KR20170109664A - Fault diagnosis and processing method and system for thermocouples of a thermal processing apparatus - Google Patents

Fault diagnosis and processing method and system for thermocouples of a thermal processing apparatus Download PDF

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KR20170109664A
KR20170109664A KR1020177024580A KR20177024580A KR20170109664A KR 20170109664 A KR20170109664 A KR 20170109664A KR 1020177024580 A KR1020177024580 A KR 1020177024580A KR 20177024580 A KR20177024580 A KR 20177024580A KR 20170109664 A KR20170109664 A KR 20170109664A
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temperature
thermocouple
temperature control
sampling
change
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KR101929559B1 (en
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동 쑤
아이 왕
펑 왕
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베이징 세븐스타 일렉트로닉스 컴퍼니, 리미티드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/026—Arrangements for signalling failure or disconnection of thermocouples
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Control Of Temperature (AREA)

Abstract

A system using fault diagnosis and processing methods for thermocouples in a thermal processing apparatus. Each temperature control region of the thermal processing apparatus has a thermocouple group and a heating unit. The system includes a filter that forms a control loop, a temperature sensing module, a logic processor, a temperature controller, and a power controller. The logic processor is further programmed to perform the steps of: sampling a temperature change of each temperature control region, a temperature difference change between respective adjacent temperature control regions, a sampling temperature change of each temperature control region and a power control change for each heating unit, Determine an operating state of each thermocouple according to a sampling temperature change of adjacent temperature control regions and a power control change for corresponding heating units; And provides diagnostic results to the temperature controller and the power controller to perform the corresponding compensation process.

Figure P1020177024580

Description

Fault diagnosis and processing method and system for thermocouples of a thermal processing apparatus

FIELD OF THE INVENTION The present invention relates generally to the manufacture of integrated circuits and, more particularly, to methods and systems for fault diagnosis and processing for thermocouples used in thermal processing apparatus.

At present, the rapid development of highly integrated and high density semiconductor devices requires more new processes, new technologies, and new equipment for semiconductor IC manufacturing. As one of the processing equipment used in IC front end fabrication, thermal processing equipment plays an important role in wafer fabrication processes including diffusion, annealing, alloying, oxidation, and thin film formation, and provides accurate temperature control .

During the fabrication of semiconductors, the heat treatment apparatus is required to perform various processes continuously without error for a long time, which raises a high demand for the stability of the apparatus. As a measurement equipment for temperature control systems, thermocouples have a wide range of applications, including high measurement accuracy, wide measurement range, small size, fast response, and long service life.

However, as shown in Figure 1, which illustrates three different states of the thermocouple, including steady state, short-circuit error state, and short-circuit error state, it is well known to those skilled in the art that short- It is known. When the thermocouple is in the disconnection fault state, the temperature sensing module of the temperature control system with the disconnection notification function will output a notification signal to the logic controller, so that the disconnection error can be easily detected. On the other hand, when the thermocouple is in a short-circuit error state, it is difficult to determine the short-circuit error of the thermocouple because the temperature data collected by the thermocouple changes with the location of the short-circuit point and the short-circuit error varies depending on the actual environment in which the thermocouple is associated.

It is therefore an object of the present invention to provide an error diagnosis and processing method for thermocouples used in a heat treatment apparatus which allows accurate diagnosis of whether thermocouples are in short-circuit error conditions and which provides information to the temperature controller accordingly , Allowing the temperature controller to take precise and rapid measures to meet processing needs and reduce losses in products and equipment.

In order to achieve these and other advantages and in accordance with the objects of the present invention, the present invention provides a method of diagnosing and treating faults for thermocouples in a heat treatment apparatus. The heat treatment apparatus includes a plurality of temperature control regions each having a thermocouple group and a corresponding heating unit. The methods include the following steps:

Step S1: Perform thermocouple error diagnosis according to the sampling temperature change of each temperature control region obtained by the corresponding thermocouple group; If the diagnosis result is normal, proceed to step S2; Otherwise, proceed to step S5;

Step S2: Perform a thermocouple error diagnosis according to a sampling temperature difference change between each temperature control area and an adjacent temperature control area obtained by corresponding thermocouple groups; If the diagnosis result is normal, proceed to step S3; Otherwise, proceed to step S5;

Step S3: Perform thermocouple error diagnosis according to the change in the sampling temperature within each temperature control region obtained by the corresponding thermocouple group while changing the power control of each corresponding heating unit; If the diagnosis result is normal, proceed to step S4; Otherwise, proceed to step S5;

Step S4: While changing the power controls of the heating units in the respective temperature control areas and adjacent temperature control areas / areas, in each temperature control area obtained by the corresponding thermocouple groups and in the adjacent temperature control areas / areas Performing a thermocouple error diagnosis according to changes in the sampling temperature of the thermocouple; If the diagnosis result is normal, proceed to step S1; Otherwise, proceed to step S5;

Step S5: output a short notice signal and perform corresponding compensation processing.

