CN101893906A - Temperature control system and method thereof - Google Patents
Temperature control system and method thereof Download PDFInfo
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- CN101893906A CN101893906A CN 201010228076 CN201010228076A CN101893906A CN 101893906 A CN101893906 A CN 101893906A CN 201010228076 CN201010228076 CN 201010228076 CN 201010228076 A CN201010228076 A CN 201010228076A CN 101893906 A CN101893906 A CN 101893906A
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Abstract
The invention relates to a temperature control system and a method thereof. In the system, a temperature signal sensed by a temperature sensing module is filtered, amplified and converted into temperature data through a signal acquisition module, and is sent into a PLC; the PLC is communicated with a control module through network to transmit the temperature data; the control module compensates the temperature data of each sampling channel to acquire the actual temperature value of each temperature sensing point, combines with temperature to control target track data and the actual temperature value, and generates a control command by combining a set control mode and a control parameter; after the control command is sent to the PLC through data flow from the top to the bottom, the control command is converted into a signal which can be received by a control signal output module by the PLC; and the control signal output module drives a transformer to output corresponding heating power. The system and the method have the advantages of strong pertinence, high control accuracy and wide application range.
Description
Technical field
The present invention relates to semiconductor technology heter temperature control technology field, relate in particular to a kind of vertical heater temperature control system and method.
Background technology
Silicon chip is a kind of important semiconductor material, and its processing technology, particularly oxidation technology are a kind of technology very high to the temperature-controlled process requirement.The silicon chip stove of present domestic design is horizontal type structure mostly.Generally having adopted the higher vertical heater of automaticity in the world is that silicon chip is done technology.In order to provide reliable and stable Temperature Field Control system, the past temperature control devices that adopt temperature control instrument general on the market as horizontal chamber furnace (oven) or vertical heater more.But this type of temperature controller is not at vertical heater technology special setting, and its suitable envelop of function is narrow, and cost height and poor expandability can not upgrade in time along with the renewal of technological requirement.
Summary of the invention
(1) technical matters that will solve
The technical problem to be solved in the present invention is: design a kind of with strong points, control accuracy is high, the scope of application is wider temperature control system and method, to overcome the deficiencies in the prior art.
(2) technical scheme
For achieving the above object, the present invention adopts following technical scheme:
The invention provides a kind of temperature control system, this system comprises: the temperature-sensitive module is used for sensing point for measuring temperature temperature, and the temperature signal that senses is sent to signal acquisition module; Signal acquisition module links to each other with described temperature-sensitive module, is sent to programmable logic controller (PLC) after will converting temperature data to from the temperature signal of described temperature-sensitive module; Programmable logic controller (PLC) is sent to coupled control module with described temperature data, and the steering order that described control module is generated sends to control signal output module; Control module, receive the temperature data that described programmable logic controller (PLC) transmits, described temperature data is resolved and computing and/or demonstration, to obtain the actual temperature value of point for measuring temperature, and in conjunction with control target temperature track data generation steering order, described steering order is sent to described programmable logic controller (PLC), and described control target temperature track data is time dependent target temperature value; Control signal output module links to each other with described programmable logic controller (PLC), according to the steering order driving transformer of described programmable logic controller (PLC) transmission; Transformer links to each other with described control signal output module, exports corresponding heating power according to described steering order.
Wherein, described control module comprises: driver element regularly described temperature data is read to the I/O server, and the steering order that described I/O server is sent sends to described programmable logic controller (PLC); The I/O server is sent to unit or operating unit according to the data configuration type with described temperature data, and the steering order that functional unit is generated is sent to described driver element; Unit is resolved described temperature data and the data of resolving is sent to corresponding functional unit; Functional unit carries out calculation process to the data of described parsing, obtains the measurement point actual temperature value, and generates steering order according to the control target temperature track data, will need data presented to deliver to operating unit simultaneously; Operating unit will be sent to the data presentation of this unit on operation interface.
Wherein, described programmable logic controller (PLC) comprises: converting unit is used for described steering order is converted to the receivable signal of described control signal output module.
Wherein, described temperature-sensitive module is Spike and Profile thermopair group.
Wherein, described control signal output module is five all wave controllers and five solid-state relays.
