CN101398669A - Mutual locking and alarming processing method and system - Google Patents
Mutual locking and alarming processing method and system Download PDFInfo
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- CN101398669A CN101398669A CNA2007101754487A CN200710175448A CN101398669A CN 101398669 A CN101398669 A CN 101398669A CN A2007101754487 A CNA2007101754487 A CN A2007101754487A CN 200710175448 A CN200710175448 A CN 200710175448A CN 101398669 A CN101398669 A CN 101398669A
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Abstract
The invention provides an interlock and alarm processing method. The method comprises the following steps: an interlock-alarm corresponding relationship aiming at a plurality of manufacturing devices is preset, the interlock comprises a parameter setting interlock and a value choosing interlock, when the parameter values protected by the parameter setting interlock vary, the parameter values are judged whether to meet the trigger conditions of the interlock, if yes, the corresponding alarm processing is performed; when the parameter values involved by the trigger conditions of the value choosing interlock vary, the parameter values are judged whether or not to meet the trigger conditions of the interlock, if yes, the corresponding safe operation and alarm processing are performed. In conclusion, the method can effectively improve the reliability of the device control software in terms of processing the interlock and the alarm, greatly reduce the expense of the system, and more effectively protect the safety of the device as well as facilitate the design and the update of the software. In particular, the advantages of the method can be greatly embodied when the method aims at a complex logic required to control a plurality of devices.
Description
Technical field
The present invention relates to control and management field, particularly relate to a kind of disposal route and system of interlocking and the warning at manufacturing equipment at manufacturing equipment.
Background technology
Modern manufacturing process relates to multi-disciplinary crossing domain, and most PROCESS FOR TREATMENT all need be in rigorous environment condition very, and as certain pressure, temperature or the like just can be carried out down; In addition, the employed equipment of modern manufacturing is often very expensive.Therefore, in order to protect these manufacturing equipments, in the logic of editing equipment management software, be processing greatly about interlocking and warning.In theory, the warning in the device control logic is the prompting for some abnormal conditions, and the option of next step operation that can carry out can be provided to the user; Interlocking then is the qualification for some specified conditions in the manufacturing equipment, to protect relevant manufacturing equipment.
General, in the device control field, the interlocking condition is generally used for the particular job condition of initialization system, guarantees the safe condition and the operate as normal of equipment, and alarm mechanism then provides corresponding abnormal signal for the operator, and provides a series of processing unusual option.The a big chunk in device control field is reported to the police all directly related with the interlocking condition, therefore the interlocking condition of device interior is carried out association process with the processing of reporting to the police, and is an important content realizing device control software.
With reference to Fig. 1, show a kind of disposal route of using always in the device control field at present for interlocking and warning.This kind technical scheme is by setting up the unique interlocking of a system (relating to a plurality of manufacturing equipments)-warning mapping relations table, interlocking-warning mapping relations table being put in whole interlocking control; Then, start one independently thread constantly inquire about each interlocking condition in this mapping relations table, judge whether it is satisfied, when the interlocking condition satisfies, search corresponding warning identifier by the mapping relations table, this warning of dishing out, and handle accordingly according to user's selection.
The shortcoming of above-mentioned prior art scheme is: need safeguard all the time one independently thread be used for constantly carrying out the inquiry of a plurality of interlocking conditions, thereby increased the expense of system greatly, also reduced the stability of system.And, because the device control logic often involves a lot of equipment, wherein can there be a large amount of interlocking situations, the interlocking condition that need inquire about and the operation amount of execution are too many, though be very easy to realize so above-mentioned prior art is taken precautions against, but along with equipment moves for a long time, shortcoming has just come out, and its system overhead that causes is that the physical device Control Software is unacceptable.In addition,, be easy to cause system's generation deadlock even collapse, reduced the stability of system owing to need to safeguard an independently thread a large amount of equipment state value of visit of not stopping.
In a word, the scheme of above-mentioned prior art, system overhead is big, security is not high, can't satisfy the demand in the device control field that becomes increasingly complex.Promptly need the urgent technical matters that solves of those skilled in the art to be exactly: to propose a kind of technical scheme that can finish interlocking and warning association process safely and efficiently, to satisfy the demand in the device control field that becomes increasingly complex.
Summary of the invention
Technical matters to be solved by this invention provides a kind of disposal route and system that carries out interlocking and warning at manufacturing equipment, can realize control and management safely and efficiently for a plurality of manufacturing equipments, system overhead and resource occupation can be effectively reduced, the demand in the device control field that becomes increasingly complex can be satisfied.
