CN101968342B - Orthogonal fine scanning based method for measuring mass centers of tiny light spots - Google Patents

Orthogonal fine scanning based method for measuring mass centers of tiny light spots Download PDF

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CN101968342B
CN101968342B CN2010102892043A CN201010289204A CN101968342B CN 101968342 B CN101968342 B CN 101968342B CN 2010102892043 A CN2010102892043 A CN 2010102892043A CN 201010289204 A CN201010289204 A CN 201010289204A CN 101968342 B CN101968342 B CN 101968342B
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gray
movable stand
single pixel
scale value
dimentional movable
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CN101968342A (en
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吕志伟
王新
巴德欣
刘晓妍
姜振华
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention provides an orthogonal fine scanning based method for measuring the mass centers of tiny light spots, and relates to a method for measuring the mass centers of light spots, which solves the problem that the mass centers of the tiny light spots can not be directly measured at present. The measuring method is realized based on a light spot measuring device which comprises a two-dimensional moving flame, a CCD (Charge Coupled Device) detector and a data acquisition unit. The method comprises the following steps of: detecting and receiving the light spots of incident light by using the CCD detector to make the light spots completely irradiate on a certain photosensitive pixel of the CCD detector, and displaying the grey level of the light spots by adopting the data acquisition unit; then respectively moving the photosensitive pixel in a direction X and a direction Y by repeatedly moving the two-dimensional moving frame, recording the current relative displacement value and the current gray value in a moving process once the frame is moved in one step; and finally calculating the mass center location of the light spot by making a gray value curve. The method can be used in the field of measurement on the mass centers of the light spots.