Preferably, step S1 comprises the following steps:

Step S11: sampling the temperatures of the respective temperature control regions by the corresponding thermocouples group; Calculating a sampling temperature change in a sampling interval of each temperature control region according to sampling temperatures of a temperature control region;

Step S12: During the normal temperature ramp-up period in the heat treatment process, it is determined whether the sampling temperature change is greater than the first threshold value and / or during the normal temperature ramp-down period in the heat treatment process, ≪ / RTI > Here, the first threshold value is a maximum temperature ramp-up value corresponding to the temperature control region in the sampling period, and the second threshold value is a negative value of the maximum temperature ramp-down value corresponding to the temperature control region in the sampling period.

Step S13: if " YES ", add 1 to the first count value indicating a short-circuit error condition;

Step S14: Repeat steps S12 and S13, and if the first count value is greater than a predetermined value, output a shortage notification signal.

Preferably, step S2 comprises the following steps:

Step S21: sampling the temperatures of the respective temperature control regions by corresponding thermocouple groups; Calculating a temperature difference change between each temperature control region and an adjacent temperature control region according to sampling temperatures obtained by corresponding thermocouples;

Step S22: During the normal temperature ramp-up period in the heat treatment process, it is determined whether the temperature difference variation is greater than the third threshold value and / or during the normal temperature ramp-down interval in the heat treatment process, ≪ / RTI > Here, the third threshold value is the maximum temperature ramp-up difference between the respective temperature control areas and the adjacent temperature control areas, and the fourth threshold value is the maximum temperature ramp-down between each temperature control area and the adjacent temperature control areas The negative value of the difference;

Step S23: If " YES ", add 1 to the second count value indicating the short-circuit error state;

Step S24: Repeat step S22 and step S23, and if the second count value is larger than the predetermined value, output a short circuit notification signal.

Preferably, step S3 further comprises the steps of:

Step S31: calculating the power control change for the control period for each heating unit according to the power outputs to the heating unit;

Step S32: summing the sampling temperature variation of each temperature control region to the number of sampling time-delay cycles to obtain a summed sampling temperature variation of each temperature control region; Summing the power control changes to the number of sampling time-delay cycles to obtain a summed power control change for each heating unit; Using the linear interpolation method, the summed power for each heating unit according to the maximum temperature-ramp-up control ratio of the temperature control zone, the maximum temperature-ramp-down power control rate, the maximum temperature ramp-up rate, Calculating a summed reference temperature change of each temperature control region corresponding to the control change; Determining whether the absolute value of the summed sampling temperature change is greater than a value obtained by multiplying the summed reference temperature change of the same temperature control region by a, wherein a is a system constant and the number of sampling time-delayed cycles is a thermocouple type, The system time-delay constant and the sampling system time-delay constant;

Step S33: if " YES ", add 1 to the third count value indicating the short-circuit error state;

Step S34: Repeat step S32 and step S33, and if the third count value is larger than a preset value, output a short circuit notification signal.

Preferably, a is between 1 and 2.

Preferably, step S4 comprises the following steps:

Step S41: calculate power control changes during the control period for each heating unit;

Step S42: Sampling of each temperature control area and adjacent temperature control areas / areas up to the number of sampling time-delay cycles to obtain the summed sampling temperature changes of each temperature control area and adjacent temperature control areas / Summing the temperature changes; Summing each of the power control changes to the number of sampling time-delay cycles to obtain a summed power control change of each temperature control region; A maximum temperature-ramp-up power control ratio, a maximum temperature-ramp-down power control ratio, a respective temperature control zone corresponding to the summed power control changes for the corresponding heating units, / Calculate the summed reference temperature changes of the regions; Determining whether the absolute value of the summed sampling temperature change of each temperature control region is greater than the absolute value of the sum of the summed reference temperature changes of each temperature control region and the adjacent temperature control regions / Where beta is a system constant and the sampling time-delay cycle is set according to the thermocouple type, the heating system time-delay constant, and the sampling system time-delay constant.

Step S43: if " YES ", add 1 to the fourth count value indicating a short-circuit error condition;

Step S44: Repeat step S42 and step S43, and if the fourth count value is larger than the predetermined value, output a short circuit notification signal.

Preferably, beta is between 0 and 1.

Preferably, each thermocouple group comprises an inner thermocouple disposed in the processing tube of the thermal processing apparatus, a first outer thermocouple disposed on the exterior of the processing tube adjacent to the corresponding heating unit, and a second outer thermocouple, And an over-temperature thermocouple disposed adjacent to the thermocouples. Step 5 includes the steps of: transferring the temperature control mode from the internal thermocouple-based mode to the first external thermocouple-based mode, or from the first external thermocouple-based mode to the second external thermocouple-based mode, And a temperature thermocouple-based mode, and continuing the process.

