CN104655976A - Thermocouple fault diagnosis method and system for semiconductor heat treatment equipment - Google Patents
Thermocouple fault diagnosis method and system for semiconductor heat treatment equipment Download PDFInfo
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- CN104655976A CN104655976A CN201510068266.4A CN201510068266A CN104655976A CN 104655976 A CN104655976 A CN 104655976A CN 201510068266 A CN201510068266 A CN 201510068266A CN 104655976 A CN104655976 A CN 104655976A
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- thermopair
- value
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/026—Arrangements for signalling failure or disconnection of thermocouples
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
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- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
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Abstract
The invention relates to a thermocouple fault diagnosis method and system for semiconductor heat treatment equipment. Each temperature control area in the semiconductor heat treatment equipment comprises a thermocouple and a heating unit; the system comprises a filter, a temperature sensing module, a logical processor, a temperature controller and an electric control unit, which are form closed-loop control; the thermocouple acquires temperature data of the heat treatment equipment, and enters the logic processor after passing through the filter and the temperature sensing module; the logic processor judges the current working state of the thermocouple according to the thermocouple sampling value change conditions corresponding to the temperature areas, thermocouple sampling value change conditions of adjacent temperature areas, thermocouple sampling value change conditions and control quantity change conditions corresponding to the temperature areas, and thermocouple sampling values corresponding to the temperature areas, thermocouple sampling change value of the adjacent temperature areas as well as related control quantity change conditions, and provides the current working state for the corresponding temperature controller and the corresponding power control unit for compensation.
Description
Technical field
The present invention relates to ic manufacturing technology field, more particularly, relate to a kind of thermopair method for diagnosing faults for semiconductor heat treatment equipment and system.
Background technology
At present, the design of semiconductor devices develops rapidly to the direction of high density, high integration, proposes more and more higher requirement to SIC (semiconductor integrated circuit) new technology, new technology, new equipment.As the semiconductor heat treatment equipment of one of the process equipment of operation before integrated circuit production line, in the silicon chip manufacturing process such as diffusion, annealing, alloy, oxidation, film growth, play important role, it requires that the temperature accurately controlled is silicon chip surface temperature.
In semiconductor fabrication process, user wishes that heat treating equipment long-time continuous can be run many group technique and do not break down, and this proposes very high requirement to the stability of equipment.The features such as thermopair, as the survey instrument of temperature control system, has measuring accuracy high, and measurement range is large, and volume is little, and thermal response is fast, and the life-span is long, have now been widely used in semiconductor heat treatment equipment.
It will be apparent to those skilled in the art that the faults such as open circuit and short circuit may appear in thermopair in the course of the work.Refer to Fig. 1, Fig. 1 is three kinds of states of thermopair work, normal condition, short trouble state and open fault view.Because temperature-sensitive module carries open circuit warning function usually, when thermopair is in open-circuit condition, it can send open circuit alerting signal to logic controller, open fault epidemic situation comparison easily differentiates, and when thermopair is in short-circuit condition, due to the difference of short circuit trouble point position, the temperature data of thermopair collection is also not quite similar, and the phenomenon of short trouble is with the difference of actual environment residing for thermopair, phenomenon of the failure is more complicated, so the more difficult differentiation of the short trouble of thermopair.
Summary of the invention
The object of the present invention is to provide a kind of thermopair fault diagnosis filter method of semiconductor heat treatment equipment, this method is utilized can correctly to diagnose out thermopair whether to be in short trouble state, to temperature controller with information, temperature controller makes correct process in time according to process requirements, reduces the loss of equipment and product.
For achieving the above object, technical scheme of the present invention is as follows:
A thermopair fault diagnosis filter method for semiconductor heat treatment equipment, described semiconductor heat treatment equipment comprises multiple temperature control district, and each temperature control district comprises thermopair and heating unit respectively, and described method specifically comprises:
Step S1: carry out thermopair fault diagnosis according to each warm area corresponding thermocouples sampled value situation of change, if diagnostic result is normal, then performs step S2, otherwise, perform step S5;
Step S2: carry out thermopair fault diagnosis according to adjacent warm area corresponding thermocouples sampled value situation of change, if diagnostic result is normal, then performs step S3, otherwise, perform step S5;
Step S3: carry out thermopair fault diagnosis according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change, if diagnostic result is normal, then performs step S4, otherwise, perform step S5;
Step S4: according to each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change carry out thermopair fault diagnosis, if diagnostic result is normal, in corresponding technological process, continue circulation and carry out step S1, step S2, step S3 and step S4; Otherwise, perform step S5;
Step S5: send thermopair short circuit fault signal, and carry out corresponding compensation deals.
