CN101964788B - Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method - Google Patents
Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method Download PDFInfo
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Abstract
The invention provides a semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method, which comprises the following steps of: configuring a Boolean type communication protocol at a digital IO port, configuring a value type communication protocol at an analog IO port, and configuring a character string type communication protocol at a serial port, an Ethernet port and a DeviceNet port; and communicating between a simulation system and equipment by selecting corresponding Boolean type communication protocol, value type communication protocol or character string type communication protocol according to the type of the equipment. The system provides a unified configuration interface externally, and a call interface in the packing, unpacking and assignment process according to the three communication protocol types is the same interface. In addition, all communication protocol formats in the field of semiconductor manufacturing equipment can be configured, so the system has the characteristic of universality in the field of semiconductor manufacturing equipment.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly a kind of communication protocol mode configuration method of semiconductor manufacturing equipment functional simulation-oriented.
Background technology
In the semiconductor manufacturing equipment field, the communication pattern between setting can be divided into five kinds of main Types such as direct IO, serial ports, Ethernet, DeviceNet.Control end sends to equipment end to control command by certain protocol format, and equipment end sends it back control end to feedback information by certain protocol format.The device fabrication producer in semiconductor manufacturing equipment field has a lot, and the communication protocol of every kind of equipment is mutually different, in order to realize the general configurable analogue system of semiconductor manufacturing equipment platform, need to realize the configurability of various device communication protocol.In five kinds of communication patterns, communication protocol mainly is divided into three types: value type communication protocol, Boolean type communication protocol and character string type communication protocol.
1, Boolean type communication protocol
Boolean type communication protocol mainly refers to the communication protocol transmitted by digital I/O, and this protocol comparison is simple, the data bit Boolean of transmission, TRUE or FALSE.Need to configure digital I/O passage high-low level scope in the configuration of digital I/O passage physical parameter.Voltage range when the high level scope refers to transmit Boolean TRUE in the IO passage; Voltage range when the low level scope refers to transmit Boolean FALSE in the IO passage.In stage of communication, program is by the magnitude of voltage that function reads a passage of reading of IO integrated circuit board, the judgement magnitude of voltage belongs to high level scope or low level scope, if magnitude of voltage is in the high level scope, the data of this IO passage are just TRUE so, if magnitude of voltage is in the low level scope, the data of this IO passage are exactly FALSE so.
2, value type communication protocol
Value type communication protocol mainly refers to the communication protocol of Simulation with I O transmission, and the data of this protocol transmission are magnitudes of voltage within the specific limits, converts the data of double type to through this magnitude of voltage after certain conversion.Need to configure the voltage range of the permission of this passage in the configuration of Simulation with I O passage physical parameter.Because the interface of Simulation with I O integrated circuit board and computer is Transistor-Transistor Logic level, so the voltage range of actual input may surpass the maximum voltage value of this TTL, therefore Simulation with I O integrated circuit board can carry out certain scale operation in integrated circuit board inside, and a high level is converted to a low level in the TTL voltage range in proportion.In stage of communication, program can be by the magnitude of voltage that function reads a passage of reading of IO integrated circuit board, this magnitude of voltage is through the magnitude of voltage after conversion, in order to obtain the real voltage value in program, this passage function reading can be carried out a voltage transitions in inside, process is opposite with the process of input voltage conversion, is that a TTL voltage scale is converted to the real voltage value.This real magnitude of voltage is exactly the magnitude of voltage of the double type obtained in our program.
3, the communication protocol of character string type
The communication protocol of character string type mainly refers to the communication protocol by serial ports, Ethernet and DeviceNet transmission, this communication protocol inside is according to certain format organization's character string, and then the pattern according to large end transmission (Big-endian) or small end transmission (Little-endian) sends to receiving terminal to character string.For successful transmission string, in serial communication, need the physical parameter of configuration to comprise start bit (indicating the beginning the transmission of data), data bit (binary code of character string), check digit (data that send are above carried out parity check), position of rest (indicating the end of transfer of data), the binary stream of a character string sends to receiving terminal according to this data format segmentation, and same also have a similar transmitting procedure in Ethernet and DeviceNet.On the physical layer protocol form, for the order complicated and changeable of semiconductor equipment, character string itself also can be removed tissue according to certain form, consists of the protocol layer form.