In order to address the above problem, the invention discloses the disposal route of a kind of interlocking and warning, comprising: preset corresponding relation at the interlocking-warning of a plurality of manufacturing equipments; Described interlocking comprises setup parameter interlocking and value interlocking; When the parameter value of being protected when described setup parameter interlocking changes, judge whether to satisfy the trigger condition of this interlocking,, then carry out corresponding the warning and handle if satisfy; When the related parameter value of the trigger condition of described value interlocking changes, judge whether to satisfy the trigger condition of this interlocking, if satisfy, then carry out corresponding safe operation and the processing of reporting to the police.
Wherein, when the trigger condition of setup parameter interlocking satisfies, can also comprise: block the main system thread, described main system thread is used to control the operation of each manufacturing equipment.
Preferably, when the trigger condition of value interlocking satisfies, start a new thread, be used to carry out corresponding safe operation.
Further, before carrying out described safe operation, this method can also comprise: judge whether corresponding safe operation can trigger the setup parameter interlocking, if, then may trigger the operation of setup parameter interlocking and insert in the thread pool, described thread pool is to one of each operation start of inserting thread independently.
Wherein, can the corresponding warning of each interlocking; Also can, the corresponding warning of trigger condition of an interlocking; Also can, the corresponding warning of a plurality of trigger conditions of an interlocking; All right, the corresponding warning of the safe operation of one or more value interlockings.
Preferably, the corresponding relation of described interlocking-warning is stored with the data mode that is independent of outside the master routine.
According to another embodiment of the present invention, the disposal system of a kind of interlocking and warning is also disclosed, comprising:
Mapping table at the interlocking-warning of a plurality of manufacturing equipments; Described interlocking comprises setup parameter interlocking and value interlocking;
Setup parameter interlock process module is used for judging whether to satisfy the trigger condition of this interlocking when parameter value that described setup parameter interlocking is protected changes, if satisfy, then calls alarm module;
The value interlocking processing module is used for judging whether to satisfy the trigger condition of this interlocking when the related parameter value of the trigger condition of described value interlocking changes, if satisfy, then calls execution module and alarm module;
Execution module is used to carry out corresponding safe operation;
Alarm module is used to carry out corresponding warning and handles.
Preferably, when the trigger condition of setup parameter interlocking satisfied, described setup parameter interlocking module also was used to call the module of blocking the main system thread, and described main system thread is used to control the operation of each manufacturing equipment.
Preferably, to carry out corresponding safe operation be to finish by starting a new thread to described execution module.
Preferably, described system can also comprise: the concurrent interlock process module that connects value interlocking processing module and execution module, be used to judge whether corresponding safe operation can trigger the setup parameter interlocking, if, then may trigger the operation of setup parameter interlocking and insert in the thread pool, described thread pool is to one of each operation start of inserting thread independently.
In this system, the relation of interlocking and warning can comprise: the corresponding warning of each interlocking; Perhaps, an interlocking corresponding warning of trigger condition; Perhaps, corresponding warning of a plurality of trigger conditions of an interlocking; Perhaps, corresponding warning of the safe operation of one or more value interlockings.
Preferably, the mapping table of described interlocking-warning is stored with the data mode that is independent of outside the master routine.
Compared with prior art, the present invention has the following advantages:
The present inventor is by to the anatomizing of interlocking situation, and from the angle of processing logic the interlocking situation is divided into setup parameter interlocking and value interlocking two classes, sets concrete treatment scheme respectively at setup parameter interlocking and value interlocking then.General, the setup parameter interlocking is used to guarantee just can set certain value under the prerequisite that a series of conditions all satisfy, and it is preventative, can prevent from certain value is carried out wrong setting; Value interlocking then is when certain condition satisfies, and triggers a series of operation automatically, and it is a protectiveness, and the state of automatic monitor system in case find danger, automatically performs a series of operation, makes system get back to safe condition.So the present invention according to separately characteristics, set adapt, treatment scheme targetedly, thereby can raise the efficiency and security.
