CN101956162B - Heating platform - Google Patents
Heating platform Download PDFInfo
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- CN101956162B CN101956162B CN2010102994032A CN201010299403A CN101956162B CN 101956162 B CN101956162 B CN 101956162B CN 2010102994032 A CN2010102994032 A CN 2010102994032A CN 201010299403 A CN201010299403 A CN 201010299403A CN 101956162 B CN101956162 B CN 101956162B
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- thermoscreen
- heating unit
- support
- warm table
- lower chamber
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Abstract
The invention discloses a heating platform, which is used for heating glass substrates of a cadmium telluride (CdTe) film solar cell production line. The heating platform is characterized by adopting an up-down butted horizontal sealed cavity structure, wherein an upper cooling water pipeline and a lower cooling water pipeline are arranged on the outer sides of an upper cavity and a lower cavity respectively; the upper cavity comprises an upper heat shield; an upper heating component bracket is fixed on the inner side of the heat shield; a heating component is arranged on the upper heating component; the lower cavity comprises a bearing bracket; the upper end of the bearing bracket is higher than the horizontal upper surface of the lower cavity; a conveying device is arranged on the bearing bracket; a lower heat shield is in butt joint with the upper heat shield through a connecting device; a lower heat shield bracket is arranged on the inner side of the lower cavity; the lower heat shield bracket is in fit connection with the lower heat shield; a lower heating component bracket is arranged on the inner side of the lower heat shield; a lower heating component is arranged on the lower heating component bracket; the conveying device comprises a driving conveying roller and a driven conveying roller; and the driving conveying roller is externally connected with a driving mechanism.
Description
Technical field
The present invention relates to manufacture of solar cells equipment, be specially a kind of warm table of the CdTe of being used for thin-film solar cells production line.
Technical background
In the film photovoltaic cell technology, be the film photovoltaic device of matrix with the cadmium telluride, be acknowledged as efficient, stable, cheap film photovoltaic device material.At room temperature, cadmium telluride polycrystal film solar cell efficiency of conversion theoretical value is 27%.From the aspects such as efficiency of conversion, reliability and price factor that cadmium telluride polycrystal film solar cell has reached at present, its Development Prospect aspect the solar photovoltaic transformation applications of ground is very wide.
In the course of processing of film photovoltaic cell, the type of heating that adopts mainly contains wire heating, three kinds of modes of far-infrared heating and high-frequency induction heating at present.But the ordinary method of heating glass substrate all is non-continous way, has influenced the continuity of thin film deposition processes, and efficient is low, and level of automation is poor, and labour intensity is big.
Summary of the invention
At the prior art deficiency, the technical problem that quasi-solution of the present invention is determined is that a kind of warm table is provided, this warm table is used for CdTe thin-film solar cells production line, serially glass substrate is heated to the needed temperature of deposition under vacuum environment, the production efficiency height, and it is simple in structure, easy to use.
The technical scheme that the present invention solves described warm table technical problem is: design a kind of warm table, a kind of warm table, be used for the glass substrate heating of CdTe thin-film solar cells production line, it is characterized in that it is the horizontal enclosed housing structure of the upper and lower butt joint of semicircular carbon steel pipes that this warm table adopts vertical cross-section, the outside of upper cavity and lower chamber is respectively arranged with cooling water pipeline and following cooling water pipeline; Described upper cavity comprises that vertical cross-section is the semicircular thermoscreen of going up, and the inboard of last thermoscreen is fixed with the heating unit support, and dismountable heating unit of going up is installed on the last heating unit support; Described lower chamber comprises the support of bearing that vertically is packed in the lower chamber inboard, and the upper end of the support of bearing is higher than the upper horizontal surface of lower chamber, be horizontally installed with e Foerderanlage by bearings on the support of bearing, the dead eye position of bearing exceeds the horizontal plane of lower chamber, and the medullary ray of dead eye is to the radius of the distance between the medullary ray of lower chamber greater than dead eye; Vertical cross-section is that semicircular thermoscreen down docks installation by coupling unit with the described thermoscreen of going up, the inboard lowest part of lower chamber also is equipped with down the thermoscreen carriage, the arc support of following thermoscreen carriage connects with the lower arcuate surface of following thermoscreen kiss, the inboard of following thermoscreen also is fixed with down the heating unit support, and dismountable heating unit down is installed on the following heating unit support; Described e Foerderanlage comprises that mainly level is installed in a series of conveying rollers on the support of bearing successively, and conveying roller comprises active transportation roller and driven conveying roller, and the active transportation roller is distributed in the driven conveying roller, and the active transportation roller is connected with external transmission rig.
