CN101863152A - Infrared radiation inhibiting material with nano periodic structure and method for preparing same - Google Patents

Infrared radiation inhibiting material with nano periodic structure and method for preparing same Download PDF

Info

Publication number
CN101863152A
CN101863152A CN 201010165515 CN201010165515A CN101863152A CN 101863152 A CN101863152 A CN 101863152A CN 201010165515 CN201010165515 CN 201010165515 CN 201010165515 A CN201010165515 A CN 201010165515A CN 101863152 A CN101863152 A CN 101863152A
Authority
CN
China
Prior art keywords
substrate
germanium
film
nano
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 201010165515
Other languages
Chinese (zh)
Other versions
CN101863152B (en
Inventor
凌军
张拴勤
杨辉
王引龙
连长春
卢言利
潘家亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
63983 Troops of PLA
Original Assignee
63983 Troops of PLA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 63983 Troops of PLA filed Critical 63983 Troops of PLA
Priority to CN2010101655159A priority Critical patent/CN101863152B/en
Publication of CN101863152A publication Critical patent/CN101863152A/en
Application granted granted Critical
Publication of CN101863152B publication Critical patent/CN101863152B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The invention provides an infrared radiation inhibiting material with a nano periodic structure, which can ensure infrared stealth of covered high-temperature targets and heat-source targets. The technical scheme is that the material comprises a substrate and a membrane material on an upper layer. The material is characterized in that: the membrane material is formed by combining five periods of compound nano germanium-zinc sulfide membranes, and the upper layer of the compound nano germanium-zinc sulfide membrane is the nano zinc sulfide membrane which is 1.1 millimeters thick and the lower layer is the nano germanium membrane which is 0.7 millimeters thick.