The present invention also provides a kind of temperature-controlled process based on the said temperature control system, and the method comprising the steps of:
S1. temperature-sensitive module senses measurement point temperature, and the temperature signal that senses is sent to signal acquisition module;
S2. signal acquisition module is sent to programmable logic controller (PLC) after converting described temperature signal to temperature data;
S3. programmable logic controller (PLC) is sent to control module with described temperature data;
S4. described control module receives described temperature data, described temperature data is resolved and computing and/or demonstration, obtain the actual temperature value of point for measuring temperature, generate steering order, and described steering order is sent to described programmable logic controller (PLC) in conjunction with the control target temperature track data;
S5. described programmable logic controller (PLC) is sent to described control signal output module with described steering order;
S6. described control signal output module is according to the heating power of described steering order driving transformer output corresponding frequencies;
Wherein, use two kinds of described control target temperature tracks of different mode plannings: heating rate mode of priority and heating-up time mode of priority.
Wherein, use described heating rate mode of priority to plan that the method for described control target temperature thermal tracking comprises: linear method, piecewise linearity method, and Spline Interpolation Method.
Wherein, described step S4 further comprises:
The described control module of S4.1 receives described temperature data, it is resolved or shows according to the data configuration type;
S4.2 carries out calculation process to the temperature data after resolving, utilize the signal source of standard all sampling channels to be carried out the measurement of appointed interval in the measurement range of semaphore request, generate calibration offset data form, temperature data to the actual measurement of each sampling channel carries out interpolation correction, obtains the measurement point actual temperature value;
S4.3 carries out the temperature calibration of adjusting to the measurement data of Profile thermocouple measurement data and Spike thermopair;
S4.4 in conjunction with the calibration of Profile thermopair and Spike thermopair after data, according to steering order, generate the control temperature;
S4.5 generates the control target temperature track data according to control temperature and the Planning Model set;
S4.6 is in conjunction with actual temperature value and control target temperature track data value, and the operation control algolithm generates steering order;
S4.7 is sent to programmable logic controller (PLC) with steering order, and showing simultaneously needs data presented.
Wherein, described control temperature is the combination of a kind of actual temperature value of choosing when being used for controller operation control algolithm, be the actual temperature value behind the Spike thermocouple measurement data calibration, or the actual temperature value behind the Profile thermocouple measurement data calibration, or the weighted array of the actual temperature value behind actual temperature value behind the Spike thermocouple measurement data calibration and the Profile thermocouple measurement data calibration.
(3) beneficial effect
Temperature control system of the present invention and method extendability thereof are strong, can carry out the configuration of control model and controlled variable according to concrete technology flexibly, the control accuracy height, and reliability and stability are good, have friendly man-machine interaction mode, easy to operate advantage.This temperature-controlled process adopts modular approach fully on software design idea, externally only disclose interface, and this OO thought makes that the security of system software encapsulation property is better, has improved the reusability of code.And level is reasonable on software architecture, and functions of modules is clearly demarcated, can be used as configurable temperature control modules, directly applies to the large scale industry Control Software System.
Description of drawings
Fig. 1 is the temperature control system structural representation according to one embodiment of the present invention;
Fig. 2 is the temperature-controlled process process flow diagram according to one embodiment of the present invention;
Fig. 3 is according to temperature data compensation process flow diagram in the temperature-controlled process of one embodiment of the present invention;
Fig. 4 is according to control target temperature trajectory planning process flow diagram in the temperature-controlled process of one embodiment of the present invention;
Fig. 5 is according to master control program process flow diagram of the present invention.
Embodiment
Temperature control system and method that the present invention proposes are described in detail as follows in conjunction with the accompanying drawings and embodiments.