Description

Small spot barycenter measuring method based on the quadrature fine scanning
Technical field
The present invention relates to a kind of barycenter measuring method of hot spot.
Background technology
The laser beam that focuses on is widely used in fields such as scientific experiment and engineering project.Realization is the prerequisite of laser aiming and aiming to the accurate measurement of small spot centroid position.Therefore, the measurement to this small spot centroid position has very high requirement.Existing facula mass center measuring technique mainly can be divided into following several types: knife edge scanning method, slit scan method, iris method etc.But these methods all can't realize the direct measurement to the barycenter of small spot.
Summary of the invention
The objective of the invention is to solve at present and can't directly carry out the problem that barycenter is measured, a kind of small spot barycenter measuring method based on the quadrature fine scanning is provided small spot.
Small spot barycenter measuring method based on the quadrature fine scanning; It is realized based on a facula measurement device; Said facula measurement device is made up of two-dimentional movable stand, ccd detector and data acquisition unit; Said ccd detector is installed on the mobile platform of two-dimentional movable stand, and the electrical signal of ccd detector connects the signal input part of data acquisition unit;
Its detailed process is following:
Step 1, adjust two-dimentional movable stand; The incident light that will pass through focusing projects on certain pixel of ccd detector photosurface fully; Data acquisition unit shows the gray-scale value of this single pixel of ccd detector output, and preserves as the gray-scale value that complete small spot produces, and uses H 0Expression; The position of two-dimentional movable stand is designated as P with this moment 0On the photosurface of ccd detector, set up the X-Y coordinate system, and the center of this single pixel is set to the initial point of this coordinate system; Use D 1The X that representes this single pixel is to size, D 2The Y that representes this single pixel is to size;
Step 2, adjust two-dimentional movable stand, said single pixel is moved along X axle forward, each step-length that moves is d 0, whenever move position and the P that once notes two-dimentional movable stand this moment 0The relative shift of position and this single pixel corresponding gray that this moment, data acquisition unit showed are reduced to H until this single pixel corresponding gray that shows when said data acquisition unit 02% or when following, stop to adjust two-dimentional movable stand;
Step 3, the two-dimentional movable stand of adjustment are got back to position P 0, and then adjust two-dimentional movable stand, and said single pixel is moved along Y axle forward, each step-length that moves is d 0, whenever move position and the P that once notes two-dimentional movable stand this moment 0The relative shift of position and this single pixel corresponding gray that this moment, data acquisition unit showed, this single pixel corresponding gray that shows when said data acquisition unit is reduced to H 02% or when following, stop to adjust two-dimentional movable stand, and note the position and the P of two-dimentional movable stand this moment 0The relative shift of position;
All relative shifts and the corresponding gray thereof of the two-dimentional movable stand that step 4, basis have write down are calculated the centroid position that obtains hot spot.
The measuring process of the small spot barycenter measuring method based on the quadrature fine scanning of the present invention is simple, can measure the centroid position of the small spot of incident fast and accurately, and precision is high, can reach micron dimension.
Description of drawings
Fig. 1 is the structural representation of facula measurement device; Fig. 2 is the gray-scale value curve that step 4 one obtains in the embodiment one; Fig. 3 is the gray-scale value curve that step 4 two obtains in the embodiment one; After Fig. 4 is execution in step one, the position view of the single pixel of the photosurface of hot spot and ccd detector, wherein A1 is a hot spot, A2 is single pixel; Fig. 5 is the process flow diagram of the small spot barycenter measuring method based on the quadrature fine scanning of the present invention; Fig. 6 is the process flow diagram of step 4.
Embodiment
Embodiment one: the small spot barycenter measuring method based on the quadrature fine scanning of this embodiment; It is realized based on a facula measurement device; Said facula measurement device is made up of two-dimentional movable stand 1, ccd detector 2 and data acquisition unit 3; Said ccd detector 2 is installed on the mobile platform of two-dimentional movable stand 1, and the electrical signal of ccd detector 2 connects the signal input part of data acquisition unit;
Its detailed process is following:
Step 1, the two-dimentional movable stand 1 of adjustment; The incident light that will pass through focusing projects on certain pixel of ccd detector 2 photosurfaces fully; Data acquisition unit 3 shows the gray-scale value of this single pixel of ccd detector 2 outputs, and preserves as the gray-scale value that complete small spot produces, and uses H 0Expression; The position of two-dimentional movable stand 1 is designated as P with this moment 0On the photosurface of ccd detector 2, set up the X-Y coordinate system, and the center of this single pixel is set to the initial point of this coordinate system; Use D 1The X that representes this single pixel is to size, D 2The Y that representes this single pixel is to size;