Compared with prior art, warm table of the present invention can with the supporting use of CdTe thin-film solar cells production line, realize the serialization production of glass substrate, and it is good to have the chamber vacuum performance, the heating efficiency height, and temperature homogeneity is good, simple in structure, low cost of manufacture, characteristics such as convenient disassembly.In the scope of applicant's retrieval, do not see the warm table that same structure is arranged.
Description of drawings
Fig. 1 is the one-piece construction synoptic diagram of a kind of embodiment of warm table of the present invention;
Fig. 2 is the upper cavity plan structure synoptic diagram of a kind of embodiment of warm table of the present invention;
Fig. 3 is the lower chamber master TV structure synoptic diagram of a kind of embodiment of warm table of the present invention;
Fig. 4 is the lower chamber plan structure synoptic diagram of a kind of embodiment of warm table of the present invention;
Fig. 5 is the following thermoscreen plan structure synoptic diagram of a kind of embodiment of warm table of the present invention;
Fig. 6 is metal sheet and the gasket structure synoptic diagram of a kind of embodiment of warm table of the present invention.
Embodiment
Further narrate the present invention below in conjunction with embodiment and accompanying drawing thereof:
The warm table (referring to Fig. 1-6) of the present invention's design, be used for the glass substrate heating of CdTe thin-film solar cells production line, it is characterized in that it is the horizontal enclosed housing structure of the upper and lower butt joint of semicircular carbon steel pipes that this warm table adopts vertical cross-section, the outside of upper cavity 1 and lower chamber 2 is respectively arranged with cooling water pipeline 11 and following cooling water pipeline 21; Described upper cavity 1 comprises that vertical cross-section is semicircular upward thermoscreen 31, upward the inboard of thermoscreen 31 is fixed with heating unit support 33, and dismountable heating unit 34 of going up is installed on the last heating unit support 33; Described lower chamber 2 mainly comprises the support of bearing 22, following thermoscreen carriage 23 and following heating unit support 37, the support of bearing 22 vertically is packed in the inboard of lower chamber 2, and the upper end of the support of bearing 22 is higher than the upper horizontal surface of lower chamber 2, be horizontally installed with e Foerderanlage 4 by bearings on the support of bearing 22, vertical cross-section is that semicircular thermoscreen 35 down docks installation by coupling unit 32 with the described thermoscreen 31 of going up; Following thermoscreen carriage 23 is installed in the lowest part of lower chamber 2 inboards, the arc support of following thermoscreen carriage 23 connects with the lower arcuate surface of following thermoscreen 35 kiss, the inboard of following thermoscreen 35 also is fixed with down heating unit support 37, and dismountable heating unit 38 down is installed on the following heating unit support 37; Described e Foerderanlage 4 comprises that mainly level is installed in a series of conveying rollers on the support of bearing 22 successively, conveying roller comprises active transportation roller 41 and driven conveying roller 42, active transportation roller 41 is distributed in the driven conveying roller 42, and active transportation roller 41 is connected with external transmission rig
The described semicircle carbon steel pipes of warm table of the present invention is boats and ships carbon steel weldless steel tubes, adopts the horizontal enclosed housing structure of upper and lower butt joint, dismantles and keep in repair more convenient, and cost is lower.
The described heating unit 34 of going up of warm table of the present invention all adopts graphite cake with following heating unit 38, and long working life, graphite cake are symmetrically arranged in the upper and lower of working face (glass substrate).Radiation heating design under the vacuum environment that adopts among the present invention, efficient is higher, and heating unit adopts board-like, and swept area is big, and the efficient height has guaranteed the homogeneity that heats simultaneously.
