CN101881335B - 多层橡胶密封圈密封装置 - Google Patents
多层橡胶密封圈密封装置 Download PDFInfo
- Publication number
- CN101881335B CN101881335B CN2010101319533A CN201010131953A CN101881335B CN 101881335 B CN101881335 B CN 101881335B CN 2010101319533 A CN2010101319533 A CN 2010101319533A CN 201010131953 A CN201010131953 A CN 201010131953A CN 101881335 B CN101881335 B CN 101881335B
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- CN
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- Prior art keywords
- cavity
- sealing ring
- sealing device
- rubber sealing
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007789 sealing Methods 0.000 title claims abstract description 61
- 238000001816 cooling Methods 0.000 claims abstract description 33
- 238000005086 pumping Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
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Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101319533A CN101881335B (zh) | 2010-03-23 | 2010-03-23 | 多层橡胶密封圈密封装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101319533A CN101881335B (zh) | 2010-03-23 | 2010-03-23 | 多层橡胶密封圈密封装置 |
Publications (2)
Publication Number | Publication Date |
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CN101881335A CN101881335A (zh) | 2010-11-10 |
CN101881335B true CN101881335B (zh) | 2012-02-01 |
Family
ID=43053424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101319533A Expired - Fee Related CN101881335B (zh) | 2010-03-23 | 2010-03-23 | 多层橡胶密封圈密封装置 |
Country Status (1)
Country | Link |
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CN (1) | CN101881335B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102135182B (zh) * | 2011-03-22 | 2013-08-28 | 中国科学院工程热物理研究所 | 一种应用于分段式模芯或模具的低压密封系统及密封方法 |
CN102350803B (zh) * | 2011-06-24 | 2014-05-28 | 中国航空工业集团公司北京航空制造工程研究所 | 一种减少复合材料成型中真空渗漏的封装方法 |
CN104235382B (zh) * | 2014-08-29 | 2016-04-13 | 杭州杭氧低温容器有限公司 | 一种热沉容器与升降平台的连接结构 |
CN105892116A (zh) * | 2016-06-29 | 2016-08-24 | 武汉华星光电技术有限公司 | 真空腔室 |
CN107024325A (zh) * | 2017-06-02 | 2017-08-08 | 中国电子科技集团公司第二十六研究所 | 质谱检漏仪结构 |
CN109958381A (zh) * | 2017-12-14 | 2019-07-02 | 核工业西南物理研究院 | 一种真空室门密封结构及真空腔室 |
CN110630747B (zh) * | 2018-06-01 | 2024-02-20 | 无锡凡远光电科技有限公司 | 一种真空阻隔密封结构以及安装有该密封结构的设备 |
CN111099165B (zh) * | 2019-12-23 | 2021-10-29 | 上海蓁维印刷有限公司 | 一种粽子包装盒 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5368648A (en) * | 1991-02-26 | 1994-11-29 | Tokyo Electron Sagami Kabushiki Kaisha | Sealing apparatus |
CN1405863A (zh) * | 2001-08-20 | 2003-03-26 | Asml美国公司 | 在反应室中隔离密封件的方法和装置 |
CN101091006A (zh) * | 2005-06-08 | 2007-12-19 | 东京毅力科创株式会社 | 真空装置的密封结构 |
CN201634054U (zh) * | 2010-03-23 | 2010-11-17 | 东莞宏威数码机械有限公司 | 多层密封装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62180168A (ja) * | 1986-01-31 | 1987-08-07 | Mitsubishi Heavy Ind Ltd | 真空容器用シ−ル機構 |
WO2009060756A1 (ja) * | 2007-11-06 | 2009-05-14 | Tohoku University | プラズマ処理装置及び外気遮断容器 |
-
2010
- 2010-03-23 CN CN2010101319533A patent/CN101881335B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5368648A (en) * | 1991-02-26 | 1994-11-29 | Tokyo Electron Sagami Kabushiki Kaisha | Sealing apparatus |
CN1405863A (zh) * | 2001-08-20 | 2003-03-26 | Asml美国公司 | 在反应室中隔离密封件的方法和装置 |
CN101091006A (zh) * | 2005-06-08 | 2007-12-19 | 东京毅力科创株式会社 | 真空装置的密封结构 |
CN201634054U (zh) * | 2010-03-23 | 2010-11-17 | 东莞宏威数码机械有限公司 | 多层密封装置 |
Non-Patent Citations (1)
Title |
---|
JP昭62-180168A 1987.08.07 |
Also Published As
Publication number | Publication date |
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CN101881335A (zh) | 2010-11-10 |
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