CN101881604B - Orthogonal polarized Mirau interference method and light splitting module and interference system thereof - Google Patents
Orthogonal polarized Mirau interference method and light splitting module and interference system thereof Download PDFInfo
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Abstract
The invention provides an orthogonal polarized Mirau interference method. Condensed incident light is split into mutually orthogonal reference light and detection light in a polarized state by a light splitting module. The detection light irradiates to an object to be measured so as to form object measuring light which is loaded with information related to the surface shape of the object to be measured. The object measuring light and the reference light are condensed by the light splitting module in the polarized mutual orthogonal mode first, and then the polarized state and intensity of two beams of light in a condensed light field are modulated by an analyzer, so that the two beams of light can mutually interfere so as to generate high-contrast interference figures. The light splitting module can perform orthogonal polarization on the object measuring light and the reference light through two polarization elements, a dual refractive substrate or a polarized light splitting layer. The invention also provides an orthogonal polarized Mirau interference system to form interference figures related to the surface shape information of the object to be measured. The intensity of the reference light and the object measuring light can be adjusted by the analyzer so as to make the two beams of light similar. Therefore, the contrast of the interference figures is improved.
Description
Technical field
The present invention relates to the Mirau interference technique, particularly a kind of quadrature polar biased formula Mirau interference technique.
Background technology
Along with the scientific and technological industry high development; Measurement demand for accurate goods (for example: microcomputer electric component, IC wafer, LCD panel etc.) increases gradually; Therefore, utilize interference technique to come the surface configuration of detecting element and then, be widely used for industry gradually as the reference of processing procedure rate of good.The mode that interference technique detects mainly is that the interference figure corresponding to the information related of determinand is carried out image processing and analysis, and then the surface profile of reduction determinand.In order to want to reduce exactly the determinand surface profile, need and interfere image clearly.In traditional Mirau white light (or wideband light) interference technique of commonly using, when with reference to the size of light intensity and thing light intensity near the time, the contrast of the interference fringe in the interference optical field just can obtain interference figure clearly than higher.
See also shown in Figure 1ly, this figure is the Mirau interferometry synoptic diagram of commonly using.When an incident light 10 earlier by object lens 110 optically focused; And shine on the splitting module 111 in an optics module 11, the beam splitter layer 113 on this splitting module 111 can be divided into one with the mode of non-polarization formula beam split by the incident light of optically focused and detect a light 103 and a reference light 104 this moment.Wherein, this detection light 103 can be projected on the determinand 90, and is reflected to form an object test light 105 by this determinand 90, and wherein this object test light 105 is loaded with the information relevant with the surface configuration of this determinand 90.This reference light 104 then elder generation is carried out the non-polarization formula with this object test light 105 again and closes light and form one and close the light light field by this non-polarization formula beam splitter layer 113 of a non-polarization formula reflecting element 112 reflected backs, then this close the light light field again through these object lens 110 for analysis.After closing light, interference figure can directly interfered and form to this object test light 105 that closes in the light light field each other with this reference light 104, thus this to close the light light field all be an interference optical field always.
See also shown in Figure 2ly, this figure is first mutually orthogonal polar biased light components 106 of two polar biased attitudes and the second polar biased light components, 107 synoptic diagram.In Fig. 1, no matter be that incident light, reference light, detection light, object test light all are to contain the first mutually orthogonal polar biased light components of two polar biased attitudes and the second polar biased light components.Therefore, this to close the light light field promptly be to interfere the first polar biased component interference optical field that forms to add by second polar biased light components in this reference light 104 and the second polar biased light components in this object test light 105 each other by first polar biased light components in this reference light 104 and the first polar biased light components in this object test light 105 to interfere the second polar biased component interference optical field that forms to form each other.Because under the situation of general use non-polarization incident light; The first polar biased light components in this reference light 104 has identical amplitude and phase place with the second polar biased light components; And the first polar biased light components in this object test light 105 also has identical amplitude and phase place with the second polar biased light components; So the first and second polar biased component interference optical fields are identical; Do not have to distinguish part, and coinciding of two polar biased component interference optical fields only can make interference optical field brightness double, but the bright dark distribution proportion in the interference optical field can't change.