Preferably, described step S1 specifically comprises the steps:
Step S11: the temperature of each thermopair to its corresponding temperature control district carries out data sampling; And calculate described thermopair sampled value variation tendency value in a sampling period according in each warm area sampled value;
Step S12: carrying out in the normal temperature-rise period of technique, judging whether described variation tendency value is more than or equal to first threshold, and/or, carrying out in the normal temperature-fall period of technique, judging whether described variation tendency value is less than or equal to Second Threshold; Wherein, described first threshold is the maximum intensification value in the sampling period, and described Second Threshold is the maximum cooling changing value in the sampling period;
Step S13: if the value of short circuit abnormality counter adds 1;
Step S14: repeat step S12 and step S13, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
Preferably, described step S2 specifically comprises the steps:
Step S21: the temperature of each thermopair to its corresponding temperature control district carries out data sampling; And calculate described thermopair sampled value variation tendency value in a sampling period according to described adjacent warm area sampled value;
Step S22: carrying out in the normal temperature-rise period of technique, judging whether described variation tendency value is more than or equal to the 3rd threshold value, and/or, carrying out in the normal temperature-fall period of technique, judging whether described variation tendency value is less than or equal to the 4th threshold value; Wherein, described 3rd threshold value is the maximum warming value of adjacent warm area thermopair in the sampling period, and described 4th threshold value is the maximum cooling changing value of adjacent warm area thermopair in the sampling period;
Step S23: if the value of short circuit abnormality counter adds 1;
Step S24: repeat step S22 and step S23, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
Preferably, described step S3 specifically comprises the steps:
Step S31: calculate controlled quentity controlled variable difference according to each warm area controlled quentity controlled variable recording gauge;
Step S32: the maximum intensification controlled quentity controlled variable changing value corresponding according to each warm area and maximum cooling controlled quentity controlled variable changing value, utilize linear interpolation method can calculate temperature control variable quantity corresponding to each control cycle, in system thermopair sampling time lag periodicity, the aggregate-value that accumulation calculating temperature control variable quantity produces, the mean value of calculating sampling time lag periodicity temp variable quantity simultaneously, then, according to typical process temperature spot temperature under stable state and the output controlled quentity controlled variable table of comparisons, linear interpolation method is utilized to calculate in this temperature range, the mean value obtaining temperature control variable quantity makes the normothermic variable quantity of certain warm area within the stagnant cycle, and judge that the absolute accumulative value that this temperature control variable quantity produces is greater than the α of the absolute accumulative value that temperature control variable quantity produces doubly, wherein α is system constants, system thermopair sampling time lag periodicity, according to thermocouple type, heating system time lag constant and the setting of sampling system system time lags constant.
Step S33: if the value of short circuit abnormality counter adds 1;
Step S34: repeat step S32, step S33, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
Preferably, the span of described α is a value between 1 ~ 2.
Preferably, described step S4 specifically comprises the steps:
Step S41: the controlled quentity controlled variable calculating adjacent warm area exports difference;
Step S42: the maximum intensification controlled quentity controlled variable changing value corresponding according to each warm area and maximum cooling controlled quentity controlled variable changing value, utilize linear interpolation method can calculate temperature control variable quantity corresponding to each control cycle, in system thermopair sampling time lag periodicity, the aggregate-value that accumulation calculating temperature control variable quantity produces, the simultaneously mean value of temperature control variable quantity in adjacent three temperature control districts in calculating sampling time lag periodicity, then, according to typical process temperature spot temperature under stable state and the output controlled quentity controlled variable table of comparisons, linear interpolation method is utilized to calculate in this temperature range, temperature control variable quantity mean value makes the normal variation amount of a certain warm area temperature and adjacent two normothermic variable quantities of warm area within the stagnant cycle, and judge the absolute accumulative value that each the temperature control variable quantity in this temperature control district produces, whether be greater than the β of the absolute accumulative value that the normothermic variable quantity of this temperature control district temperature control variable quantity and adjacent Liang Ge temperature control district produces doubly, wherein, β is system constants, and system thermopair sampling time lag periodicity sets according to thermocouple type, heating system time lag constant and sampling system system time lags constant,
Step S43: if the value of short circuit abnormality counter adds 1;
Step S44: repeat step S42 step S43, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
Preferably, the setting range of system constants β is a value between 0 to 1.