Warm table of the present invention is described goes up thermoscreen 31 and following thermoscreen 35 all adopts Biodegradable material, is specially polylactic acid foam material, has excellent properties such as biodegradable, controllable density, easy processing, good barrier property.The following thermoscreen 35 of embodiment has oval type groove 36 in the position of arranging e Foerderanlage 4, so that the conveying roller of e Foerderanlage 4 is installed.Last thermoscreen 31 and following thermoscreen 35 will guarantee that substrate glass can pass through smoothly after fixing, and it is outer too many can not cause heat to be lost to screen again.
Described e Foerderanlage 4 embodiment of warm table of the present invention comprise that 22 levels are installed in the conveying roller on the support of bearing 22 successively, conveying roller comprises active transportation roller 41 and driven conveying roller 42, active transportation roller 41 is 3, all the other are that 42,3 active transportation rollers 41 of driven conveying roller are uniformly at intervals in 19 driven conveying rollers 42 (being specially the 5+1+5+1+5+1+4 structure).One end axial length of active transportation roller 41 is in order to be connected with external transmission rig.Described conveying roller (comprising active transportation roller 41 and driven conveying roller 42) adopts ceramic roller.This roller thermal conductivity is low, and environmental protection, can reduce the heat to bearing conduction, prolongs bearing work-ing life.Conveying roller is carried and can be made the contact area of itself and glass substrate little, has guaranteed the consistence of upper and lower surface radiation heating.Conveying roller is arranged in parallel, and the spacing between the adjacent conveyor roller is half of glass length, and being specially is 150mm.The conveying roller of described e Foerderanlage 4 and the contact area of glass substrate are little, can guarantee the consistence of glass substrate top and bottom heating.
The warm table of embodiment of the invention design is provided with three active transportation rollers 41 altogether, and drive roll 41 input terminuss that move need pass upper cavity 1.Upper cavity 1 is provided with facet 15 and groove 16 initiatively in the position that the motion input terminus of active transportation roller 41 stretches out, and has drive roll groove 16, installs with convenient.Initiatively circular arc metal sheet 13 and the sealed strip 14 bigger than groove size are adopted in the sealing of groove 16.The inboard of lower chamber 2 is provided with the support of bearing 22 and following thermoscreen carriage 23.The support of bearing 22 is in the outside of thermoscreen 35 down, has guaranteed that bearing environment for use temperature is lower, and prolong work-ing life.Dead eye 25 positions of bearing exceed the horizontal plane of lower chamber 2, and the medullary ray 26 of dead eye 25 is to the radius of the distance between the medullary ray 27 of lower chamber 2 greater than dead eye 25, so that the conveying roller of e Foerderanlage 4 is installed.
The upper cavity 1 of warm table embodiment of the present invention is processed into facet 15 in the position of the motion input terminus of drive roll 41, and has drive roll groove 16, and the drive roll groove seals with metal sheet 13 and gasket 14.Metal sheet 13 and gasket 14 are provided with axis hole 17, and metal sheet 13 is fixed on the upper cavity 1 by bolted mode.
The upper cavity 1 of warm table embodiment of the present invention docks with lower chamber 2 to adopt goes up cascaded surface 12 and downstairs face 24 structures, the bolting butt joint.
The rear and front end of warm table of the present invention itself is a hatch frame, for being back to back of process raw material (glass substrate).But during work, the warm table front and back end closely is connected with vacuum lock transitional cavity (application of applicant's separate case) respectively, forms the heating under vacuum chamber that really becomes sealing.As required, warm table can a plurality of serial connections fit together, and constitutes a big vacuum heated chamber.The length of each warm table can be identical or different, and this depends primarily on the translational speed of heat-up time and glass substrate.The heating unit of each warm table can independent control, with the convenient heating process of regulating.It is a big vacuum heated chamber that the warm table that embodiment uses has adopted 6 warm table serial connections, has been disposed in order six groups of thermoscreens and heating unit in the chamber, forms six groups of heating under vacuum chambeies.During work, from the feed(raw material)inlet of first heated chamber, the temperature of warm table improves 70-100 ℃ successively, and heating is produced continuously.Vacuum chamber vacuumizes with heating unit heating and begins simultaneously.After the vacuum tightness of heating chamber and temperature reach requirement, glass substrate promptly serially with certain speed successively by warm table, realize even heating, and the purpose of scale production continuously.
The present invention does not address part and is applicable to prior art.
