization.

The demand for simulation systems in the integrated circuit industry is very large, and the main needs of the simulation system in the industry are as follows.

1) Use of the simulation platform - For new product development, the simulation platform is a test that is critical to the software on the hardware.

2) Expectations - The simulation platform is not intended to completely replace the actual processing equipment. The purpose is to test the control system software and reduce the debugging time on the actual equipment.

3) Simulation platform interface - The simulation system supplier should provide the solution for different control system interfaces, mainly including two kinds of interfaces: communication level interface and physical I / O level interface.

4) System Configuration - IC equipment suppliers need a simulation platform that can easily be used for products and not The same configuration and each customization provided by the product are configured to meet this requirement on the communication interface.

5) Support for test automation - Since the simulation system responds to the control system, it will not be automated. The simulation system should be designed to fully support automated testing.

6) Ease of use - easy to use.

However, the existing simulation system of integrated circuit manufacturing equipment has the following disadvantages: The simulation system and the key technologies are designed by each company specifically for a certain manufacturing equipment, and the simulation system cannot be configured according to different manufacturing equipment requirements, thereby failing to Meet the needs of different hardware for different projects, so it is not universal. Summary of the invention

SUMMARY OF THE INVENTION An object of the present invention is to solve at least one of the above technical drawbacks and to provide a simulation platform for an integrated circuit manufacturing apparatus.

An embodiment of the present invention provides a simulation platform for an integrated circuit manufacturing device, including: a plurality of instruments to be simulated, a plurality of boards, each of the plurality of boards including a plurality of channels, wherein Each of the plurality of channels is connected to a pin of one of the plurality of instruments to be simulated; and an emulation computer, wherein the emulation computer communicates with the plurality of instruments to be simulated through the plurality of boards, Simulating a plurality of devices to be simulated, the simulation computer comprising: a protocol layer processor, wherein the protocol layer processor is configured to establish a plurality of communication protocols in the simulation platform, and generate corresponding to the plurality of communication protocols a protocol layer configuration file, and communicating with the plurality of instruments to be simulated by the plurality of boards according to the plurality of communication protocols; a device layer processor, wherein the device layer processor is used to establish the simulation platform a plurality of devices, and generating a device layer configuration file corresponding to the plurality of devices, and loading the plurality of devices according to the established plurality of devices a protocol layer configuration file, and managing the plurality of devices and performing device layer simulation; a subsystem layer processor, wherein the subsystem layer processor is configured to establish multiple subsystems in the simulation platform, and generate and a subsystem layer configuration file corresponding to the plurality of subsystems, wherein each of the subsystems includes one or more devices established in the device layer processor, and loading the plurality of subsystems according to the established a device layer configuration file corresponding to the device in the plurality of subsystems, and managing the plurality of subsystems and devices in each subsystem and performing subsystem layer simulation; and a system layer processor, wherein the system layer processor is used to establish Computing a plurality of systems in the platform, and generating system layer configuration files corresponding to the plurality of systems, wherein each of the systems includes one or more subsystems established in the subsystem layer processor And loading the subsystem layer configuration file corresponding to the subsystem in the one or more systems according to the one or more systems established To the plurality of systems, and carry out the management of the simulation system, and each of the plurality of sub-systems and the system layer.

In an embodiment of the present invention, the protocol layer configuration file, the device layer configuration file, the subsystem layer configuration file, and the system layer configuration file are saved in an XML file format.

In an embodiment of the present invention, the protocol layer processor includes: a protocol configuration module, where the protocol configuration module is configured to establish the multiple communication protocols in the simulation platform, and generate and a protocol layer configuration file corresponding to the communication protocol; and a protocol operation module, wherein the protocol operation module is configured to configure the module The configured communication protocol performs a connection test for verification.

In an embodiment of the present invention, the protocol type includes an Ethernet protocol, a serial port protocol, an analog 10 protocol, a digital 10 protocol, and a DeviceNet protocol.

In an embodiment of the present invention, when the protocol type of the communication protocol is an Ethernet protocol or a serial port protocol, the protocol layer configuration file further includes a protocol format, where the protocol format includes a command name and a command carried The attribute parameter of the attribute.

In an embodiment of the present invention, the protocol layer processor further includes: a protocol encapsulation module, where the protocol encapsulation module further includes a data unpacking interface and a data packet when the protocol type is an Ethernet protocol or a serial port protocol An interface, the data unpacking interface, configured to parse data sent by the multiple boards; and the data packet interface is configured to perform a packet operation on data sent to the multiple boards.

In an embodiment of the present invention, the device layer processor includes: a device configuration module, where the device configuration module is configured to establish multiple devices in the simulation platform, and generate devices corresponding to the multiple devices a layer configuration file to configure the plurality of devices, and the protocol layer configuration file corresponding to the plurality of devices is loaded to the plurality of devices to enable each device to perform with the device to be simulated by using the communication protocol And a device running module, where the device running module is configured to verify the configured device, and simulate the multiple devices after passing the verification.

In an embodiment of the present invention, the device layer configuration file includes: a device name and a type; a device attribute, where the device attribute includes a device attribute name, a device attribute type, a device attribute maximum value, and a device The minimum value of the attribute and the default value of the attribute of the device; the device control command, the device control command includes the name of the device control command, the delivery direction of the device control command, and the content of the device control command; the device action, the device action includes the device An action name and a device control command coupled with the action name, a number of steps of the action, and a device action type corresponding to each step; and a coupling relationship inside the device, the coupling relationship inside the device includes a coupling condition and the The coupling relationship command corresponding to the coupling condition.

In an embodiment of the present invention, the device action type includes a command behavior, an action condition, a delay wait, a change rule, and return information.

In an embodiment of the present invention, the device configuration module is further configured to add one or more devices to the multiple devices, or delete one or more devices from the multiple devices.

In an embodiment of the present invention, the device running module includes: a first verification unit, configured to perform verification on the device configured by the device configuration module; and a first port initialization unit, configured to generate and pass verification Device of the device controls the corresponding physical port, and checks whether the physical port conflicts. When the physical port is checked for conflict, the physical port is initialized; the first command management unit is configured to send or receive a device control command; a first simulation unit, configured to execute a simulation action corresponding to the device control command; and a first error management unit, configured to record error information in a device layer simulation process in a log form.

In an embodiment of the present invention, the subsystem layer processor includes: a subsystem configuration module, where the subsystem configuration module is configured to establish multiple subsystems in the simulation platform, and generate and the multiple subsystems Corresponding child a system layer configuration file to configure the plurality of subsystems, wherein each of the subsystems includes a plurality of devices, and the device layer configuration files corresponding to the plurality of subsystems are loaded to the plurality of subsystems for configuration The plurality of devices in each subsystem; and a subsystem running module, the subsystem running module is configured to verify the configured subsystem, and simulate the plurality of subsystems after passing the verification.

In an embodiment of the present invention, the subsystem layer configuration file includes: a subsystem attribute, the subsystem attribute includes a property name of the subsystem, a device attribute inside the subsystem, and an internal device of the subsystem The attributes include the name of the device, the type of the device, and the physical port; the coupling condition between the devices, the coupling condition of the device includes the name of the coupled device, the coupling condition, and the coupling trigger command; the coupling relationship between the devices, and the coupling relationship between the devices includes the device The coupling action between the two, the name of the coupling device, the number of steps of the coupling action, and the type of coupling action corresponding to each step.

In an embodiment of the invention, the type of coupling action includes device behavior, coupled action conditions, and delay of the coupling action.

In an embodiment of the present invention, the subsystem configuration module is further configured to add one or more subsystems to the multiple subsystems, or delete one or more subsystems from the multiple subsystems; Adding one or more of the devices to each subsystem or deleting one or more of the devices from the various subsystems.

In an embodiment of the present invention, the subsystem running module includes: a second verification unit, configured to verify the subsystem configured by the subsystem configuration module; and a second port initialization unit, configured to generate a physical port corresponding to a device control command of the device inside the verified subsystem, and checking whether the physical port conflicts, when checking that the physical port has no conflict, running the device inside the subsystem and the physical The port is initialized; the second command management unit is configured to receive or send a device control command of the device inside the subsystem; and the second simulation unit is configured to execute a simulation corresponding to the device control command of the device inside the subsystem Acting, and triggering the coupling condition, performing a corresponding coupling action according to the coupling condition; and a second error management unit, configured to record error information in the subsystem layer simulation process in the form of a log.

In an embodiment of the present invention, the system layer processor includes: a system configuration module, where the system configuration module is configured to establish multiple systems in the simulation platform, and generate a system corresponding to the multiple systems a layer configuration file to configure the plurality of systems, wherein each of the systems includes a plurality of subsystems, and the subsystem layer configuration files corresponding to the plurality of systems are loaded to the plurality of systems to configure each The plurality of subsystems in the system; and a system operation module, wherein the system operation module is configured to verify the configured system, and after the verification, perform simulation on the multiple systems.

In an embodiment of the present invention, the system layer configuration file includes: a system attribute, where the system attribute includes a system name, system description information, a subsystem attribute inside the system, and a subsystem attribute of the system includes: The name of the subsystem and the equipment within each subsystem; and the coupling relationship between the subsystems.