Preferably, described thermopair comprises Inner thermopair, OuterA thermopair, OuterB thermopair and OverTemp thermopair, described step S5 specifically comprises: switch the temperature control method of Inner thermopair to OuterA thermopair successively, or OuterA thermopair is to the temperature control method of OuterB thermopair, or OuterB thermopair is to OverTemp thermocouple temperature control method, continue process.
For achieving the above object, the present invention also has and adopts the system of technique scheme as follows:
Each temperature control district in semiconductor heat treatment equipment described in a kind of thermopair fault diagnosis filter method of semiconductor heat treatment equipment comprises thermopair and heating unit respectively; Described system comprises wave filter, temperature-sensitive module, logic processor, temperature controller and power control unit, to form closed-loop control; Thermopair gathers heat treating equipment temperature data device after filtering, logic processor is entered again after temperature-sensitive module, logic processor is according to each warm area corresponding thermocouples sampled value situation of change, the change of adjacent warm area thermopair sampled value, each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change and each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change, judge the duty of current thermocouple, be supplied to relevant temperature controller and power control unit compensates process.
Preferably, described thermopair comprises Inner thermopair, OuterA thermopair, OuterB thermopair and OverTemp thermopair, described compensation deals comprise: switch the temperature control method of Inner thermopair to OuterA thermopair successively, or OuterA thermopair is to the temperature control method of OuterB thermopair, or OuterB thermopair is to OverTemp thermocouple temperature control method, continue process.
As can be seen from technique scheme, the thermopair fault diagnosis filter method and system of a kind of semiconductor heat treatment equipment of the present invention, by real-time monitoring system, lower each warm area thermopair sampled value situation of change, adjacent warm area thermopair sampled value situation of change, each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change, each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change reach the object of diagnosis thermopair short trouble in working order.Utilize this method can correctly diagnose out thermopair whether to be in malfunction, to temperature controller with information, temperature controller makes correct process in time according to process requirements, reduces the loss of equipment and product.
Accompanying drawing explanation
Fig. 1 is three kinds of states of semiconductor heat treatment equipment thermopair, i.e. normal condition, short-circuit condition and open-circuit condition schematic diagram
Fig. 2 is the structural representation that the present invention includes five corresponding five temperature-controlled areas of road heating unit
Fig. 3 is the electric control system block diagram of the thermopair fault diagnosis filter method adopting semiconductor heat treatment equipment of the present invention
Fig. 4 is the schematic flow sheet of thermopair fault diagnosis filter method one preferred embodiment of semiconductor heat treatment equipment of the present invention
Fig. 5 is temperature controlled region Zone_i and Zone_i+1 maximum temperature difference situation example in the embodiment of the present invention
Fig. 6 is temperature controlled region Zone_n and Zone_n-1 maximum temperature difference situation example in the embodiment of the present invention
Fig. 7 is temperature controlled region Zone_i+j and Zone_i+j+1 maximum temperature difference situation (i+j+1<n) example in the embodiment of the present invention
Fig. 8 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to each warm area corresponding thermocouples sampled value situation of change
Fig. 9 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to adjacent warm area corresponding thermocouples sampled value situation of change
Figure 10 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change
Figure 11 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change
Embodiment
Below in conjunction with accompanying drawing 1-11, the specific embodiment of the present invention is described in further detail.
It should be noted that, the present invention's temperature data be intended to by collecting judges the duty of thermopair, and if judge that thermopair is in short trouble state, carry out respective handling in time, to avoid causing process results significantly to decline; Meanwhile, the present invention can also in technological process, by being switched to other temperature-control heat couple and corresponding temperature controlling mode compensates process, ensure that proceeding of technique, dropping to minimum by loss.
In the following embodiments, the temperature of semiconductor heat treatment equipment controls to be divided into multiple temperature control district as required, and each temperature control district can comprise multiple thermopair and heating unit respectively, and each temperature control district can also comprise multiple thermopair and heating unit respectively.
Refer to Fig. 2, Fig. 2 is the structural representation that the present invention includes five corresponding five temperature-controlled areas of road heating unit.As shown in the figure, in the present embodiment, the temperature-controlled area of semiconductor heat treatment equipment is 5, each temperature control district comprises 5 groups of thermopairs respectively, with the heating unit that 5 temperature controlled region (zone1, zone2, zone3zone4 and zone5) comprise, i.e. thermopair group 1, thermopair group 2, thermopair group 3, thermopair group 4 and thermopair group 5.Inner thermopair, OuterA thermopair, OuterB thermopair and OverTemp thermopair etc. can also be comprised in thermopair group 1.
