CN101959103A - Vibrating diaphragm and microphone comprising vibrating diaphragm - Google Patents
Vibrating diaphragm and microphone comprising vibrating diaphragm Download PDFInfo
- Publication number
- CN101959103A CN101959103A CN2010101535405A CN201010153540A CN101959103A CN 101959103 A CN101959103 A CN 101959103A CN 2010101535405 A CN2010101535405 A CN 2010101535405A CN 201010153540 A CN201010153540 A CN 201010153540A CN 101959103 A CN101959103 A CN 101959103A
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- CN
- China
- Prior art keywords
- vibrating diaphragm
- microphone
- damping device
- support portion
- adjusting damping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000013016 damping Methods 0.000 claims description 12
- 230000001788 irregular Effects 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Diaphragms For Electromechanical Transducers (AREA)
- Telephone Set Structure (AREA)
Abstract
The invention provides a vibrating diaphragm, which comprises a vibrating part and a plurality of supporting parts connected with the vibrating part, wherein the peripheries of self-vibrating parts of the supporting parts extend outwards. The vibrating diaphragm also comprises at least one central line, and all the supporting parts are positioned on the same side of the central line. The vibrating diaphragm can improve sensibility.
Description
Technical field
The present invention relates to a kind of vibrating diaphragm and comprise the microphone of this vibrating diaphragm.
Background technology
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
And the microphone of using more and better performances at present is microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone is called for short MEMS), and in the correlation technique, silicon capacitor microphone comprises substrate, backboard and vibrating diaphragm.Wherein, vibrating diaphragm is the vitals of silicon capacitor microphone, and its general structure is vibrating diaphragm involving vibrations portion and the support portion that links to each other with the vibration section, the support portion evenly rule be distributed in the vibration section periphery.This structure sheaf stress can't discharge the stress gradient that vibrating diaphragm produces.Therefore, be necessary to provide a kind of novel vibrating diaphragm.
Summary of the invention
The technical problem that the present invention need solve provides a kind of vibrating diaphragm that can improve sensitivity.
According to the above-mentioned technical problem that needs solution, designed a kind of vibrating diaphragm, its involving vibrations portion and the some support portions that link to each other with the vibration section, the periphery of described support portion self-excited oscillation portion stretches out, described vibrating diaphragm comprises at least one center line, and described support portion all is positioned at the center line homonymy.
Preferably, be provided with the adjusting damping device in the zone of the close periphery of described vibrating diaphragm.
Preferably, described adjusting damping device is some holes, and the line of centres in described sound hole is a circle.
Preferably, described adjusting damping device is some some irregular slits that are distributed in vibrating diaphragm near outer regions.
Preferably, described support portion comprises two crossbeams, and the angle between these two crossbeams is 180 °.
The present invention also provides a kind of microphone, it is characterized in that: this microphone comprises aforesaid vibrating diaphragm.
Beneficial effect of the present invention is: the support portion all is positioned at vibrating diaphragm center line homonymy, and large tracts of land free end film is provided, thereby can discharge stress and improve sensitivity; Acoustic holes can further discharge stress, improves sensitivity; Acoustic holes can be regulated damping, improves microphone property; Free end can contact with backboard after making alive, has certain sealing, regulates damping.
Description of drawings
Fig. 1 is the schematic perspective view of first embodiment of vibrating diaphragm provided by the invention;
Fig. 2 is the schematic perspective view of second embodiment of vibrating diaphragm provided by the invention.
Embodiment
The invention will be further described below in conjunction with drawings and embodiments.
Vibrating diaphragm provided by the invention is used for microelectronic device, as silicon capacitor microphone, loud speaker, receiver etc.Silicon capacitor microphone is mainly used in the electronic equipments such as mobile phone, is used to receive sound.
Referring to Fig. 1, Fig. 2, first embodiment provided by the invention.Vibrating diaphragm 1 provided by the invention, involving vibrations portion 11 stretches out with the support portion 12 that links to each other with vibration section 11, the periphery of these support portion 12 self-excited oscillation portions 11.
Vibrating diaphragm 1 is provided with at least one center line, and support portion 12 all is positioned at the homonymy of this center line.
Zone near vibrating diaphragm 1 periphery is provided with adjusting damping devices such as hole 13 or slit.
From Fig. 1, can see among Fig. 2 that the line of centres in sound hole is a circle.
Certainly, sound hole, slit etc. also can be the irregular zones that is distributed near vibrating diaphragm 1 periphery.
In one embodiment, support portion 12 comprises two crossbeams, and the angle between these two crossbeams is 180 °.
The shape of vibrating diaphragm 1 can be circular, square etc.
Microphone provided by the invention comprises aforesaid vibrating diaphragm 1.
Protection scope of the present invention is not exceeded with above-mentioned execution mode, as long as the equivalence that those of ordinary skills do according to disclosed content is modified or changed, all should include in the protection range of putting down in writing in claims.
Claims (10)
1. vibrating diaphragm, its involving vibrations portion and the some support portions that link to each other with the vibration section, the periphery of described support portion self-excited oscillation portion stretches out, and it is characterized in that: described vibrating diaphragm comprises at least one center line, and described support portion all is positioned at the center line homonymy.