The present invention also provides a system that uses the above-mentioned error diagnosis and processing method. The heat treatment apparatus includes a plurality of temperature control regions each including a thermocouple group and a heating unit. The system includes a filter that forms a control loop, a temperature sensing module, a logic processor, a temperature controller, and a power controller. The temperatures sampled by each of the thermocouple groups are processed by a filter, a temperature sensing module, and a logic processor, wherein the logic processor is configured to determine a sampling temperature change in each temperature control region obtained by the corresponding thermocouple group, A sampling temperature difference change between each temperature control region and an adjacent temperature control region obtained by a corresponding thermocouple group and a power control change for each heating unit, , And sampling temperature changes of each temperature control region and adjacent temperature control regions / regions and power control changes for corresponding heating units of respective temperature control regions and adjacent temperature control regions / regions To determine the current operating state of the thermocouple, and to perform the corresponding compensation process, And provides a temperature controller and a power controller.

Preferably, each thermocouple group comprises an inner thermocouple disposed in the processing tube of the heat treatment apparatus, a first outer thermocouple and a second outer thermocouple disposed outside of the processing tube adjacent to the corresponding heating unit, Temperature thermocouple disposed adjacent to the thermocouples, and the corresponding compensation process may be performed in a first thermocouple-based mode in an internal thermocouple-based mode or in a second external thermocouple-based mode in a first external thermocouple- In a thermocouple-based mode, or in a second external thermocouple-based mode to an over-temperature thermocouple-based mode, and continuing the process.

According to the present invention, the thermocouple shorting error is caused by a sampling temperature change obtained by each thermocouple group, a sampling temperature difference change obtained by each thermocouple group and another thermocouple group of the adjacent temperature control region, a power control (S) of the respective thermocouple group and the adjacent temperature region (s) while changing the sampling temperatures obtained by the respective thermocouple groups and changing the power controls of the corresponding heating units And can be diagnosed by monitoring the changes of the obtained sampling temperature in real time. The diagnostic results can be sent to the temperature controller for modification and immediate measurement in accordance with the processing requirements, thus reducing equipment and product losses.

BRIEF DESCRIPTION OF THE DRAWINGS In order that these objects, features and advantages of the present invention may be more fully understood, embodiments of the present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which
1 shows three states of a thermocouple in a thermal processing apparatus including a steady state, a short-circuit state, and a disconnection state.
Fig. 2 is a schematic diagram showing five temperature control areas and five heating units of a heat treatment apparatus. Fig.
3 is a block diagram illustrating a power control system using a thermocouple error diagnosis and processing method of the present invention.
4 is a flowchart illustrating a method for diagnosing and processing a thermocouple error according to an embodiment of the present invention.
Fig. 5 shows the maximum temperature differences in the i < th &gt; temperature control region and the (i + 1) temperature control region.
Fig. 6 shows the maximum temperature differences in the n-th temperature control region and the n-1-th temperature control region.
7 shows the maximum temperature differences (i + j + 1 &lt; n) in the i + j temperature control region and the i + j + 1 temperature control region.
FIG. 8 shows thermocouple error diagnostic steps according to the sampling temperature change obtained by each thermocouple group.
FIG. 9 shows thermocouple error diagnostic steps in accordance with the sampling temperature difference change obtained by each thermocouple group and another thermocouple group in the adjacent temperature control region.
Figure 10 shows the steps of diagnosing thermocouple failures according to the sampling temperature change obtained by each thermocouple group and the power control change for the heating unit corresponding to the thermocouple group.
11 is a graph showing the relationship between the sampling temperature changes obtained by the power control changes for the heating units of the respective thermocouple group and the other thermocouple groups of the adjacent temperature control regions and the thermocouple group corresponding temperature control region and the adjacent temperature control regions Lt; RTI ID = 0.0 &gt; thermocouple &lt; / RTI &gt;

BRIEF DESCRIPTION OF THE DRAWINGS The invention will be described in more detail with reference to embodiments and the accompanying Figs.

The present invention aims at preventing the reduction of the process effect by determining the operating state of the thermocouple based on the sampling temperature and performing corresponding measurements when the thermocouple is determined to be in the short-circuit error state. It is also possible to ensure the progress of the heat treatment process through compensation processes such as using different thermocouples or correspondingly changing the temperature control mode, which minimizes losses.

Hereinafter, in the embodiment of the present invention, the heat treatment apparatus may be divided into a plurality of temperature control regions as necessary. In each temperature control region, a plurality of thermocouples and a heating unit may be provided, and the plurality of thermocouples may be of various types.