Yet; Some determinand can absorb in a large number and be projected to the detection light on it or will detect wide amount scattering; Make object test light 105 too big with the strength difference of reference light 104; Cause when the first polar biased light components in this reference light 104 and the second polar biased light components respectively with this object test light 105 in the first polar biased light components and the second polar biased light components interfere each other after; The interference figure contrast of formed two polar biased component interference optical fields is all very low, is not easy to be analyzed so that close the formed interference figure of light light field.Because the reference light and the object test light that close in the light light field can not carry out the adjustment of relative intensity again, so can't increase the contrast of interference figure.
Comprehensively above-mentioned, need a kind of interference technique that can adjust the relative intensity of the reference light that closes in the light light field and object test light, so that improve the contrast of interference figure, therefore the present invention is suggested.And the present invention closes light with object test light and reference light with the mode of quadrature polar biased, has just closed object test light and reference light and the directly interference each other of light time, because the polar biased attitude of two light is independent mutually at this moment; Can modulate its amplitude and phase place respectively; And then seeing through the polar biased attitude that analyzer is modulated two light, the polar biased attitude that makes two light is quadrature no longer, can let two light interfere each other; And can adjust the relative intensity of two light, and then obtain the high-contrast interference figure relevant with the surface shape information of a determinand.Except proposing above-mentioned quadrature polar biased formula Mirau interference technique, this name also proposes splitting module relevant with it and interference system, so that solve the too low problem of interference figure contrast that possibly run in the located by prior art.
In located by prior art, U.S. bulletin patent US.Pat.No.5,166,751 technology that disclosed are also relevant with polar biased formula Mirau interference technique.Through analyzing two respectively by having different object test lights and the formed interference figure of reference light phase difference value, this patent can be obtained the displacement on microcosmic surface to be measured accurately.But this patent and this patent have following 3 differences at least: (1) in this patent, an incident light is divided into a reference light and a detection light with the mode of non-polarization formula beam split; But in this patent, an incident light is divided into a reference light and a detection light with the mode of quadrature polar biased (the polar biased attitude is mutually orthogonal) formula beam split.(2) in this patent; Be to increase use a slice phase delay device (phaseretarder) with the maximum difference of traditional M irau interference technique; Use narrow frequency light but be to use phase delay device to arrange in pairs or groups; Therefore this patent and be not suitable for doing the tomoscan of thing table form, however this tomoscan function but is the most important derivation function of the Mirau interference technique commonly used; But in this patent; With the maximum difference of traditional M irau interference technique at the light that closes with the beam split of incident light and reference light and object test light; Close light by formula beam split of script non-polarization and non-polarization formula; Change the formula beam split of quadrature polar biased respectively into and quadrature polar biased formula is closed light, therefore can use wideband light, and be fit to do the tomoscan of thing table form.(3) in this patent, the object test light and the reference light that close behind the light can directly interfere with each other; But in this patent, the object test light and the reference light that close behind the light can't directly interfere with each other, but must be earlier through just interfering with each other after the polar biased attitude modulation (modulation).
Summary of the invention
The objective of the invention is to, solve and commonly use the too low technical matters of interference figure contrast that runs in the Mirau interference technique.
The present invention provide a kind of quadrature polar biased formula Mirau interference technique with and interference system and splitting module; It is divided into the mutually orthogonal reference light of polar biased attitude and with one by the incident light of optically focused earlier and detects light; On this detection rayed to a determinand and form an object test light, and this object test light has the information relevant with the surface profile of this determinand.Then, this object test light and this reference light are closed light with the mutually orthogonal mode of polar biased attitude and form one and close the light light field, this is closed object test light and reference light in the light light field carry out the modulation of polar biased attitude it can be interfered each other through adjusting an analyzer.Because the polar biased attitude of this two light was mutually orthogonal originally; Could interfere each other after seeing through the modulating action of polar biased attitude of this analyzer; Therefore can utilize the intensity of this analyzer this reference light of adjustment and object test light, make two light intensities approaching, to improve the contrast of interference figure.