In an embodiment of the present invention, the system configuration module is further configured to add one or more systems to the multiple systems, or delete one or more systems from the multiple systems; In each of the systems One or more of the subsystems are added, or one or more of the subsystems are deleted from the various systems. In an embodiment of the present invention, the system operation module includes: a third verification unit, configured to verify the system configured by the system configuration module; and a third port initialization unit, configured to generate and pass verification The physical port corresponding to the device control command of the device in the subsystem inside the system, checking whether the physical port conflicts, and when checking that the physical port has no conflict, running the subsystem inside the system and the subsystem The internal device, and the physical port is initialized; a third command management unit, configured to receive or send a device control command of a device in a subsystem inside the system; and a third simulation unit, configured to execute The device controls a simulation action corresponding to the command, and triggers a coupling condition between the devices, and performs a corresponding coupling action according to the coupling condition; and a third error management unit is configured to perform a system layer simulation process in the form of a log Error message.

The simulation platform for the integrated circuit manufacturing device provided by the embodiment of the present invention is a general software simulation platform implemented by Visual Studio 2008 .NET based on the Windows XP operating system. The simulation platform includes a protocol layer processor, a device layer processor, a subsystem layer processor, and a system layer processor. The protocol layer processor may encapsulate the driver of the communication protocol required by the simulation platform, and provide a protocol layer configuration file with the protocol layer configuration content to the device layer, so that the device layer passes the command of the subsystem layer. The communication protocol stipulates that the transceiver mode performs the simulation action, thereby implementing communication with the instrument to be simulated.

The device layer processor can complete the configuration of the device, including device attributes, control commands, actions, and internal coupling, and provide the written device layer configuration content device layer configuration file to the subsystem layer for subsystem layer query. And calling, in addition to the management of the device, including adding, deleting, saving and editing devices, and then communicating with the instrument to be simulated through the communication protocol configured by the protocol layer, and performing device layer simulation.

The subsystem layer processor can complete the configuration and management of the subsystem, including the properties of the subsystem and the devices inside the subsystem, adding or deleting devices in the subsystem by querying and invoking the device layer configuration file, and allowing the user to combine the devices into Complete subsystems, and management of the coupling relationship between each device within each subsystem, provide subsystem layer configuration files written with subsystem layer configuration content to the system layer for system layer query and call, in the above configuration After completion, the simulation of the subsystem layer is performed.

The system layer processor can complete the configuration and management of the system, including the attributes of the system and the subsystems inside the system. By adding and deleting subsystems by querying and calling the subsystem layer configuration file, and supporting the user to combine the subsystems into complete The system, as well as the management of the coupling between the various subsystems within each system, to perform system layer simulation.

The simulation platform for the integrated circuit manufacturing device provided by the embodiment of the present invention can flexibly configure the protocol layer, the device layer, the subsystem layer and the system layer of the simulation platform according to different hardware required in different projects and different usage methods of the same hardware. And the simulation platform is accurate, real-time and scalable.

The additional aspects and advantages of the invention will be set forth in part in the description which follows. DRAWINGS The above and/or additional aspects and advantages of the present invention will become apparent and readily understood from

1 is a schematic structural diagram of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention; FIG. 2 is a schematic overall structural diagram of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention; The main interface of the simulation platform for integrated circuit manufacturing equipment;

4 is a configuration management main interface of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention; FIG. 5 is a main operation and operation interface of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention; Schematic diagram of a protocol layer processor of an embodiment of the invention;

FIG. 7 is a schematic overall structural diagram of a protocol layer according to an embodiment of the present invention; FIG.

8 is a configuration interface of a Dev i ceNe t protocol according to an embodiment of the present invention;

FIG. 9 is a configuration interface of an Ethernet protocol according to an embodiment of the present invention;

10 is a configuration interface of a serial port protocol according to an embodiment of the present invention;

11 is a configuration interface of an analog I/O protocol according to an embodiment of the present invention;

12 is a configuration interface of a digital I/O protocol according to an embodiment of the present invention;

FIG. 13 is a flowchart of data unpacking according to an embodiment of the present invention;

14 is a flowchart of a data packet according to an embodiment of the present invention;

15 is a connection test interface of a protocol running module verification configuration protocol according to an embodiment of the present invention;

16 is a communication flowchart of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention; FIG. 17 is a schematic structural diagram of a device layer processor according to an embodiment of the present invention;

FIG. 18 is a schematic overall structural diagram of a device layer according to an embodiment of the present invention; FIG.

FIG. 19 is a schematic structural diagram of a device layer according to an embodiment of the present invention; FIG.

20 is a flowchart of configuration management of a device configuration module according to an embodiment of the present invention;

21 is a hierarchical interface of a Dev i ce according to an embodiment of the present invention;

FIG. 22 is an interface for creating a device name and a device type according to an embodiment of the present invention;

23 is an interface for creating and editing device attributes according to an embodiment of the present invention;

24 is a configuration interface of a control command of a device according to an embodiment of the present invention;

25 is a configuration interface of an action name of a device according to an embodiment of the present invention;

26 is a configuration interface of action content of a device according to an embodiment of the present invention;

27 is a configuration interface of an action condition according to an embodiment of the present invention;

28 is a configuration interface of a waiting time according to an embodiment of the present invention;

29 is a configuration interface of a variation rule according to an embodiment of the present invention;

Figure 30 (a) shows a configuration interface in which the variation rule is a user-defined configuration according to an embodiment of the present invention;

FIG. 30(b) is a configuration interface of a PID change rule according to an embodiment of the present invention;

Figure 30 (c) shows a configuration interface of a change rule of P I according to an embodiment of the present invention;

FIG. 30( d ) is a configuration interface whose change rule is a direct assignment according to an embodiment of the present invention; FIG. 31 is a configuration interface of returning information according to an embodiment of the present invention;

32 is a configuration interface of a coupling relationship inside a device according to an embodiment of the present invention;

33 is a configuration interface of coupling conditions inside a device according to an embodiment of the present invention;

FIG. 34 is a schematic structural diagram of a device running module according to an embodiment of the present invention;

FIG. 35 is a configuration interface of a physical interface according to an embodiment of the present invention;

36 is a flowchart of a device operation module according to an embodiment of the present invention;

37 is an operation management interface of a device running module according to an embodiment of the present invention;

38 is a schematic structural diagram of a subsystem layer processor according to an embodiment of the present invention;

39 is a general architectural diagram of a subsystem layer according to an embodiment of the present invention;

40 is a class diagram of a subsystem layer according to an embodiment of the present invention;

41 is a flowchart of configuration management of a subsystem configuration module according to an embodiment of the present invention;

42 is a hierarchical management interface of a subsystem according to an embodiment of the present invention;

43 is a creation interface of a subsystem according to an embodiment of the present invention;

44 is an interface for adding a device to a subsystem according to an embodiment of the present invention;

45 is a configuration interface of coupling conditions between devices according to an embodiment of the present invention;

FIG. 46 is a configuration diagram of a coupling relationship name between devices according to an embodiment of the present invention;

FIG. 47 is a configuration interface of a coupling action between devices according to an embodiment of the present invention; FIG.

FIG. 48 is a configuration interface of delay of a coupling action according to an embodiment of the present invention; FIG.

49 is a configuration interface of device behavior of a coupling action according to an embodiment of the present invention;

FIG. 50 is a configuration interface of a coupling action condition according to an embodiment of the present invention; FIG.

51 is a schematic structural diagram of a subsystem operation module according to an embodiment of the present invention;

52 is a flowchart of a subsystem running module according to an embodiment of the present invention;

53 is an operation management interface of a subsystem running module according to an embodiment of the present invention;

FIG. 54 is a schematic structural diagram of a system layer processor according to an embodiment of the present invention;

Figure 55 is a diagram showing the overall architecture of a system layer according to an embodiment of the present invention;

Figure 56 is a diagram showing the class structure of a system layer according to an embodiment of the present invention;

57 is a flowchart of configuration management of a system configuration module according to an embodiment of the present invention;

FIG. 58 is a system hierarchical management interface according to an embodiment of the present invention;

FIG. 59 is a system creation interface according to an embodiment of the present invention;

60 is an interface for adding a subsystem to a system according to an embodiment of the present invention;

61 is a schematic structural diagram of a system operation module according to an embodiment of the present invention;

62 is a flowchart of operation of a system operation module according to an embodiment of the present invention;

FIG. 63 is an operation management interface of a system operation module according to an embodiment of the present invention;

FIG. 64 is a flowchart of operation of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention; detailed description

The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the accompanying drawings, wherein the embodiments of the embodiments are described by way of example only, and are not to be construed as limiting. .

FIG. 1 is a schematic structural diagram of a simulation platform for an integrated circuit manufacturing apparatus according to an embodiment of the present invention. The simulation platform for integrated circuit manufacturing equipment includes a plurality of instruments to be simulated, a plurality of boards, and a simulation computer. Wherein each board comprises a plurality of channels, each channel being connected to a pin of one of the plurality of simulation instruments. The simulation computer communicates with multiple instruments to be simulated through multiple boards to simulate multiple instruments to be simulated. The emulation computer includes a protocol layer processor 1000, a device layer processor 2000, a subsystem layer processor 3000, and a system layer processor 4000. The protocol layer processor 1000 is configured to establish multiple communication protocols in the simulation platform, and generate a protocol layer configuration file corresponding to multiple communication protocols, and multiple communication protocols completed according to the foregoing configuration pass multiple boards and multiple The simulation device performs communication; the device layer processor 2000 is configured to establish a plurality of devices in the simulation platform, and generate a device layer configuration file corresponding to the plurality of devices, and load the protocol layer processor 1000 according to the established multiple devices. A protocol layer configuration file corresponding to multiple devices, and each device is managed and simulated at the device layer. The device layer configuration file includes the device name and type, device attributes, device control commands, device actions, and internal coupling relationships; The subsystem layer processor 3000 is configured to establish a plurality of subsystems in the simulation platform, and generate subsystem layer configuration files corresponding to the plurality of subsystems, wherein each subsystem includes one or more established in the device layer processor 2000. Device, and loaded from device layer processor 20 according to multiple subsystems established 00 device layer configuration file corresponding to devices in multiple subsystems, and management and subsystem layer simulation of each subsystem and devices in each subsystem, wherein the subsystem layer configuration file includes subsystem attributes and subsystem internals Device attributes, coupling conditions between devices, and coupling relationships between devices; system layer processor 4000 is used to establish multiple systems in the simulation platform, and generate system layer configuration files corresponding to multiple systems, where each system Include one or more subsystems established in the subsystem layer processor 3000, and load subsystem subsystem profiles corresponding to subsystems of the plurality of systems from the subsystem layer processor 3000 according to the established multiple systems, The management and system layer simulations are performed for each system and subsystems in each system. The system layer configuration files include system attributes, subsystem attributes within the system, and coupling relationships between subsystems. The protocol layer configuration file, the device layer configuration file, the subsystem layer configuration file, and the system layer configuration file are all saved in the XML (Extens ens i b l e Markup Language) file format.

