CN101886918A - Fast measuring method of right angle of large-sized rectangular glass substrate and measuring instrument thereof - Google Patents
Fast measuring method of right angle of large-sized rectangular glass substrate and measuring instrument thereof Download PDFInfo
- Publication number
- CN101886918A CN101886918A CN2010101025690A CN201010102569A CN101886918A CN 101886918 A CN101886918 A CN 101886918A CN 2010101025690 A CN2010101025690 A CN 2010101025690A CN 201010102569 A CN201010102569 A CN 201010102569A CN 101886918 A CN101886918 A CN 101886918A
- Authority
- CN
- China
- Prior art keywords
- measuring
- glass substrate
- squareness
- monitor station
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention relates to a method for measuring the right angle of a large-sized rectangular glass substrate by utilizing a plane geometry principle and a linear displacement sensor and singlechip technology and measuring the displacements of two parallel edges of glass as well as a measuring instrument thereof. The accurate positioning of the glass substrate is realized by utilizing upper buses of two positioning columns positioned at the bottom of equipment and a side bus of a positioning column positioned at the left side of the equipment as standards; a part to be measured of the left side surface of the glass substrate stresses a mandril of the measuring instrument to generate the displacement; if the bottom edge of the glass substrate is not perpendicular to the side edge of the glass substrate, the reading value of the measuring instrument can be different by overturning the glass substrate by the displacement of 180 degrees, and a half of a difference value is right angle measuring data. The invention can fast and conveniently measure whether the right angle of the adjacent edges of the glass is in a range of 1/1000 or not; and in addition, the measuring method can realize the fast, efficient and easy operation in the production of the large-sized rectangular glass substrate, is convenient and fast, is lower in cost and better meets the requirements for the flow operation of a glass production line.
Description
Technical field
The present invention relates to a kind of plane geometry principle and linear displacement transducer, singlechip technology of utilizing,, come large-sized rectangle glass is carried out method and the measuring instrument thereof that squareness is measured by measuring the displacement of glass two parallel edges.
Background technology
Be a cumbersome thing for the squareness of measuring the large-size glass substrate at present.For the measurement of flat-type object squareness, basic skills roughly can be divided two kinds: optical means and mechanical system.
1, optical means: utilize the reflection of light principle, the Laser emission instrument fixing by the relative datum face sends straight line light, light is through the reflection of emission instrument, surveying instrument is moving on the tested surface to measure the reading variation of reflected light on the scale instrument, and this changing value is exactly the squareness of tested surface relative datum face.
2, mechanical means: at first with the reference field fixed product, the clock gauge gauge outfit that is fixed on the measuring table (the desirable vertical plane of illusion) is slided on measurement face, and the reading variation of clock gauge is squareness.Also available clearance gauge is measured the gap length of the measuring table and the face of measurement and is determined the squareness value.The difference of surveying instrument different measuring value that also can be by being fixed on the measuring table diverse location is determined squareness in addition.
The general measure value precision that the above measuring method is measured is mainly used to for the measurement of machined piece morely about 1 μ m, and measures time-consumingly, and equipment price is also very expensive.In the glass substrate industry, strict to the flatness requirement of glass, a lot of on the market now companies produce the equipment of special measurement plane degree.Relatively with the flatness of glass, the squareness general measure of glassy phase adjacent side is less, and perhaps the sheet glass of general applications there is no very strict requirement to the squareness of glassy phase adjacent side, and generally the precision of sheet glass cutting equipment is enough to meet the demands.But along with the production of liquid-crystalline glasses, plasma glass, more and more higher to the requirement of adjacent edge squareness, be badly in need of a kind of method to satisfy this requirement.
Even mainly use aspect the inspection of the squareness of traditional glass production cutting relative method with the try square suitable with glass size with specified accuracy near comparison, the first, because the glass substrate size is big and thin, difficult, careless slightly glass will be broken.Wipe scratching can appear in glass surface when the second, being put into glass substrate above the platform, causes to be examined glass substrate and scrap.Three,, cause wrong result to mislead production because the relative method troublesome poeration will not measured mistake slightly diligently.Also occurred the measuring equipment of high precision such as laser collimation system recently on the market but because the cost costliness, inapplicablely checked the field at glass substrate.