Refer to Fig. 3, Fig. 3 is the electric control system block diagram of the thermopair fault diagnosis filter method adopting semiconductor heat treatment equipment of the present invention.As shown in the figure, this system, except comprising 5 groups of thermopair groups, also comprises wave filter, temperature-sensitive module, logic processor, temperature controller and power control unit, to form closed-loop control.
Five groups of thermopairs gather heat treating equipment temperature data device after filtering, logic processor is entered again after temperature-sensitive module, logic processor is according to each warm area corresponding thermocouples sampled value situation of change, the change of adjacent warm area thermopair sampled value, each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change and each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change, judge the duty of current thermocouple, be supplied to relevant temperature controller and power control unit compensates process.
For clarity sake, before the thermopair fault diagnosis filter method of semiconductor heat treatment equipment of the present invention is described in detail, first some word concepts are described.
In the normal situation of heating system, the data obtaining the maximum heating rate of each temperature range of system and maximum rate of temperature fall are as shown in table 1 below.
Typical process temperature spot temperature and the output controlled quentity controlled variable table of comparisons under table 1 stable state
That is, when normal temperature-rise period, continuous n thermo-electric couple temperature data sampled value changing value Δ T (unit DEG C, sampling period Δ t second) should≤threshold value TH1 (the maximum intensification value=RampUpRatemax* Δ t/60 in the Δ t time), heating rate unit DEG C/Min.
When normal temperature-fall period, continuous n thermo-electric couple temperature data sampled value changing value Δ T (unit DEG C, sampling period Δ t second) should≤threshold value TH2 (the maximum cooling value=RampDownRatemax* Δ t/60 in the Δ t time), rate of temperature fall unit DEG C/Min.
For multichannel heating unit, as shown in Figure 3, maximum heating rate RampUp
ratemaxfor rate of temperature change (T per minute measured during multichannel heating with full power
min (i+1)-T
min (i)), this measured value changed along with the temperature range of heating unit work and the time of heating unit work, need the maximum heating rate obtaining this temperature range at heating unit normal working temperature interval selection fixed sample point, meanwhile, the calibration in cycle can be fixed.
For multichannel heating warm area, maximum rate of temperature fall RampDown
ratemaxfor rate of temperature change (T per minute measured when multichannel zero energy heats
min (i+1)-T
min (i)), this measured value changed along with the temperature range of heating unit work and the time of heating unit work, need the maximum rate of temperature fall obtaining this temperature range at heating unit normal working temperature interval selection fixed sample point, meanwhile, the calibration in cycle can be fixed.
Adjacent warm area maximum temperature rising rate of change Δ T
nearMaxUpfor: this warm area heating with full power, during adjacent warm area zero energy heated condition, the adjacent warm area normal temperature difference that double sampled point records, this difference changes along with the temperature range of heating unit work and the time of heating unit work, needs to be fixed this measured value of period regulation at heating unit normal working temperature interval selection fixed sample point.
Adjacent warm area maximum temperature decline rate of change Δ T
nearMaxDownfor: this warm area zero energy heats, during adjacent warm area heating with full power state, the adjacent warm area normal temperature difference that double sampled point records.This difference changes along with the temperature range of heating unit work and the time of heating unit work, needs the maximum rate of temperature fall obtaining this temperature range at heating unit normal working temperature interval selection fixed sample point, is fixed the calibration in cycle simultaneously.
For continuous multichannel heating unit (as shown in Figure 3), adjacent warm area temperature gap has three kinds of situations, and respectively as shown in Fig. 5, Fig. 6 and Fig. 7, often kind of situation comprises a positive rate of change of adjacent warm area and adjacent warm area bears rate of change, Δ T
nearMaxUp=T
zone (i+1)-T
zone (i)=TH3, Δ T
nearMaxDown=T
zone (i)-t
zone (i+1)=TH4.