Description

A kind of infrared radiation inhibiting material with nano periodic structure and preparation method thereof
Technical field
The present invention relates to military infrared stealth and camouflage field, be specially a kind of infrared radiation inhibiting material with nano periodic structure, the present invention also provides the preparation method of this material.
Background technology
Traditional infrared stealth mainly is to utilize high, medium and low emissivity material to make the appearance profile of military target cut apart distortion to reach stealthy purpose with camouflage.Though this material can play certain effect to the passive target infrared of static state is stealthy, but to high-temperature targets with the thermal source target arranged, as engine of aircraft engine nozzle, naval vessels, tank etc., can't implement infrared stealth effectively, this wherein main cause be that the design preparation of low-emissivity material is the difficult point of infrared stealth always, low-launch-rate can not be accomplished very low level at present.
Summary of the invention
At the problems referred to above, the invention provides a kind of infrared radiation inhibiting material with nano periodic structure, the infrared stealth that it can guarantee the high-temperature targets that is capped and the thermal source target object is arranged.
A kind of infrared radiation inhibiting material with nano periodic structure, its technical scheme is such: it comprises the thin-film material on substrate and upper strata, it is characterized in that: described thin-film material is that the composite Nano germanium and the zinc sulfide film in five cycles is composited mutually, and the upper strata of described composite Nano germanium and zinc sulfide film is that the nano-zinc sulfide film of 1.1mm thickness, lower floor are the nanometer germanium film of 0.7mm thickness.
It is further characterized in that: described substrate is flexible materials such as basic cloth; Described substrate is a hard material.
A kind of preparation method of infrared radiation inhibiting material with nano periodic structure is characterized in that:
Germanium material, substrate are placed vacuum coating equipment inside, vacuum state adopts evaporation coating to plate the nanometer germanium film of 0.7mm thickness down on substrate, remove germanium material afterwards and change zinc sulphide materials, vacuum state adopts evaporation coating to plate the nano-zinc sulfide film of 1.1mm thickness down on germanium film, keep substrate location constant afterwards, under vacuum state, carry out evaporation coating at the upper surface of the substrate of plated film, alternately plate the nano-zinc sulfide film each four times of nanometer germanium film, the 1.1mm thickness of 0.7mm thickness successively.
It is further characterized in that: its concrete processing step is as follows:
A, germanium material and substrate are placed the vacuum chamber of the vacuum coating equipment that does not vacuumize, the gas of vacuum chamber
Be discharged to 10 -4The Torr(holder) following pressure, make its evaporation form nanoparticle more than the heating germanium to 300 ℃,, stop heating afterwards at the substrate surface uniform deposition, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge substrate top surface forms the nanometer germanium film of 0.7mm thickness;
B, the germanium material of vacuum chamber removed change zinc sulphide materials into, substrate location is motionless, and the gas of vacuum chamber is discharged to 10 -4The Torr(holder) following pressure, make its evaporation form nanoparticle more than the baking Zinc material to 300 ℃,, stop heating afterwards at the substrate surface uniform deposition, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge substrate top surface forms the nano-zinc sulfide film of 1.1mm thickness;
C, alternately repeat a and b step each four times successively, form the composite Nano germanium and the zinc sulfide film in five cycles at substrate surface.
It further is characterised in that:
Described substrate material needs to stand lives high temperature more than 300 ℃, the physicochemical property that the heating-up temperature in the described vacuum chamber the is not higher than described substrate minimum temperature between the high-temperature region that changes.
Infrared radiation inhibiting material of the present invention, because it comprises the thin-film material on substrate and upper strata, described thin-film material is that the upper strata in five cycles is nano-zinc sulfide films of 1.1mm thickness, lower floor is that the nanometer germanium film of 0.7mm thickness is composited, it will have the germanium of different refraction coefficients, the zinc sulphide medium is pressed periodic arrangement in the space, and its space periodic and optical wavelength are suitable, because Bragg diffraction, this system will produce forbidden photon band in 8 ~ 14mm wavelength band, if the energy of photon falls in the forbidden photon band spectral region, just can not in medium, propagate, so be covered in the outer surface of high temp objects when this material after, the radiation characteristic of high temp objects outer surface changes, make the emissivity of material in 8 ~ 14mm wavelength band, occur than low value, and the main wave band of existing various Infrared Detectors responses is 8 μ m~14 μ m, using behind this inhibition material can be so that Infrared Detectors can't respond, and then arrives infrared stealth;
Wherein, when substrate is flexible materials such as basic cloth, it can be covered on the object of no solid form such as camouflage net, screening account, when substrate is hard material, it can be covered on the object of solid form, the smoke exhaust pipe of the engine position of motor-driven tank, power station, cave depot engineering for example, the infrared stealth that it can guarantee the high-temperature targets that is capped and the thermal source target object is arranged.
Description of drawings
Fig. 1 is a structural representation enlarged drawing of the present invention.
The specific embodiment
A kind of infrared radiation inhibiting material with nano periodic structure, its structure is seen Fig. 1, it comprises the thin-film material on substrate 1 and upper strata, thin-film material is that the composite Nano germanium and the zinc sulfide film in five cycles is composited mutually, the upper strata of composite Nano germanium and zinc sulfide film is the nano-zinc sulfide film 2 of 1.1mm thickness, the nanometer germanium film 3 that lower floor is 0.7mm thickness, and substrate is flexible material or hard materials such as basic cloth.
A kind of preparation method of infrared radiation inhibiting material with nano periodic structure:
Specific embodiment one: with resistant to elevated temperatures basic cloth as substrate
A, germanium material and basic cloth substrate are placed the vacuum chamber of the vacuum coating equipment that does not vacuumize, the gas of vacuum chamber is discharged to 10 -4The Torr(holder) following pressure, heating germanium to 300 ℃ makes its evaporation form nanoparticle, at the substrate surface uniform deposition, stops heating afterwards, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge basic cloth substrate top surface forms the nanometer germanium film of 0.7mm thickness;
B, the germanium material of vacuum chamber removed change zinc sulphide materials into, basic cloth substrate location is motionless, and the gas of vacuum chamber is discharged to 10 -4The Torr(holder) following pressure, baking Zinc material to 300 ℃ makes its evaporation form nanoparticle, at basic cloth substrate surface uniform deposition, stop heating afterwards, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge basic cloth substrate top surface forms the nano-zinc sulfide film of 1.1mm thickness;
C, alternately repeat a and b step each four times successively, form the composite Nano germanium and the zinc sulfide film in five cycles at basic cloth substrate surface;
Specific embodiment two: with the carborundum hard material as substrate
A, germanium material and carborundum hard material substrate are placed the vacuum chamber of the vacuum coating equipment that does not vacuumize, the gas of vacuum chamber is discharged to 10 -4The Torr(holder) following pressure, heating germanium to 400 ℃ makes its evaporation form nanoparticle, at carborundum hard material substrate surface uniform deposition, stop heating afterwards, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge carborundum hard material substrate top surface forms the nanometer germanium film of 0.7mm thickness;
B, the germanium material of vacuum chamber removed change zinc sulphide materials into, carborundum hard material substrate location is motionless, and the gas of vacuum chamber is discharged to 10 -4The Torr(holder) following pressure, baking Zinc material to 400 ℃ makes its evaporation form nanoparticle, at hard material substrate surface uniform deposition, stop heating afterwards, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge carborundum hard material substrate top surface forms the nano-zinc sulfide film of 1.1mm thickness;
C, alternately repeat a and b step each four times successively, form the composite Nano germanium and the zinc sulfide film in five cycles at carborundum hard material substrate surface.