For three kinds of communication protocol type recited above, communication protocol pattern subsystem of the present invention should satisfy several performance requirements:
1, general configurable
Because semiconductor equipment self may be with multiple communication interface, the protocol type of every kind of communication interface might be not identical, therefore communication protocol pattern configurations subsystem of the present invention must provide a unified configuration interface, unified calling interface, realize general configurability, could satisfy like this requirement of emulation platform device independence.
2, external interface is unified
Different protocol types and protocol format, resolving to data can be not identical with the package process yet, in order to facilitate calling of other simulation subsystem, this communication protocol schema management subsystem need to provide a unified call interface, the different operating process of data in parsing and package process of encapsulation different interface type.
Summary of the invention
Main purpose of the present invention is for the general configurable problem of communication protocol that solves the emulation of semiconductor manufacturing equipment field devices, proposes a kind of communication protocol mode configuration method of semiconductor manufacturing equipment functional simulation-oriented.
For achieving the above object, one aspect of the present invention proposes a kind of communication protocol mode configuration method of semiconductor manufacturing equipment functional simulation-oriented, it is characterized in that, comprise the following steps: be Boolean type communication protocol with the digital I/O port arrangement, be value type communication protocol with Simulation with I O port arrangement, be character string type communication protocol with serial ports port, ethernet port and DeviceNet port arrangement, wherein, described Boolean type communication protocol is that character string type field and field length are a byte; Described value type communication protocol is integer field or floating type field, and the field length of described value type communication protocol is variable; In described character string type communication protocol, length, type and the effect of the total length of character string, each field are configured according to the command context of described serial ports port, ethernet port and DeviceNet port; Communicate with analogue system Boolean type communication protocol corresponding according to the type selecting of equipment, value type communication protocol or character string type communication protocol and described equipment.
In one embodiment of the invention, described is that Boolean type communication protocol further comprises with the digital I/O port arrangement: the title that creates Boolean type communication protocol; The type of selecting described Boolean type communication protocol is the DI/DO type; Configure channel position corresponding to described Boolean type communication protocol; Configure the high-low level scope of described passage; Configure the form of described Boolean type communication protocol, wherein, comprise a field, and the length of described field is a byte, the type of described field is the character string type field.
In one embodiment of the invention, described is that value type communication protocol further comprises with Simulation with I O port arrangement: the title that creates value type communication protocol; The type of selecting described value type communication protocol is the AI/AO type; Configure channel position corresponding to described value type communication protocol; Select the voltage range of described passage; Configure the form of described value type communication protocol, wherein, comprise a field, the variable-length of described field, the type of described field is integer field or floating type field.
In one embodiment of the invention, described is that character string type communication protocol further comprises with serial ports port, ethernet port and DeviceNet port arrangement: the title that creates character string type communication protocol; The type of selecting described character string type communication protocol is serial ports, Ethernet or DeviceNet type; Configure channel position corresponding to described character string type communication protocol; The physical parameter of configuration communication interface; Configure the form total length of described character string type communication protocol according to the command context of described serial ports port, ethernet port and DeviceNet port; Length, type and effect according to each field in the described character string type communication protocol of described form total length configuration; Judge whether unappropriated agreement length is 0; If judge that unappropriated agreement length is not 0, continue length, type and the effect of each field in the described character string type communication protocol of configuration, until judge that unappropriated agreement length is 0.
In one embodiment of the invention, described analogue system Boolean type communication protocol corresponding according to the type selecting of equipment, value type communication protocol or character string type communication protocol and described equipment communicate further and comprises: the emulation termination is received data; Character string is converted to character array; Read the protocol fields configuration information; Judge whether field is command name; If judge that described field is command name, preserves described command name; If judge that described field is not command name, further judge whether described field is parameter information; If judge that described field is parameter information, preserves described parameter information; If judge that described field is not parameter information, judge that described field is ignored for other information not process; Successively all protocol fields are processed, and finished to separate packet procedures.