Summary of the invention
Purpose of the present invention just is to provide a kind of plane geometry principle and linear displacement transducer, singlechip technology of utilizing, by measuring the displacement of glass two parallel edges, come large-sized rectangle glass is carried out method and the measuring instrument thereof that squareness is measured, the present invention can measure the squareness of glassy phase adjacent side quickly and easily whether in 1/1000 scope, in the large-size glass substrate production this measuring method can realize fast, efficient and simple operations, convenient and swift and cost is lower, adapted to the requirement of glass production line streamlined operation preferably.
Technical scheme of the present invention for achieving the above object is:
The quick measuring method of the squareness of large-size glass substrate:
A limit of glass substrate is placed directly on two reference columns that are arranged on the bottom when at first, measuring, and the glass left side edge is close to be arranged on the reference column in left side, record the displacement data d1 (mm) on this limit by the displacement detecting instrument this moment, and the reference point of displacement detecting instrument is arranged on left positioner post vertical direction 1000mm place;
Then, the large-size glass upset is about to the glass turn-over for 180 °, by the displacement detecting instrument corresponding sides of measuring the limit are for the first time measured, the numerical value of surveying is d2 (mm), and calculate at last: 1/2 of absolute value (d2-d1) is the squareness measurement data of large-size glass substrate.
The measuring instrument that the squareness of large-size glass substrate of the present invention is measured fast, comprise the triangulation frame, be assemblied in the base member under the frame, be arranged on the monitor station of measuring on the frame, be provided with two parallel horizontal location posts in the monitor station bottom, be provided with a perpendicular positioning post in monitor station lower-left side, perhaps this perpendicular positioning post is arranged on the monitor station lower right side; Correspondingly with perpendicular positioning post position be provided with the straight-line displacement detector measuring above the frame left side or right side, the push rod of detector is set to be 900mm-1050mm apart from lower horizontal reference column distance; The soft filler strip of the contact area of promising minimizing glass substrate and equipment evenly is set on the monitor station surface, and it is high that the flatness consistance setting of filler strip is wanted, and one deck electrostatic prevention Teflon single face adhesive tape that has been sticked on every filler strip is used for contacting with glass substrate.This adhesive tape also has advantages such as thickness is even, low-friction coefficient except electrostatic prevention, guarantee to realize that not damaged detects.
The measuring instrument that the squareness of large-size glass substrate of the present invention is measured fast, the push rod of described detector are set to be 1000mm apart from lower horizontal reference column distance; On monitor station, evenly be provided with lightening hole; In measurement frame bottom the set screw leg that can adjust frame height and level is installed, makes it to adapt to different states of ground, the convenient carrying of castor also is housed does not in addition have the special installation environment of crane to adapt to clean room;
Measuring principle of the present invention is: two corresponding sides of glass substrate are guaranteed to be parallel to each other by processing technology as shown in Figure 1, utilize the Up Highway UHW of two reference columns of device bottom and left positioner post side bus as benchmark, and glass substrate has been realized accurate location.The tested position compressing detector push rod of glass substrate left surface produces displacement, if glass substrate base and side out of plumb, will be different with the reading value of 180 ° of displacement detecting instrument of glass substrate upset, 1/2 of its difference is the squareness measurement data.
Beneficial effect of the present invention is: the present invention can measure the squareness of glassy phase adjacent side quickly and easily whether in 1/1000 scope, in the large-size glass substrate production this measuring method can realize fast, efficient and simple operations, convenient and swift and cost is lower, adapted to the requirement of glass production line streamlined operation preferably.It below is one group of correlation data utilizing the inventive method and the test of clock gauge measuring method
Test comparison tables of data unit (mm)
| The measurement result measuring method | ??P1 | ??P2 | ??P3 | ??P4 | ??P5 |
| Clock gauge is measured | ??0.289 | ??0.423 | ??0.447 | ??0.462 | ??0.242 |
| This device measuring | ??0.29 | ??0.42 | ??0.45 | ??0.50 | ??0.24 |
From the test findings of form as can be seen, if with the clock gauge measurement result as the correct result of theory, then the average error of this device measuring is 2.15%, can satisfy request for utilization for the check of this series products squareness (1mm).In addition according to equipment characteristic, the glass that is cut out under this glass substrate cutting machine normal operation, the adjacent edge squareness is less, is generally less than 0.5 scope by test, only in the equipment debugging stage, the squareness numerical value of glass just can near or surpass 1mm.And the precision of measuring depends on the precision of sensor and analog to digital conversion circuit, and this precision is easy to realize.