Step 2, the two-dimentional movable stand 1 of adjustment make said single pixel move along X axle forward, and each step-length that moves is d 0, and the incident light hot spot is outwards progressively shifted out in this single pixel, whenever move position and the P that once notes two-dimentional movable stand 1 this moment 0This single pixel corresponding gray of the relative shift of position and data acquisition unit 3 demonstrations this moment is reduced to H until this single pixel corresponding gray that shows when said data acquisition unit 3 02% or when following, stop to adjust two-dimentional movable stand 1, and note the position and the P of two-dimentional movable stand 1 this moment 0The relative shift of position;
Step 3, the two-dimentional movable stand 1 of adjustment are got back to position P 0, and then adjust two-dimentional movable stand 1, and said single pixel is moved along Y axle forward, each step-length that moves is d 0, whenever move position and the P that once notes two-dimentional movable stand 1 this moment 0This single pixel corresponding gray of the relative shift of position and data acquisition unit 3 demonstrations this moment, this single pixel corresponding gray that shows when said data acquisition unit 3 is reduced to H 02% or when following, stop to adjust two-dimentional movable stand 1, and note the position and the P of two-dimentional movable stand 1 this moment 0The relative shift of position;
All relative shifts and the corresponding gray thereof of the two-dimentional movable stand 1 that step 4, basis have write down are calculated the centroid position that obtains hot spot.
The detailed process of the said content of step 4 can for:
Make two-dimentional movable stand 1 at P 0X-Y coordinate system during the position, on the photosurface is the initial position coordinate system, then:
Step 4 one, according to all relative shifts of the two-dimentional movable stand 1 that writes down in the step 2 and corresponding this single pixel corresponding gray, draw the gray-scale value curve, and by the X of this gray-scale value curve acquisition facula mass center in the initial position coordinate system to coordinate;
Step 4 two, according to all relative shifts of the two-dimentional movable stand 1 that writes down in the step 3 and corresponding this single pixel corresponding gray, draw the gray-scale value curve, and by the Y of this gray-scale value curve acquisition facula mass center in the initial position coordinate system to coordinate;
Step 4 three, by the X of facula mass center in the initial position coordinate system that obtains to coordinate and Y to coordinate, promptly get the centroid position of hot spot.
The detailed process of step 4 one said content is:
Relative shift with the two-dimentional movable stand 1 that writes down in the step 2 is a horizontal ordinate, is ordinate with said single pixel corresponding gray, draws the gray-scale value curve, makes H 1Represent the gray-scale value of peak in this gray-scale value curve, make X 1Represent that gray-scale value equals in this gray-scale value curve
Figure BDA0000026841830000031
The abscissa value of point, X then 1With
Figure BDA0000026841830000032
Difference be the X of facula mass center in the initial position coordinate system to coordinate.
The detailed process of step 4 two said contents is:
Relative shift with the two-dimentional movable stand 1 that writes down in the step 3 is a horizontal ordinate, is ordinate with said single pixel corresponding gray, draws the gray-scale value curve, makes H 2Represent the gray-scale value of peak in this gray-scale value curve, make X 2Represent that gray-scale value equals in this gray-scale value curve
Figure BDA0000026841830000033
The abscissa value of point, X then 2With
Figure BDA0000026841830000034
Difference be the Y of facula mass center in the initial position coordinate system to coordinate.
In the experiment, moving step length d 0Be 0.1 μ m, the photosensitive pixel of ccd detector 2 is of a size of 10 μ m * 10 μ m, and mobile total length is 10 μ m.
The position of adjustment ccd detector 2, it is inner, as shown in Figure 4 to make hot spot be positioned at an one of which specific pixel; Move ccd detector 2 along the Y axle horizontal then; Setting each moving step length is 0.1 μ m, and mobile total length is 10 μ m, promptly moves to an image that comprises complete hot spot with big one 10 μ m * 10 μ m such as single pixel of ccd detector 2 fully outside this pixel; Wherein, the X of single pixel is to dimension D 1Be 10 μ m, Y is to dimension D 2Be 10 μ m, so The measured gray-scale value of this pixel after the whenever mobile step-length of record, and be depicted as curve.Find corresponding grey scale value among the figure to drop to the abscissa value X of the position of maximal value one half 0, X then 0The difference that deducts 5 μ m gained is the X of facula mass center in the initial position coordinate system to coordinate.
In like manner, ccd detector 2 is moved in the same way along Y direction, be depicted as curve, obtain the abscissa value Y that corresponding grey scale value among the figure drops to the position of maximal value one half 0, Y then 0The difference that deducts 5 μ m gained is the Y of facula mass center in the initial position coordinate system to coordinate.Therefore, the coordinate of facula mass center in the initial position coordinate system is (X 0-5 μ m, Y 0-5 μ m).
To the simulated measurement result of the centroid position of desirable Gauss's hot spot as shown in Figures 2 and 3; Wherein, Fig. 2 is the curve that step 4 one obtains, and also is single pixel when X axle forward moves, and single pixel corresponding gray is with the variation relation curve of the relative shift of two-dimentional movable stand 1; Fig. 3 is the curve that step 4 two obtains, and also is single pixel when Y axle forward moves, and single pixel corresponding gray is with the variation relation curve of the relative shift of two-dimentional movable stand 1.
The measuring process of the small spot barycenter measuring method based on the quadrature fine scanning of the present invention is simple, can measure the centroid position of the small spot of incident fast and accurately, and precision is high, can reach micron dimension.

