CN101908472B - 在绝缘层中嵌入纳米晶的半导体材料制备方法 - Google Patents
在绝缘层中嵌入纳米晶的半导体材料制备方法 Download PDFInfo
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CN101908472B true CN101908472B (zh) | 2015-10-14 |
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Families Citing this family (7)
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CN102130038A (zh) * | 2010-12-27 | 2011-07-20 | 上海新傲科技股份有限公司 | 采用离子注入制备绝缘体上硅材料的方法 |
WO2012088710A1 (zh) * | 2010-12-27 | 2012-07-05 | 上海新傲科技股份有限公司 | 采用吸杂工艺制备带有绝缘埋层的半导体衬底的方法 |
CN102130039B (zh) * | 2010-12-27 | 2013-04-10 | 上海新傲科技股份有限公司 | 采用吸杂工艺制备带有绝缘埋层的半导体衬底的方法 |
CN102569061B (zh) * | 2011-12-30 | 2014-12-17 | 上海新傲科技股份有限公司 | 带有绝缘埋层的辐射加固材料及其制备方法 |
CN102491260A (zh) * | 2011-12-31 | 2012-06-13 | 上海先进半导体制造股份有限公司 | 采用腐蚀自停止方式制造流量传感器的方法 |
CN111739838B (zh) * | 2020-06-23 | 2023-10-31 | 中国科学院上海微系统与信息技术研究所 | 一种抗辐射的soi材料的制备方法 |
CN111987073B (zh) * | 2020-08-28 | 2022-05-31 | 厦门理工学院 | 一种基于中子辐照的抗辐照加固soi器件及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN87105937A (zh) * | 1987-12-12 | 1988-06-01 | 南京工学院 | 半导体直接键合的表面处理方法 |
CN1495849A (zh) * | 2002-08-10 | 2004-05-12 | 朴在仅 | 制造纳米soi晶片的方法及由该法制造的纳米soi晶片 |
CN1744298A (zh) * | 2005-07-29 | 2006-03-08 | 上海新傲科技有限公司 | 一种绝缘体上硅的制作方法 |
CN101414552A (zh) * | 2008-10-23 | 2009-04-22 | 中国科学院微电子研究所 | 高密度硅纳米晶薄膜的制备方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN87105937A (zh) * | 1987-12-12 | 1988-06-01 | 南京工学院 | 半导体直接键合的表面处理方法 |
CN1495849A (zh) * | 2002-08-10 | 2004-05-12 | 朴在仅 | 制造纳米soi晶片的方法及由该法制造的纳米soi晶片 |
CN1744298A (zh) * | 2005-07-29 | 2006-03-08 | 上海新傲科技有限公司 | 一种绝缘体上硅的制作方法 |
CN101414552A (zh) * | 2008-10-23 | 2009-04-22 | 中国科学院微电子研究所 | 高密度硅纳米晶薄膜的制备方法 |
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Inventor after: Wei Xing Inventor after: Lin Chenglu Inventor after: Zhang Zhengxuan Inventor after: Zou Shichang Inventor after: Chen Ming Inventor after: Bi Dawei Inventor after: Wu Aimin Inventor after: Wang Xiang Inventor after: Zhang Miao Inventor after: Wang Xi Inventor before: Wei Xing Inventor before: Wang Xiang Inventor before: Zhang Miao Inventor before: Wang Xi Inventor before: Lin Chenglu |
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Free format text: CORRECT: INVENTOR; FROM: WEI XING WANG XIANG ZHANG MIAO WANG XI LIN CHENGLU TO: WEI XING ZHANG ZHENGXUAN ZOU SHICHANG CHEN MING BI DAWEI WU AIMIN WANG XIANG ZHANG MIAO WANG XI LIN CHENGLU |
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