Fig. 2 is a schematic view showing five temperature control areas of the heat treatment apparatus and corresponding five heating units; Fig. Referring to FIG. 2, the heat treatment apparatus has five control regions (region 1, region 2, region 3, region 4, and region 5) each including a thermocouple group and a heating unit. Each thermocouple group comprises four thermocouples, an Inner TC disposed in the processing tube of the thermal processing apparatus, a first outer thermocouple (OuterA TC) disposed outside the processing tube adjacent to the corresponding heating unit, A second outer thermocouple (OuterB TC), and an over-temperature thermocouple (OverTemp TC) disposed adjacent to the first and second outer thermocouples.

3 is a block diagram illustrating a power control system using a thermocouple error diagnosis and processing method of the present invention. As shown in FIG. 3, the system also includes a filter, a temperature sensing module, a logic processor, a temperature controller and a power controller, which form a control loop.

The temperatures sampled by the five thermocouple groups (first through fifth thermocouples in FIG. 3) are processed by a filter, a temperature sensing module, and a logic processor. The logic processor is configured to determine a sampling temperature change obtained by each thermocouple group during a sampling period, a sampling temperature difference change obtained by another thermocouple group of each thermocouple group and an adjacent temperature control region, And the sampling temperature variation obtained by the power control variation for the heating unit corresponding to the thermocouple group and the other thermocouple group (s) of each thermocouple group and the adjacent temperature control region (s) To determine the operating state of the thermocouples according to the sampling temperature changes obtained by the power control changes to the temperature controller, and then provide the diagnostic results to the temperature controller and power controller to perform the corresponding compensation process.

For clarity, some of the terms herein will be described as follows.

As shown in Table 1, during normal operation of the heating system of the thermal processing apparatus, the maximum temperature-ramp-up ratio and the maximum temperature-ramp-down ratio within each temperature control region at different temperature ranges are recorded.

Figure pct00001

During the normal temperature ramp-up period in the heat treatment process, the temperature of each temperature control zone is serially sampled n times by the corresponding thermocouple group. Here, the sampling interval obtained by the thermocouple group (

Figure pct00002
(Unit seconds)) of each sampling temperature change (
Figure pct00003
(Unit C)) must be equal to or smaller than the first threshold value TH1 or smaller than the first threshold value TH1. The first threshold value TH1 is the maximum temperature ramp-up value during the sampling period, which can be calculated by the following formula:
Figure pct00004
Figure pct00005
, From here,
Figure pct00006
(Unit ° C / minute) is the maximum temperature ramp-up ratio that can be obtained from Table 1.

During the normal temperature ramp-down period in the heat treatment process, the temperature of each temperature control region is serially sampled n times by the corresponding thermocouple group. Here, the sampling interval obtained by the thermocouple group (

Figure pct00007
(Unit seconds)) of each sampling temperature change (
Figure pct00008
(Unit C)) must be equal to or greater than the second threshold value TH2 or greater than the second threshold value TH2. The second threshold value TH2 is the negative value of the maximum temperature ramp-down during the sampling interval, which can be calculated by the following formula:
Figure pct00009
, From here,
Figure pct00010
(Unit ° C / minute) is the maximum temperature ramp-down rate that can be obtained from Table 1.

Figure pct00011
When the maximum power is outputted to the corresponding heating unit of the temperature control region, the temperature control region
Figure pct00012
), And the measured value varies depending on the temperature change of the heating unit and the operation time. To obtain the maximum temperature ramp-up rate within the temperature range, the sampling time should be selected and the sampling interval should be calibrated.

Figure pct00013
When the power is not outputted to the corresponding heating unit of the temperature control region,
Figure pct00014
), And the measured value varies depending on the temperature change of the heating unit and the operation time. To obtain the maximum temperature ramp-down rate within the temperature range, the sampling time should be selected and the sampling interval should be calibrated.

The maximum temperature ramp-up difference of two adjacent temperature control areas

Figure pct00015
) Represents the temperature difference between the temperatures sampled in two adjacent temperature control regions (adjacent temperature control region and current temperature control region), where the maximum power is output to the heating unit of the current temperature control region and the adjacent temperature No power is output to the heating unit of the control region. The temperature difference varies with the temperature range of the heating units and the operating time. The sampling time should be selected, and the sampling interval should be calibrated.

The maximum temperature ramp-down difference (&lt; RTI ID = 0.0 &gt;

Figure pct00016
) Is the temperature difference between the temperatures of two adjacent temperature control regions (the adjacent temperature control region and the current temperature control region), where power is not output to the heating unit of the current temperature control region, And outputted to the heating unit in the control area. The temperature difference varies with the temperature range of the heating units and the operating time. The sampling time should be selected, and the sampling interval should be calibrated.

For a number of temperature control regions (as shown in Figure 3), three types of temperature differences are provided in adjacent temperature control regions, and each type of temperature difference, as shown in Figures 5-7, A change value and a negative change value.

Figure pct00017
,
Figure pct00018
Figure pct00019

The method for diagnosing and processing thermocouple faults will be described in more detail with reference to FIG. As shown in Fig. 4, the method includes the following steps.