Claims (1)

1. based on the small spot barycenter measuring method of quadrature fine scanning; It is characterized in that it realizes based on a facula measurement device; Said facula measurement device is made up of two-dimentional movable stand (1), ccd detector (2) and data acquisition unit (3); Said ccd detector (2) is installed on the mobile platform of two-dimentional movable stand (1), and the electrical signal of ccd detector (2) connects the signal input part of data acquisition unit;
Its detailed process is following: step 1, adjust two-dimentional movable stand (1); The incident light that will pass through focusing projects on certain pixel of ccd detector (2) photosurface fully; Data acquisition unit (3) shows the gray-scale value of this single pixel of ccd detector (2) output; And, use H as the gray-scale value preservation that complete small spot produces 0Expression; The position of two-dimentional movable stand (1) is designated as P at this moment 0On the photosurface of ccd detector (2), set up the X-Y coordinate system, and the center of this single pixel is set to the initial point of this coordinate system; Use D 1The X that representes this single pixel is to size, D 2The Y that representes this single pixel is to size;
Step 2, adjust two-dimentional movable stand (1), said single pixel is moved along X axle forward, each step-length that moves is d 0, whenever move position and the P that once notes two-dimentional movable stand this moment (1) 0This single pixel corresponding gray that the relative shift of position and data acquisition unit this moment (3) show is reduced to H until this single pixel corresponding gray that shows when said data acquisition unit (3) 02% or when following, stop to adjust two-dimentional movable stand (1);
Step 3, adjust two-dimentional movable stand (1) and get back to position P 0, and then adjust two-dimentional movable stand (1), and said single pixel is moved along Y axle forward, each step-length that moves is d 0, whenever move position and the P that once notes two-dimentional movable stand this moment (1) 0This single pixel corresponding gray that the relative shift of position and data acquisition unit this moment (3) show, this single pixel corresponding gray that shows when said data acquisition unit (3) is reduced to H 02% or when following, stop to adjust two-dimentional movable stand (1), and note the position and the P of two-dimentional movable stand this moment (1) 0The relative shift of position;
All relative shifts and the corresponding gray thereof of the two-dimentional movable stand (1) that step 4, basis have write down are calculated the centroid position that obtains hot spot;
The detailed process of the said content of step 4 is:
Make two-dimentional movable stand (1) at P 0X-Y coordinate system during the position, on the photosurface is the initial position coordinate system, then:
Step 4 one, based on all relative shifts of the two-dimentional movable stand (1) that writes down in the step 2 and this corresponding single pixel corresponding gray; Draw the gray value curve, and obtain the X of facula mass center in the initial position coordinate system to coordinate by this gray value curve;
Step 4 two, based on all relative shifts of the two-dimentional movable stand (1) that writes down in the step 3 and this corresponding single pixel corresponding gray; Draw the gray value curve, and obtain the Y of facula mass center in the initial position coordinate system to coordinate by this gray value curve;
Step 4 three, by the X of facula mass center in the initial position coordinate system that obtains to coordinate and Y to coordinate, promptly get the centroid position of hot spot;
The detailed process of step 4 one said content is:
Relative shift with the two-dimentional movable stand (1) that writes down in the step 2 is a horizontal ordinate, is ordinate with said single pixel corresponding gray, draws the gray-scale value curve, makes H 1Represent the gray-scale value of peak in this gray-scale value curve, make X 1Represent that gray-scale value equals in this gray-scale value curve
Figure FDA0000099304780000021
The abscissa value of point, X then 1With Difference be the X of facula mass center in the initial position coordinate system to coordinate;
The detailed process of step 4 two said contents is:
Relative shift with the two-dimentional movable stand (1) that writes down in the step 3 is a horizontal ordinate, is ordinate with said single pixel corresponding gray, draws the gray-scale value curve, makes H 2Represent the gray-scale value of peak in this gray-scale value curve, make X 2Represent that gray-scale value equals in this gray-scale value curve
Figure FDA0000099304780000023
The abscissa value of point, X then 2With
Figure FDA0000099304780000024
Difference be the Y of facula mass center in the initial position coordinate system to coordinate.
CN2010102892043A 2010-09-21 2010-09-21 Orthogonal fine scanning based method for measuring mass centers of tiny light spots Expired - Fee Related CN101968342B (en)

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CN102353521B (en) * 2011-06-13 2013-07-24 北京康拓红外技术股份有限公司 Method for measuring spot size of multi-element infrared ray shaft temperature detector
CN103256902A (en) * 2013-05-08 2013-08-21 中国科学院上海光学精密机械研究所 Method of measuring included angle between two laser beams
CN112862791A (en) * 2021-02-20 2021-05-28 茂莱（南京）仪器有限公司 Light spot sub-pixel center positioning method based on pixel moving cutting

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