Architectural feature of the present invention and advantage are: (1) frame: several plates of welding are done the whole processing of postwelding to guarantee the flatness of upper surface above adopting the base that stainless steel square tube frame structure square tube is welded into, and the parts that make it to be installed in top find reference field.The bottom is equipped with the set screw leg that can adjust frame height and level, makes it to adapt to different states of ground, and the convenient carrying of castor also is housed does not in addition have the special installation environment of crane to adapt to clean room.Upper spider part as the plummer of measuring just glass substrate the measurement frame we adopted the hommization man-machine interface at 80 ° of inclination angles, be that placement glass substrate or observed reading are all more convenient like this, adopt the cross section of A font in addition, because triangle has stability, can finish with lighter material and adopt the square tube of three A shapes to support to the support of substrate, reference field is chosen bottom surface and front surface to make things convenient for Installation and Debugging.(2), the monitor station of support glass: this part is adopted the monoblock aluminium sheet to carry out surface anodization again through accurate processing and is finished dealing with.The emphasis of this part be to guarantee whole square aluminium sheet more than a meter surface smoothness in 0.1mm, can guarantee that so just glass substrate can not cause testing result to exceed error requirements because of the out-of-flatness of detection plane.The middle macropore that is gone is mainly used in loss of weight, can adopt the deflection in the thicker aluminium minimizing processing like this and realize precision, can weight reduction make whole device light and skilful again.(3), some parts directly related with measurement: one is for the contact area that reduces glass and equipment is equipped with 22 white nylon filler strips on aluminium sheet, and the nylon filler strip requires the consistance of flatness to want high.Also having the very important point is exactly to paste one deck electrostatic prevention Teflon single face adhesive tape to be used for contacting with glass substrate on every filler strip, and this adhesive tape also has advantages such as thickness is even, low-friction coefficient except electrostatic prevention, guarantee to realize that not damaged detects.Another one is a reference column, two reference columns are installed, because 2 definite straight lines contact two reference columns in a limit and this of glass below monitor station, detecting reference column of lower-left side installation, contact with it with an other right-angle side bottom of glass.With this reference column above one meter place displacement transducer is installed, be used for the variable in distance of testing sensor and glass edge.(4), measurement and digital display device measurement are to utilize two register pins of device bottom as benchmark, be pressed in the different numerical value change that cause linear displacement transducer in position of left side push rod by glass edge, this changing value sends single-chip microcomputer to through analog to digital conversion, directly shows its value by digital display device again.The position of push rod is positioned at apart from the place of side register pin 1000mm, and measured numerical value is the vertical situation of glass side to the base.
Summing up innovative point of the present invention is:
1, satisfied the glass substrate production line to the squareness Testing requirement; 2, test speed is fast, the efficient height, and labour intensity is low; 3, proper to the substrate surface protection, can realize that not damaged detects; 4, test data is accurate, the measuring accuracy height; 5, the result data Display Realization digitizing, intellectuality; 6, easy to operate, move and debug simply.
Description of drawings
Fig. 1 is the principle schematic of method of testing of the present invention,
Fig. 2 is the structural representation of tester of the present invention,
Fig. 3 is the left view of Fig. 2 of the present invention.
Among the figure: 1 base member, 2, reference column, 3 monitor stations, 4 and 5 are filler strip and adhesive tape, 6 A-frame parts, 7 trays, 8 straight-line displacement detectors, 9 vertical digital display callipers, 10 castors, 11 foot bolt, 12 horizontal type digital display callipers, 13 lightening holes.
