CN101958402B - 可调紧基片传输装置 - Google Patents
可调紧基片传输装置 Download PDFInfo
- Publication number
- CN101958402B CN101958402B CN201010187954XA CN201010187954A CN101958402B CN 101958402 B CN101958402 B CN 101958402B CN 201010187954X A CN201010187954X A CN 201010187954XA CN 201010187954 A CN201010187954 A CN 201010187954A CN 101958402 B CN101958402 B CN 101958402B
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- Prior art keywords
- roller
- gripping sleeve
- substrate
- bellmouth
- nut
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- 239000000758 substrate Substances 0.000 title claims abstract description 119
- 230000005540 biological transmission Effects 0.000 title claims abstract description 63
- 238000004140 cleaning Methods 0.000 claims abstract description 26
- 229920006351 engineering plastic Polymers 0.000 claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 claims abstract description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 241001131688 Coracias garrulus Species 0.000 description 142
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 238000013467 fragmentation Methods 0.000 description 5
- 238000006062 fragmentation reaction Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 210000001138 tear Anatomy 0.000 description 3
- 208000004350 Strabismus Diseases 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010187954XA CN101958402B (zh) | 2010-05-25 | 2010-05-25 | 可调紧基片传输装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010187954XA CN101958402B (zh) | 2010-05-25 | 2010-05-25 | 可调紧基片传输装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101958402A CN101958402A (zh) | 2011-01-26 |
CN101958402B true CN101958402B (zh) | 2012-02-29 |
Family
ID=43485621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010187954XA Expired - Fee Related CN101958402B (zh) | 2010-05-25 | 2010-05-25 | 可调紧基片传输装置 |
Country Status (1)
Country | Link |
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CN (1) | CN101958402B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107013478A (zh) * | 2017-06-12 | 2017-08-04 | 李�杰 | 具有充电功能的太阳能风扇 |
CN111962039B (zh) * | 2020-07-14 | 2023-02-03 | 苏州迈正科技有限公司 | 真空镀膜装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101580179A (zh) * | 2009-06-04 | 2009-11-18 | 东莞宏威数码机械有限公司 | 基片传输机构 |
CN101654183A (zh) * | 2009-07-29 | 2010-02-24 | 东莞宏威数码机械有限公司 | 滚轮传输装置 |
CN201699059U (zh) * | 2010-05-25 | 2011-01-05 | 东莞宏威数码机械有限公司 | 可调紧滚轮装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6439245B1 (en) * | 2000-06-30 | 2002-08-27 | Lam Research Corporation | Method for transferring wafers from a conveyor system to a wafer processing station |
JP4562424B2 (ja) * | 2004-05-25 | 2010-10-13 | 三機工業株式会社 | ホイールコンベヤ |
-
2010
- 2010-05-25 CN CN201010187954XA patent/CN101958402B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101580179A (zh) * | 2009-06-04 | 2009-11-18 | 东莞宏威数码机械有限公司 | 基片传输机构 |
CN101654183A (zh) * | 2009-07-29 | 2010-02-24 | 东莞宏威数码机械有限公司 | 滚轮传输装置 |
CN201699059U (zh) * | 2010-05-25 | 2011-01-05 | 东莞宏威数码机械有限公司 | 可调紧滚轮装置 |
Also Published As
Publication number | Publication date |
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CN101958402A (zh) | 2011-01-26 |
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