In concrete treatment scheme, at the setup parameter interlocking, because it belongs to preventative, be to be used for preventing that parameter is by the setting of mistake, so as long as when needs are revised certain parameter, carry out the judgement of corresponding interlocking condition, determine whether allowing to revise according to the result, whether dishing out reports to the police gets final product; And value interlocking is a protectiveness; be to be used for preventing that the value of some parameter from not satisfying some condition; in order to guarantee the safety of equipment; automatically carry out sequence of operations; make equipment recover safe condition; therefore, the present invention only starts the judgement of interlocking condition when the related parameter value variation of value interlocking.From top analytic process as can be seen, the present invention has reduced and has started the judgement number of times of interlocking condition, and then has reduced system overhead; And, when the related parameter of interlocking changes, just start the judgement of interlocking condition, can reduce access times, thereby improve security a large amount of equipment state values.
Further, when the condition of value interlocking satisfies, the present invention starts a new thread and is used to carry out the pairing associated safety operation of this value interlocking, main system thread originally (being used to control the thread of manufacturing equipment operation) still continues to carry out, the new thread of carrying out safe operation is finished and stops voluntarily afterwards getting final product, thereby does not influence the operation of manufacturing equipment under the main system thread.
Moreover, because the solution of the present invention can be with the triggering of interlocking and the operation flow of processing disengaging program.As: the operation of valve is arranged out in the flow process, and software design personnel need not consider out the interlocking that valve may cause, the flow process that need write out valve can be by the interlocking of other personnel's specialized designs all operations.In case open the flow process of valve or open the related interlocking of valve and change, all can independently revise like this, can other people's design not impacted by the professional.
In a word, use method of the present invention, can improve the reliability of device control software aspect processing interlocking and warning effectively, greatly reduce system overhead, the safety of more effective protection equipment makes things convenient for the design and the renewal of software simultaneously.Particularly control the complex logic of a plurality of equipment at needs, can greatly reduce the exploitation complexity of system, develop safely faster, reliability height and system take the few device control software of hardware resource.
Description of drawings
Fig. 1 is the process flow figure of a kind of existing interlocking and warning;
Fig. 2 is the flow chart of steps of the disposal route embodiment of a kind of interlocking of the present invention and warning;
Fig. 3 is the structured flowchart of the disposal system embodiment of a kind of interlocking of the present invention and warning;
Fig. 4 is the flow chart of steps of object lesson 1 of the present invention;
Fig. 5 is the flow chart of steps of object lesson 2 of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
The present invention can be used in numerous general or special purpose computingasystem environment or the configuration.For example: personal computer, server computer, handheld device or portable set, plate equipment, multicomputer system, the system based on microprocessor, set top box, programmable consumer-elcetronics devices, network PC, small-size computer, mainframe computer, comprise distributed computing environment of above any system or equipment or the like.
The present invention can describe in the general context of the computer executable instructions of being carried out by computing machine, for example program module.Usually, program module comprises the routine carrying out particular task or realize particular abstract, program, object, assembly, data structure or the like.Also can in distributed computing environment, put into practice the present invention, in these distributed computing environment, by by communication network connected teleprocessing equipment execute the task.In distributed computing environment, program module can be arranged in the local and remote computer-readable storage medium that comprises memory device.
With reference to Fig. 2, show the embodiment of the disposal route of a kind of interlocking of the present invention and warning, specifically can may further comprise the steps:
Wherein, the corresponding relation of described interlocking-warning can be by the mode of tables of data, or the mode of database, and perhaps the mode of file exists.In fact, the present invention can set up the mapping table of unique interlocking-warning, also can set up the mapping table of two interlocking-warnings, is used for respectively at setup parameter interlocking and value interlocking.
Preferably, the corresponding relation of described interlocking-warning is stored with the data mode that is independent of outside the master routine.Because the corresponding relation of this interlocking-warning is present in the program outside with certain feasible data mode, therefore, system does not need to recompilate the corresponding relation that can discern interlocking-warning of revising, and promptly this mode can satisfy the frequent variations of the corresponding relation of interlocking-warning in the modern manufacturing process.Further, owing to may have setup parameter interlocking and the concurrent situation of value interlocking in the reality, and owing to the corresponding relation of described interlocking-warning is positioned at outside the master routine, need not consider whether can trigger interlocking when that is to say the compilation operation flow process, can more be absorbed in the logic of flow process, thereby make the structure of program more clear, more independent.