In one embodiment of the invention, also comprise: the emulation end sends data; Read and send the protocol fields configuration information; Judge whether described field is command name; If judge that described field is command name, adds the transmission chained list with described command name; If judge that described field is not command name, further judges whether described field is parameter information; If judge that described field is parameter information, query facility parameter value, and described parameter value is added the transmission chained list; If judge described field for parameter information, judge that described field is ignored for other information not process; Successively all protocol fields are processed, and finished the package process.
In one embodiment of the invention, also comprise protocol fields is carried out assignment.Specifically protocol fields being carried out assignment further comprises: according to the protocol name vlan query protocol VLAN; Read protocol fields configuration information corresponding to described agreement; Judge whether described field is command name; If judge that described field is command name, be described field assignment with described command name; If judge that described field is not command name, further judges whether described field is parameter information; If judge that described field is parameter information, it is the property parameters title that described field is specified relevant device; If judge described field for parameter information, judge that described field is ignored for other information not process; Successively all protocol fields are processed, and protocol finishes field assignment procedure.
The present invention has advantages of as follows:
1, unified interface
The present invention externally provides a unified configuration interface, can find out from the configuration flow figure of three kinds of dissimilar communications protocol format, their interface is identical, for the package of three kinds of communication protocol type, unpack, the calling interface in assignment procedure is also to use the same interface.
2, general configurable
Therefore the present invention can configure all communications protocol format in semiconductor manufacturing equipment field, has the characteristics of communicativeness in the semiconductor manufacturing equipment field.
The aspect that the present invention adds and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or the additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Fig. 1 is the communication protocol mode configuration method flow chart of the semiconductor manufacturing equipment functional simulation-oriented of the embodiment of the present invention;
Fig. 2 is the collocation method flow chart of the Boolean type communication protocol of the embodiment of the present invention;
Fig. 3 is the collocation method flow chart of the value type communication protocol of the embodiment of the present invention;
Fig. 4 is the collocation method flow chart of the character string type communication protocol of the embodiment of the present invention;
Fig. 5 be the embodiment of the present invention according to the content of communication protocol needs configurations and sequence design interface schematic diagram;
Fig. 6 is the data solution packet procedures of the embodiment of the present invention;
Fig. 7 is the data packet process of the embodiment of the present invention;
Fig. 8 is the protocol fields assignment procedure of the embodiment of the present invention.
Embodiment
The below describes embodiments of the invention in detail, and the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the present invention, and can not be interpreted as limitation of the present invention.
The present invention is based on Windows XP operating system, adopts Visual studio2008 to realize.It can complete the flexible configuration function of semiconductor equipment communications protocol format, can configure various communications protocol format at unified configuration interface, is applicable to the configuration of the communication protocol of the various communication interface types in semiconductor manufacturing equipment field.System of the present invention is based on the .NET development platform, forms based on Object-Oriented Technology, can provide a general configurable communication protocol editting function for semiconductor manufacturing equipment field devices analogue system.Owing to existing various communication interfaces in the actual industrial environment, communication mode and communication protocol, but consider the application (semiconductor manufacturing equipment device emulation field) of system of the present invention, so the present invention several interface types relatively more commonly used in the semiconductor manufacturing equipment platform have only been realized: direct IO type, serial ports type, ethernet type and DeviceNet type.The PC of use system of the present invention need to be installed IO integrated circuit board and the Labcard driver program of specific manufacturer.
Wherein, in the present invention, the main contents of communication protocol configuration are to configure the total length of an agreement, and length and the data type of each field in agreement.In the semiconductor manufacturing equipment field, although communication protocol is varied, indefinite length, every kind of communication protocol can be divided into according to certain length the field (field refers to that a segment length is not 0 character string) that length does not wait.In system of the present invention, the type of field is divided into following several:
1) integer field
The integer field need to be appointed as the figure place of the represented maximum integer of 4 bytes in the protocol format configuration in the length of this field on 32 machines.Can carry out setting and the inquiry of the device attribute parameter of integer type with the integer field.