Step S1: Perform thermocouple error diagnosis according to the sampling temperature change of each temperature control region obtained by the corresponding thermocouple group; If the diagnosis result is normal, proceed to step S2; Otherwise, proceed to step S5;

Step S2: Perform a thermocouple error diagnosis according to a sampling temperature difference change between each temperature control area and an adjacent temperature control area obtained by corresponding thermocouple groups; If the diagnosis result is normal, proceed to step S3; Otherwise, proceed to step S5;

Step S3: Perform thermocouple error diagnosis according to the change in the sampling temperature within each temperature control region obtained by the corresponding thermocouple group while changing the power control of each corresponding heating unit; If the diagnosis result is normal, proceed to step S4; Otherwise, proceed to step S5;

Step S4: While changing the power controls of the heating units in the respective temperature control areas and adjacent temperature control areas / areas, in each temperature control area obtained by the corresponding thermocouple groups and in the adjacent temperature control areas / areas Performing a thermocouple error diagnosis according to changes in the sampling temperature of the thermocouple; If the diagnosis result is normal, proceed to step S1; Otherwise, proceed to step S5;

Step S5: output a short notice signal and perform corresponding compensation processing. When a thermocouple short-circuit fault is diagnosed, compensation processing is performed by using different thermocouples in the thermocouple group instead of temperature measurement and temperature control. In an embodiment, to allow the process to continue, the temperature control mode may be changed from an internal TC-based mode to an external A TC-based mode, or from an external A TC-based mode to an external B TC- Based mode to the over-temperature TC-based mode.

Referring to FIG. 8, which illustrates thermocouple error diagnostic steps in accordance with a sampling temperature change obtained by each thermocouple group, according to a preferred embodiment of the present invention, step S1 further includes the following steps.

Step S11: initialize a first count value indicating a short-circuit error state, that is, iCount1 = 0; Sampling the temperatures of each temperature control region by a corresponding thermocouple group; Formula

Figure pct00020
Of the temperature control region in accordance with the sampling temperatures of the temperature control region
Figure pct00021
) Of sampling temperature change (
Figure pct00022
);

Step S12: During the normal temperature ramp-up period in the heat treatment process, whether the sampling temperature change is larger than the first threshold value TH1

Figure pct00023
> TH1), and / or during a normal temperature ramp-down period in the heat treatment process, whether the sampling temperature change is less than a second threshold value TH2
Figure pct00024
&Lt;TH2); Here, the first threshold value is the maximum temperature ramp-up value in the sampling period (TH1 =
Figure pct00025
), The second threshold value is a negative value of the maximum temperature ramp-down value in the sampling period (TH2 =
Figure pct00026
).

Step S13: If &quot; YES &quot;, i.e.,

Figure pct00027
> TH1 or
Figure pct00028
&Lt; TH2, 1 is added to the first count value iCount1; Otherwise, TH2 &lt;
Figure pct00029
Lt; TH1, maintains a first count value (iCount1);

Step S14: Repeat steps S12 and S13, and if the first count value iCount1 is greater than a predetermined value, output a short circuit notification signal.

In an embodiment, if the diagnostic result obtained from step S1 is normal, step S2 may be performed for further diagnosis. As shown in FIG. 9, which illustrates thermocouple error diagnostic steps in accordance with a change in sampling temperature difference obtained by each thermocouple group and another thermocouple group in an adjacent temperature control region, step S2 further includes the following steps .

Step S21: initialize the second count value indicating the disconnection error state, that is, iCount2 = 0; Sampling the temperatures of the respective temperature control region and the adjacent temperature control region by corresponding thermocouple groups; The sampling temperature difference variation of the two adjacent temperature control regions according to the sampling temperatures of the respective temperature control regions

Figure pct00030
), That is,
Figure pct00031
;

Step S22: During the normal temperature ramp-up period in the heat treatment process, it is determined whether the sampling temperature difference change is greater than the third threshold value TH3 and / or during the normal temperature ramp-down interval, (TH4); Here, the third threshold value TH3 is the maximum temperature ramp-up difference of two adjacent temperature control areas (

Figure pct00032
), And the fourth threshold value TH4 is the maximum temperature ramp-down difference (
Figure pct00033
) &Lt; / RTI &gt;

Step S23: If &quot; YES &quot;, that is,

Figure pct00034
= TH3 or
Figure pct00035
Figure pct00036
<
Figure pct00037
= TH4, adds 1 to the second count value iCount2; Otherwise, TH4 &lt;
Figure pct00038
&Lt; TH3, the second count value iCount2 is kept the same;

Step S24: Repeat step S22 and step S23, and if the second count value iCount2 is greater than a predetermined value, output a short circuit notification signal.