For the corresponding relation of interlocking-warning, can there be following multiple corresponding relation: the corresponding warning of each interlocking; Perhaps, an interlocking corresponding warning of trigger condition; Perhaps, corresponding warning of a plurality of trigger conditions of an interlocking; Perhaps, corresponding warning of the safe operation of one or more value interlockings.That is to say that each setup parameter interlocking is including, but not limited to a value that needs protection, one or more trigger condition, warning; Each setup parameter interlocking can corresponding warning, and each trigger condition also can corresponding warning.Each value interlocking needs the operation carried out after one or more trigger conditions, warning and a series of triggering; Each value interlocking can corresponding warning, and each operation also can corresponding warning.In a word, the present invention can set up very flexibly and report to the police and trigger relation between the operation that the conditioned disjunction of reporting to the police need carry out, can be according to this corresponding relation corresponding warning of dishing out, and provide abundant information to the user.
Warning described in step 102 and the step 103 is handled to generally comprise to the operator provides various forms of abnormal signals and (is for example reported to the police, various sound and light signals etc.), and provide a series of processing unusual option, wait for operator's processing, and handle accordingly according to operator's concrete selection, continue after pending the finishing to judge alert if,, then continue the operation of manufacturing equipment if remove.
Preferably, when the trigger condition of setup parameter interlocking satisfies, also comprise: block the main system thread, described main system thread is used to manage the operation of each manufacturing equipment of control.And when the trigger condition of value interlocking satisfies, then can not need to block the main system thread, only need to carry out corresponding safe operation and report to the police to handle getting final product.This because of: value interlocking is a protectiveness, and the setup parameter interlocking is preventative, that is to say that the value that value interlocking is protected is the actual value of hardware device, and the value that the setup parameter interlocking the is protected value that to be software systems attempt to compose.So value interlocking must be carried out safe operation, otherwise may cause damage to hardware after triggering at once; The setup parameter interlocking then needs to block thread, waits for that the user handles, because reality goes down to the hardware assignment parameter.
Further,, when the trigger condition of value interlocking satisfies, start a new thread, be used to carry out corresponding safe operation, make equipment recover safe condition in order not influence interlocking inquiry thread.
Need to prove, after triggering value interlocking, may need to carry out a series of safe operations, these operations should be carried out immediately, but may trigger the setup parameter interlocking when carrying out certain operation, this just might block processing threads, causes all operations in time not carried out.In order to address this problem, the present invention can further include following steps: judge whether corresponding safe operation can trigger the setup parameter interlocking, if, then may trigger the operation of setup parameter interlocking and insert in the thread pool, described thread pool is to one of each operation start of inserting thread independently; If not, then start a new thread, be used to carry out corresponding safe operation.Owing to all have a separate threads at each operation that may trigger the setup parameter interlocking in the thread pool, all can be attempted carrying out so can guarantee all operations, guaranteed the safety of equipment to greatest extent.Certainly, because some operation may cause the setup parameter interlocking, do not have real running succeeded.If but do not adopt the method for thread pool, more possiblely can not cause the operation of setup parameter interlocking not to be performed yet.
With reference to Fig. 3, show the embodiment of the disposal system of a kind of interlocking and warning, can comprise:
Mapping table 201 at the interlocking-warning of a plurality of manufacturing equipments; Described interlocking comprises setup parameter interlocking and value interlocking; Preferably, the mapping table of described interlocking-warning is stored with the data mode that is independent of outside the master routine.It is pointed out that said mapping table herein, be not limited to this a kind of data storage form of tables of data, and only be for convenience of description.
About the concrete corresponding relation of interlocking-warning, can be various, for example: the corresponding warning of each interlocking; Perhaps, an interlocking corresponding warning of trigger condition; Perhaps, corresponding warning of a plurality of trigger conditions of an interlocking; Perhaps, corresponding warning of the safe operation of one or more value interlockings.
Setup parameter interlock process module 202 is used for judging whether to satisfy the trigger condition of this interlocking when parameter value that the setup parameter interlocking is protected changes, if satisfy, then calls alarm module 205;
Value interlocking processing module 203 is used for judging whether to satisfy the trigger condition of this interlocking when the related parameter value of the trigger condition of value interlocking changes, if satisfy, then calls execution module 204 and alarm module 205;
Further, when the trigger condition of setup parameter interlocking satisfied, described setup parameter interlocking module also was used to call obstruction module 206, is used to block the main system thread, and described main system thread is used to manage the operation of each manufacturing equipment.
In order to solve the problem of concurrent interlocking, in another preferred embodiment of the present invention, can also comprise: concurrent interlock process module 207, connect described value interlocking processing module 203 and execution module 204, be used to judge whether corresponding safe operation can trigger the setup parameter interlocking, if, then may trigger the operation of setup parameter interlocking and insert in the thread pool, described thread pool is to one of each operation start of inserting thread independently.