Temperature control system that according to a kind of side of enforcement of the present invention is and method are applied in the temperature control of vertical furnaceman's skill, as shown in Figure 1, this system comprises: temperature-sensitive module 1 is used for sensing point for measuring temperature temperature, and the temperature signal that senses is sent to signal acquisition module; Signal acquisition module 2 links to each other with temperature-sensitive module 1, is sent to programmable logic controller (PLC) (Programmable LogicController, PLC) 3 after will converting temperature data from the temperature signal of temperature-sensitive module 1 to; Programmable logic controller (PLC) 3, the temperature data that signal acquisition module 2 is sent is sent to coupled control module 4 by Industrial Ethernet, and the steering order that control module 4 is generated sends to control signal output module 5; Control module 4, receive the temperature data that programmable logic controller (PLC) 3 transmits, this temperature data is resolved and computing and/or demonstration, to obtain the actual temperature value of point for measuring temperature, generate steering order according to actual temperature value and control target temperature track data, and steering order is sent to programmable logic controller (PLC) 3; Control signal output module 5 links to each other with programmable logic controller (PLC) 3, according to the steering order driving transformer 6 that programmable logic controller (PLC) 3 sends, is made up of five all wave controllers and five solid-state relays; Transformer 6 links to each other with control signal output module 5, exports corresponding heating power according to steering order.
Temperature-sensitive module 1 is Spike and Profile thermopair group.The temperature signal that temperature-sensitive module 1 senses is by signal acquisition module 2 filtering, amplify, send into PLC3 after converting temperature data to, PLC3 by network and control module 4 communications with the transmission temperature data, control module 4 inquiries utilize the offset data form that generates behind the standard signal source calibration in advance, mode by interpolation compensates the temperature data of each sampling channel, obtain the actual temperature value of each point for measuring temperature, control target temperature track data and actual temperature value according to planning, generate steering order in conjunction with control model of setting and controlled variable, steering order is after data stream is sent to PLC3 from top to bottom, converting unit by PLC3 converts control signal output module 5 receivable signals to, it is the receivable signal of all wave controllers, with driving solid relay work, solid-state relay power controlling source transformer 6 is supplied with the working time of heating furnace silks, to adjust in each control cycle the equalization stable in temperature field in the whole body of heater.
The whole temperature-controlled process of control module 4 operations, it is provided with: Drive Layer, driver wherein is cyclic access peripheral hardware hardware interface regularly, and the temperature data that PLC3 is fed back to reads to the I/O server, and the steering order that the I/O server is sent sends to PLC3; The I/O server, be responsible for the triggering with new and dependent event of data, temperature data is sent to that mechanical floor is resolved or directly delivers to operation layer being presented on the operation interface according to the data configuration type, the steering order that functional layer is generated is sent to Drive Layer and drives peripheral hardware hardware and carry out work; Mechanical floor, the resolution temperature data also are sent to corresponding functional layer with the data of resolving; Functional layer for the core that entire stream is handled, is being moved all control algolithms, the data of resolving are carried out calculation process, obtain the measurement point actual temperature value, and generate steering order, will need data presented to deliver to operation layer simultaneously according to the control target temperature track data; Operation layer is used for user's operation, and the data presentation that will be sent to this layer is on operation interface.
As shown in Figure 2, the temperature-controlled process based on said system comprises step:
S1. temperature-sensitive module senses measurement point temperature, and the temperature signal that senses is sent to signal acquisition module;
S2. signal acquisition module is sent to programmable logic controller (PLC) after converting temperature signal to temperature data;
S3. programmable logic controller (PLC) is sent to control module with temperature data;
S4. control module receives this temperature data, and temperature data is resolved and computing and/or demonstration, obtains the actual temperature value of point for measuring temperature and generates steering order in conjunction with the control target temperature track data, and steering order is sent to programmable logic controller (PLC);
S5. programmable logic controller (PLC) is sent to control signal output module with steering order;
S6. control signal output module is according to the heating power of steering order driving transformer output corresponding frequencies.