2) floating type field
The floating type field, this subsystem is defaulted as the double type, need to be appointed as the figure place (comprising decimal point) of the represented floating number of 4～8 bytes in protocol format configuration in this field length on 32 machines.In analogue system, no matter data be single precision or double precision, unified carry out computing according to double precision, operation result can be similar to according to the length of protocol format configuration, satisfies the protocol format requirement to guarantee command context.Can carry out setting and the inquiry of the device attribute parameter of floating type with the floating type field.
3) character string type field
Character string type field, length minimum are the field of 1 byte, generally are used for identifying the control informations such as title of specific instructions.Wherein the Boolean Class offset of digital I/O passage is expressed as 1 and 0,1 expression true (TRUE) in program, and 0 expression false (FALSE) can be regarded as a character, and length is 1 byte.Length is that the Boolean Class offset of 1 byte is commonly used for the control of digital I/O passage and Query Information in analogue system.
In addition, in communication protocol, the effect of each field is also different, and field can be divided into the field of three types according to its effect in this simulation subsystem:
1) command name
Such field is mainly used to identify an order, is equivalent to the title of order, distinguishes different orders and distinguishes by the judgement command field.
2) property parameters
Property parameters is mainly used to represent value or the title of attribute.When control end sends the querying command of a parameter to this this simulation subsystem, just need to use the field of this type to represent the title of the property parameters that will inquire about.When the emulation end replies to the value of a parameter of control end or control end and to simulation subsystem, the value of a property parameters is set, just need to use such field to represent the concrete numerical value of parameter.
3) other parameters
Except the field effect of top two, also have some fields there is no clear and definite effect, or be used for carrying out parity check, perhaps just to carry out some clear datas and fill, such field is referred to as the other types field.
According to the division of communication protocol type, communication protocol mode configuration method and subsystem also mainly carry out modular design according to three dissimilar communication protocols.
As shown in Figure 1, be the communication protocol mode configuration method flow chart of the semiconductor manufacturing equipment functional simulation-oriented of the embodiment of the present invention, the method comprises the following steps:
Step S101 is Boolean type communication protocol with the digital I/O port arrangement, is value type communication protocol with Simulation with I O port arrangement, and is character string type communication protocol with serial ports port, ethernet port and DeviceNet port arrangement.Wherein, Boolean type communication protocol is that character string type field and field length are a byte; Value type communication protocol is integer field or floating type field, and the field length of value type communication protocol is variable; In character string type communication protocol, the length of the total length of character string, each field, type and effect are configured according to the command context of described serial ports port, ethernet port and DeviceNet port.
Particularly, Boolean type communication protocol, the layoutprocedure of value type communication protocol and character string type communication protocol is as follows.
1, the collocation method of Boolean type communication protocol
As shown in Figure 2, be the collocation method flow chart of the Boolean type communication protocol of the embodiment of the present invention.Boolean type communication protocol mainly refers to the communication protocol transmitted by digital I/O, and this protocol comparison is simple, and the data of transmission are Boolean, as TRUE or FALSE.Man-to-man relation with the property parameters of equipment due to the passage of IO type in physical device, therefore a passage can not appear to a plurality of property parameters, the perhaps situation of a plurality of passages to a property parameters, so the configuration of IO communications protocol format is comparatively simple.Simultaneously use the character string type field and represent due to the communication protocol of Boolean type, so the length of the communication protocol of Boolean type 1 byte always.The method comprises the following steps:
Step S201, the title of establishment Boolean type communication protocol.
Step S202, selecting the type of Boolean type communication protocol is the DI/DO type.
Step S203, channel position corresponding to configuration Boolean type communication protocol.
Step S204, the high-low level scope of collocation channel.
Step S205, the form of configuration Boolean type communication protocol, wherein, this Boolean type communication protocol comprises a field, and the length of this field is a byte, the type of this field is the character string type field.