Need to prove that each embodiment in this instructions all adopts the mode of going forward one by one to describe, what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.For device class embodiment, because it is similar substantially to method embodiment, so description is fairly simple, relevant part gets final product referring to the part explanation of method embodiment.
In order to describe the present invention more clearly, describe below by two concrete examples:
Example 1
With reference to Fig. 4, suppose present embodiment at the semiconductor vacuum treatment facility, and in the control system of semiconductor vacuum treatment facility, if open two valves between the continuous chamber, must be that two chambers are in same pressure condition, promptly be vacuum or simultaneously for atmosphere simultaneously.The pressure that for example pre-defines chamber is vacuum less than 80mTorr, is atmosphere greater than 740Torr, in case two chambers are under the different pressure conditions, then can not carry out the operation of driving valve, the choke system main thread, and send warning, wait for that the user carries out corresponding recovery operation.
Above-mentioned interlocking and alarm processing method are the processing mode of the setup parameter interlocking that the present invention mentions, concrete steps are as follows:
Set up the corresponding relation of interlocking and warning in the system, that is: set up a setup parameter interlocking, the bid value of protection valve opening correspondence, trigger condition: 1, two one of chambers be that one in vacuum is an atmosphere; 2, two one of chambers are that one in atmosphere is not an atmosphere for vacuum neither yet; 3, two one of chambers are that one in vacuum is not an atmosphere for vacuum neither yet.Corresponding each trigger condition is set up a warning, and the information that trigger condition is satisfied adds in the warning.
Move whole semiconductor vacuum treatment facility, when system sends out the order of valve, detect whether this order of setup parameter interlock protection is arranged,, then carry out actual equipment if do not have; If have, judge then whether the trigger condition in the setup parameter interlocking has one to satisfy, the warning of then dishing out corresponding to this trigger condition is arranged, if all do not satisfy, then carry out actual equipment.The warning in case dish out, then the choke system main thread is waited for user's processing; After pending the finishing, recover main thread.
Example 2
With reference to Fig. 5, this example remains at the semiconductor vacuum treatment facility.
In the control system of semiconductor vacuum treatment facility, the pressure in the chamber can not be too big, and danger appears in the too big equipment that may cause.For example pre-define chamber pressure and can not surpass 800Torr, when in (charging into nitrogen) when operation, inflated to chamber by system, in case the pressure in the chamber greater than 800Torr, system can close gas filling valve automatically, stops inflation.
Above-mentioned interlocking and alarm processing method are the mentioned value interlocking processing mode of the present invention, and concrete steps are as follows:
Set up the corresponding relation of interlocking and warning in the system, that is: set up a value interlocking, comprise trigger condition: the pressure of chamber is greater than 800Torr; Operation: close gas filling valve.To should interlocking setting up a warning, the information that condition is satisfied adds in the warning.
Move whole semiconductor vacuum treatment facility, when system sends the order of inflation, open gas filling valve, because the pressure of chamber changes the force value of the continuous amendment record of system's meeting, each modification will judge all whether the trigger condition (pressure of chamber is greater than 800Torr) of value interlocking satisfies, if do not satisfy then the force value of amendment record,, then start the operation of new this interlocking of thread execution if satisfy, promptly close gas filling valve, the corresponding warning of dishing out then.Whole process is choke system main thread not, and the new thread of the executable operations back that is finished stops getting final product.
More than to the disposal route and the system of a kind of interlocking and warning at manufacturing equipment provided by the present invention, be described in detail, used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (12)
1, the disposal route of a kind of interlocking and warning is characterized in that, comprising:
Preset corresponding relation at the interlocking-warning of a plurality of manufacturing equipments; Described interlocking comprises setup parameter interlocking and value interlocking;
When the parameter value of being protected when described setup parameter interlocking changes, judge whether to satisfy the trigger condition of this interlocking,, then carry out corresponding the warning and handle if satisfy;
When the related parameter value of the trigger condition of described value interlocking changes, judge whether to satisfy the trigger condition of this interlocking, if satisfy, then carry out corresponding safe operation and the processing of reporting to the police.
2, the method for claim 1 is characterized in that, when the trigger condition of setup parameter interlocking satisfies, also comprises: block the main system thread, described main system thread is used to control the operation of each manufacturing equipment.
3, the method for claim 1 is characterized in that, when the trigger condition of value interlocking satisfies, starts a new thread, is used to carry out corresponding safe operation.