The present invention also provides a kind of quadrature polar biased formula Mirau splitting module, and it can utilize two polar biased elements, dual refractive substrate or a polar biased beam splitter layer with this object test light and this reference light quadrature polarization.Wherein, this object test light is loaded with the information relevant with the surface configuration of a determinand.Because object test light and reference light in this splitting module are that the polar biased attitude is mutually orthogonal, can't in this splitting module, interfere each other, must outside splitting module, interfere each other through the modulation of an analyzer to produce interference figure.
In one embodiment, the present invention provides a kind of quadrature polar biased formula Mirau interference technique, and it includes the following step:
Step a is with an incident light optically focused and be divided into the mutually orthogonal reference light of polar biased attitude and one detect light;
Step b should detect light and be projected to a determinand and form an object test light, and it is loaded with the information relevant with the surface configuration of this determinand;
Step c closes this object test light and this reference light light with the mutually orthogonal mode of polar biased attitude and forms one and closes the light light field;
Steps d is carried out this object test light and reference light that closes in the light modulation of polar biased attitude and it can be interfered each other.
In another embodiment; The present invention more provides a kind of quadrature polar biased formula Mirau splitting module; It focuses on an incident light earlier and is divided into the mutually orthogonal reference light of polar biased attitude and and detects light; Should detect light then and outside this splitting module, form an object test light, it is loaded with the relevant information of thing table shape with a determinand, and this object test light and this reference light are closed light by this splitting module with the mutually orthogonal mode of polar biased attitude again.
Among another embodiment, the present invention more provides a kind of quadrature polar biased formula Mirau interference system, and it includes a light source, and it provides an incident light; One object lens, it is with this incident light optically focused; One splitting module; It will be divided into the mutually orthogonal reference light of polar biased attitude and by this incident light of optically focused and detect light; This detects light and outside this splitting module, forms an object test light; It is loaded with the relevant information of thing table shape with a determinand, and this object test light and this reference light are closed light by this splitting module with the mutually orthogonal mode of polar biased attitude again and form one and close the light light field; And an analysis module, this analysis module can be modulated the polar biased attitude of this reference light that closes light field in the light and object test light, and two luminous energy are interfered to form at least one interference figure each other.
Beneficial effect of the present invention is, can reference light and object test light be closed light with the mutually orthogonal mode of polar biased attitude, makes object test light and can be adjusted with reference to light intensity to have the interference figure of high-contrast with generation.
Description of drawings
Fig. 1 is the Mirau interference technique synoptic diagram of commonly using;
Fig. 2 is the first mutually orthogonal polar biased light components of two polar biased attitudes and the second polar biased light components synoptic diagram;
Fig. 3 is an interference technique schematic flow sheet of the present invention;
Fig. 4 closes the method flow synoptic diagram that reference light and object test light in the light light field are interfered it each other for modulation of the present invention;
Fig. 5 closes the light light field through the analyzer synoptic diagram for reference light and object test light;
Fig. 6 is an interference system embodiment synoptic diagram of the present invention;
Fig. 7 A and Fig. 7 B are respectively another embodiment synoptic diagram of interference system of the present invention;
Fig. 8 is another embodiment synoptic diagram of interference system of the present invention.