Step S206, Boolean type communication protocol creates and finishes.
Boolean type communication protocol configuration data format design is as follows:
Boolean type protocol format configuration data is kept in the XML file, and the partial document structure is as follows:
Purpose item in protocol format represents what type is this field be as, command name or parameter type, or be other types.The agreement length of Boolean type is constant 1.
2, the collocation method of value type communication protocol
As shown in Figure 3, be the collocation method flow chart of the value type communication protocol of the embodiment of the present invention.Value type communication protocol mainly refers to the communication protocol of Simulation with I O transmission, and the data of this protocol transmission are magnitudes of voltage within the specific limits, converts the data of double type to through this magnitude of voltage after certain conversion.In the device emulation system, the data of double type are mainly used in describing some continually varying property parameters and analog control signals.Because data and the Boolean type data of double type belong to direct IO interface, different just their field lengths are different, the type difference of field.Therefore similar with the layoutprocedure of Boolean type communication protocol.The method comprises the following steps:
Step S301, the title of establishment value type communication protocol.
Step S302, selecting the type of value type communication protocol is the AI/AO type.
Step S303, channel position corresponding to configuration numerical value type communication agreement.
Step S304, the voltage range of collocation channel.
Step S305, the form of configuration numerical value type communication agreement, wherein, this value type communication protocol comprises a field, and the length of this field is not fixed value 1, and it is variable, and the type of this field is integer field or floating type field.
Step S306, value type communication protocol creates and finishes.
Value type communication protocol data format design is as follows:
The protocol format data of value type communication protocol (AI/AO) are kept in the XML file, and the document of agreement form is as follows:
Top file format and Boolean type communications protocol format are very similar, all only have a field.Because they belong to the interface of direct IO type, difference is that Boolean type only has 0 and 1, and length one is decided to be 1 byte, and value type is the floating type data, indefinite length.This communication protocol of two types all directly communicates by the hardware line in physical device, so the protocol format problem that does not exist a plurality of field serials to transmit, this is also the maximum difference of the communication protocol module of they and the following character string type that will say.
3, character string type communication protocol collocation method
As shown in Figure 4, be the collocation method flow chart of the character string type communication protocol of the embodiment of the present invention.Character string type communication protocol is different with the numeric type communications protocol format from Boolean type communication protocol, and the communication protocol type of character string type generally all has the feature of a plurality of fields, and character string becomes a command context according to certain format combination.Generally, the protocol format that transmits in serial ports, Ethernet and DevcieNet communication interface is all this type.Owing to will express control or the Query Information of a complexity by the data of serial transmission, thus the form of agreement often also mark is complicated.The communication protocol layoutprocedure more complicated of character string type, except title, type, channel position and some passage physical parameters of configuration protocol, the more important thing is the total length of config string and the division of each field length, the type of each field, effect etc.The method comprises the following steps:
Step S401, the title of establishment character string type communication protocol.
Step S402, selecting the type of character string type communication protocol is serial ports, Ethernet or DeviceNet type.
Step S403, the channel position that config string type communication agreement is corresponding.
Step S404, the physical parameter of configuration communication interface.
Step S405 is according to the form total length of the command context config string type communication agreement of serial ports port, ethernet port and DeviceNet port.
Step S406 is according to length, type and the effect of each field in form total length config string type communication agreement.
Step S407 judges whether unappropriated agreement length is 0.If judge that unappropriated agreement length is 0, continues execution in step S406.
Step S408, if judge that unappropriated agreement length is 0, character string type communication protocol creates and finishes.
Character string type communication protocol data format design is as follows:
The configuration data of character string type communication protocol is kept in XML document, and file structure is as follows:
The form of the communication protocol of character string type is all generally a plurality of fields, and the effect of each field also is not quite similar, some expression parameter values, and some marking command titles, what have is verification and other type of action such as grade.