As shown in FIG. 2, the system layer, the subsystem layer, the device layer, and the protocol layer are configured and managed by using a visual user operation interface, and the layer-by-layer query and call configuration files are performed through the system layer, the subsystem layer, the device layer, and the protocol layer. And transmitting and receiving control commands to realize communication between the simulation platform and the instrument to be simulated, and then perform corresponding simulation actions. Specifically, as shown in FIG. 3, the user creates a new project on the main interface of the simulation platform of the embodiment of the present invention, and then creates components required for each layer, including protocols, devices, subsystems, and systems, and components. Configuration properties and commands corresponding to the interface. Figure 4 shows the main interface of the configuration management (Conf ig ) of the simulation platform. The user can configure the properties of each component by obtaining the default values (preset values) of the corresponding components of each layer, and then displaying them on the operation interface. After modifying the properties on the operation interface, the property change values of the corresponding components are updated into the XML file and saved. After the configuration of the simulation platform is completed, verify the correctness of the configuration, that is, verify whether the configured components can communicate with the instrument to be simulated, and perform simulation running after the verification configuration is correct. Figure 5 shows the main interface of the operation and management of the simulation platform.

The protocol layer processor 1000, the device layer processor 2000, the subsystem layer processor 3000, and the system layer processor 4000 are described in detail below in conjunction with specific embodiments.

As shown in FIG. 6, the protocol layer processor 1000 includes a protocol configuration module 1100 and a protocol execution module 1200. The protocol configuration module 1100 is configured to establish multiple communication protocols in the simulation platform, and generate a protocol layer configuration file corresponding to the multiple communication protocols, so that the simulation platform can pass the board and the device to be simulated according to the configured communication protocol. Communicate. The protocol running module 1200 is configured to perform a connection test on the communication protocol configured by the protocol configuration module 1100, thereby verifying whether communication with the instrument to be simulated can be achieved through the communication protocol. When the communication with the instrument to be simulated can be realized by verification, that is, according to the communication protocol, the protocol to be simulated can be communicated with the protocol to be simulated.

Figure 7 shows the overall architecture of the protocol layer. The protocol layer configuration module 1100 can configure and manage protocols for the protocol layer, including creating one or more protocols, saving one or more protocols, or deleting one or more protocols from multiple protocols. The protocol layer configuration module 1100 configures a communication protocol to the simulation platform by generating a protocol layer configuration file. The protocol layer configuration file includes a protocol type and a protocol format of one or more communication protocols. For communication types in the field of integrated circuit manufacturing equipment, protocol types may include Ethernet protocols, serial protocols, analog 10 protocols, digital 10 protocols, and DeviceNet protocols. Since the simulation platform provides a unified calling interface to the outside, a communication base class derives four communication subclasses, and the base class provides a unified interface, and the subclass provides a specific communication mode implementation method. As shown in Figure 7, due to the similarity between the analog 10 protocol and the digital 10 protocol, the direct I/O (Direct-IO) class is responsible for the management of the above two communication interfaces; the serial port Serialport implements the communication management of the serial protocol. Ethernet class realizes communication management of Ethernet protocol, DeviceNet implements communication management of DeviceNet protocol, and management of the above four communication interface classes is realized by communication management class. The call to the communication interface relative to the upper layer of the protocol layer (such as the device layer, subsystem layer or system layer) only needs to apply to the communication interface management class.

The five communication protocols of the embodiments of the present invention are described below with reference to Figs. 8 through 12.

1) DeviceNet protocol

As shown in FIG. 8, the protocol configuration module 1100 can configure all communication parameters except the physical port to the DeviceNet interface. In order to avoid the loss of received data, the DeviceNet class will open a thread to process the received data after receiving the data, and the receiving data thread will continue to listen to the port, ready to receive new data. Since a device monopolizes a physical port, the thread is no longer opened during the process of sending data, and the transmission process is controlled within a single device, and no two data are simultaneously transmitted. Among them, the DeviceNet protocol uses a unified protocol format, so no custom protocol format is required.

2) Ethernet protocol

As shown in FIG. 9, the protocol configuration module 1100 can configure a user-defined command format for the Ethernet interface. In order to avoid the loss of received data, the Ethernet class (the Ethernet class) will open a thread after receiving the data. The received data is processed, and the receiving data thread continues to listen to the port, ready to receive new data. Since a device monopolizes a port, the process of sending data no longer turns on the thread, and the single device internally controls the sending process so that no two data are simultaneously transmitted.

3) Serial protocol

As shown in Figure 10, the protocol configuration module 11 00 can configure the baud rate, stop bit, handshake signal, data bit, and check mode of the serial port. In order to avoid the loss of received data, the serial port class (Ser i a l por t ) will open a thread to process the received data after receiving the data, and the receiving data thread will continue to listen to the serial port, ready to receive new data. Since a device monopolizes a port, the process of sending data no longer turns on the thread, and the single device internally controls the sending process, so that no two data are simultaneously transmitted.

4) Simulation 10 protocol

The simulation platform of the embodiment of the present invention uses the analog 10 board, and can set the level range of each channel of the analog 10 and the corresponding relationship between the analog 10 channel and the actual physical channel. As shown in Figure 11, after receiving the data, if this data changes compared with the previous data, it means that new data comes, and the new layer needs to be transmitted to the upper layer (such as device layer, subsystem layer or system layer). The data. Since the data received by the analog 10-port is analog, it is judged whether the two data are consistent according to the error of the two data before and after. If the error of the two data before and after exceeds a certain range, it means that new data comes. Among them, the analog 10 protocol uses a unified protocol format, so there is no need to customize the protocol format.

5) Digital 10 Protocol

The simulation platform of the embodiment of the present invention uses a digital 10 card to set the high and low range of the digital 10 and the corresponding relationship between the 10 channels and the actual physical channel. As shown in Figure 12, each thread of the number 10 is responsible for one board channel. When the data is received, if this data changes compared with the previous data, it means that new data comes, and the upper layer needs to be The device layer, subsystem layer, or system layer) transmits this new data. Among them, the digital 10 protocol uses a unified protocol format, so no custom protocol format is required.

Since the devices in the field of integrated circuit manufacturing equipment use different communication protocols according to different manufacturers, the communication protocols used in the same instant are the same, but the protocol formats of each device are different from each other, so the configuration process of the Ethernet protocol and the serial port protocol is performed. In the middle, you need to customize the protocol format.

The role of each field in the communication protocol is also different. In the simulation platform of the embodiment of the present invention, the protocol format of the communication protocol can be divided into three types of fields according to its function:

A. Command Name ( CommandName )

The command name is mainly used to identify a command, which is equivalent to the name of the command. By distinguishing the command field, different commands are distinguished. The command is a command for interaction between the instrument to be simulated and the simulation computer.

B. Attribute parameters ( Parame t erName )

Attribute parameters are mainly used to represent the value or name of an attribute. When the instrument to be simulated sends a parameter query command to the simulation computer, it is necessary to use the field of the type to indicate the name of the attribute parameter to be queried. When the simulation computer returns a value to a parameter of the instrument to be simulated or the instrument to be simulated sets an attribute parameter to the simulation computer When the value of the number is used, the attribute parameter is required to represent the specific value of the parameter.

C. Other ( Other )

In addition to the above two types of field functions, there are no explicit action fields, or fields for parity check, or fields filled with only blank data. Fields of the above type are collectively referred to as other types of fields.

When the protocol type is an Ethernet protocol or a serial port protocol, the protocol layer processor 1000 further includes a protocol encapsulation module 1300. The protocol encapsulation module 1300 includes a data unpacking interface and a data encapsulation interface. In order to meet the requirements of the custom protocol format, the data unpacking interface and the data packet interface are used to perform unpacking operations and packet operations on the data transmitted between the simulation computer and the instrument to be simulated.

As shown in FIG. 13, the process of performing data unpacking through the data unpacking interface includes the following steps:

The S1301 emulation side (ie the emulation computer) receives the data, ie the data sent from the board to the emulation computer.

S1302 converts a string into a character array;

S1303 reads protocol field configuration information;

S1304 determines whether the field is a command name;

S1305, when the judgment field is a command name, save the command name;

S1306, when the judgment field is not the command name, continue to determine whether the field is parameter information;

S1307, when the judgment field is parameter information, save the parameter information;

S1308 ignores no processing when the judgment field is other information;

S1309 determines whether there is still a protocol field not processed, if yes, execute S1303; if not, execute S1310;

The S1310 unpacking process ends.