Claims (6)

1. infrared radiation inhibiting material with nano periodic structure, it comprises the thin-film material on substrate and upper strata, it is characterized in that: described thin-film material is that the composite Nano germanium and the zinc sulfide film in five cycles is composited mutually, and the upper strata of described composite Nano germanium and zinc sulfide film is that the nano-zinc sulfide film of 1.1mm thickness, lower floor are the nanometer germanium film of 0.7mm thickness.
2. a kind of infrared radiation inhibiting material with nano periodic structure according to claim 1 is characterized in that: described substrate is flexible materials such as basic cloth.
3. a kind of infrared radiation inhibiting material with nano periodic structure according to claim 1 is characterized in that: described substrate is a hard material.
4. the preparation method of an infrared radiation inhibiting material with nano periodic structure is characterized in that:
Germanium material, substrate are placed vacuum coating equipment inside, vacuum state adopts evaporation coating to plate the nanometer germanium film of 0.7mm thickness down on substrate, remove germanium material afterwards and change zinc sulphide materials, vacuum state adopts evaporation coating to plate the nano-zinc sulfide film of 1.1mm thickness down on germanium film, keep substrate location constant afterwards, under vacuum state, carry out evaporation coating at the upper surface of the substrate of plated film, alternately plate the nano-zinc sulfide film each four times of nanometer germanium film, the 1.1mm thickness of 0.7mm thickness successively.
5. the preparation method of a kind of infrared radiation inhibiting material with nano periodic structure according to claim 4 is characterized in that:
Its concrete processing step is as follows:
A, germanium material and substrate are placed the vacuum chamber of the vacuum coating equipment that does not vacuumize, the gas of vacuum chamber
Be discharged to 10 -4The Torr(holder) following pressure, make its evaporation form nanoparticle more than the heating germanium to 300 ℃,, stop heating afterwards at the substrate surface uniform deposition, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge substrate top surface forms the nanometer germanium film of 0.7mm thickness;
B, the germanium material of vacuum chamber removed change zinc sulphide materials into, substrate location is motionless, and the gas of vacuum chamber is discharged to 10 -4The Torr(holder) following pressure, make its evaporation form nanoparticle more than the baking Zinc material to 300 ℃,, stop heating afterwards at the substrate surface uniform deposition, naturally after the cooling, guarantee that by the quartz crystal monitoring film thickness gauge substrate top surface forms the nano-zinc sulfide film of 1.1mm thickness;
C, alternately repeat a and b step each four times successively, form the composite Nano germanium and the zinc sulfide film in five cycles at substrate surface.
6. the preparation method of a kind of infrared radiation inhibiting material with nano periodic structure according to claim 4, it is characterized in that: described substrate material needs to stand lives high temperature more than 300 ℃, the physicochemical property that the heating-up temperature in the described vacuum chamber the is not higher than described substrate minimum temperature between the high-temperature region that changes.
CN2010101655159A 2010-05-07 2010-05-07 Infrared radiation inhibiting material with nano periodic structure and method for preparing same Expired - Fee Related CN101863152B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010101655159A CN101863152B (en) 2010-05-07 2010-05-07 Infrared radiation inhibiting material with nano periodic structure and method for preparing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010101655159A CN101863152B (en) 2010-05-07 2010-05-07 Infrared radiation inhibiting material with nano periodic structure and method for preparing same

Publications (2)

Publication Number Publication Date
CN101863152A true CN101863152A (en) 2010-10-20
CN101863152B CN101863152B (en) 2012-04-25