Description of reference numerals
The 2-interference technique; 20～23-step; 230～232-step; The 3-interference system; The 30-light source; The 300-light field; 31-optics module; The 310-object lens; 311,312,313-splitting module; 314-polar biased formula reflection horizon; The 3110-base material; 3111-first polarization layer; 3112-non-polarization formula beam splitter layer; 3120-birefringence base material; 3121-non-polarization formula reflecting element; The 3130-base material; 3131-polar biased formula beam splitter layer; 3132-non-polarization formula reflection horizon; 3140-non-polarization formula reflection horizon; 3141-second polarization layer; 32,32a, 32b-analyzer; The 33-light field; The 330-first polar biased light components; The 331-second polar biased light components; 332,332a, 332b-reference light; 333-detects light; 334,334a, 334b-object test light; 34,36-non-polarization formula beam splitter; 35,35a, 35b-image collection device; 37-polar biased element; The 90-determinand; The 91-object test light; The 92-reference light; The 93-analyzer.
Embodiment
Describe below in conjunction with the relevant thin portion structure of accompanying drawing device of the present invention and the theory of design.
See also shown in Figure 3ly, this figure is an interference technique schematic flow sheet of the present invention.In the present embodiment, this method includes the following step, at first carry out step 20, with an incident light optically focused and be divided into the mutually orthogonal reference light of polar biased attitude and one detect light.Just take into this incident light apart two light components through the mode of quadrature polar biased beam split, and used when reference light and detection light respectively.
Then carry out step 21, this detection light is projected to a determinand and forms be loaded with and an object test light of the information related of this determinand.Just be incident upon the detection light on the determinand, can be by the determinand surface reflection form and the object test light of the information related of this determinand.
Then carry out step 22, this object test light and this reference light are closed light with the mutually orthogonal mode of polar biased attitude and form one close the light light field.In this step, because the polar biased attitude of reference light and object test light is mutually orthogonal, therefore just closing the light time, the reference light and the object test light that close in the light light field can't directly produce interference.In the interference technique of commonly using,, just can't adjust the strength ratio between two light waves when object test light and after with reference to actinic light.And then carry out step 23, this object test light and reference light that closes in the light light field is carried out the modulation of polar biased attitude and it is interfered each other.In this step; Because this reference light and object test light can not be interfered before modulation each other, just its polar biased attitude is mutually orthogonal, therefore can adjust the strength ratio between two road light; Make reference light and object test light after polar biased attitude modulation through analyzer; Not only can interfere each other, and the intensity of the two also can be adjusted to more close, to increase the contrast of interference figure.
When consistent, can obtain the reason of the higher interference figure of contrast as for reference light and object test light intensity, see also following explanation.
The hypothetical reference light intensity is I
R, and the intensity of object test light is I
O, then the intensity distributions of the light field of (being assumed to be complete same tone interferes) is when twice light is interfered each other:
Wherein, θ is the phase differential between two road light.(1) formula can be rewritten into again
I＝(I
O+I
R)(1+γcosθ) (2)
Wherein,
Be the interference fringe contrast.Can find out by (2) formula, work as I
O=I
RThe time, interference fringe has maximum-contrast 1, works as I
O=0.05 I
RThe time, the contrast of interference fringe is 0.426, and works as I
O=0.01 I
RThe time, the contrast of interference fringe only is 0.198.So more near 1 o'clock, the contrast of interference fringe is high more with reference to the ratio between the intensity of light intensity and object test light, and 20I
R＜I
O＜0.05 I
RCan be described as and interfere enough high necessary conditions of interfering fringe contrast.
See also shown in Figure 4ly, this figure is that the method flow synoptic diagram that reference light and object test light in the light light field are interfered it is each other closed in modulation of the present invention.When object test light and reference light left splitting module after, close on the light path that the light light field passes through at this with step 230 earlier an analyzer be set.This analyzer can be linear polar biased element.Then carry out step 231, utilize this reference light that closes in the light of this analyzer adjustment to make it approaching with the intensity of object test light, the polar biased direction of for example rotating this linearity polar biased element in the plane promptly can be adjusted the intensity of reference light and object test light.Because the strength difference of reference light and object test light can be different along with determinand; When the green strength of reference light and object test light has too big-difference; The position angle (orientation) that can pass through the pivot analysis device is to certain special angle; Making has more close intensity via two residual linear polar biased light after analyzer optical filtering (filtering) effect, and produces higher interference fringe contrast.Though the filter action meeting of analyzer makes the intensity of interference figure reduce, increase exposure is remained unchanged, so capture is unquestionable.