Wherein, the communication protocol pattern is divided into the protocol format of three types on the whole, when design realized, Boolean type and value type communication protocol belonged to the communication protocol of direct IO type, realized the management that these two communication protocols are configured with a Direct IO class.Preserve the configuration data of agreement with a structure in class, because value type and Boolean type communication protocol all only have a field, therefore represent this field in the structure the inside with a string variable.And the communication protocol more complicated of character string type, can be divided into ethernet communication protocol, serial communication protocol and deviceNet communication protocol three major types, the communication protocol of every type has different physical parameters to need configuration, therefore the structure of every kind of agreement also is not quite similar, with three class serialport, three classes of Ethernet and deviceNet realize respectively the configuration data management to top described type in configuration subsystem.The communication protocol of character string type is identical aspect protocol fields, all use the chained list presentation protocol field of a structure type in the structure of three protocol class, wherein each element of chained list represents the particular content of a field, comprises start byte, stops byte, the content such as field effect, field type.
As shown in Figure 5, for the embodiment of the present invention according to the content of communication protocol needs configurations and sequence design interface schematic diagram.Configured the title of Ethernet protocol in figure, the total length of type and agreement and the configuration of each field.
Step S102, analogue system Boolean type communication protocol corresponding according to the type selecting of equipment, value type communication protocol or character string type communication protocol and emulator communicate.
Communication protocol is mainly used to the data that send are carried out package, the data that receive are resolved, so communication protocol pattern configurations module also provides package and separated packet interface.In addition, other simulation subsystems only have protocol format to communicate, only could distinguish the different command that control end sends according to protocol format and protocol contents at the particular content post-simulation subsystem of specifically having formulated each protocol fields, could send data to control end according to protocol format and content.Therefore this is placed on subsystem also provides communication protocol assignment interface.
A data solution packet interface:
private?void?ParsePacket(string?data，out?string?command，out?ArrayList?infolist)
The Data Analysis process that is simulation software from carrying out after the interface integrated circuit board is received data that unpacks of data, it parse the command name that receives data and order with parameter and control information.Wherein, Boolean type communication protocol and numeric type communications protocol format be owing to only having a field, a byte, so title and order with parameter all refer to the data of a byte.As shown in Figure 6, be the data solution packet procedures of the embodiment of the present invention.Comprise the following steps:
Step S601, the emulation termination is received data.
Step S602 is converted to character array with character string.
Step S603 reads the protocol fields configuration information.
Step S604 judges whether field is command name.
Step S605, if the judgement field is command name, the hold-over command title, follow execution in step S609.
Step S606 if the judgement field is not command name, judges further whether field is parameter information.
Step S607 if the judgement field is parameter information, preserves parameter information, then execution in step S609.
Step S608 if the judgement field is not parameter information, judges that field is that other information are ignored and do not processed.
Step S609 judges whether that protocol fields is not processed in addition, if also have protocol fields not process, returns to step S603.
Step S610 finishes to separate packet procedures.
B, data packet interface:
private?string?SealPacket(string?command，ArrayList?comminfo)
When simulation subsystem need to send data to control end, just need to carry out the package operation to the data that medicine sends.According to the content of protocol format, fill in command name in the command name field, fill in parameter value at parameter field, the checksum field calculation check and value, everything action is all completed in the package process, and after having encapsulated, data can send with the data of character string type.If Boolean type communication protocol or numeric type communication protocol do not need to carry out complicated operation, the data that only need judgement to send are 1 or 0, and are directly just passable to the transmission 1 or 0 of IO port.As shown in Figure 7, be the data packet process of the embodiment of the present invention.Comprise the following steps:
Step S701, the emulation end sends data.
Step S702 reads and sends the protocol fields configuration information.
Step S703 judges whether field is command name.
Step S704 if the judgement field is command name, adds command name and sends chained list transmission, then execution in step S708.
Step S705 if the judgement field is not command name, judges further whether field is parameter information.
Step S706, if the judgement field is parameter information, query facility parameter value, and parameter value is added the transmission chained list, then execution in step S708.
Step S707 if the judgement field is not parameter information, judges that described field is ignored for other information not process.