The data unpacking interface parses out the command name of the data and the parameters and control information of the command. Among them, since the Boolean communication protocol and the numeric communication protocol format have only one field, one byte, the parameters carried by the name and the command all refer to one byte of data.

As shown in FIG. 14, the process of performing data encapsulation through the data encapsulation interface includes the following steps:

S1401: The emulation computer sends data, that is, sends data from the emulation computer to the board.

S1402: Read the transmission protocol field configuration information;

S1403: determining whether the field is a command name;

S1404: If the judgment field is a command name, send a command name to the sending list;

S1405: When the judgment field is not the command name, continue to determine whether the field is parameter information;

S1406: When the judgment field is the parameter information, query the device parameter value, and add the parameter value to the sending linked list; S1407: When the determining field is other information, calculate the checksum or fill;

S1408: determining whether there is still a protocol field not processed, if yes, executing S1402; if not, executing S1409;

S1409: The packet process ends.

In the data packet process, according to the content of the protocol format, fill in the command name in the command name field, in the parameter The field fills in the parameter value, the checksum field is calculated in the checksum field, and the data is sent as string type data. If it is a Boolean communication protocol or a numerical communication protocol, it is not necessary to perform complicated operations, and it is only necessary to judge whether the data to be transmitted is 1 or 0, thereby directly transmitting 1 or 0 to the 10 port.

When creating a protocol configuration communication parameter, the protocol layer does not give the configuration content of the physical port. Because a device may have multiple communication methods, it will be done in different communication modes when receiving commands. To differentiate, the emulation platform configures the physical port only when devices are added at the subsystem level.

In one embodiment of the invention, the protocol layer configuration file saves the protocol data in an XML format. The emulation platform uses XML files to store protocol data, so that when the user needs the protocol, the XML file can be directly read, which is convenient to operate.

After the protocol configuration module 1100 is configured to complete the required communication protocol, the protocol operation module 1200 needs to perform a connection test on the communication protocol to verify the communication protocol. Figure 15 shows the connection test interface of the protocol running module. When there is data transmission between the simulation computer and the instrument to be simulated, it means that the communication protocol is verified. The verified communication protocol allows communication with a plurality of instruments to be simulated in accordance with the protocol format of the communication protocol.

As shown in FIG. 16, the simulation platform communicates with the instrument to be simulated through the physical port, and includes the following steps: S1601: Initialize the communication port;

S1602: Open the communication port;

S1603: Detect whether data is received, if it receives data, execute S1604; otherwise, execute S1605;

S1604: processing the data;

S1605: Waiting for a predetermined time, in an embodiment of the present invention, the predetermined time may be 50 milliseconds; S1606: determining whether to close the port, if it is determined to close the port, executing S1607; otherwise, executing S1603;

S1607: Close the port and stop receiving data.

The protocol layer processor 1000 of the embodiment of the present invention can configure a communication protocol required by the simulation platform, and can further provide a protocol layer configuration file written with protocol layer configuration content to the device layer, so that the device layer receives the subsystem. After the command of the layer, the communication protocol is specified by the communication protocol to perform the simulation operation, thereby implementing communication with the instrument to be simulated.

As shown in FIG. 17, the device layer processor 2000 includes a device configuration module 2100 and a device operation module 2200. The device configuration module 21 00 is configured to establish multiple devices in the simulation platform, and generate a device layer configuration file corresponding to the multiple devices to configure the established multiple devices, and configure the protocol layer processor 1000. The layer profile is correspondingly loaded to a plurality of configured devices such that each device can communicate with the instrument to be simulated through a communication protocol configured in the protocol layer configuration file. The device operation module 22 00 is used to verify the configured device, that is, whether the device can communicate with the instrument to be simulated. When the device is verified, it can communicate with the instrument to be simulated and simulate the device layer.

Figure 18 shows an overall architectural diagram of the device layer. The device layer configuration module 2100 can configure and manage devices at the device layer, including creating one or more devices, saving devices, deleting one or more devices from multiple devices, or opening one or more devices. The device layer configuration module 2100 configures multiple devices by generating a device layer configuration file. The device layer configuration file includes the name and type of the device, device attributes, device control commands, device actions, and coupling relationships within the device. As shown in Figure 19, the device attributes include the attribute name of the device, the attribute type of the device, the maximum value of the device, the minimum value of the device, and the default value of the device. The device control command includes the name of the device control command and the device control command. The direction of the transfer, the content of the device control command, the device control command using the protocol name, the command range of the device control command, the number of included attributes of the device control command, and the name of the protection attribute; the device action includes the action name of the device and the device coupled with the action name The number of steps that control commands, actions, and the type of device action that corresponds to each step. The device action types include command behavior, action condition, delay wait, change rule, and return information. The internal coupling relationship of the device includes a device name, a coupling attribute name, a coupling condition, and a coupling relationship command corresponding to the coupling condition. In one embodiment of the invention, the device layer configuration file may save the data in an XML format.

The device layer configuration module 2100 configuration management flow will be described below with reference to FIG.

S2001: Enter the device layer;

S2002: creating a device;

In order to facilitate the classification and searching of a large number of devices, it is managed by a tree structure. As shown in Figure 21, the Device information tree consists of the Device node and the Action leaf, Command, and Property leaf nodes. Among them, a Device can contain any Action (Action), Command (Control) and Property leaf nodes, and the Action, Command, and Property nodes must belong to a Device ( Equipment) Node.

As shown in Figure 22, when the device configuration module 2100 creates the name and type of the device, it has the following functions: Add: Create the device name and the type of the device.

Edit: You can edit any of the device properties after the creation is complete.

Delete: The added device name and type can be deleted from the device name list.

Save: Save the device name and type as an XML file for easy reading.

S2003: save the device list;

S2004: selecting a device;

S2005: Create device attributes;

The device configuration module 2100 selects the device that needs to be configured according to the created device list. When the device configuration module 2100 creates the device attribute, it has the following functions:

Add: After selecting a device, add the device properties and the new device properties are added to the device properties list. The configured device attribute contents include attribute name, attribute type (for example: int, string, etc.), attribute maximum (optional), attribute minimum (optional), and attribute default (initial) value.

Edit: You can edit any of the device properties after the creation is complete.

Delete: The added device properties can be removed from the device properties list.

Save: Save the device properties as an XML file for easy reading.

As shown in Figure 23, fill in the property name of the device in the text box corresponding to PropertyName. Select the type of the attribute from the drop-down menu corresponding to the Property Type. In one embodiment of the invention, the type of device attribute includes a Boolean type or a numeric type, and the like. Then fill in the maximum, minimum and default initial values of the attribute in the text box below. If there is no maximum, minimum or default initial value for the attribute, the value that does not exist is allowed to be null.

S2006: saving device attributes;

As shown in Figure 23, click Add to add the device properties to the list on the right. In the list on the right, you can edit and delete the added options. Click Save after the configuration is complete to save the device properties and return to the device configuration management interface. If you need to edit and delete later, you can repeat the above actions.

S2007: Create device control commands;

The device configuration module 2100 selects the device that needs to be configured with the control command. The device configuration module 2100 has the following functions when creating the device control command:

Add: After selecting a device, add the name, command direction, and return information of the device control command. The command direction includes receiving, sending, and sending to itself. Wherein, when the command direction is sent to itself, in order to trigger the in-device coupling. After adding the previous step, the contents of the command added include the protocol name, protocol address range, protocol address, command description, number of command attributes, and device attributes in the specified command.

The protocol and the control command have a one-to-one correspondence, that is, one control command corresponds to one protocol format. The protocol name can be selected from various protocols created when the protocol is configured.

Protocol address range: When the protocol is serial port and TCP/IP protocol, since the protocol layer encapsulates the protocol format for the two types of protocols, there may be multiple segments of the String type protocol field. Therefore, it is necessary to specify which segment of the field the command belongs to. Field. In one embodiment of the invention, the protocol address range is optional.

Protocol Address: Used to specify the physical address or port number to which the control command is sent.

Command Description: Used to interpret the text of the control command.

Number of command attributes: The number of device attributes carried by this control command.

Specify the device attribute in the command: Used to specify the device attribute carried in the control command. For example: The control device has three device attributes, and specifies the attribute contents of the three device attributes.

Add new device control commands to the device command list.

Edit: You can edit any of the device commands after the creation is complete.

Delete: The added device command can be deleted from the device command list.

Save: Save the device command as an XML file.

As shown in Figure 24, you need to select the device to be configured in the DeviceName drop-down menu.

In the first step, fill in the command name corresponding to the command name in the text box corresponding to CommandName, select the sending direction of the control command in the drop-down menu corresponding to CommandDirection (ie, judge the control command to send or receive), and then in CommandNote Fill in a brief description of the control command. In the second step, select the protocol name to be used by the control command in the ProtocolName drop-down option. In the third step, it is necessary to confirm the device attribute corresponding to the parameter in the control command. Fill in the name in the text box corresponding to ParameterNumber To make the number of parameters, click OK and then click OK. Then in the table below, the filled number of columns will be automatically generated. Each column represents a parameter, and then there will be a drop-down menu below each parameter. Option, the option is all the attribute names configured before, after selecting the corresponding attribute name, click Add to add the attribute name to the list on the right. In the list on the right, you can edit and delete the added options. Click OK when the configuration is complete to return to the device configuration management interface. If you need to edit and delete later, you can repeat the above actions.

S2008: save device command;

Click Save after the configuration is complete to save the device properties and return to the device configuration management interface. If you need to edit and delete later, you can repeat the above actions.