Embodiment
The inventive method is as shown in Figure 1:
A limit of glass substrate is placed directly on two reference columns that are arranged on the bottom when at first, measuring, and the glass left side edge is close to be arranged on the reference column in left side, record the displacement data d1 (mm) on this limit by the displacement detecting instrument this moment, and the reference point of displacement detecting instrument is arranged on left positioner post vertical direction 1000mm place;
Then, the large-size glass upset is about to the glass turn-over for 180 °, by the displacement detecting instrument corresponding sides of measuring the limit are for the first time measured, the numerical value of surveying is d2 (mm), and calculate at last: 1/2 of absolute value (d2-d1) is the squareness measurement data of large-size glass substrate.
The measuring instrument that the squareness of large-size glass substrate of the present invention is measured fast shown in accompanying drawing 2,3, comprise triangulation frame 6, be assemblied in the base member 1 under the frame 6, be arranged on the monitor station of measuring on the frame 63, monitor station 3 is assemblied on the frame 6 by tray 7; Be provided with two parallel horizontal location posts 2 in monitor station 3 bottoms, be provided with a perpendicular positioning post 2 in monitor station 3 lower-left sides, perhaps this perpendicular positioning post is arranged on the monitor station lower right side; Correspondingly with perpendicular positioning post 2 positions be provided with straight-line displacement detector 8 measuring above the frame left side or right side, the push rod of detector 8 be set to apart from lower horizontal reference column distance be
The soft filler strip 4 of the contact area of promising minimizing glass substrate and equipment evenly is set on monitor station 3 surfaces, and it is high that the flatness consistance setting of filler strip 4 is wanted, and one deck electrostatic prevention Teflon single face adhesive tape 5 that has been sticked on every filler strip 4 is used for contacting with glass substrate.The push rod of detector of the present invention is set to be 1000mm apart from lower horizontal reference column distance; On monitor station, evenly be provided with lightening hole 13; In measurement frame 6 bottoms the set screw leg 11 that can adjust frame height and level is installed, makes it to adapt to different states of ground, castor 10 convenient carryings also are housed does not in addition have the special installation environment of crane to adapt to clean room; The present invention can also be provided with vertical digital display calliper 9 in the monitor station top center, is provided with horizontal type digital display calliper 12 on monitor station one side perpendicular positioning post opposite simultaneously, and the present invention just can possess the function of tested glass substrate size like this.
(1) frame among the present invention: adopt stainless steel square tube frame structure, several plates of welding are done the whole processing of postwelding to guarantee the flatness of upper surface above the base that square tube is welded into, and the parts that make it to be installed in top find reference field.The bottom is equipped with the set screw leg that can adjust frame height and level, makes it to adapt to different states of ground, and the convenient carrying of castor also is housed does not in addition have the special installation environment of crane to adapt to clean room.Upper spider part as the plummer of measuring just glass substrate the measurement frame we adopted the hommization man-machine interface at 80 ° of inclination angles, be that placement glass substrate or observed reading are all more convenient like this, adopt the cross section of A font in addition, because triangle has stability, can finish with lighter material and adopt the square tube of three A shapes to support to the support of substrate, reference field is chosen bottom surface and front surface to make things convenient for Installation and Debugging.(2), the monitor station of support glass: this part is adopted the monoblock aluminium sheet to carry out surface anodization again through accurate processing and is finished dealing with.The emphasis of this part be to guarantee whole square aluminium sheet more than a meter surface smoothness in 0.1mm, can guarantee that so just glass substrate can not cause testing result to exceed error requirements because of the out-of-flatness of detection plane.The middle macropore that is gone is mainly used in loss of weight, can adopt the deflection in the thicker aluminium minimizing processing like this and realize precision, can weight reduction make whole device light and skilful again.(3), some parts directly related with measurement: one is for the contact area that reduces glass and equipment is equipped with 22 white nylon filler strips on aluminium sheet, and the nylon filler strip requires the consistance of flatness to want high.Also having the very important point is exactly to paste one deck electrostatic prevention Teflon single face adhesive tape to be used for contacting with glass substrate on every filler strip, and this adhesive tape also has advantages such as thickness is even, low-friction coefficient except electrostatic prevention, guarantee to realize that not damaged detects.Another one is a reference column, two reference columns are installed, because 2 definite straight lines contact two reference columns in a limit and this of glass below monitor station, detecting reference column of lower-left side installation, contact with it with an other right-angle side bottom of glass.With this reference column above one meter place displacement transducer is installed, be used for the variable in distance of testing sensor and glass edge.(4), measurement and digital display device measurement are to utilize two register pins of device bottom as benchmark, be pressed in the different numerical value change that cause linear displacement transducer in position of left side push rod by glass edge, this changing value sends single-chip microcomputer to through analog to digital conversion, directly shows its value by digital display device again.The position of push rod is positioned at apart from the place of side register pin 1000mm, and measured numerical value is the vertical situation of glass side to the base.