For example Fig. 5 closes the synoptic diagram of light light field through analyzer for reference light and object test light.Analyzer 93 is a linear polar biased element, and it has a polar biased direction 930.The intensity of this object test light 91 in closing the light light field is during less than the intensity of this reference light 92; Can rotate this analyzer 93 to change its polar biased direction 930 through (in plane) in the plane, the angle that makes this polar biased direction 930 and this reference light 92 is greater than the angle of this polar biased direction 930 with this object test light 91.Thus, promptly can let this reference light 92 more approaching, and make the component of two light on this polar biased direction 930 to interfere each other, and then obtain the interference figure of high-contrast with the component of this object test light 91 on this polar biased direction 930.
In step 232, make this object test light and reference light mutual interference after of closing in the light produce an interference figure at last through this analyzer.Originally reference light and object test light can't directly interfere with each other because of the polar biased attitude is mutually orthogonal; But the operational analysis device is done after the optical filtering; Can make reference light close through the angle of rotation analyzer in the plane on the one hand with the component size of object test light on this analyzer; This reference light and the object test light component on this analyzer is because can produce interference in same direction, to form interference figure each other on the other hand.In addition; Under another kind of embodiment; The quantity of this analyzer has more than and is limited to one; Can this reference light and object test light be divided into each other corresponding sub-reference light and sub-object test light of multiple tracks, modulate the sub-reference light of this multiple tracks and object test light to form the interference figure of a plurality of high-contrasts respectively through the analyzer of correspondence respectively then.Because the mode of modulation is not given unnecessary details at this as shown in the step of Fig. 4.
See also shown in Figure 6ly, this figure is an interference system embodiment synoptic diagram of the present invention.In the present embodiment, this interference system 3 includes a light source 30, an optics module 31 and an analysis module 32.This light source 30 provides a light field 33, and this light field 33 is directed to this optics module 31 via a non-polarization formula beam splitter 34.In the present embodiment, this light field 33 is made up of one first polar biased light components 330 and 331 of one second polar biased light components.This optics module 31 has object lens 310 and a splitting module 311; These object lens 310 are with these light field 33 optically focused; And this splitting module 311 will be divided into mutually orthogonal reference light 332 of polar biased attitude and a detection light 333 by this light field 33 of optically focused; This detection light 333 is projected on the outer determinand 90 of this splitting module 311 and forms and be loaded with and an object test light 334 of the information related of this determinand 90; This object test light 334 closes light with this reference light 332 with the mutually orthogonal mode of polar biased attitude through this splitting module 311 again and forms one and close the light light field, and this closes the light light field earlier through these object lens 310, leaves this optics module 31 then.
This analysis module 32; It is arranged at a side of this optics module 31; This analysis module leaves this optics module 31 and this reference light 332 that closes in the light light field through this non-polarization formula beam splitter 34 carries out the modulation of polar biased attitude with this object test light 334; So that the polar biased attitude of two light is no longer mutually orthogonal, and then interfere to form at least one interference figure each other.In the present embodiment, this analysis module 32 is an analyzer, and it is a linear polar biased element.Through in the plane rotation this analyzer the polar biased direction to certain special angle, can so that reference light and object test light via the analyzer filter action after the generation higher contrast interference figure.And interference figure image collection device 35 capable of using (for example CCD or CMOS) is gathered image for subsequent analysis.
The polar biased direction of aforementioned adjustment analyzer can have different corners according to condition of different.For example: when the measurement of the microcosmic determinand table that is applied to high slope; Because the intensity of the object test light that the strength ratio of original reference light is original is many greatly; The polar biased direction of therefore necessary plane inward turning analyzer is so that its polar biased direction near object test light; Letting has more close intensity via residual linear polar biased reference light and object test light after the filter action, and produces higher interference fringe contrast.Certainly, because the analyzer height constrains with reference to light intensity to yield to faint thing light intensity, the total intensity of interference optical field in the case can be very little, and must increase considerably the timing up of the image collection device that capture is used.