Below in conjunction with Fig. 4, the thermopair fault diagnosis filter method of semiconductor heat treatment equipment of the present invention is described in detail.As shown in the figure, in the present embodiment, the method can specifically comprise the steps:
Step S1: carry out thermopair fault diagnosis according to each warm area corresponding thermocouples sampled value situation of change, if diagnostic result is normal, then performs step S2, otherwise, perform step S5;
Step S2: carry out thermopair fault diagnosis according to adjacent warm area corresponding thermocouples sampled value situation of change, if diagnostic result is normal, then performs step S3, otherwise, perform step S5;
Step S3: carry out thermopair fault diagnosis according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change, if diagnostic result is normal, then performs step S4, otherwise, perform step S5;
Step S4: according to each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change carry out thermopair fault diagnosis, if diagnostic result is normal, in corresponding technological process, continue circulation and carry out step S1, step S2, step S3 and step S4; Otherwise, perform step S5;
Step S5: send thermopair short circuit fault signal, and carry out corresponding compensation deals.After diagnosing out thermopair fault, the method for compensation deals method can adopt other neighboring thermocouple to bear the heavy burden of detection and temperature control.In the present embodiment, the temperature control method of Inner thermopair to OuterA thermopair can be switched successively, or OuterA thermopair is to the temperature control method of OuterB thermopair, or OuterB thermopair is to OverTemp thermocouple temperature control method, continues process.
Refer to Fig. 8, Fig. 8 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to each warm area corresponding thermocouples sampled value situation of change.As shown in the figure, step S1 specifically can comprise the steps:
Step S11: by abnormality counter initialization, i.e. iCount1=0; The temperature of each thermopair to its corresponding temperature control district carries out data sampling; And calculate described thermopair sampled value variation tendency value in a sampling period according in each warm area sampled value, namely calculate Δ T=T according to this warm area sampled value
t+1-T
t;
Step S12: carrying out in the normal temperature-rise period of technique, judging whether described variation tendency value is more than or equal to first threshold TH1, and/or, carrying out in the normal temperature-fall period of technique, judging whether described variation tendency value is less than or equal to Second Threshold TH2; Wherein, described first threshold is the maximum intensification value in the sampling period, and described Second Threshold is the maximum cooling changing value in the sampling period.
Step S13: if i.e. Δ T> threshold value TH1 (the maximum warming value=RampUp in the Δ t time
ratemax* Δ t/60) or Δ T< threshold value TH2 (the maximum cooling changing value=RampDown in the Δ t time
ratemax* Δ t/60), if so, the value of short circuit abnormality counter iCount1 adds 1; If Δ T<=TH1 and Δ T>=TH2, then the value of iCount1 remains unchanged;
Step S14: repeat step S12 and step S13, if the value of short circuit abnormality counter iCount1 is greater than a certain predetermined value, send thermopair fault-signal.
In the present embodiment, if obtain diagnosing the upper execution step S2 that can also continue in normal basis to diagnose further in step S1.Refer to Fig. 9, Fig. 9 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to adjacent warm area corresponding thermocouples sampled value situation of change.As shown in the figure, step S2 specifically can comprise the steps:
Step S21: initialization exception state counter, i.e. iCount2=0; The temperature of each thermopair to its corresponding temperature control district carries out data sampling; And calculate described thermopair sampled value variation tendency value in a sampling period according to described adjacent warm area sampled value; Namely Δ T is calculated according to adjacent warm area sampled value
nearZone=T
zone (i+1)-T
zone (i);
Step S22: carrying out in the normal temperature-rise period of technique, judging whether variation tendency value is more than or equal to the 3rd threshold value TH
3, and/or, carrying out in the normal temperature-fall period of technique, judging whether variation tendency value is less than or equal to the 4th threshold value TH
4; Wherein, the 3rd threshold value TH
3be the maximum warming value of adjacent warm area thermopair in the sampling period, the 4th threshold value TH
4it is the maximum cooling changing value of adjacent warm area thermopair in the sampling period;
Step S23: if i.e. Δ T
nearZone> Δ T
nearMaxUp=TH
3or Δ T
nearZone< Δ T
nearMaxDown=TH
4, the value of short circuit abnormality counter iCount2 adds 1; If Δ TNearZone<TH
3and Δ TNearZone>TH
4, then the value of iCount2 remains unchanged;
Step S24: repeat step S22 and step S23, if the value of short circuit abnormality counter iCount2 is greater than a certain predetermined value, send thermopair fault-signal.