Family

ID=42955164

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010101655159A Expired - Fee Related CN101863152B (en) 2010-05-07 2010-05-07 Infrared radiation inhibiting material with nano periodic structure and method for preparing same

Country Status (1)

Country Link
CN (1) CN101863152B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103293577A (en) * 2013-06-21 2013-09-11 中国科学院上海技术物理研究所 4-14.5-micrometer infrared wide-spectrum beam splitting film with ZnSe substrate
CN104865618A (en) * 2015-05-08 2015-08-26 中国人民解放军国防科学技术大学 Infrared stealth thin film with spectral selectivity and low emission rate and preparation method of infrared stealth thin film
CN104865617A (en) * 2015-05-08 2015-08-26 中国人民解放军国防科学技术大学 Infrared stealth thin film with spectral selectivity and low emission rate and preparation method of infrared stealth thin film
CN104991291A (en) * 2015-06-26 2015-10-21 中国人民解放军国防科学技术大学 Infrared stealth film capable of achieving low emissivity in band range from 8 microns to 14 microns selectively, and preparation method for infrared stealth film
CN110345816A (en) * 2019-07-16 2019-10-18 四川航龙航空工业有限公司 A kind of MULTILAYER COMPOSITE camouflage cloth of high thermal inertia
CN114924342A (en) * 2022-03-10 2022-08-19 电子科技大学 Selective infrared radiation stealth material and preparation method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85106181A (en) * 1984-04-24 1987-03-04 株式会社堀场制作所 The multilayer films interference filter that is used for gas tester
CN2052908U (en) * 1989-09-06 1990-02-14 中国科学院上海技术物理研究所 Six or five micrometer infrared long wave pass filter
CN101067661A (en) * 2007-07-04 2007-11-07 中国航空工业第一集团公司第六一三研究所 Infrared cut-off light filtering films on germanium-base parts surface and plating method thereof
JP2007298661A (en) * 2006-04-28 2007-11-15 Horiba Ltd Antireflection film for infrared light
JP2009086533A (en) * 2007-10-02 2009-04-23 Sumitomo Electric Hardmetal Corp Infrared multilayered film, infrared antireflection film, and infrared laser reflecting mirror
CN101620280A (en) * 2009-06-30 2010-01-06 中国航空工业集团公司洛阳电光设备研究所 Film system of infrared double-waveband antireflection film system and plating method thereof
US20100035036A1 (en) * 2008-08-08 2010-02-11 Mccloy John S Durable antireflective multispectral infrared coatings

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85106181A (en) * 1984-04-24 1987-03-04 株式会社堀场制作所 The multilayer films interference filter that is used for gas tester
CN2052908U (en) * 1989-09-06 1990-02-14 中国科学院上海技术物理研究所 Six or five micrometer infrared long wave pass filter
JP2007298661A (en) * 2006-04-28 2007-11-15 Horiba Ltd Antireflection film for infrared light
CN101067661A (en) * 2007-07-04 2007-11-07 中国航空工业第一集团公司第六一三研究所 Infrared cut-off light filtering films on germanium-base parts surface and plating method thereof
JP2009086533A (en) * 2007-10-02 2009-04-23 Sumitomo Electric Hardmetal Corp Infrared multilayered film, infrared antireflection film, and infrared laser reflecting mirror
US20100035036A1 (en) * 2008-08-08 2010-02-11 Mccloy John S Durable antireflective multispectral infrared coatings
CN101620280A (en) * 2009-06-30 2010-01-06 中国航空工业集团公司洛阳电光设备研究所 Film system of infrared double-waveband antireflection film system and plating method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103293577A (en) * 2013-06-21 2013-09-11 中国科学院上海技术物理研究所 4-14.5-micrometer infrared wide-spectrum beam splitting film with ZnSe substrate
CN104865618A (en) * 2015-05-08 2015-08-26 中国人民解放军国防科学技术大学 Infrared stealth thin film with spectral selectivity and low emission rate and preparation method of infrared stealth thin film
CN104865617A (en) * 2015-05-08 2015-08-26 中国人民解放军国防科学技术大学 Infrared stealth thin film with spectral selectivity and low emission rate and preparation method of infrared stealth thin film
CN104865618B (en) * 2015-05-08 2017-04-19 中国人民解放军国防科学技术大学 Infrared stealth thin film with spectral selectivity and low emission rate and preparation method of infrared stealth thin film
CN104991291A (en) * 2015-06-26 2015-10-21 中国人民解放军国防科学技术大学 Infrared stealth film capable of achieving low emissivity in band range from 8 microns to 14 microns selectively, and preparation method for infrared stealth film
CN110345816A (en) * 2019-07-16 2019-10-18 四川航龙航空工业有限公司 A kind of MULTILAYER COMPOSITE camouflage cloth of high thermal inertia
CN110345816B (en) * 2019-07-16 2022-04-26 四川航龙航空工业有限公司 Multilayer composite camouflage cloth with high heat inertia
CN114924342A (en) * 2022-03-10 2022-08-19 电子科技大学 Selective infrared radiation stealth material and preparation method thereof