In addition; When the measurement of the microcosmic thing table that is applied to have the non-uniform scattering rate; At each scan depths place; All must let rotation half-turn (180 degree) in the polar biased direction continuous level of analyzer, and the highest interference contrast can appear respectively in each regional area on the interference figure under different polar biased directions.In all scannings, the interference figure integrated (integrate) that each regional area on the interference figure occurred when having the highest interference fringe contrast can analyze and the relevant information of thing table shape.
In the embodiment of Fig. 6, this splitting module 311 mainly has a base material 3110, one first polarization layer 3111 and a polar biased formula reflection horizon 314.This base material 3110 provides this light field 33 to pass through, and in the present embodiment, this base material 3110 is the material of printing opacity, as: glass, plastic cement etc., but not as limit.One side of this base material 3110 has a non-polarization formula beam splitter layer 3112, when this light field 33 is passed through this non-polarization formula beam splitter layer 3112, forms one and penetrates a light field and a reflection light field.At this moment, no matter be that this penetrates light field or this reflection light field all includes the first mutually orthogonal polar biased light components 330 of polar biased attitude and the second polar biased light components 331.When this penetrated light field through this first polarization layer 3111, these second polar biased light components, 331 meetings were by filtering, and the first polar biased light components of passing through 330 forms these detection light 333 and is projected on the determinand 90, and formed an object test light 334 by determinand 90 reflections.And the reflection in this this polar biased formula reflection horizon 314 of reflection light field process makes its first polar biased light components 330 by filtering, and only keeps its second polar biased light components 331, and forms a reference light 332.In the present embodiment; This polar biased formula reflection horizon 314 has one second polarization layer 3141 and a non-polarization formula reflection horizon 3140; Second polarization layer 3141 is between non-polarization formula beam splitter layer 3112 and this non-polarization formula reflection horizon 3140; This second polarization layer 3141 is used to the filtering first polar biased light components, and this non-polarization formula reflection horizon 3140 is used to reflect the second polar biased light components.Because this reference light 332 is when being reflected back toward this beam splitter layer 3112; The only remaining second polar biased light components, and this object test light 334 then only is left the first polar biased light components when penetrating back this beam splitter layer 3112; Therefore two light are closed after the light by this non-polarization formula beam splitter layer 3112, and its polar biased attitude is mutually orthogonal.
See also shown in Fig. 7 A and the 7B, this figure is respectively another embodiment synoptic diagram of interference system of the present invention.Wherein in the embodiment of Fig. 7 A, this splitting module 312 mainly has a dual refractive substrate 3120 and a non-polarization formula reflecting element 3121.This birefringence base material 3120 is divided into the first mutually orthogonal polar biased light components 330 of polar biased attitude and the second polar biased light components 331 with this light field 33.Wherein this first polar biased light components 330 forms a detection light 333 through this birefringence base material 3120 and is projected on the determinand 90, and is reflected to form this object test light 334 that is loaded with the information relevant with this determinand 90 surface configurations by this determinand 90; 331 of this second polar biased component light fields form this reference light 332 by these non-polarization formula reflecting element 3121 reflections.This reference light 332 is closed light by this birefringence base material 3120 with the mutually orthogonal mode of polar biased attitude with this object test light 334.Remaining modulation technique is not given unnecessary details at this as previously mentioned.