In the present embodiment, if obtain diagnosing the upper execution step S3 that can also continue in normal basis to diagnose further in step S2.Refer to Figure 10, Figure 10 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change.As shown in the figure, step S3 specifically can comprise the steps:
Step S31: by abnormality counter initialization, i.e. iCount3=0; Controlled quentity controlled variable difference is calculated, i.e. Δ CtrlOut according to each warm area controlled quentity controlled variable recording gauge
zone (i)=CtrlOut
zone (i) t+1-CtrlOut
zone (i) t;
Step S32: the maximum intensification controlled quentity controlled variable changing value RampUpRate corresponding according to each warm area
maxwith maximum cooling controlled quentity controlled variable changing value RampDown
ratemax, utilizes linear interpolation method to calculate each control cycle Δ CtrlOut
zone (i)corresponding temperature control variation delta T
Δ CtrlOut, at system thermopair sampling time lag periodicity N
cyclein, accumulation calculating temperature control variation delta CtrlOut
zone (i)the aggregate-value produced
calculating sampling time lag periodicity N simultaneously
cycletemp variable quantity CtrlOut
zone (i)mean value
then, according to typical process temperature spot temperature under stable state and the output controlled quentity controlled variable table of comparisons, utilize linear interpolation method to calculate in this temperature range, obtain the mean value of temperature control variable quantity
at stagnant cycle N
cycleinside obtain the normothermic variation delta T of certain warm area
standardjudge whether the absolute accumulative value that this temperature control variable quantity produces is greater than the α of the absolute accumulative value that temperature control variable quantity produces doubly, wherein α is system constants, the span of α is a value between 1 ~ 2, system thermopair sampling time lag periodicity sets according to thermocouple type, heating system time lag constant and sampling system system time lags constant;
Step S33: if
the value of short circuit abnormality counter iCount3 adds 1, otherwise iCount3 remains unchanged;
Step S34: repeat step S32, step S33, if the value of short circuit abnormality counter iCount3 is greater than a certain predetermined value, send thermopair fault-signal.
In the present embodiment, if obtain diagnosing the upper execution step S4 that can also continue in normal basis to diagnose further in step S3.Refer to Figure 11, Figure 11 is the step schematic diagram carrying out thermopair fault diagnosis in a preferred embodiment of the present invention according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change.As shown in the figure, step S4 specifically can comprise the steps:
Step S41: initialization exception state counter iCount4=0, the controlled quentity controlled variable calculating adjacent warm area exports difference; Namely
ΔCtrlOut
Zone(i-1)＝CtrlOut
Zone(i-1)t+1-CtrlOut
Zone(i-1)t；
ΔCtrlOut
Zone(i+1)＝CtrlOut
Zone(i+1)t+1-CtrlOut
Zone(i+1)t；
Step S42: the maximum intensification controlled quentity controlled variable changing value RampUpRate corresponding according to each warm area
maxwith maximum cooling controlled quentity controlled variable changing value RampDownRate
max, utilize linear interpolation method can calculate each control cycle Δ CtrlOut
zone (i)corresponding temperature control variation delta T
Δ CtrlOut, at system thermopair sampling time lag periodicity N
cyclein, accumulation calculating temperature control variation delta CtrlOut
zone (i)the aggregate-value produced
calculating sampling time lag periodicity N simultaneously
cycletemp variable quantity CtrlOut
zone (i),ctrlOut
zone (i-1),ctrlOut
zone (i+1)mean value,
then, according to typical process temperature spot temperature under stable state and the output controlled quentity controlled variable table of comparisons 1, linear interpolation method is utilized to calculate in this temperature range, temperature control variable quantity mean value CtrlOut
zone (i) AVGat stagnant cycle N
cycleinside make the normal variation amount Δ T of a certain warm area temperature
standardand adjacent two warm area temperature CtrlOut
zone (i-1),ctrlOut
zone (i+1)at stagnant cycle N
cycleinterior normal variation amount Δ T
standard (i-1)with Δ T
standard (i+1), and judge the absolute accumulative value that each the temperature control variable quantity in this temperature control district produces
whether be greater than the β of the absolute accumulative value that the normothermic variable quantity of this temperature control district temperature control variable quantity and adjacent Liang Ge temperature control district produces doubly, i.e. β | Δ T
standard+ Δ T
standard (i-1)+ Δ T
standard (i+1)|; Wherein, β is system constants, and usually, the setting range of system constants β can be a value between 0 to 1; System thermopair sampling time lag periodicity sets according to thermocouple type, heating system time lag constant and sampling system system time lags constant;
Step S43: if the value of short circuit abnormality counter adds 1;
Step S44: repeat step S42 and step S43, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
After logic processor judges that thermopair is in short trouble state, it can send alerting signal to temperature controller, and switch temperature-control heat couple (Inner TC → OuterA TC → OuterBTC → OverTemp TC) and temperature control method (Cascade → Spike → OverTemp), to ensure proceeding of technique, do not repeat them here.