S2009: Select device;

Select the device for which you want to configure actions based on the list of devices you have created.

S2010: Create device actions;

The device configuration module 2100 creates device actions including the following functions:

Add force:

1) After selecting the device, add the action name, the new action name will be added to the action name list, and Figure 25 shows the configuration interface of the device action name. First, you need to select the device settings you want to configure and the editing device action interface in the DeviceName drop-down menu. The first page is the ActionManager page that creates the action name, and the other page is the ActionEdit page that sets the action content. You need to create the action name on the ActionManager page before setting the content for each new action in the ActionEdit page.

First on the ActionManager page, fill in the action name in the text box corresponding to the ActionName, then click Add to add to the list on the right. In the list on the right, you can edit and delete the added options. After the configuration is complete, click the ActionEdit option to enter the settings action content interface.

2) Select the device action to be configured according to the created action list;

3) selecting, according to the created device command list, a device control command coupled with the action, where the device control command includes a coupling behavior sent to the device for triggering the device, and the device can perform the corresponding action only after receiving the relevant command;

4) Set the number of steps of the action, refine the action into a number of steps, each step corresponds to a device action type, and the entire device action is divided into each step to execute;

5) Configure each step of the creation completion. The device action types include Command Behavior, Condition, WaitTime, VariationalRule, and Return Info.

As shown in Figure 26, in the ActionEdit interface, the first step is to select the name of the action created before in the drop-down menu corresponding to ActionName. In the second step, select the name of the previously created command in the drop-down menu corresponding to CommandName. In the third step, the text box corresponding to the Number of Steps is filled in the number of action types executed by the action after receiving the specified command, and the fourth step is to configure the action type to be executed in order, first In the drop-down menu corresponding to Step No., select the Step corresponding to the quantity filled in the third step to configure. For example, if you fill in 3 in the third step, it means that you need to perform 3 types of actions, then Step 1 to Step 3 appear in the drop-down menu corresponding to SepNo. For example, if you select Stepl, you can configure the action type for this step below.

According to different action types, the configuration of the device action is as follows:

1) Configure command behavior: This action type is to assign a device attribute to the specified command when the device command is configured.

As shown in Figure 26, click Command Behavior to execute the parameters passed in the command corresponding to the corresponding device attributes configured in the previous step, that is, the function in Step3 to set and edit the communication protocol used by the device.

2) Configure the action condition: The action type is to perform the next step when determining what the device attribute meets. Wherein, the determined action conditions can be combined, and the action to be performed can be selected after the judgment. For example: When the flow rate of the device MFC is greater than 1000, perform one step, otherwise perform another step. The configuration includes: device attributes (selected according to the created device attribute list), conditional judgment (including greater than, less than, judge whether the two are equal, less than or equal to, greater than or equal to), attribute value (the attribute value requires the user) Specify), logical relationship (and, or, XOR), so that many conditional judgments can be combined into one conditional judgment. New action conditions are added to the action condition list.

As shown in Figure 26, after clicking Condition, a pop-up interface will be displayed for the user to customize, as shown in Figure 27. First, add the judgment condition, select the previously configured device attribute in the drop-down menu corresponding to the Property, and select the relationship with the following values in the drop-down menu corresponding to the Relationship (including greater than, less than, equal to, greater than or equal to, less than or equal to 5 types). Then enter the value associated with the attribute in the text box corresponding to Value. For example, when the pressure is greater than 0.5, the pressure is selected in the Property, the Relationship is selected to be greater than, and the Value is filled with 0.5. Then click the Add button to add the conditional judgment to the list on the right. Because the judgment conditions can exist at the same time, there are three choices of AND, OR and XOR. For example, when the pressure is greater than 0.5 or the temperature is less than 30, click OR after the first condition is set and Add, and set the second condition at this time. Click Add to complete adding a complete condition.

Then, after adding a judgment condition, it is necessary to set the execution action after the judgment. In the Then Step box, select the execution action type after determining the condition in the drop-down menu corresponding to NextStep, and select another execution action type after the judgment condition in the drop-down menu corresponding to NextStep in the Else Step box (both are allowed to be empty) ). For example, if the action of waiting is satisfied under the condition that the pressure is greater than or equal to 0.6, select 3-WaitTime in the Then Step box; otherwise, execute the return command action, and in the Else Ste box, select the return information (Return Info). Then click the Add button to add to the list on the right, corresponding to the judgment conditions defined above. In the list on the right, you can edit and delete the added options. Click OK when the configuration is complete to return to the device action configuration interface. If you need to edit and delete later, you can repeat the above actions.

3) Configure delay wait: This action type is the execution time waiting for the corresponding time. The configuration includes: wait time and the next step. The waiting time is how long it needs to be executed, and the unit is ms. The next step is to pick the next step. As shown in Figure 26, after clicking WaitTime, the wait time configuration interface (shown in Figure 28) is entered. Select the waiting delay time in the drop-down menu corresponding to Delay. Click OK after the configuration is complete to return to the device action configuration interface. Among them, the delay time can be given by the designer with reference to the actual device.

4) Configuration change rule: This action type is used to specify the change rule of device attributes. The configuration includes: device attributes (selected according to the created device attribute list), change rules, custom change rules interface, and next steps.

Among them, the change rules include PID, PI, direct assignment and customization, which are selected by the user. Custom Change Rule The interface is used to let the user define the change rules of the attribute. The next step is to pick the next step.

As shown in Figure 26, after clicking VariationalRule, enter the change rule configuration interface (Figure

29 shown). As shown in Figure 29, select the parameter name to be changed in the Property drop-down option, and select the change rule of the parameter (such as PID, PI, user-defined and direct assignment) in the drop-down menu corresponding to VariationalRule. Figure 30 (a), Figure 30 (b), Figure 30 (c), and Figure 30 (d) configuration interfaces for user-defined, PID, PI, and direct assignment, respectively. Click OK when the configuration is complete to return to the device action configuration interface.

5) Configuration return information: This action type specifies the return information of the device to the instrument to be simulated. The configuration includes: Command name (selected according to the return type in the created device command list), Protocol name (meaning the same as the configuration command, selected according to the created protocol list), Set the attributes of the command (set the return information Device properties), the next step (select the next step).

As shown in Figure 26, after clicking Return Info, enter the reply information configuration interface (shown in Figure 31). Select the previously configured device command from the drop-down menu corresponding to CommandName, select the previously configured protocol name from the drop-down menu corresponding to ProtocolName, and then select the parameter value to be returned in the table below. . Click OK when the configuration is complete to return to the device action configuration interface.

For the same reason, after configuring all the steps in the drop-down menu, click the Add button to add to the list on the right. In the list on the right, you can edit and delete the added options. Click OK when the configuration is complete to return to the device action configuration interface. If you need to edit and delete later, you can repeat the above actions. New device actions are added to the device action list.

Edit: You can edit any step in the Add Device action after the creation is complete.

Delete: The added content can be deleted in the device action name list, action condition list, and device action list. Save: Save the device action as an XML file.

S2011: save device action;

S2012: judging whether to edit the device, if yes, executing S2004; otherwise executing S2013;

After configuring the action of the device, further configure the coupling relationship inside the device. Device Configuration Module 2100 Configuring the internal coupling relationship of the device includes the following functions:

Add: Create a device internal match. Edit: You can edit any of the device's internal coupling relationships after the creation is complete. Delete: The added device internal coupling can be removed from the device's internal coupling list.

Save: Save the internal coupling relationship of the device into an XML file for easy reading by the user.

As shown in Fig. 32, when the configuration of the coupling relationship inside the device is started, a single coupling condition or a plurality of coupling conditions are first determined. A judgment condition is added when there are a plurality of coupling conditions. As shown in Figure 33, select the previously configured device attribute from the drop-down menu corresponding to the Property, and select the relationship with the following values in the drop-down menu corresponding to the Relationship, including greater than, less than, equal to, greater than or equal to Less than or equal to 5 types. Then enter the value associated with the attribute in the text box corresponding to Value. For example, when the pressure is greater than 0.5, select the pressure in Property, select Greater in Relationship, and fill in 0.5 in Value. Then click the Add button to add the conditional judgment to the list on the right. Since the judgment conditions can exist at the same time, there are three choices of sum, or, or XOR. For example, when the pressure is greater than 0.5 or the temperature is less than 30, click OR after the first condition is set and Add, and set the second condition at this time. Click Add to complete adding a complete coupling condition.

Then, after adding a matching condition, you need to set the corresponding execution command, and select the previously configured command in the drop-down menu corresponding to SendSelfCommand. Then click the Add button to add to the list on the right, corresponding to the judgment conditions defined above. In the list on the right, you can edit and delete the added options. Click OK when the configuration is complete to return to the device action configuration interface. If you need to edit and delete later, you can repeat the above actions.

In the simulation platform of the embodiment of the present invention, the configured device parameters are first monitored, and the value is judged whether the coupling condition is satisfied. When the value of the device parameter or attribute reaches the configured critical point, it is judged that the coupling condition is satisfied, and the coupling relationship command is triggered, and the coupling relationship command is transmitted to the device running module 2200 as an internal message delivery interface to perform the corresponding device behavior action. To meet the user's configuration requirements.

Since all coupling relationships and post-coupling executions occur in real time in parallel during the actual device operation, multi-threading techniques are used to achieve all of these operations in real-time and parallel, so that the most natural approach to reality The condition of the device.

S2013: The configuration ends.