In an embodiment, if the diagnostic result obtained from step S2 is normal, step S3 may be performed for further diagnosis. As shown in FIG. 10, which illustrates the thermocouple error diagnostic steps according to the obtained temperature change obtained by the power control change for the heating unit corresponding to each thermocouple group and the thermocouple, step S3 further includes the following steps do.

Step S31: initialize the third count value indicating the short-circuit error state, that is, iCount3 = 0; The control section for the heating unit corresponding to the thermocouple group (for example, in the i th temperature control region) according to the power outputs for the heating unit of the i th temperature control region

Figure pct00039
) Of power control change (
Figure pct00040
Figure pct00041
), That is,
Figure pct00042
Figure pct00043
. Here, the control period (
Figure pct00044
) Of power control change (
Figure pct00045
Figure pct00046
) Corresponds to the corresponding temperature change (
Figure pct00047
), And the temperature change caused by the power control change can be calculated by a linear interpolation method.

Step S32: the summed sampling temperature change of the i th temperature control region (

Figure pct00048
The number of sampling time-delay cycles (&lt; RTI ID = 0.0 &gt;
Figure pct00049
) Of the i th temperature control region obtained by the corresponding thermocouples group
Figure pct00050
); The summed power control change for the heating unit in the i &lt; th &gt;
Figure pct00051
The number of sampling time-delay cycles (&lt; RTI ID = 0.0 &gt;
Figure pct00052
) To the power control change (
Figure pct00053
); Using the linear interpolation method, the maximum temperature-ramp-up control ratio (
Figure pct00054
), Maximum temperature - ramp-down control ratio (
Figure pct00055
), Maximum temperature ramp-up rate (
Figure pct00056
), And the maximum temperature ramp-down rate
Figure pct00057
), The summed temperature control change (
Figure pct00058
) Corresponding to the reference temperature change (
Figure pct00059
); The absolute value of the summed sampling temperature change is greater than the absolute value of the summed standard temperature change multiplied by?
Figure pct00060
) Decision, where the maximum temperature-ramp-up control ratio (
Figure pct00061
) And maximum temperature-ramp-down control ratio (
Figure pct00062
) Is predetermined, and the maximum temperature ramp-up ratio (
Figure pct00063
) And the maximum temperature ramp-down rate
Figure pct00064
) Can be obtained from Table 1; a is a system constant between 1 and 2, and the number of sampling time-delay cycles is set according to the thermocouple type, the heating system time-delay constant and the sampling system time-delay constant;

Step S33: If &quot; YES &quot;, that is,

Figure pct00065
, Adds 1 to the third count value (iCount3); Otherwise, keep the third count value iCount3 the same;

Step S34: Repeat steps 32 and 33, and output a short circuit notification signal if the third count value iCount3 is greater than a preset value.

 In an embodiment, if the diagnostic result obtained from step S3 is normal, step S4 may be performed for further diagnosis. As shown in Fig. 11, which illustrates the thermocouple error diagnostic steps in accordance with the power control change for each thermocouple group and the other thermocouple group (s) of the adjacent temperature control region (s), and the corresponding heating unit, Further includes the following steps.

Step S41: initialize the fourth count value indicating the short-circuit error state, that is, iCount4 = 0; The control section for the heating units of the two temperature control regions adjacent to the i &lt; th &gt; temperature control region and the i &lt; th &gt; temperature control region according to the power outputs for the heating units in the three temperature control regions

Figure pct00066
) &Lt; / RTI &gt;
Figure pct00067
Figure pct00068
,
Figure pct00069
,
Figure pct00070
); In other words

Figure pct00071
;

Figure pct00072
;

Here, the control period (

Figure pct00073
), The power control change (
Figure pct00074
/
Figure pct00075
/
Figure pct00076
) Corresponds to the corresponding temperature change (
Figure pct00077
), And the temperature change caused by the power control change can be calculated by linear interpolation.

Step S42: The summed sampling temperature change of each of the temperature control areas (

Figure pct00078
), The number of sampling time-delay cycles (
Figure pct00079
), The sampling temperature change of each of the three temperature control areas obtained by the corresponding thermocouple groups (
Figure pct00080
); The summed power control changes (
Figure pct00081
,
Figure pct00082
,
Figure pct00083
), The number of sampling time-delay cycles (
Figure pct00084
) To power control changes (
Figure pct00085
,
Figure pct00086
,
Figure pct00087
Figure pct00088
); Using the linear interpolation method, the maximum temperature-ramp-up control ratio (
Figure pct00089
), Maximum temperature - ramp-down control ratio (
Figure pct00090
), The maximum temperature ramp-up value (
Figure pct00091
), Maximum temperature ramp fall value (
Figure pct00092
) &Lt; / RTI &gt;
Figure pct00093
,
Figure pct00094
,
Figure pct00095
0.0 &gt;(&lt; / RTI &gt;
Figure pct00096
,
Figure pct00097
,
Figure pct00098
); If the absolute value of each of the summed sampling temperature changes of the three control regions is greater than the sum of the three summated standard temperature changes multiplied by?
Figure pct00099
Figure pct00100
Figure pct00101
Figure pct00102
), Where [beta] is a system constant between 0 and 1, and the sampling time-delay cycle is set according to the thermocouple type, the heating system time-delay constant, and the sampling system time-delay constant.