2. vibrating diaphragm according to claim 1 is characterized in that: the zone in the close periphery of described vibrating diaphragm is provided with the adjusting damping device.
3. vibrating diaphragm according to claim 2 is characterized in that: described adjusting damping device is some holes, and the line of centres in described sound hole is a circle.
4. vibrating diaphragm according to claim 2 is characterized in that: described adjusting damping device is some some irregular slits that are distributed in vibrating diaphragm near outer regions.
5. according to claim 1 or 2 or 3 described vibrating diaphragms, it is characterized in that: described support portion comprises two crossbeams, and the angle between these two crossbeams is 180 °.
6. microphone, it is characterized in that: this microphone comprises vibrating diaphragm as claimed in claim 1.
7. microphone according to claim 6 is characterized in that: the zone in the close periphery of described vibrating diaphragm is provided with the adjusting damping device.
8. microphone according to claim 7 is characterized in that: described adjusting damping device is some holes, and the line of centres in described sound hole is a circle.
9. microphone according to claim 7 is characterized in that: described adjusting damping device is some some irregular slits that are distributed in vibrating diaphragm near outer regions.
10. according to claim 6 or 7 or 8 described microphones, it is characterized in that: described support portion comprises two crossbeams, and the angle between these two crossbeams is 180 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010153540.5A CN101959103B (en) | 2010-04-19 | 2010-04-19 | Vibrating diaphragm and the mike including this vibrating diaphragm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010153540.5A CN101959103B (en) | 2010-04-19 | 2010-04-19 | Vibrating diaphragm and the mike including this vibrating diaphragm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101959103A true CN101959103A (en) | 2011-01-26 |
| CN101959103B CN101959103B (en) | 2016-06-08 |
Family
ID=43486155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010153540.5A Expired - Fee Related CN101959103B (en) | 2010-04-19 | 2010-04-19 | Vibrating diaphragm and the mike including this vibrating diaphragm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101959103B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104066040A (en) * | 2013-03-19 | 2014-09-24 | 财团法人工业技术研究院 | Pressure sensor and method for manufacturing the same |
| WO2022036962A1 (en) * | 2020-08-19 | 2022-02-24 | 苏州礼乐乐器股份有限公司 | Full-band high-sound-quality hearing aid having sound beams and sound tunnels |
| WO2022110415A1 (en) * | 2020-11-30 | 2022-06-02 | 瑞声声学科技(深圳)有限公司 | Mems microphone chip |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6039146A (en) * | 1997-11-06 | 2000-03-21 | Lg Foster Ltd. | Method of manufacturing speaker diaphragm |
| CN1961608A (en) * | 2004-05-27 | 2007-05-09 | 松下电器产业株式会社 | Loudspeaker |
| CN1992996A (en) * | 2005-12-30 | 2007-07-04 | 丁轶 | Detachable supporting structure for loudspeaker diaphragm |
| CN201134924Y (en) * | 2007-12-24 | 2008-10-15 | 瑞声声学科技(常州)有限公司 | Micro loudspeaker |
| CN101448193A (en) * | 2008-11-07 | 2009-06-03 | 瑞声声学科技(深圳)有限公司 | Capacitive microphone |
| CN101572849A (en) * | 2009-04-03 | 2009-11-04 | 瑞声声学科技(深圳)有限公司 | Silica-based microphone |
| JP2010057167A (en) * | 2008-07-28 | 2010-03-11 | Aoi Electronics Co Ltd | Directional microphone |
-
2010
- 2010-04-19 CN CN201010153540.5A patent/CN101959103B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6039146A (en) * | 1997-11-06 | 2000-03-21 | Lg Foster Ltd. | Method of manufacturing speaker diaphragm |
| CN1961608A (en) * | 2004-05-27 | 2007-05-09 | 松下电器产业株式会社 | Loudspeaker |
| CN1992996A (en) * | 2005-12-30 | 2007-07-04 | 丁轶 | Detachable supporting structure for loudspeaker diaphragm |
| CN201134924Y (en) * | 2007-12-24 | 2008-10-15 | 瑞声声学科技(常州)有限公司 | Micro loudspeaker |
| JP2010057167A (en) * | 2008-07-28 | 2010-03-11 | Aoi Electronics Co Ltd | Directional microphone |
| CN101448193A (en) * | 2008-11-07 | 2009-06-03 | 瑞声声学科技(深圳)有限公司 | Capacitive microphone |
| CN101572849A (en) * | 2009-04-03 | 2009-11-04 | 瑞声声学科技(深圳)有限公司 | Silica-based microphone |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104066040A (en) * | 2013-03-19 | 2014-09-24 | 财团法人工业技术研究院 | Pressure sensor and method for manufacturing the same |
| WO2022036962A1 (en) * | 2020-08-19 | 2022-02-24 | 苏州礼乐乐器股份有限公司 | Full-band high-sound-quality hearing aid having sound beams and sound tunnels |
| WO2022110415A1 (en) * | 2020-11-30 | 2022-06-02 | 瑞声声学科技(深圳)有限公司 | Mems microphone chip |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101959103B (en) | 2016-06-08 |
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Addressee: Zhang Yong Document name: payment instructions |
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Granted publication date: 20160608 |