The device execution module 2200 performs simulation of the device layer based on the configuration of the device configuration module 2100. As shown in FIG. 34, the device running module 2200 includes a first verification unit 2201, where the first verification unit 2201 is configured to verify the device configured by the device configuration module 2100. The first port initialization unit 2202 is configured to generate and The physical port corresponding to the device control command of the device is verified, and the physical port is checked for conflict. When the physical port is in conflict, the physical port is initialized. The first command management unit 2203 is configured to send or receive a device control command. The first simulation unit 2204 is configured to execute a simulation action corresponding to the device control command; and the first error management unit 2205 is configured to record error information in the device layer simulation process in the form of a log.

After the device configuration is completed, the first verification unit 2201 needs to verify the configured device. First, the user needs to add the communication physical port of the device, as shown in Figure 35, because the device's rec command uses TCP/IP. Protocol, so you need to fill in the physical port information of TCP/IP. When the verified device can communicate with the instrument to be simulated through the physical port, it indicates that the device passes the verification. After the physical port configuration is correct, the device execution module 2200 can receive and send commands and perform related actions.

As shown in FIG. 36, the device execution module 2200 performs simulation of the device layer, including the device receiving the data and performing corresponding actions, changing the parameter values of the device, and the system interface (shown in FIG. 37) dynamically displaying the parameters of the device in the form of a table. The value includes the following steps:

S3601: Start the simulation;

S3602: Detect whether the physical ports conflict. When detecting physical port conflicts, execute S3610 to end the simulation; otherwise, execute S3603;

S3603: Read the device parameters into the hash table;

S3604: The port is initialized;

S3605: Bind port receives data delegation;

S3606: The port receives the data, triggering an event;

S3607: Parsing the data and performing the action;

S3608: Determine whether to end the simulation. If it is judged to continue the simulation, execute S3609; otherwise, execute S3610;

S3609: Continue to wait to receive data;

S3610: End the simulation.

Figure 37 shows the operation management interface of the device running module 2200. When the device running module 2200 performs the device layer simulation, all the parameter information of the device configuration is listed in the table on the right, and the state of the parameters can be refreshed in time, and the log information on the right side is continuously displayed and sent. Information and error logs. Similarly, if you need to stop or exit the device, right-click on the relevant menu.

The embodiment of the present invention provides that the device layer processor can complete the configuration of the device, including the attributes, control commands, actions, and internal couplings of the device, and provides the device layer configuration content device layer configuration file to the subsystem layer. It can be queried and invoked by the subsystem layer, and can also complete the management of the device, including adding, deleting, saving and editing devices, and then communicating with the instrument to be simulated through the communication protocol configured by the protocol layer, and performing device layer simulation. .

As shown in FIG. 38, the subsystem layer processor 3000 includes a subsystem configuration module 3100 and a subsystem operation module 3200. The subsystem configuration module 3100 is configured to establish one or more subsystems in the simulation platform, and generate a subsystem layer configuration file corresponding to the one or more subsystems to configure one or more subsystems to the subsystem layer, where Each subsystem includes one or more devices that load device layer configuration files for device layer configuration module 2100 to one or more subsystems to configure devices in each subsystem. The subsystem running module 3200 is used to verify the configured subsystem, that is, whether the subsystem can communicate with the instrument to be simulated. After verification, the subsystem layer is simulated.

Figure 39 shows an overall architectural diagram of the subsystem layer. The subsystem layer configuration module 3100 can manage multiple subsystems and devices inside each subsystem, including adding one or more subsystems to multiple subsystems, and deleting In addition to one or more subsystems or save save subsystems, one or more devices created and configured by device layer processor 2000 are added or deleted to the various subsystems to be combined into a complete subsystem. The subsystem layer configuration module 3100 is configured with multiple subsystems by generating a subsystem layer configuration file. As shown in FIG. 40, the subsystem layer configuration file includes: a subsystem attribute, including a subsystem attribute name; a device attribute inside the subsystem, including a device name, a device type, and a physical port; and a coupling condition between devices, Including the name of the coupling device, the coupling condition and the command to trigger the coupling; the coupling relationship between the devices, the coupling action between the devices, the name of the coupling device, the number of steps of the coupling action, and the type of coupling action corresponding to each step, wherein the coupling action type includes Device behavior, coupled action conditions, and delays in coupled actions. In one embodiment of the invention, the subsystem layer configuration file can save data in an XML format. Since multiple devices in the subsystem are established and configured for the device layer processor 2000, most of the content in the subsystem layer configuration file is the content of the device layer, and the coupling conditions and relationships between the communication physical interface and the device.

The configuration management process of the subsystem configuration module 3100 is described below with reference to FIG. 41, including the following steps: S4101: Entering the subsystem layer;

S4102: Select a system name;

In order to facilitate the specification and lookup of a large number of Subsystems, it is managed by a tree structure. As shown in Figure 42, the Subsystem information tree consists of a Subsystem node and a leaf node containing the device name. A subsystem can contain any leaf node containing the device name, and the device name node must belong to a certain node. Subsystem nodes.

S4103: Configure the subsystem name;

As shown in Figure 43, the subsystem configuration module 3100 configures the subsystem name to include the following functions:

Add: Create a subsystem name.

Edit: You can edit any of the subsystem names after the creation is complete.

Delete: The added subsystem name can be removed from the list of subsystem names.

Save: Save the subsystem name as an XML file for easy reading by the user.

S4104: Add a device to the subsystem;

As shown in Figure 44, the subsystem configuration module 3100 adds devices to the subsystem including the following functions:

Add: Add a device inside the subsystem by loading the device layer configuration file. The device is first named because the device with the same device name and different internal logic may appear, so the device name corresponds to the base class to which it belongs. Because the same device may have multiple communication protocols, different communication protocols have different command formats to send to the emulation platform, and all commands of the device need to be bound to the physical port of the actual communication protocol.

Edit: You can edit any of the device names after the creation is complete.

Delete: The added device name can be deleted from the device name list.

Save: Save the device name as an XML file for easy reading by the user.

S4105: save the subsystem list;

S4106: Create a coupling relationship list; After adding devices to the subsystem, you need to manage the coupling relationship between the devices. In the simulation platform of the embodiment of the present invention, the coupling relationship between the device and the coupling relationship between the devices are respectively implemented at the device layer and the subsystem layer.

In the subsystem layer, the coupling relationship between the triggering devices includes two ways: First, when the attribute of a certain device reaches a critical value, the coupling action of another device is triggered, and the coupling condition between the devices is required to be customized. Secondly, when the device receives a certain command, it directly triggers the coupling action of another device or determines whether certain attributes of the current device satisfy the condition and then trigger the coupling action of the other device. Since the method of triggering the coupling condition is implemented by another device transmitting the configured command through the internal messaging interface, it is necessary to define a coupling command corresponding to the coupling action by the user, that is, to configure the coupling relationship between the devices.

As shown in Figure 45, the subsystem configuration module 3100 configures coupling conditions between devices, including:

Add: Create an inter-device coupling condition.

Edit: You can edit any of the inter-device coupling conditions after the creation is complete.

Delete: The added inter-device coupling conditions can be removed from the list of coupling conditions between devices.

Save: Save the inter-device coupling conditions to an XML file for easy reading by the user.

S4107: Select the coupling relationship name;

As shown in Figure 46, after selecting the subsystem, add the coupling relationship name and the new coupling relationship name will be added to the coupling relationship name list. Select the action of the coupling relationship to be configured according to the created coupling relationship list.

S4108: Select a coupling device;

Select devices that need to be coupled within the subsystem;

S4109: Select device control command;

Selecting a received device control command for the coupled device;

S4110: The number of configuration action steps;

S4111: Select an action step;

As shown in Figure 47, the number of steps in the action is set, and the coupling action is refined into multiple steps, each of which corresponds to a type of coupled action. Among them, the types of coupling actions include: device behavior, coupled action conditions, and delays of coupled actions.

S4112: Configuration step action;

Configure Delay Waiting: This action type waits for the corresponding time to execute the simulation action. The configuration includes: wait time and the next step. The waiting time is how long it needs to be executed, and the unit is milliseconds. In one embodiment of the invention, the latency may be 120 milliseconds. The next step is to pick the next step. As shown in Figure 47, select the delay button, and the configuration interface shown in Figure 48 pops up, setting the delay time in milliseconds.

Configure device behavior: This action type is the behavior of directly executing the specified device. As shown in Figure 47, select the Execute Action button, and the configuration interface shown in Figure 49 pops up to perform the coupling action of the device. Select the device, select the action of the device, click the OK button to exit the setting interface, and click the cancel button to cancel the setting.

Configure the coupling action condition: The action type is to perform the next step when determining what the device attribute meets. The conditions in which the judgment is made may be combined. After the judgment, select the action to be performed. For example: When the flow rate of the device MFC is greater than 1000, do not know, otherwise perform another step. The configuration includes: device attributes, where the device attributes are selected according to the created device attribute list; conditional judgments, including greater than, less than, equal to, less than or equal to, greater than or equal to; attribute values, the attribute values require user designation; Relationships, including and, or, or XOR, can combine many conditional judgments into one conditional judgment. New action conditions are added to the action condition list.

As shown in Fig. 47, the condition judgment button is selected, and the configuration interface as shown in Fig. 50 is popped up, and the condition judgment action is set. Select the device, device parameters, and coupling conditions. According to the true and false of the coupling condition, the corresponding steps are performed. When coupled to the list on the right, click the OK button to exit the device page and click the Cancel button to cancel this setting.

S4113: Determine whether the configuration needs to be modified, if necessary, execute S4110; otherwise, execute S4114;

S4114: Save the list of coupled actions;

Edit You can edit any step in the Add Coupling action after the creation is complete.