Step S43: If yes, add one to the fourth count value iCount4, otherwise keep the fourth count value iCount4 equal;

Step S44: Repeat step S42 and step S43, and if the fourth count value iCount4 is greater than a predetermined value, a short circuit notification signal is output.

When the logic controller determines that the thermocouples in the thermocouple group are in short-circuit error conditions, the logic controller sends a notification signal to the temperature controller to use the other thermocouples (internal TC → external A TC → External BTC → overtemperature TC), change the temperature control method (cascade → spike → overtemperature).

In summary, in accordance with the present invention, the thermocouple shorting error is caused by a sampling temperature change obtained by each thermocouple group, a sampling temperature difference change obtained by the thermocouple groups in each of the two adjacent temperature control zones, (S) in each thermocoupler group and adjacent temperature region (s) during a change in the sampling temperature obtained by each thermocouple group while changing the power control and the power controls of the corresponding heating units, Can be diagnosed by monitoring in real time the changes of the sampling temperature obtained by the microcomputer. Diagnostic results can be sent to the temperature controller for modification, can be measured immediately according to process requirements, thus reducing equipment and product losses.

While this invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. , And can be made without departing from the spirit and scope of the present invention.

Claims (10)

A method of diagnosing and treating faults for thermocouples of a thermal processing apparatus, each comprising a plurality of temperature control regions having thermocouple groups and corresponding heating units, the method comprising:
Step S1: Perform a thermocouple error diagnosis according to a sampling temperature change of each temperature control region obtained by the corresponding thermocouple group; If the diagnosis result is normal, proceed to step S2; Otherwise, proceed to step S5;
Step S2: Perform a thermocouple error diagnosis according to a sampling temperature difference change between each temperature control area and an adjacent temperature control area obtained by the corresponding thermocouple groups; If the diagnosis result is normal, proceed to step S3; Otherwise, proceed to step S5;
Performing a thermocouple error diagnosis according to a change in sampling temperature within each temperature control region obtained by said corresponding thermocouple group while changing said power control of each corresponding heating unit; If the diagnosis result is normal, proceed to step S4; Otherwise, proceed to step S5;
Step S4: While changing the power controls of the heating units within each temperature control area and adjacent temperature control areas / areas, each temperature control area obtained by the corresponding thermocouple groups and the adjacent temperature control area / Performing thermocouple error diagnostics in accordance with changes in the sampling temperature within the regions; If the diagnosis result is normal, proceed to step S1; Otherwise, proceed to step S5; And
Step S5: output a short notice signal and perform a corresponding compensation process;
&Lt; / RTI &gt; The method according to claim 1,
Step S1:
Step S11: sampling the temperatures of the respective temperature control regions by the corresponding thermocouples group; Calculating the sampling temperature change in a sampling interval of each temperature control region according to the sampling temperatures of the temperature control region;
Step S12: During the normal temperature ramp-up period in the heat treatment process, it is determined whether the sampling temperature change is greater than the first threshold value, and / or whether the sampling temperature change Determining whether the second threshold is less than a second threshold; Wherein the first threshold value is a maximum temperature ramp-up value corresponding to the temperature control region during the sampling interval and the second threshold value is a maximum temperature ramp-down value corresponding to the temperature control region during the sampling interval It is a negative value.
Step S13: if &quot; YES &quot;, add 1 to the first count value indicating a short-circuit error; And
Step S14: Repeat steps S12 and S13, and if the first count value is greater than a predetermined value, output the short circuit notification signal;
&Lt; / RTI &gt; The method according to claim 1,
In the step S2,
Step S21: sampling the temperatures of each temperature control region by the corresponding thermocouple group; And computing the sampling temperature difference change between each temperature control region and an adjacent temperature region according to the sampling temperatures obtained by the corresponding thermocouple groups;
Step S22: During the normal temperature ramp-up period in the heat treatment process, it is determined whether the sampling temperature difference change is greater than a third threshold value and / or during the normal temperature ramp-down interval in the heat treatment process, Determining whether the temperature change is less than a fourth threshold value; Wherein the third threshold is a maximum temperature ramp-up difference between each temperature control region and an adjacent temperature control region and the fourth threshold is a maximum temperature ramp-down between each temperature control region and an adjacent temperature control region The negative value of the difference; And
Step S23: If &quot; YES &quot;, add 1 to the second count value indicating the short-circuit error state;
And repeating the step S22 and the step S23, and when the second count value is larger than a predetermined value, the short notice signal is outputted. The method according to claim 1,
Step S3 is:
Step S31: calculating the power control change for a control period for each heating unit according to the power outputs for the heating unit;