Usually, all can cause the distortion of signal in the transmit stage of manufacturing, installation and the sampling channel of sensor, therefore the temperature value from the PLC feedback is not to measure temperature value really.So, when obtaining the feedback temperature data, need calibrate accordingly it in system.As shown in Figure 3, step S4 further comprises:
The S4.1 control module receives temperature data, it is resolved or shows according to the data configuration type;
S4.2 carries out calculation process to the temperature data after resolving, utilize the signal source of standard all sampling channels to be carried out the measurement of appointed interval in the measurement range of semaphore request, generate calibration offset data form, temperature data to the actual measurement of each sampling channel carries out interpolation correction, obtains the measurement point actual temperature value;
S4.3 is at Profile thermocouple measurement data, the producer that produces can provide the calibration data of a cover gamut, be used for accomplishing to measurement data, simultaneously, at Spike thermocouple measurement data, effect in order to need to control with the Profile thermopair in control procedure is carried out equivalence, also needs the measurement data of Spike thermopair is carried out the correction of adjusting of a temperature;
S4.4 in conjunction with the correction of Profile thermopair and Spike thermopair after data, according to steering order, generation is used for the control temperature of temperature control algorithm, this control temperature is the combination of a kind of actual temperature value of choosing when being used for controller operation control algolithm, can be actual temperature value behind Spike thermopair, the Profile calibration of thermocouple and the weighted array between the two;
S4.5 generates the control target temperature track data according to control temperature and the Planning Model set;
S4.6 is in conjunction with actual temperature value and control target temperature track data value, and the operation control algolithm generates steering order;
S4.7 is sent to programmable logic controller (PLC) with steering order, and showing simultaneously needs data presented.Adopt modular approach fully on this method software design idea, externally only disclose interface, this OO thought makes that the security of system software encapsulation property is better, has improved the reusability of code, can be used as configurable temperature control modules, directly apply to the large scale industry Control Software System.
Fig. 4 is a control target temperature trajectory planning process flow diagram of the present invention.When system's running temperature control method, at first to obtain the control target temperature track, promptly time dependent target temperature value Td (t).According to the systemic-function requirement, the control target temperature track in the inventive method comprises two kinds of Planning Model: 1. temperature rise rate mode of priority; 2. temperature rise time priority pattern.To the temperature rise rate mode of priority, the present invention proposes following three kinds of planing methods:
A. linear method
T
d(t)＝a*(t-t
0)+b (t＞t
0)
B. piecewise linearity method
T
d(t)＝a*(t-t
0)+b (t
0＜t＜t
s)
T
d(t)＝c*(t-t
0)+d (t＞t
s)
C. polynomial spline method
T
d(t)＝a*(t-t0)
3+b*(t-t0)
2+c*(t-t
0)+d (t＞t0)
The present invention can adopt said method to generate the control target temperature track according to parameter of user automatically.
Fig. 5 is a master control program process flow diagram of the present invention.As shown in Figure 5, the control procedure of master routine is:
(1) at first finish the initial work of total system, the upper and lower computer communication connects, functions such as database configuration.The every value of initialization was default value when system powered on, and control module is sent control command can change the value of setting, set as system's maximum operating temperature value.
(2) after system initialization was finished, system can load relevant controlled variable and calibration data generation steering order by the enabling signal acquisition module simultaneously, in conjunction with the control target temperature track data of flow process generation shown in Figure 3.
(3) progress control method is started working, and the PLC sending controling instruction is to control signal output subsystem.
(4) if current working and original parameter application scenario do not conform to, when need changing original pid control parameter, system provides the pid parameter setting function to generate new pid control parameter.
(5), after the thermal characteristic between Spike thermopair and the Profile thermopair changes, need in time carry out warm area and adjust to upgrade calibration parameter at the system conversion parts or after carrying out cleaning treatment.
(6) receive control module operation layer command information at last and judge whether the end temp Control work, if receive the finish command, EOP (end of program) then, otherwise periodic duty always, the signal of received signal acquisition module feedback ceaselessly, ceaselessly move pid control algorithm, ceaselessly the steering order that sends to PLC and upgrade the operation layer data presented.
Above embodiment only is used to illustrate the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; under the situation that does not break away from the spirit and scope of the present invention; can also make various variations and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (10)
1. temperature control system, this system comprises:
The temperature-sensitive module is used for sensing point for measuring temperature temperature, and the temperature signal that senses is sent to signal acquisition module;
Signal acquisition module links to each other with described temperature-sensitive module, is sent to programmable logic controller (PLC) after will converting temperature data to from the temperature signal of described temperature-sensitive module;
Programmable logic controller (PLC) is sent to coupled control module with described temperature data, and the steering order that described control module is generated sends to control signal output module;
Control module, receive the temperature data that described programmable logic controller (PLC) transmits, described temperature data is resolved and computing and/or demonstration, to obtain the actual temperature value of point for measuring temperature, and in conjunction with control target temperature track data generation steering order, described steering order is sent to described programmable logic controller (PLC), and described control target temperature track data is time dependent target temperature value;
Control signal output module links to each other with described programmable logic controller (PLC), according to the steering order driving transformer of described programmable logic controller (PLC) transmission;
Transformer links to each other with described control signal output module, exports corresponding heating power according to described steering order.