Claims (5)
1. warm table, be used for the glass substrate heating of CdTe thin-film solar cells production line, it is characterized in that it is the horizontal enclosed housing structure of the upper and lower butt joint of semicircular carbon steel pipes that this warm table adopts vertical cross-section, the outside of upper cavity and lower chamber is respectively arranged with cooling water pipeline and following cooling water pipeline; Described upper cavity comprises that vertical cross-section is the semicircular thermoscreen of going up, and the inboard of last thermoscreen is fixed with the heating unit support, and dismountable heating unit of going up is installed on the last heating unit support; Described lower chamber comprises the support of bearing that vertically is packed in the lower chamber inboard, and the upper end of the support of bearing is higher than the upper horizontal surface of lower chamber, be horizontally installed with e Foerderanlage by bearings on the support of bearing, the dead eye position of bearing exceeds the horizontal plane of lower chamber, and the medullary ray of dead eye is to the radius of the distance between the medullary ray of lower chamber greater than dead eye; Vertical cross-section is that semicircular thermoscreen down docks installation by coupling unit with the described thermoscreen of going up, the inboard lowest part of lower chamber also is equipped with down the thermoscreen carriage, the arc support of following thermoscreen carriage connects with the lower arcuate surface of following thermoscreen kiss, the inboard of following thermoscreen also is fixed with down the heating unit support, and dismountable heating unit down is installed on the following heating unit support; Described e Foerderanlage comprises that mainly level is installed in a series of conveying rollers on the support of bearing successively, and conveying roller comprises active transportation roller and driven conveying roller, and the active transportation roller is distributed in the driven conveying roller, and the active transportation roller is connected with external transmission rig.
2. warm table according to claim 1 is characterized in that described carbon steel pipes is boats and ships carbon steel weldless steel tubes.
3. warm table according to claim 1 is characterized in that the described heating unit of going up all adopts graphite cake with following heating unit.
4. warm table according to claim 1 is characterized in that the described thermoscreen of going up all adopts polylactic acid foam material with following thermoscreen.
5. warm table according to claim 1 it is characterized in that described conveying roller adopts ceramic roller, and the spacing between the adjacent conveyor roller is 150mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102994032A CN101956162B (en) | 2010-10-08 | 2010-10-08 | Heating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102994032A CN101956162B (en) | 2010-10-08 | 2010-10-08 | Heating platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101956162A CN101956162A (en) | 2011-01-26 |
| CN101956162B true CN101956162B (en) | 2011-09-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102994032A Expired - Fee Related CN101956162B (en) | 2010-10-08 | 2010-10-08 | Heating platform |
Country Status (1)
| Country | Link |
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| CN (1) | CN101956162B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113373410B (en) * | 2021-05-28 | 2022-11-18 | 中国科学院理化技术研究所 | Optical lens heat capacity coating device and method and optical lens |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6058740A (en) * | 1999-02-23 | 2000-05-09 | First Solar, Llc | Glass substrate deposition system having lateral alignment mechanism |
| US20040045504A1 (en) * | 2000-01-31 | 2004-03-11 | Takahiro Yajima | Deposited film forming apparatus and deposited film forming method |
| CN201530862U (en) * | 2009-10-29 | 2010-07-21 | 润峰电力有限公司 | Gas transportation sedimentation growing system for cadmium-telluride thin film solar cell |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09165681A (en) * | 1995-12-14 | 1997-06-24 | Ulvac Japan Ltd | Heater plate for vacuum deposition and its production |
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2010
- 2010-10-08 CN CN2010102994032A patent/CN101956162B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6058740A (en) * | 1999-02-23 | 2000-05-09 | First Solar, Llc | Glass substrate deposition system having lateral alignment mechanism |
| US20040045504A1 (en) * | 2000-01-31 | 2004-03-11 | Takahiro Yajima | Deposited film forming apparatus and deposited film forming method |
| CN201530862U (en) * | 2009-10-29 | 2010-07-21 | 润峰电力有限公司 | Gas transportation sedimentation growing system for cadmium-telluride thin film solar cell |
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| Publication number | Publication date |
|---|---|
| CN101956162A (en) | 2011-01-26 |
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Granted publication date: 20110928 Termination date: 20151008 |
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