CN101934496B - 化学机械抛光机及具有它的化学机械抛光设备 - Google Patents
化学机械抛光机及具有它的化学机械抛光设备 Download PDFInfo
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- CN101934496B CN101934496B CN2010102466281A CN201010246628A CN101934496B CN 101934496 B CN101934496 B CN 101934496B CN 2010102466281 A CN2010102466281 A CN 2010102466281A CN 201010246628 A CN201010246628 A CN 201010246628A CN 101934496 B CN101934496 B CN 101934496B
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- 238000005498 polishing Methods 0.000 title claims abstract description 108
- 239000000126 substance Substances 0.000 title abstract 6
- 239000012530 fluid Substances 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 238000003466 welding Methods 0.000 claims description 6
- 238000007598 dipping method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 27
- 230000009189 diving Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 235000008708 Morus alba Nutrition 0.000 description 1
- 240000000249 Morus alba Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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CN2010102466281A CN101934496B (zh) | 2010-08-05 | 2010-08-05 | 化学机械抛光机及具有它的化学机械抛光设备 |
US13/384,627 US9138857B2 (en) | 2010-08-05 | 2011-06-08 | Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same |
PCT/CN2011/075452 WO2012016477A1 (zh) | 2010-08-05 | 2011-06-08 | 化学机械抛光机及具有它的化学机械抛光设备 |
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CN2010102466281A CN101934496B (zh) | 2010-08-05 | 2010-08-05 | 化学机械抛光机及具有它的化学机械抛光设备 |
Publications (2)
Publication Number | Publication Date |
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CN101934496A CN101934496A (zh) | 2011-01-05 |
CN101934496B true CN101934496B (zh) | 2012-02-15 |
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CN2010102466281A Active CN101934496B (zh) | 2010-08-05 | 2010-08-05 | 化学机械抛光机及具有它的化学机械抛光设备 |
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CN (1) | CN101934496B (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012016477A1 (zh) * | 2010-08-05 | 2012-02-09 | 清华大学 | 化学机械抛光机及具有它的化学机械抛光设备 |
CN102211311B (zh) * | 2011-05-30 | 2013-03-27 | 清华大学 | 化学机械抛光设备 |
CN103949968A (zh) * | 2014-05-04 | 2014-07-30 | 长春工业大学 | 一种智能曲面研抛组合装置 |
JP6093741B2 (ja) * | 2014-10-21 | 2017-03-08 | 信越半導体株式会社 | 研磨装置及びウェーハの研磨方法 |
CN105364701A (zh) * | 2015-10-19 | 2016-03-02 | 上海华力微电子有限公司 | 研磨护圈磨损自动补偿装置以及补偿方法 |
CN105598827B (zh) * | 2016-01-05 | 2018-05-22 | 天津华海清科机电科技有限公司 | 化学机械抛光机 |
KR102559647B1 (ko) * | 2016-08-12 | 2023-07-25 | 삼성디스플레이 주식회사 | 기판 연마 시스템 및 기판 연마 방법 |
CN106737055A (zh) * | 2016-12-01 | 2017-05-31 | 天津华海清科机电科技有限公司 | 化学机械抛光机及用于其的抛光组件 |
CN106597841B (zh) * | 2016-12-14 | 2019-09-24 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 化学机械平坦化中修整器电机的跟踪扫描算法 |
CN108705438A (zh) * | 2018-07-18 | 2018-10-26 | 四川三虎家居有限公司重庆分公司 | 一种家具板材用抛光装置 |
CN110103119A (zh) * | 2018-09-20 | 2019-08-09 | 杭州众硅电子科技有限公司 | 一种抛光装卸部件模块 |
CN110509172A (zh) * | 2019-08-27 | 2019-11-29 | 浙江日成模具有限公司 | 一种模具钢表面的精加工设备及其精加工工艺 |
CN111070076A (zh) * | 2019-12-18 | 2020-04-28 | 华虹半导体(无锡)有限公司 | 化学机械研磨设备 |
CN111002205B (zh) * | 2019-12-19 | 2022-02-01 | 山东欧思特新材料科技有限公司 | 一种半导体用晶圆抛光设备 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3342652A (en) * | 1964-04-02 | 1967-09-19 | Ibm | Chemical polishing of a semi-conductor substrate |
CN100585812C (zh) * | 2005-04-19 | 2010-01-27 | 株式会社荏原制作所 | 基板处理设备 |
TW200744790A (en) * | 2005-09-09 | 2007-12-16 | Inopla Inc | Apparatus and method for polishing objects using object cleaners |
JP2009194134A (ja) * | 2008-02-14 | 2009-08-27 | Ebara Corp | 研磨方法及び研磨装置 |
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Effective date of registration: 20150202 Address after: 300350, No. 8, building 9, ha Hing Road, Haihe science and Technology Park, Jinnan District, Tianjin Patentee after: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Address before: 100084 Beijing 100084-82 mailbox Patentee before: Tsinghua University |
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Denomination of invention: Chemical mechanical polishing machine and chemical mechanical polishing equipment with same Effective date of registration: 20180206 Granted publication date: 20120215 Pledgee: Tsinghua Holdings Co., Ltd. Pledgor: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Registration number: 2018120000003 |
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Date of cancellation: 20191022 Granted publication date: 20120215 Pledgee: Tsinghua Holdings Co., Ltd. Pledgor: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Registration number: 2018120000003 |
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Address after: 300350, No. 8, building 9, ha Hing Road, Haihe science and Technology Park, Jinnan District, Tianjin Patentee after: Huahaiqingke Co.,Ltd. Address before: 300350, No. 8, building 9, ha Hing Road, Haihe science and Technology Park, Jinnan District, Tianjin Patentee before: TSINGHUA University |