2. temperature control system as claimed in claim 1 is characterized in that, described control module comprises:
Driver element regularly reads to the I/O server with described temperature data, and the steering order that described I/O server is sent sends to described programmable logic controller (PLC);
The I/O server is sent to unit or operating unit according to the data configuration type with described temperature data, and the steering order that functional unit is generated is sent to described driver element;
Unit is resolved described temperature data and the data of resolving is sent to corresponding functional unit;
Functional unit carries out calculation process to the data of described parsing, obtains the measurement point actual temperature value, and generates steering order according to the control target temperature track data, will need data presented to deliver to operating unit simultaneously;
Operating unit will be sent to the data presentation of this unit on operation interface.
3. temperature control system as claimed in claim 1 is characterized in that, described programmable logic controller (PLC) comprises:
Converting unit is used for described steering order is converted to the receivable signal of described control signal output module.
4. temperature control system as claimed in claim 1 is characterized in that, described temperature-sensitive module is Spike and Profile thermopair group.
5. temperature control system as claimed in claim 3 is characterized in that, described control signal output module is five all wave controllers and five solid-state relays.
6. temperature-controlled process based on each described temperature control system of claim 1-5 is characterized in that the method comprising the steps of:
S1. temperature-sensitive module senses measurement point temperature, and the temperature signal that senses is sent to signal acquisition module;
S2. signal acquisition module is sent to programmable logic controller (PLC) after converting described temperature signal to temperature data;
S3. programmable logic controller (PLC) is sent to control module with described temperature data;
S4. described control module receives described temperature data, described temperature data is resolved and computing and/or demonstration, obtain the actual temperature value of point for measuring temperature, generate steering order, and described steering order is sent to described programmable logic controller (PLC) in conjunction with the control target temperature track data;
S5. described programmable logic controller (PLC) is sent to described control signal output module with described steering order;
S6. described control signal output module is according to the heating power of described steering order driving transformer output corresponding frequencies;
7. temperature-controlled process as claimed in claim 6 is characterized in that, uses two kinds of described control target temperature tracks of different mode plannings: heating rate mode of priority and heating-up time mode of priority.
8. temperature-controlled process as claimed in claim 7 is characterized in that, uses described heating rate mode of priority to plan that the method for described control target temperature thermal tracking comprises: linear method, piecewise linearity method, and Spline Interpolation Method.
9. temperature-controlled process as claimed in claim 8 is characterized in that, described step S4 further comprises:
The described control module of S4.1 receives described temperature data, it is resolved or shows according to the data configuration type;
S4.2 carries out calculation process to the temperature data after resolving, utilize the signal source of standard all sampling channels to be carried out the measurement of appointed interval in the measurement range of semaphore request, generate calibration offset data form, temperature data to the actual measurement of each sampling channel carries out interpolation correction, obtains the measurement point actual temperature value;
S4.3 carries out the temperature calibration of adjusting to the measurement data of Profile thermocouple measurement data and Spike thermopair;
S4.4 in conjunction with the calibration of Profile thermopair and Spike thermopair after data, according to steering order, generate the control temperature;
S4.5 generates the control target temperature track data according to control temperature and the Planning Model set;
S4.6 is in conjunction with actual temperature value and control target temperature track data value, and the operation control algolithm generates steering order;
S4.7 is sent to programmable logic controller (PLC) with steering order, and showing simultaneously needs data presented.
10. temperature-controlled process as claimed in claim 9, it is characterized in that, described control temperature is the combination of a kind of actual temperature value of choosing when being used for controller operation control algolithm, be the actual temperature value behind the Spike thermocouple measurement data calibration, or the actual temperature value behind the Profile thermocouple measurement data calibration, or the weighted array of the actual temperature value behind actual temperature value behind the Spike thermocouple measurement data calibration and the Profile thermocouple measurement data calibration.
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Application publication date: 20101124 |