Claims (7)
1. the quick measuring method of the squareness of large-size glass substrate is characterized in that:
A limit with glass substrate when at first, measuring is placed directly on two reference columns that are arranged on the bottom, and the glass left side edge is close to be arranged on the reference column in left side, record the displacement data d1 (mm) on this limit by a displacement detecting instrument this moment, and the reference point of displacement detecting instrument is arranged on left positioner post vertical direction 1000mm place;
Then the large-size glass upset is about to the glass turn-over for 180 °, by the displacement detecting instrument corresponding sides of measuring the limit are for the first time measured, the numerical value of surveying is d2 (mm), and calculate at last: 1/2 of absolute value (d2-d1) is the squareness measurement data of large-size glass substrate.
2. the measuring instrument measured fast of the squareness of large-size glass substrate, it is characterized in that: it comprises the triangulation frame, is assemblied in the base member under the frame, be arranged on the monitor station of measuring on the frame, be provided with two parallel horizontal location posts in the monitor station bottom, be provided with a perpendicular positioning post in monitor station lower-left side, perhaps be provided with a perpendicular positioning post in the monitor station lower right side; Correspondingly with perpendicular positioning post position be provided with the straight-line displacement detector measuring above the frame left side or right side, the push rod of detector is set to be 900mm--1050mm apart from lower horizontal reference column distance; The soft filler strip of the contact area of promising minimizing glass substrate and equipment evenly is set on the monitor station surface, and each filler strip is provided with the flatness unanimity, and one deck electrostatic prevention Teflon single face glue has been sticked on every filler strip.
3. according to the quick measuring instrument of measuring of the squareness of the described large-size glass substrate of claim 2, it is characterized in that: the push rod of described detector is set to be 1000mm apart from lower horizontal reference column distance.
4. the measuring instrument of measuring fast according to the squareness of the described large-size glass substrate of claim 2 is characterized in that: evenly be provided with lightening hole on monitor station.
5. the measuring instrument of measuring fast according to the squareness of the described large-size glass substrate of claim 2 is characterized in that: in measurement frame bottom the set screw leg that can adjust frame height and level is installed; The castor of convenient carrying is housed.
6. according to the quick measuring instrument of measuring of the squareness of the described large-size glass substrate of claim 2, it is characterized in that: described measuring machine frame is provided with 80 ° of inclination angles.