In sum, by real-time monitoring system, lower each warm area thermopair sampled value situation of change, adjacent warm area thermopair sampled value situation of change, each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change, each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change reach the object of diagnosis thermopair short trouble to this method in working order.Utilize this method can correctly diagnose out thermopair whether to be in malfunction, to temperature controller with information, temperature controller makes correct process in time according to process requirements, reduces the loss of equipment and product.
Above-describedly be only the preferred embodiments of the present invention; described embodiment is also not used to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization instructions of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (10)
1. a thermopair fault diagnosis filter method for semiconductor heat treatment equipment, described semiconductor heat treatment equipment comprises multiple temperature control district, and each temperature control district comprises thermopair and heating unit respectively, it is characterized in that, described method specifically comprises:
Step S1: carry out thermopair fault diagnosis according to each warm area corresponding thermocouples sampled value situation of change, if diagnostic result is normal, then performs step S2, otherwise, perform step S5;
Step S2: carry out thermopair fault diagnosis according to adjacent warm area corresponding thermocouples sampled value situation of change, if diagnostic result is normal, then performs step S3, otherwise, perform step S5;
Step S3: carry out thermopair fault diagnosis according to each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change, if diagnostic result is normal, then performs step S4, otherwise, perform step S5;
Step S4: according to each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change carry out thermopair fault diagnosis, if diagnostic result is normal, in corresponding technological process, continue circulation and carry out step S1, step S2, step S3 and step S4; Otherwise, perform step S5;
Step S5: send thermopair short circuit fault signal, and carry out corresponding compensation deals.
2. thermopair fault diagnosis filter method as claimed in claim 1, it is characterized in that, described step S1 specifically comprises the steps:
Step S11: the temperature of each thermopair to its corresponding temperature control district carries out data sampling; And calculate described thermopair sampled value variation tendency value in a sampling period according in each warm area sampled value;
Step S12: carrying out in the normal temperature-rise period of technique, judging whether described variation tendency value is more than or equal to first threshold, and/or, carrying out in the normal temperature-fall period of technique, judging whether described variation tendency value is less than or equal to Second Threshold; Wherein, described first threshold is the maximum intensification value in the sampling period, and described Second Threshold is the maximum cooling changing value in the sampling period;
Step S13: if the value of short circuit abnormality counter adds 1;
Step S14: repeat step S12 and step S13, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
3. thermopair fault diagnosis filter method as claimed in claim 1, it is characterized in that, described step S2 specifically comprises the steps:
Step S21: the temperature of each thermopair to its corresponding temperature control district carries out data sampling; And calculate described thermopair sampled value variation tendency value in a sampling period according to adjacent warm area sampled value;
Step S22: carrying out in the normal temperature-rise period of technique, judging whether described variation tendency value is more than or equal to the 3rd threshold value, and/or, carrying out in the normal temperature-fall period of technique, judging whether described variation tendency value is less than or equal to the 4th threshold value; Wherein, described 3rd threshold value is the maximum warming value of adjacent warm area thermopair in the sampling period, and described 4th threshold value is the maximum cooling changing value of adjacent warm area thermopair in the sampling period;
Step S23: if the value of short circuit abnormality counter adds 1;
Step S24: repeat step S22 and step S23, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
4. thermopair fault diagnosis filter method as claimed in claim 1, it is characterized in that, described step S3 specifically comprises the steps:
Step S31: calculate controlled quentity controlled variable difference according to each warm area controlled quentity controlled variable recording gauge;
Step S32: the maximum intensification controlled quentity controlled variable changing value corresponding according to each warm area and maximum cooling controlled quentity controlled variable changing value, utilize linear interpolation method can calculate temperature control variable quantity corresponding to each control cycle, in system thermopair sampling time lag periodicity, the aggregate-value that accumulation calculating temperature control variable quantity produces, the mean value of calculating sampling time lag periodicity temp variable quantity simultaneously, then, according to typical process temperature spot temperature under stable state and the output controlled quentity controlled variable table of comparisons, linear interpolation method is utilized to calculate in this temperature range, the mean value obtaining temperature control variable quantity makes the normothermic variable quantity of certain warm area within the stagnant cycle, and judge whether the absolute accumulative value that this temperature control variable quantity produces is greater than the α of the absolute accumulative value that temperature control variable quantity produces doubly, wherein α is system constants, system thermopair sampling time lag periodicity, according to thermocouple type, heating system time lag constant and the setting of sampling system system time lags constant,
Step S33: if the value of short circuit abnormality counter adds 1;
Step S34: repeat step S32, step S33, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
5. thermopair fault diagnosis filter method as claimed in claim 4, it is characterized in that, the span of described α is a value between 1 ~ 2.