Delete can be deleted in the list of coupled action names and action conditions;

Save Save the blending action as an XML file

S4115 saves the subsystem;

S4116: Configuration is complete.

The subsystem operation module 3200 includes a second verification unit 3201, a second port initialization unit 3202, a second command management unit 3203, a second simulation unit 3204, and a second error management unit 3205. The second verification unit 3201 is configured to verify the subsystem configured by the subsystem configuration module 3100; the second port initialization unit 3202 is configured to generate a physical port corresponding to the device control command of the device inside the verified subsystem. And checking whether the physical port conflicts, when checking that the physical port has no conflict, running the device inside the subsystem and initializing the physical port; the second command management unit 3203 is configured to receive or send the device control command of the device inside the subsystem; The second simulation unit 3204 is configured to execute a simulation action corresponding to the device control command, and trigger a coupling condition, and perform a corresponding coupling action according to the coupling condition; the second error management unit 3205 is configured to record the subsystem layer in the process of the log layer simulation process. Error message.

After the subsystem configuration module 3100 is configured, the second verification unit 3201 needs to verify the configured subsystem, that is, whether the configured subsystem can communicate with the instrument to be simulated through the physical port. If the verification is passed, that is, the subsystem can communicate with the instrument to be simulated, the subsystem operation module 3200 begins to perform the simulation of the subsystem layer.

As shown in FIG. 52, the subsystem running module 3200 performs the simulation of the subsystem layer including the following steps:

S5201 starts simulation;

S5202 detects whether the physical ports conflict, if the conflict occurs, execute S5210; otherwise, execute S5203;

S5203 runs equipment inside the subsystem;

The S5204 device port is initialized.

The S5205 binds the port to receive data delegation. S5206: triggering event to perform coupling action processing;

S5207: Parsing the data and performing the action;

S5208: Determine whether to end the simulation, if it is judged to end the simulation, execute 5210; otherwise, execute S5209;

S5209: Continue to wait for receiving data;

S5210: End the simulation.

As shown in FIG. 53, when the subsystem running module 3200 is running, a window pops up prompting the user to start the subsystem, and can receive and send commands and perform related actions, and the subsystem is listed in the table on the right. All the equipment and all the parameter information of the device configuration can refresh the status of these parameters in time, and the log information on the right will continuously display the received and sent information and the error log, which is determined by the second error management unit. 3205 is recorded in the form of a log.

The subsystem layer processor 3000 of the embodiment of the present invention can complete the configuration and management of the subsystem, including the attributes of the subsystem and the devices inside the subsystem, adding or deleting devices in the subsystem by querying and calling the device layer configuration file, and Support users to combine devices into complete subsystems, and manage the coupling relationship between each device inside each subsystem, and provide subsystem layer configuration files written with subsystem layer configuration content to the system layer for system layer query And call, after the above configuration is completed, perform the simulation of the subsystem layer.

As shown in FIG. 54, the system layer processor 4000 includes a system configuration module 4100, configured to establish multiple systems in the simulation platform, and generate system layer configuration files corresponding to multiple systems to configure multiple systems, where each The system includes one or more subsystems, and the subsystem layer configuration file of the subsystem configuration module 3100 is loaded into multiple systems to configure subsystems in each system; the system operation module 4200 is configured to verify the configured system, Simulate the system through verification.

Figure 55 shows an overall architectural diagram of the system layer. The system configuration module 4100 can manage multiple systems and subsystems within each system, including adding one or more systems to multiple systems, deleting one or more systems from multiple systems, saving, and then to each system. One or more subsystems established and configured by subsystem layer processor 3000 are added or deleted to be combined into a complete system. Wherein, as shown in FIG. 56, the system configuration module 4100 configures a plurality of systems by generating a system layer configuration file. The system layer configuration file includes: system attributes, including system name and system description information; subsystem attributes inside the system, including the name of the subsystem and the devices inside each subsystem, including the attributes of the device and the attributes of the protocol corresponding to the device. ; and the coupling relationship with the subsystem. In one embodiment of the invention, the system layer configuration file can save data in an XML format.

Referring to FIG. 57, the system configuration module 4100 performs a system layer configuration management process, which includes the following steps: S5701: Enter the system layer;

As shown in Figure 58, in order to facilitate the specification and lookup of a large number of systems, it is managed by a tree structure. The System information tree consists of a system node and a leaf node containing the device name. A system can contain any leaf node containing the device name, and the device name node must belong to a system node.

S5702: Create a system;

Figure 59 shows the interface for creating a system. The system configuration module 4200 creates a system including the following functions: Add: Create a system name.

Edit: You can edit any of the system names after the creation is complete.

Delete: The added system name can be deleted from the system name list.

Save: Save the system name as an XML file for easy reading by the user.

S5703: judging whether to edit the system, if it is judged to edit the system, executing S5702; otherwise, executing S5704; S5704: saving the system;

S5705 : Enter the subsystem layer.

After configuring the system, add subsystems to the system. Figure 60 shows the interface for adding subsystems to the system. System Configuration Module The 4200 Add Subsystem includes the following features:

Add: Add the subsystem to which the system belongs. The sub-systems created previously are listed for user selection by loading the subsystem layer configuration file, and the selected ones are added to the created system.

Edit: You can edit any of the subsystems after the creation is complete.

Save: Save the list of subsystem classes as an XML file for easy reading by the user.

As shown in FIG. 61, the system operation module 4200 includes a third verification unit 4201, wherein the third verification unit 4201 is configured to verify the system configured by the system configuration module 4100; the third port initialization unit 4202, wherein the third port initialization unit 4202 is used to generate a physical port corresponding to the device control command of the device in the subsystem inside the system, and check whether the physical port conflicts. When checking that the physical port has no conflict, the subsystem inside the operating system and the device inside the subsystem are And the physical port is initialized; the third command management unit 4203, wherein the third command management unit 4203 is configured to receive or send a device control command of the device in the subsystem inside the system; the third simulation unit 4204, wherein the third simulation The unit 4204 is configured to execute a simulation action corresponding to the device control command, and trigger a coupling condition between the devices, and perform a corresponding coupling action according to the coupling condition; and a third error management unit 4205, wherein the third error management unit 4205 is configured to log Formal system layer simulation process error Information.

After the configuration of the system layer is completed by the system configuration module 4100, the third verification unit 4201 needs to verify the configured system, that is, whether the configured system can communicate with the instrument to be simulated through the physical port. When the configured system communicates with the instrument to be simulated, the system operation module 4200 can begin to perform simulation of the system layer.

The simulation flow of the system operation module 4200 will be described below with reference to FIG. 62, including the following steps:

S6201: Start simulation;

S6202: Check whether the physical ports are in conflict. If the physical port conflict is determined, execute S6211; otherwise, execute S6203.

S6203: Start running the internal subsystem;

S6204: Each device runs inside the subsystem;

S6205: Initialize the port and start receiving data;

S6206: The port receives the data and triggers the event. S6207: parsing the data and performing a coupling action;

S6208: Perform a simulation action when the coupling condition is satisfied;

S6209: Determine whether to end the simulation. If it is judged to end the simulation, execute S6211; otherwise, execute S6210; S6210: continue to wait for receiving data;

S6211 : End the simulation.

System Operation Module The 4200 operation simulation mainly completes the dynamic simulation function of the system. Since the system is a collection of several subsystems, there is no coupling between the subsystems. The device receives the data and performs the corresponding action, changes the parameter value of the device, and then triggers the coupling relationship of the subsystem to perform corresponding processing. Finally, the main system interface dynamically displays the parameter values of each device in the subsystem in the form of a table.

As shown in FIG. 63, after the system running module 4200 starts to start, it can receive and send commands and perform related actions, and in the table on the right, all the subsystems and subsystems included in the system are listed, and the device configuration is included. All the parameter information can be refreshed in time, and the log information on the right side will continuously display the received and sent information and the error log, and the log of the above error is provided by the third error management unit 4205.

The system layer processor 4000 provided by the embodiment of the present invention can complete system configuration and management, including system attributes and subsystems inside the system, adding or deleting subsystems in the system by querying and calling subsystem layer configuration files, and supporting The user combines the subsystems into a complete system and manages the coupling relationship between the various subsystems within each system to perform system layer simulation.

The protocol layer processor 1000, the device layer processor 2000, the subsystem layer processor 3000, and the system layer processor 4000 provided in the above embodiments describe an operational flow of a simulation platform for an integrated circuit manufacturing device according to an embodiment of the present invention. , including the following steps:

S6401: Start the program;

S6402: Create or open a configuration;

S6403: After the configuration protocol is completed, the S6404 is executed. The configured protocol can start communication with the instrument to be simulated, and then execute S6413.

In step 6403, the protocol configuration module 1100 configures the communication protocol for the simulation platform, and the protocol operation module 1200 can start communication with the instrument to be simulated through the configured protocol.

S6405: Configure the device. After the device is configured, run S6406 to start the device layer simulation, and then execute S6413.

In step 6405, the device configuration module 2100 configures a communication protocol for the device by loading a protocol layer configuration file, and configures a plurality of devices by generating a device layer configuration file, and the device operation module 2200 performs simulation of the device layer.

S6407: After configuring the subsystem, after the subsystem configuration is completed, execute S6408, start the simulation of the subsystem layer, and then execute S6413;

In step 6407, the subsystem configuration module 3100 loads the devices in the subsystem by loading the device layer configuration file. Configure to configure multiple subsystems by generating a subsystem layer configuration file, and run the module by the subsystem

The 3200 performs a simulation of the subsystem layer.