Also Published As

Publication number Publication date
CN101863152B (en) 2012-04-25

Similar Documents

Publication Publication Date Title
CN101863152B (en) Infrared radiation inhibiting material with nano periodic structure and method for preparing same
Moustaghfir et al. Structural and optical studies of ZnO thin films deposited by rf magnetron sputtering: influence of annealing
Hong et al. Influence of buffer layer thickness on the structure and optical properties of ZnO thin films
KR102090553B1 (en) Sapphire thin film coated flexible substrate
JP2009510263A (en) Sputtering target, low resistance transparent conductive coating, method for forming such coating and composition for use in the conductive coating
CN109686798B (en) Magnetic ferrite/Bi composite film applied to medium and far infrared photoelectric detection
CN104076530A (en) One-dimensional photonic crystal selective radiator
Kim et al. Enhanced conductance properties of UV laser/RTA annealed Al-doped ZnO thin films
CN105461236A (en) Angular-transformation colorful glass and preparation method thereof
Park et al. Electrical and optical properties of in and Al doped ZnO thin film
Guo et al. Past achievements and future challenges in the development of infrared antireflective and protective coatings
CN103730523B (en) A kind of graphene-based mercury cadmium telluride composite film material and preparation method thereof
Sakthivelu et al. Structural, mophological and optical studies of molarity based ZnO thin films
Jayatissa et al. Optical properties of zinc nitride films deposited by the rf magnetron sputtering method
CN104831241B (en) A kind of method for growing single-phase extension m faces ZnOS ternary alloy films
CN104152854B (en) High temperature resistant, antioxidative low infrared emissivity composite coating and preparation method thereof
Ashraf et al. The influence of substrate temperature on the structural and optical properties of ZnS thin films
CN103287010B (en) Sapphire infrared window yittrium oxide/silica anti-reflection protective film and preparation method thereof
JP7395826B2 (en) Composite tungsten oxide film, method for producing the same, and film-forming substrate and article having the film
Chibane et al. Development of Molybdenum trioxide (MoO3) by spin coating method for photovoltaic application
Bel Hadj Tahar et al. Effects of individual layer thickness on the microstructure and optoelectronic properties of sol–gel‐derived zinc oxide thin films
CN102161503B (en) Preparation method of orthorhombic tin dioxide thin film
Ugwu The Effect of Annealing, Doping on the Properties and Functionality of Zinc Oxide Thin Film; Review
Panneerdoss et al. Characteristic comparison of TiO2 thin films with an inorganic and organic precursor at different molarities by Spray pyrolysis
Brierley et al. Diamond coatings for large-area IR windows

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C53 Correction of patent for invention or patent application
CB03 Change of inventor or designer information

Inventor after: Ling Jun

Inventor after: Pan Jialiang

Inventor after: Yang Hui

Inventor after: Zhang Shuanqin

Inventor after: Wang Yinlong

Inventor after: Lian Changchun

Inventor after: Lu Yanli

Inventor before: Ling Jun

Inventor before: Zhang Shuanqin

Inventor before: Yang Hui

Inventor before: Wang Yinlong

Inventor before: Lian Changchun

Inventor before: Lu Yanli

Inventor before: Pan Jialiang

COR Change of bibliographic data

Free format text: CORRECT: INVENTOR; FROM: LING JUN ZHANG SHUANQIN YANG HUI WANG YINLONG LIAN ZHANGCHUN LU YANLI PAN JIALIANG TO: LING JUN PAN JIALIANG YANG HUI ZHANG SHUANQIN WANG YINLONG LIAN ZHANGCHUN LU YANLI

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120425

Termination date: 20190507