Step S708 judges whether that protocol fields will be processed in addition, if judgement is execution in step S702.
Step S709 if judgement does not have protocol fields to process, finishes the package process.
C, protocol fields assignment interface:
private?string?SetField(string?protocolname，ArrayList?comminfo)
After simulation subsystem parses data, need to operate according to the specific instructions and the occurrence that receive, and judge that receiving data is which order just need to compare the title of naming in the command list (CLIST) in the command name that receives and emulator on earth, if title both is identical, just expression has received that analogue system received this order, and emulator just can carry out according to the data of receiving the sequence of operations such as parameter assignment.Therefore, before emulator begins communication, need the particular content of each protocol fields of each order of configuration agreement used, just used our protocol fields assignment interface this moment.First parameter provides the title of agreement, and second parameter transmits the particular content of each protocol fields with the form of chained list.As shown in Figure 8, be the protocol fields assignment procedure of the embodiment of the present invention.
Step S801 is according to the protocol name vlan query protocol VLAN.
Step S802 reads protocol fields configuration information corresponding to agreement.
Step S803 judges whether field is command name.
Step S804 if the judgement field is command name, is this field assignment with command name, and follows execution in step S808.
Step S805 if the judgement field is not command name, judges further whether field is parameter information.
Step S806 if the judgement field is parameter information, specifies the property parameters title of relevant device for field, and follows execution in step S808.
Step S807 if the judgement field is not parameter information, judges that field is that other information are ignored and do not processed.
Step S808 judges whether that protocol fields is not processed in addition, if judgement also has execution in step S802.
Step S809 is not if judgement has protocol finishes field assignment procedure.
The present invention has advantages of as follows:
1, unified interface
The present invention externally provides a unified configuration interface, can find out from the configuration flow figure of three kinds of dissimilar communications protocol format, their interface is identical, for the package of three kinds of communication protocol type, unpack, the calling interface in assignment procedure is also to use the same interface.
2, general configurable
Therefore the present invention can configure all communications protocol format in semiconductor manufacturing equipment field, has the characteristics of communicativeness in the semiconductor manufacturing equipment field.
Although illustrated and described embodiments of the invention, for the ordinary skill in the art, be appreciated that without departing from the principles and spirit of the present invention and can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is by claims and be equal to and limit.
Claims (1)
1. the communication protocol mode configuration method of a semiconductor manufacturing equipment functional simulation-oriented, is characterized in that, comprises the following steps:
Be Boolean type communication protocol with the digital I/O port arrangement, be value type communication protocol with Simulation with I O port arrangement, be character string type communication protocol with serial ports port, ethernet port and DeviceNet port arrangement, wherein, described Boolean type communication protocol is that character string type field and field length are a byte; Described value type communication protocol is integer field or floating type field, and the field length of described value type communication protocol is variable; In described character string type communication protocol, length, type and the effect of the total length of character string, each field are configured according to the command context of described serial ports port, ethernet port and DeviceNet port; With
Analogue system Boolean type communication protocol corresponding according to the type selecting of equipment, value type communication protocol or character string type communication protocol and described equipment communicate,
Wherein, described is that Boolean type communication protocol further comprises with the digital I/O port arrangement: the title that creates Boolean type communication protocol; The type of selecting described Boolean type communication protocol is the DI/DO type; Configure channel position corresponding to described Boolean type communication protocol; Configure the high-low level scope of described passage; Configure the form of described Boolean type communication protocol, wherein, comprise a field, and the length of described field is a byte, the type of described field is the character string type field,
Wherein, described is that value type communication protocol further comprises with Simulation with I O port arrangement: the title that creates value type communication protocol; The type of selecting described value type communication protocol is the AI/AO type; Configure channel position corresponding to described value type communication protocol; Select the voltage range of described passage; Configure the form of described value type communication protocol, wherein, comprise a field, the variable-length of described field, the type of described field is integer field or floating type field,