6. thermopair fault diagnosis filter method as claimed in claim 1, it is characterized in that, described step S4 specifically comprises the steps:
Step S41: the controlled quentity controlled variable calculating adjacent warm area exports difference;
Step S42: the maximum intensification controlled quentity controlled variable changing value corresponding according to each warm area and maximum cooling controlled quentity controlled variable changing value, utilize linear interpolation method can calculate temperature control variable quantity corresponding to each control cycle, in system thermopair sampling time lag periodicity, the aggregate-value that accumulation calculating temperature control variable quantity produces, the simultaneously mean value of temperature control variable quantity in adjacent three temperature control districts in calculating sampling time lag periodicity, then, according to typical process temperature spot temperature under stable state and the output controlled quentity controlled variable table of comparisons, linear interpolation method is utilized to calculate in this temperature range, temperature control variable quantity mean value makes the normal variation amount of a certain warm area temperature and adjacent two normothermic variable quantities of warm area within the stagnant cycle, and judge the absolute accumulative value that each the temperature control variable quantity in this temperature control district produces, whether be greater than the β of the absolute accumulative value that the normothermic variable quantity of this temperature control district temperature control variable quantity and adjacent Liang Ge temperature control district produces doubly, wherein, β is system constants, and system thermopair sampling time lag periodicity sets according to thermocouple type, heating system time lag constant and sampling system system time lags constant,
Step S43: if the value of short circuit abnormality counter adds 1;
Step S44: repeat step S42 step S43, if the value of short circuit abnormality counter is greater than a certain predetermined value, send thermopair fault-signal.
7. thermopair fault diagnosis filter method as claimed in claim 6, it is characterized in that, the setting range of system constants β is a value between 0 to 1.
8. thermopair fault diagnosis filter method as claimed in claim 1, it is characterized in that, described thermopair comprises Inner thermopair, OuterA thermopair, OuterB thermopair and OverTemp thermopair, described step S5 specifically comprises: switch the temperature control method of Inner thermopair to OuterA thermopair successively, or OuterA thermopair is to the temperature control method of OuterB thermopair, or OuterB thermopair is to OverTemp thermocouple temperature control method, continue process.
9. adopt a system for method described in claim 1, each temperature control district in described semiconductor heat treatment equipment comprises thermopair and heating unit respectively; It is characterized in that,
Described system comprises wave filter, temperature-sensitive module, logic processor, temperature controller and power control unit, to form closed-loop control; Thermopair gathers heat treating equipment temperature data device after filtering, logic processor is entered again after temperature-sensitive module, logic processor is according to each warm area corresponding thermocouples sampled value situation of change, the change of adjacent warm area thermopair sampled value, each warm area corresponding thermocouples sampled value situation of change and controlled quentity controlled variable situation of change and each warm area corresponding thermocouples sampled value and adjacent warm area thermopair sampling changing value and relevant control amount situation of change, judge the duty of current thermocouple, be supplied to relevant temperature controller and power control unit compensates process.
10. system as claimed in claim 9, it is characterized in that, described thermopair comprises Inner thermopair, OuterA thermopair, OuterB thermopair and OverTemp thermopair, described compensation deals comprise: switch the temperature control method of Inner thermopair to OuterA thermopair successively, or OuterA thermopair is to the temperature control method of OuterB thermopair, or OuterB thermopair is to OverTemp thermocouple temperature control method, continue process.
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| CN201510068266.4A CN104655976B (en) | 2014-12-04 | 2015-02-10 | A kind of thermocouple fault diagnosis method and system for semiconductor heat treatment equipment |
| KR1020177024580A KR101929559B1 (en) | 2015-02-10 | 2015-04-16 | Fault diagnosis and processing method and system for thermocouples of a thermal processing apparatus |
| PCT/CN2015/076715 WO2016127490A1 (en) | 2015-02-10 | 2015-04-16 | Fault diagnosis and treatment method and system for thermocouples in heat treatment apparatus |
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| CN106324465A (en) * | 2015-06-30 | 2017-01-11 | 瑞萨电子株式会社 | Semiconductor device and fault detecting method |
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| KR101929559B1 (en) | 2018-12-17 |
| KR20170109664A (en) | 2017-09-29 |
| WO2016127490A1 (en) | 2016-08-18 |
| CN104655976B (en) | 2017-08-22 |
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