In addition, shown in Fig. 7 B, in the present embodiment, this splitting module 313 mainly has a base material 3130, a polar biased formula beam splitter layer 3131 and a non-polarization formula reflection horizon 3132.This base material 3130 provides this light field 33 to pass through, and this base material 3130 is the material of printing opacity, as: glass, plastic cement etc., but not as limit.When this light field 33 impinges upon this polar biased formula beam splitter layer 3131; Its first polar biased light components 330 can penetrate this polar biased formula beam splitter layer 3131 and form a detection light 333; And its second polar biased component light field 331 can be formed a reference light 332 by these non-polarization formula reflection horizon 3132 reflections again by these polar biased formula beam splitter layer 3131 reflections.Again, this detection light 333 is projected on the determinand 90, and forms an object test light 334 that is loaded with the information relevant with this determinand surface configuration via the reflection of this determinand 90.Then, this object test light 334 is closed light by this polar biased formula beam splitter layer 3131 with the mutually orthogonal mode of polar biased attitude with this reference light 332.Remaining modulation technique is not given unnecessary details at this as previously mentioned.
As shown in Figure 8, this figure is another embodiment synoptic diagram of interference system of the present invention.In the present embodiment; Basically similar with Fig. 6; Difference be that this analysis module is made up of a plurality of analyzer 32a and 32b in the present embodiment, though the analyzer quantity of Fig. 8 only is two; But the quantity of analyzer is corresponding to the number of beam split, and the people who therefore is familiar with this technology can change according to the explanation of Fig. 8.Certainly, any analyzer in these a plurality of analyzers all can be a linear polar biased element.In Fig. 8; Through another non-polarization formula beam splitter 36 this is closed the light light field and be divided into that a son closes light light field (comprising binary light object test light 334a and reference light 332a) and another son closes light light field (comprising binary light object test light 334b and reference light 332b); The light path of closing the light light field at this two son attendes branch office one analyzer 32a and another analyzer 32b is set, and can form two interference figures.According to aforesaid principle, the polar biased direction of rotation this two analyzers 32a and 32b can make the contrast raising of two interference figures in the plane respectively, and two have high-contrast interference figure can be used to analyze accurately the surface configuration of determinand.
In Fig. 6, Fig. 7 A, Fig. 7 B and Fig. 8, this light source 30 can directly provide this light field 33, also a light field 300 can be provided earlier, forms this light field 33 via the modulation of a polar biased element 37 again.
Comprehensively above-mentioned; Interference technique provided by the invention with and splitting module and interference system owing to can reference light and object test light be closed light with the mutually orthogonal mode of polar biased attitude; Make and object test light and can be adjusted have the interference figure of high-contrast with generation with reference to light intensity.
The above description of this invention is illustrative, and nonrestrictive, and those skilled in the art is understood, and within spirit that claim limits and scope, can carry out many modifications, variation or equivalence to it, but they will fall in protection scope of the present invention all.
Claims (13)
1. a quadrature polar biased formula Mirau interference technique is characterized in that, includes the following step:
Step a is with an incident light optically focused and be divided into the mutually orthogonal reference light of polar biased attitude and one detect light;
Step b should detect light and be projected to a determinand and form an object test light, and this object test light is loaded with the information relevant with the surface configuration of this determinand;
Step c closes this object test light and this reference light light with the mutually orthogonal mode of polar biased attitude and forms one and closes the light light field;
Steps d is carried out the modulation of polar biased attitude with this object test light and reference light that closes in the light light field, makes the intensity of reference light and object test light close, produces the interference figure with high-contrast and it is interfered each other.
2. quadrature polar biased formula Mirau interference technique as claimed in claim 1 is characterized in that, this polar biased attitude modulation is carried out by an analyzer in the said steps d.
3. quadrature polar biased formula Mirau interference technique as claimed in claim 2 is characterized in that this analyzer is a linear polar biased element.
4. quadrature polar biased formula Mirau interference technique as claimed in claim 1; It is characterized in that; This polar biased attitude modulation is closed the beam split of light light field with this earlier and is closed the light light field to form a plurality of sons in the said steps d; And make each height close the light light field through an analyzer, utilize each analyzer to modulate corresponding son respectively again and close object test light and the polar biased attitude of reference light in the light light field.
5. quadrature polar biased formula Mirau interference technique as claimed in claim 4 is characterized in that having an analyzer at least is linear polar biased element.