7. according to the quick measuring instrument of measuring of the squareness of claim 2,3,4,5,6 described large-size glass substrates, it is characterized in that: be provided with vertical digital display calliper in the monitor station top center, be provided with the horizontal type digital display calliper on monitor station one side perpendicular positioning post opposite simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101025690A CN101886918A (en) | 2010-01-29 | 2010-01-29 | Fast measuring method of right angle of large-sized rectangular glass substrate and measuring instrument thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101025690A CN101886918A (en) | 2010-01-29 | 2010-01-29 | Fast measuring method of right angle of large-sized rectangular glass substrate and measuring instrument thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101886918A true CN101886918A (en) | 2010-11-17 |
Family
ID=43072929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101025690A Pending CN101886918A (en) | 2010-01-29 | 2010-01-29 | Fast measuring method of right angle of large-sized rectangular glass substrate and measuring instrument thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101886918A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764831A (en) * | 2019-03-21 | 2019-05-17 | 北京林业大学 | A kind of contactless board material vertical degree detection device and method |
| CN110668689A (en) * | 2018-09-04 | 2020-01-10 | Ａｇｃ株式会社 | Glass for display |
| CN110763163A (en) * | 2019-10-28 | 2020-02-07 | 中国科学院西安光学精密机械研究所 | Photoelectric image measuring instrument and measuring method for detecting verticality of large-size workpiece |
| CN113567029A (en) * | 2021-09-26 | 2021-10-29 | 江西经纬科技发展有限公司 | Pressure data acquisition system |
| CN114777599A (en) * | 2022-03-24 | 2022-07-22 | 山西光兴光电科技有限公司 | Verifying attachment of support plate glass size and squareness |
| CN115790399A (en) * | 2023-01-13 | 2023-03-14 | 北京航天计量测试技术研究所 | Warhead length measuring method based on double displacement sensors |
-
2010
- 2010-01-29 CN CN2010101025690A patent/CN101886918A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110668689A (en) * | 2018-09-04 | 2020-01-10 | Ａｇｃ株式会社 | Glass for display |
| TWI825162B (en) * | 2018-09-04 | 2023-12-11 | 日商Ａｇｃ股份有限公司 | Display glass |
| CN109764831A (en) * | 2019-03-21 | 2019-05-17 | 北京林业大学 | A kind of contactless board material vertical degree detection device and method |
| CN110763163A (en) * | 2019-10-28 | 2020-02-07 | 中国科学院西安光学精密机械研究所 | Photoelectric image measuring instrument and measuring method for detecting verticality of large-size workpiece |
| CN113567029A (en) * | 2021-09-26 | 2021-10-29 | 江西经纬科技发展有限公司 | Pressure data acquisition system |
| CN113567029B (en) * | 2021-09-26 | 2021-12-17 | 江西经纬科技发展有限公司 | Pressure data acquisition system |
| CN114777599A (en) * | 2022-03-24 | 2022-07-22 | 山西光兴光电科技有限公司 | Verifying attachment of support plate glass size and squareness |
| CN115790399A (en) * | 2023-01-13 | 2023-03-14 | 北京航天计量测试技术研究所 | Warhead length measuring method based on double displacement sensors |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101886918A (en) | Fast measuring method of right angle of large-sized rectangular glass substrate and measuring instrument thereof | |
| CN201122093Y (en) | Thickness measurement device | |
| CN203704886U (en) | Flatness optical measuring device | |
| CN104698632A (en) | Substrate detection device and protruding height detection method | |
| CN110542369A (en) | Flatness and straightness detection device | |
| CN102589492A (en) | Large curved surface flexibility detection device | |
| CN205506004U (en) | Portable plane degree laser detector | |
| CN103398688A (en) | Instrument for measuring thickness of thin plate with high bright reflective surface | |
| CN104236487A (en) | Device and method for detecting flatness | |
| CN116608817A (en) | Guide rail precision detection equipment | |
| Unkuri et al. | Interferometric 30 m bench for calibrations of 1D scales and optical distance measuring instruments | |
| CN211291316U (en) | Marine straightness measuring device | |
| CN210346580U (en) | Flatness and straightness detection device | |
| CN105526869A (en) | Multifunctional sheet material detection device | |
| CN202501825U (en) | Grade-three linear scale testing device | |
| CN201653395U (en) | Right-angle quick measuring instrument for large-dimension glass substrate | |
| CN106508059B (en) | Presurized water reactor nuclear fuel component skeleton check device | |
| CN202002606U (en) | Sheet metal part planeness measuring device | |
| CN107907060A (en) | A kind of glass screen height and flatness checking device | |
| CN207487596U (en) | CTP plate size detecting devices | |
| CN206223112U (en) | Flatness quick detection equipment based on many laser feelers | |
| CN208567765U (en) | A kind of detection device | |
| CN203375938U (en) | A surface high-brightness reflective sheet thickness measuring apparatus | |
| CN212567307U (en) | Detection apparatus for square lens asymmetry in flat panel display system | |
| CN202485609U (en) | Device for measuring fringe spacing of glass base plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20101117 |