Step S32: summing the sampling temperature change of each temperature control area to the number of sampling time-delay cycles to obtain a summed sampling temperature change of each temperature control area; Summing the power control change to the number of sampling time-delay cycles to obtain a summed power control change for each heating unit; A linear ramp-down ratio, and a ramp-down ramp-up ratio for the respective heating units in accordance with the maximum temperature-ramp-up power control ratio, the maximum temperature-ramp-down power control ratio, the maximum temperature ramp- Calculating a summed reference temperature change of each temperature control region corresponding to the summed power control change; Determining whether the absolute value of the summed sampling temperature change of each temperature control area is greater than the absolute value of the summed reference temperature change of the same temperature control area multiplied by a, Constant and the number of sampling time-delay cycles is set according to a thermocouple type, a heating system time-delay constant, and a sampling system time-delay constant;
Step S33: if &quot; YES &quot;, add 1 to the third count value indicating the short-circuit error state; And
Step S34: Repeat Step 32 and Step 33, and if the third count value is greater than a predetermined value, output the short notice signal;
&Lt; / RTI &gt; 5. The method of claim 4,
Wherein alpha is between 1 and 2. The method according to claim 1,
In step S4,
Step S41: calculating the power control change during a control period for each heating unit, in accordance with the power outputs for the heating unit;
Step S42: To obtain the summed sampling temperature changes of each temperature control region and the adjacent temperature control regions / regions, the number of sampling time-delay cycles to each of the temperature control regions and the adjacent temperature control regions / Summing the sampling temperature changes; Summing each of the power control changes to a number of the sampling time-delay cycles to obtain a summed power control change of each temperature control area; Using the linear interpolation method, the sum of the maximum temperature ramp up power control ratio, the maximum temperature ramp down power control ratio, the maximum temperature ramp up ratio, and the maximum temperature ramp down ratio, Computing respective temperature control regions corresponding to power control changes and summed reference temperature changes of adjacent temperature control regions / regions; Wherein the absolute value of the summed sampling temperature change in each temperature control region is greater than the absolute value of the sum of the summed reference temperature changes in each temperature control region and adjacent temperature control regions / Wherein said beta is a system constant and said number of sampling time-delay cycles is set according to a thermocouple type, a heating system time-delay constant, and a sampling system time-delay constant;
Step S43: if &quot; YES &quot;, add 1 to the fourth count value indicating a short-circuit error condition; And
Step S44: Repeat step S42 and step S43; if the fourth count value is greater than a predetermined value, output the short notice signal;
&Lt; / RTI &gt; The method according to claim 6,
Wherein the beta is between 0 and 1. The method according to claim 1,
Each thermocouple group comprising: an inner thermocouple disposed in a processing tube of the thermal processing apparatus; a first outer thermocouple and a second outer thermocouple disposed outside of the processing tube adjacent to the corresponding heating unit; An over-temperature thermocouple disposed adjacent external thermocouples;
The step S5 further comprises the steps of: controlling the temperature control mode from an internal thermocouple-based mode to a first external thermocouple-based mode, or from a first external thermocouple-based mode to a second external thermocouple- Mode to an over-temperature thermocouple-based mode, and continuing the process. The system of claim 1, wherein the heat treatment apparatus comprises a plurality of temperature control regions each having a thermocouple group and a heating unit,
The system includes a filter forming a control loop, a temperature sensing module, a logic processor, a temperature controller, and a power controller,
Wherein the temperatures sampled by each of the thermocouple groups are processed by the filter, the temperature sensing module, and the logic processor, wherein the logic processor is configured to perform the sampling of each temperature control region obtained by the corresponding thermocouple group Each temperature control region obtained by the power control change for the corresponding thermocouple group and each heating unit between the temperature control region, the temperature change, the respective temperature control region obtained by the corresponding thermocouple groups and the adjacent temperature control region, And the sampling temperature changes of each temperature control region and the adjacent temperature control regions / regions and the sampling temperature changes of the respective temperature control regions and adjacent temperature control regions / The current operating state of each thermocouple in accordance with the power control changes Decision and; And provides diagnostic results to the temperature controller and the power controller to perform a corresponding compensation process. 10. The method of claim 9,
Each thermocouple group comprising an inner thermocouple disposed in a processing tube of the heat treatment apparatus, a first outer thermocouple and a second outer thermocouple disposed outside of the processing tube adjacent to the corresponding heating unit, An over-temperature thermocouple disposed adjacent the outer thermocouples,
The corresponding compensation process may be performed as follows: the temperature control mode is changed from an internal thermocouple-based mode to a first external thermocouple-based mode, or from a first external thermocouple-based mode to a second external thermocouple- Based mode to an over-temperature thermocouple-based mode, and continuing the process.
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