4, as claim 1 or 3 described methods, it is characterized in that, before carrying out described safe operation, also comprise:
Judge whether corresponding safe operation can trigger the setup parameter interlocking, if, then may trigger the operation of setup parameter interlocking and insert in the thread pool, described thread pool is to one of each operation start of inserting thread independently.
5, the method for claim 1 is characterized in that,
The corresponding warning of each interlocking;
Perhaps, an interlocking corresponding warning of trigger condition;
Perhaps, corresponding warning of a plurality of trigger conditions of an interlocking;
Perhaps, corresponding warning of the safe operation of one or more value interlockings.
6, the method for claim 1 is characterized in that,
The corresponding relation of described interlocking-warning is stored with the data mode that is independent of outside the master routine.
7, the disposal system of a kind of interlocking and warning is characterized in that, comprising:
Mapping table at the interlocking-warning of a plurality of manufacturing equipments; Described interlocking comprises setup parameter interlocking and value interlocking;
Setup parameter interlock process module is used for judging whether to satisfy the trigger condition of this interlocking when parameter value that described setup parameter interlocking is protected changes, if satisfy, then calls alarm module;
The value interlocking processing module is used for judging whether to satisfy the trigger condition of this interlocking when the related parameter value of the trigger condition of described value interlocking changes, if satisfy, then calls execution module and alarm module;
Execution module is used to carry out corresponding safe operation;
Alarm module is used to carry out corresponding warning and handles.
8, system as claimed in claim 7 is characterized in that, when the trigger condition of setup parameter interlocking satisfied, described setup parameter interlocking module also was used to call the module of blocking the main system thread, and described main system thread is used to control the operation of each manufacturing equipment.
9, system as claimed in claim 7 is characterized in that, it is to finish by starting a new thread that described execution module is carried out corresponding safe operation.
10, as claim 7 or 9 described systems, it is characterized in that, also comprise:
The concurrent interlock process module that connects value interlocking processing module and execution module, be used to judge whether corresponding safe operation can trigger the setup parameter interlocking, if, then may trigger the operation of setup parameter interlocking and insert in the thread pool, described thread pool is to one of each operation start of inserting thread independently.
11, system as claimed in claim 7 is characterized in that,
The corresponding warning of each interlocking;
Perhaps, an interlocking corresponding warning of trigger condition;
Perhaps, corresponding warning of a plurality of trigger conditions of an interlocking;
Perhaps, corresponding warning of the safe operation of one or more value interlockings.
12, system as claimed in claim 7 is characterized in that, the mapping table of described interlocking-warning is stored with the data mode that is independent of outside the master routine.
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|---|---|---|---|
| CN200710175448A CN100595699C (en) | 2007-09-29 | 2007-09-29 | Method and system for processing interlock and alarm |
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| CN200710175448A CN100595699C (en) | 2007-09-29 | 2007-09-29 | Method and system for processing interlock and alarm |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968742A (en) * | 2010-09-21 | 2011-02-09 | 清华大学 | Internal interlocking management method and device for simulation system |
| CN104073784A (en) * | 2013-03-27 | 2014-10-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | MOCVD equipment interlocking control method and system |
| CN104281141A (en) * | 2013-07-04 | 2015-01-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process gas interlocking control method and system |
| CN104471495A (en) * | 2012-07-17 | 2015-03-25 | 三菱电机株式会社 | Control device and control method |
-
2007
- 2007-09-29 CN CN200710175448A patent/CN100595699C/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968742A (en) * | 2010-09-21 | 2011-02-09 | 清华大学 | Internal interlocking management method and device for simulation system |
| CN101968742B (en) * | 2010-09-21 | 2013-05-22 | 清华大学 | Internal interlocking management method and device for simulation system |
| CN104471495A (en) * | 2012-07-17 | 2015-03-25 | 三菱电机株式会社 | Control device and control method |
| CN104471495B (en) * | 2012-07-17 | 2017-03-29 | 三菱电机株式会社 | Control device and control method |
| CN104073784A (en) * | 2013-03-27 | 2014-10-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | MOCVD equipment interlocking control method and system |
| CN104073784B (en) * | 2013-03-27 | 2016-08-10 | 北京北方微电子基地设备工艺研究中心有限责任公司 | The interlock control method of MOCVD device and system |
| CN104281141A (en) * | 2013-07-04 | 2015-01-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process gas interlocking control method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100595699C (en) | 2010-03-24 |
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