6. a quadrature polar biased formula Mirau interference system is characterized in that, includes:
One light source, it provides an incident light;
One object lens, it is with this incident light optically focused;
One splitting module; It will be divided into the mutually orthogonal reference light of polar biased attitude and by this incident light of optically focused and detect light; This detection light is projected to a determinand and forms an object test light; Wherein, this object test light is loaded with the information relevant with the surface configuration of this determinand, and this object test light and this reference light are closed light by this splitting module with the mutually orthogonal mode of polar biased attitude again and form one and close the light light field; And
One analysis module, this analysis module can be modulated this and closed reference light and the polar biased attitude of object test light in the light light field, make the intensity of reference light and object test light close, make it interfere at least one interference figure that has high-contrast with formation each other.
7. quadrature polar biased formula Mirau interference system as claimed in claim 6 is characterized in that this splitting module has more:
One non-polarization formula beam splitter layer when it provides this incident light through this beam splitter layer, forms and should detect light and this reference light;
One first polarization layer, it is modulated into this object test light has specific polar biased attitude; And
One polar biased formula reflection horizon, it reflects this reference light so that the polar biased attitude of the polar biased attitude of this reference light and this object test light is mutually orthogonal for the polar biased formula.
8. quadrature polar biased formula Mirau interference system as claimed in claim 7; It is characterized in that; This polar biased formula reflection horizon has more one second polarization layer and a non-polarization formula reflection horizon, and this second polarization layer is between this non-polarization formula beam splitter layer and this non-polarization formula reflection horizon.
9. quadrature polar biased formula Mirau interference system as claimed in claim 6; It is characterized in that; This splitting module has more dual refractive substrate; It is divided into this mutually orthogonal reference light of polar biased attitude and this detection light with this incident light earlier, again this reference light and this object test light that is formed by this detection light is closed light with the mutually orthogonal mode of polar biased attitude.
10. quadrature polar biased formula Mirau interference system as claimed in claim 6; It is characterized in that; This splitting module has more a polar biased beam splitter layer; This incident light forms polar biased attitude mutually orthogonal this detection light and this reference light through this polar biased beam splitter layer the time, and this reference light is closed light by this polar biased beam splitter layer with the mutually orthogonal mode of polar biased attitude with this object test light that is formed by this detection light.
11. quadrature polar biased formula Mirau interference system as claimed in claim 6 is characterized in that this analysis module more comprises at least one analyzer.
12. quadrature polar biased formula Mirau interference system as claimed in claim 11 is characterized in that having an analyzer at least is linear polar biased element.
13. quadrature polar biased formula Mirau interference system as claimed in claim 6 is characterized in that, has more at least one image collection device and gathers this interference figure.
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| CN2009101375367A CN101881604B (en) | 2009-05-05 | 2009-05-05 | Orthogonal polarized Mirau interference method and light splitting module and interference system thereof |
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| CN2009101375367A CN101881604B (en) | 2009-05-05 | 2009-05-05 | Orthogonal polarized Mirau interference method and light splitting module and interference system thereof |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7317540B1 (en) * | 2004-02-20 | 2008-01-08 | University Of South Florida | Method of full-color optical coherence tomography |
| TW200846621A (en) * | 2007-05-18 | 2008-12-01 | Univ Nat Taipei Technology | Method and apparatus for simultaneously acquiring interferograms and method for solving the phase |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7317540B1 (en) * | 2004-02-20 | 2008-01-08 | University Of South Florida | Method of full-color optical coherence tomography |
| TW200846621A (en) * | 2007-05-18 | 2008-12-01 | Univ Nat Taipei Technology | Method and apparatus for simultaneously acquiring interferograms and method for solving the phase |
Non-Patent Citations (1)
| Title |
|---|
| Joanna Schmitt et. al..Improved polarization Mirau interference microscope.《Optical Engineering》.2007,第46卷(第7期),第077007-1-077007-2页. * |
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| CN101881604A (en) | 2010-11-10 |
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