Wherein, described is that character string type communication protocol further comprises with serial ports port, ethernet port and DeviceNet port arrangement: the title that creates character string type communication protocol; The type of selecting described character string type communication protocol is serial ports, Ethernet or DeviceNet type; Configure channel position corresponding to described character string type communication protocol; The physical parameter of configuration communication interface; Configure the form total length of described character string type communication protocol according to the command context of described serial ports port, ethernet port and DeviceNet port; Length, type and effect according to each field in the described character string type communication protocol of described form total length configuration; Judge whether unappropriated agreement length is 0; If judge that unappropriated agreement length is not 0, continue length, type and the effect of each field in the described character string type communication protocol of configuration, until judge that unappropriated agreement length is 0,
Wherein, described analogue system Boolean type communication protocol corresponding according to the type selecting of equipment, value type communication protocol or character string type communication protocol and described equipment communicate further and comprises: the emulation termination is received data; Character string is converted to character array; Read the protocol fields configuration information; Judge whether field is command name; If judge that described field is command name, preserves described command name; If judge that described field is not command name, further judge whether described field is parameter information; If judge that described field is parameter information, preserves described parameter information; If judge that described field is not parameter information, judge that described field is ignored for other information not process; Successively all protocol fields are processed, and are finished to separate packet procedures,
Wherein, also comprise: the emulation end sends data; Read and send the protocol fields configuration information; Judge whether described field is command name; If judge that described field is command name, adds the transmission chained list with described command name; If judge that described field is not command name, further judges whether described field is parameter information; If judge that described field is parameter information, query facility parameter value, and described parameter value is added the transmission chained list; If judge described field for parameter information, judge that described field is ignored for other information not process; Successively all protocol fields are processed, and are finished the package process,
Wherein, also comprise: protocol fields is carried out assignment,
Wherein, describedly protocol fields is carried out assignment further comprise: according to the protocol name vlan query protocol VLAN; Read protocol fields configuration information corresponding to described agreement; Judge whether described field is command name; If judge that described field is command name, be described field assignment with described command name; If judge that described field is not command name, further judges whether described field is parameter information; If judge that described field is parameter information, it is the property parameters title that described field is specified relevant device; If judge described field for parameter information, judge that described field is ignored for other information not process; Successively all protocol fields are processed, and protocol finishes field assignment procedure.
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| CN 201010291914 CN101964788B (en) | 2010-09-26 | 2010-09-26 | Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method |
| PCT/CN2011/071276 WO2012037796A1 (en) | 2010-09-21 | 2011-02-24 | Simulation platform for integrated circuit manufacturing equipment |
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| WO2012037796A1 (en) * | 2010-09-21 | 2012-03-29 | 清华大学 | Simulation platform for integrated circuit manufacturing equipment |
| CN103457845A (en) * | 2013-09-09 | 2013-12-18 | 江南大学 | Conversion technology capable of being configured with multiple protocols |
| CN107621809B (en) * | 2016-07-14 | 2020-01-03 | 北京北方华创微电子装备有限公司 | Method for configuring IO channel and semiconductor processing method |
| CN108667763A (en) * | 2017-03-28 | 2018-10-16 | 北京京东尚科信息技术有限公司 | Method, system, electronic equipment and the storage medium that communication protocol scheduling executes |
| CN108471367A (en) * | 2018-03-19 | 2018-08-31 | 天筑科技股份有限公司 | The analogue system and method for communication base station room internally-powered equipment based on serial ports |
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| US6829727B1 (en) * | 2001-01-12 | 2004-12-07 | Metalink Corp. | In-circuit emulation of single chip microcontrollers |
| CN1867896A (en) * | 2003-09-30 | 2006-11-22 | 东京毅力科创株式会社 | System and method for on-tool semiconductor simulation |
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| US6829727B1 (en) * | 2001-01-12 | 2004-12-07 | Metalink Corp. | In-circuit emulation of single chip microcontrollers |
| CN1867896A (en) * | 2003-09-30 | 2006-11-22 | 东京毅力科创株式会社 | System and method for on-tool semiconductor simulation |
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