S6409: Building a system;

In step 6409, the system configuration module 4100 configures the subsystems in the system by loading the subsystem layer configuration file, configures multiple systems by generating system layer configuration files, and performs system layer simulation by the system operation module 4200.

S6410: Determine whether to start the simulation of the system layer. If it is judged to execute the simulation of the system layer, execute S6411; otherwise, execute S6413;

S6411: Start communication with the instrument to be simulated;

S6412: Stop the simulation;

S6413: The simulation ends.

While the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art The scope of the invention is defined by the appended claims and their equivalents.

Claims

Claim

1. A simulation platform for an integrated circuit manufacturing device, comprising:

Multiple instruments to be simulated,

a plurality of boards, each of the plurality of boards comprising a plurality of channels, wherein each of the plurality of channels is connected to a pin of one of the plurality of instruments to be simulated; and

An emulation computer, wherein the emulation computer communicates with the plurality of instruments to be simulated by the plurality of boards, and is used for simulating a plurality of instruments to be simulated, the emulation computer comprising:

a protocol layer processor, configured to establish a plurality of communication protocols in the simulation platform, and generate a protocol layer configuration file corresponding to the plurality of communication protocols, and pass the plurality of communication protocols according to the protocol layer Translating a plurality of boards with the plurality of instruments to be simulated;

a device layer processor, where the device layer processor is configured to establish a plurality of devices in the simulation platform, and generate a device layer configuration file corresponding to the multiple devices, and load the device according to the established multiple devices. The protocol layer configuration file corresponding to the multiple devices, and managing the multiple devices and performing device layer simulation;

a subsystem layer processor, the subsystem layer processor is configured to establish a plurality of subsystems in the simulation platform, and generate a subsystem layer configuration file corresponding to the multiple subsystems, where each of the subsystems includes One or more devices established in the device layer processor, and loading device layer configuration files corresponding to devices in the plurality of subsystems according to the established plurality of subsystems, and the plurality of subsystems and each sub The devices in the system are managed and simulated at the subsystem level; and

a system layer processor, the system layer processor is configured to establish a plurality of systems in the simulation platform, and generate a system layer configuration file corresponding to the multiple systems, where each of the systems includes one or more a subsystem established in the subsystem layer processor, and loading, according to the established plurality of systems, a subsystem layer configuration file corresponding to a subsystem of the plurality of systems, to the plurality of systems, and The multiple systems and the subsystems in each system are managed and simulated at the system level.

2. The simulation platform according to claim 1, wherein the protocol layer configuration file, the device layer configuration file, the subsystem layer configuration file, and the system layer configuration file are saved in an XML file format.

3. The simulation platform according to claim 1, wherein the protocol layer processor comprises:

a protocol configuration module, where the protocol configuration module is configured to establish the multiple communication protocols in the simulation platform, and generate a protocol layer configuration file corresponding to the multiple communication protocols; and

The protocol running module is configured to perform a connection test on the communication protocol configured by the protocol configuration module for verification.

4. The simulation platform according to claim 3, wherein the protocol types include an Ethernet protocol, a serial protocol, an analog 10 protocol, a digital 10 protocol, and a DeviceNet protocol.

The simulation platform according to claim 4, wherein when the protocol type of the communication protocol is an Ethernet protocol or a serial port protocol, the protocol layer configuration file further includes a protocol format, where the protocol format includes a command name and The command carries the attribute parameter of the attribute.

The emulation platform of claim 5, wherein, when the protocol type is an Ethernet protocol or a serial port protocol, the protocol layer processor further includes a protocol encapsulation module, where the protocol encapsulation module includes:

a data unpacking interface, configured to parse data sent by the plurality of boards;

And a data packet interface, configured to perform a packet operation on data sent to the multiple boards.

7. The simulation platform of claim 1, wherein the device layer processor comprises:

a device configuration module, where the device configuration module is configured to establish a plurality of devices in the simulation platform, and generate a device layer configuration file corresponding to the multiple devices to configure the multiple devices, where the multiple The protocol layer configuration file corresponding to the devices is loaded to the plurality of devices to enable each device to communicate with the instrument to be simulated through the communication protocol; and

a device running module, where the device running module is configured to verify the configured multiple devices, and simulate the multiple devices after passing the verification.

8. The simulation platform of claim 7, wherein the device layer configuration file comprises:

The name and type of the device;

a device attribute, where the device attribute includes a device attribute name, a device attribute type, a device attribute maximum value, a device attribute minimum value, and a device attribute default value;

a device control command, where the device control command includes a name of the device control command, a delivery direction of the device control command, and a content of the device control command;

a device action, the device action including an action name of the device and a device control command coupled with the action name, a number of steps of the action, and a device action type corresponding to each step;

The coupling relationship inside the device, the coupling relationship inside the device includes a coupling condition and a coupling relationship command corresponding to the coupling condition.

9. The simulation platform according to claim 8, wherein the device action type comprises a command behavior, an action condition, a delay wait, a change rule, and return information.

The simulation platform of claim 7, wherein the device configuration module is further configured to add one or more devices to the multiple devices, or delete one or more devices from the multiple devices. .

The simulation platform of claim 8, wherein the device operation module comprises:

a first verification unit, configured to perform verification on the multiple devices that are configured by the device configuration module, where the first port initialization unit is configured to generate, by using the device control command of the multiple devices that are verified Physical port, and checking whether the physical port conflicts, and when checking that the physical port has no conflict, initializing the physical port;

a first command management unit, configured to send or receive the device control command;

a first simulation unit, configured to execute a simulation action corresponding to the device control command; and The first error management unit is configured to record error information in the device layer simulation process in the form of a log.

12. The simulation platform of claim 2, wherein the subsystem layer processor comprises:

a subsystem configuration module, where the subsystem configuration module is configured to establish a plurality of subsystems in the simulation platform, and generate a subsystem layer configuration file corresponding to the multiple subsystems to configure the multiple subsystems, where Each of the subsystems includes a plurality of devices, and the device layer configuration file corresponding to the plurality of devices included in the subsystem is loaded to the plurality of subsystems to configure the plurality of the subsystems Equipment; and

The subsystem running module is configured to verify the configured multiple subsystems, and simulate the multiple subsystems after passing the verification.

The simulation platform according to claim 12, wherein the subsystem layer configuration file includes: a subsystem attribute, where the subsystem attribute includes an attribute name of the subsystem;

The device attribute inside the subsystem. The device attributes inside the subsystem include the name of the device, the type of the device, and the physical port.

a coupling condition between devices, the coupling condition of the device includes a name of the coupling device, a coupling condition, and a coupling trigger command;

The inter-device coupling relationship includes a coupling action between devices, a name of the coupling device, a number of steps of the coupling action, and a coupling action type corresponding to each step.

14. The simulation platform of claim 13, wherein the type of coupling action comprises a device behavior, a coupling action condition, and a delay of the coupling action.

The simulation platform according to claim 14, wherein the subsystem configuration module is further configured to add one or more subsystems to the plurality of subsystems, or delete one or more subsystems from the plurality of subsystems; And adding one or more of the devices to the respective subsystems or deleting one or more of the devices from the respective subsystems.

The simulation platform according to claim 13, wherein the subsystem operation module comprises: a second verification unit, configured to perform verification on the subsystem configured by the subsystem configuration module; a unit, configured to generate a physical port corresponding to the device control command of the multiple devices in the verified subsystem, and check whether the physical port conflicts, and when the physical port is checked to have no conflict, run the subsystem The plurality of devices within and initializing the physical port;

a second command management unit, configured to receive or send a device control command of the multiple devices in the subsystem;

a second simulation unit, configured to execute a simulation action corresponding to a device control command of the multiple devices in the subsystem, and trigger the coupling condition, and perform a corresponding coupling action according to the coupling condition; and

The second error management unit is configured to record error information in the subsystem layer simulation process in the form of a log.

The simulation platform according to claim 2, wherein the system layer processor comprises:

a system configuration module, where the system configuration module is configured to establish a plurality of systems in the simulation platform, and generate a system layer configuration file corresponding to the multiple systems to configure the multiple systems, where each Said The system includes a plurality of subsystems, the subsystem layer configuration files corresponding to the plurality of systems being loaded to the plurality of systems to configure the plurality of subsystems in each system; and

And a system running module, where the system running module is configured to verify the configured multiple systems, and after performing verification, perform simulation on the multiple systems.

The simulation platform according to claim 17, wherein the system layer configuration file includes: a system attribute, where the system attribute includes a system name and system description information;

Subsystem attributes within the system, the subsystem attributes within the system include the name of the subsystem and the devices within each subsystem; and

The coupling relationship between subsystems.

19. The simulation platform of claim 17, wherein the system configuration module is further configured to add one or more systems to the plurality of systems, or delete one or more systems from the plurality of systems And adding one or more of the subsystems to the various systems, or deleting one or more of the subsystems from the various systems.

The simulation platform of claim 18, wherein the system operation module comprises:

a third verification unit, configured to perform verification on the multiple systems configured by the system configuration module; and a third port initialization unit, configured to generate, by using, multiple devices in the plurality of subsystems in the verified system The device controls a physical port corresponding to the command, and checks whether the physical port conflicts. When checking that the physical port has no conflict, the subsystem inside the system and the device inside the subsystem are operated, and the device is The physical port is initialized;

a third command management unit, configured to receive or send the device control command of the device in a subsystem internal to the system;

a third simulation unit, configured to execute a simulation action corresponding to the device control command, trigger a coupling condition between the devices, and perform a corresponding coupling action according to the coupling condition; and

The third error management unit is used for error information in the system layer simulation process in the form of logs.