CN101862200B - Rapid X-ray fluorescence CT method - Google Patents
Rapid X-ray fluorescence CT method Download PDFInfo
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- CN101862200B CN101862200B CN2010101719837A CN201010171983A CN101862200B CN 101862200 B CN101862200 B CN 101862200B CN 2010101719837 A CN2010101719837 A CN 2010101719837A CN 201010171983 A CN201010171983 A CN 201010171983A CN 101862200 B CN101862200 B CN 101862200B
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Abstract
The invention improves the data acquisition speed of traditional X-ray fluorescence CT. The technical scheme is to provide a rapid X-ray fluorescence CT method which comprises the following steps: using a large light spot to irradiate a sample and using an array fluorescence detector with a lead collimator to record fluorescence energy spectrum. Compared with the traditional X-ray fluorescence CT method, the data acquisition speed of the method is improved by times. The improved times of the data acquisition speed is equivalent to the increased times of the array cells of the array fluorescence detector. For example, for a 64x64 array fluorescence detector, the data acquisition speed can be improved by 64x64 times. The method can realize rapid and in-situ X-ray fluorescence CT experiments.
Description
Technical field
The present invention relates to a kind of x-ray imaging method, particularly a kind of rapid X-ray fluorescence CT method.
Background technology
XRF computer tomography (CT) method is the product that X ray CT and two kinds of technology of x-ray fluorescence analysis organically combine; It is a kind of Dynamic Non-Destruction Measurement; Through the measurement features XRF; Reconstruct the distributed in three dimensions image of non radioactive element (like calcium, ferrum etc.), the distribution of multiple element and need not carry out destructive slicing treatment in the measuring samples simultaneously to sample in sample interior.Main experimental facilities is as shown in Figure 1, mainly comprises monochromator 2, microbeam apparatus 3, two X ray intensity detectors 4, fluorescent probe 6, sample stage 5 (but rotatable translation) and data handling systems 9,10,11.
In traditional XRF CT method; Synchronizable optical 1 obtains unicolor X ray microbeam 13 after monochromator 2 and microbeam apparatus 3 monochromes are restrainted with limit; Microbeam 13 shine sample 5 ' on, the XRF of sample 5 in the microbeam irradiation process ' be inspired is 6 records of fluorescent probe, sample is along direction translation scan shown in arrow among Fig. 17 then; After the single pass process finishes; Sample rotates an angle (like 1 ° of each rotation) along direction shown in arrow among Fig. 18, and then the repeated translation scanning process, until scanning on whole 180 ° of circumference one time; We just obtain one group of XRF power spectrum 9 like this, are the data for projection 10 of XRF CT through separating the fluorescence intensity data that the XRF power spectrum obtains one group of certain element; According to data for projection, computer just can reconstruct the two-dimentional element distribution image 12 (gray value of image distributes corresponding with concentration of element) about detection plane according to the image reconstruction program 11 that designs at last.
In traditional XRF CT experiment, large-area fluorescent probe 6 is adopted in data acquisition, and the fluorescence intensity that detects is the integration of concentration of element along X ray incident direction (AB as shown in Figure 2), and data acquisition adopts scanning to add the method for rotating sample.Owing to adopt the mode of spot scan during data acquisition, a cover two dimension or three-dimensional experimental data be obtained and long time will be spent, limited the extensive use of this method.
Summary of the invention
The technical problem that the present invention will solve is to propose a kind of rapid X-ray fluorescence CT formation method, improves the acquisition speed of XRF CT.
The technical scheme that the present invention adopted provides a kind of rapid X-ray fluorescence CT method, comprising:
(1) monochromatic light is shone on the sample, said sample is inspired characteristic X-ray fluorescence simultaneously by translation and rotation;
(2) utilize fluorescent probe to gather said XRF, obtain the XRF power spectrum;
(3) resolve said XRF power spectrum, obtain the data for projection of XRF CT;
(4) utilize the X ray intensity detector to gather the data for projection of the transmission CT of said sample;
(5), reconstruct the element distribution image of said sample according to the data for projection of said XRF CT and the data for projection of said transmission CT.
Wherein, described monochromatic spot diameter is greater than the width of said sample; Described fluorescent probe is the array fluorescent probe that installs lead collimator additional.Said translation is that with said sample along said monochromatic incident direction translation once the distance of said translation is the wall thickness of said lead collimator.Said rotation is said sample to be wound perpendicular to the axle of said monochromatic incident direction and the line direction that gets into said lead collimator is each rotate 1 °, until scanning on whole 180 ° of circumference one time.Described fluorescent probe is 64 * 64 or 32 * 32 or the array fluorescent probe of other yuan number.Described array fluorescent probe is gathered perpendicular to all XRFs in the said lead collimator zone of said monochromatic incident direction.The data for projection of said transmission CT further comprises the data for projection of the transmission CT of each fluorescent energy section, calculates the absorptance of said sample to fluorescent X-ray, the self-absorption of modified chi ray.Described correction is to carry out along the line direction that gets into said lead collimator.The resolution of described element distribution image is by the horizontal opening decision of said lead collimator.Wherein, described lead collimator is the collimator of the square hole that is arranged in parallel, and the horizontal opening size of lead collimator promptly is the length of side of square hole, and the wall thickness of lead collimator and the length of side of square hole equate.
Advantage of the present invention comprises: shine sample with large spot, need not focus on or limit bundle to obtain microbeam to large spot, simplified experimental facilities; Adopt the array fluorescent probe that installs lead collimator additional to replace the large tracts of land fluorescent probe simultaneously,, can realize whole audience imaging, improved acquisition speed greatly through replacing point by point scanning step to sample along sample of incident illumination direction translation; The horizontal opening size decision of the lead collimator of the spatial resolution of the element distribution image that reconstructs before by detector, and the spatial resolution of traditional distribution diagram of element is by the cross section decision of launching spot; Because the method for data acquisition changes, what the correction that absorbs for X ray became is easier in addition.
Description of drawings
In conjunction with following specific descriptions and appended accompanying drawing to currently preferred embodiment, of the present invention these will be more readily understood with further feature and advantage, and wherein similar characteristic is with similar numeral, wherein:
Fig. 1 is traditional X-ray ray fluorescence CT experimental provision and process sketch map;
Fig. 2 is a traditional X-ray ray fluorescence CT data acquisition sketch map;
Fig. 3 is according to rapid X-ray fluorescence CT experimental provision of the present invention and data acquisition sketch map.
The specific embodiment
Provide the specific embodiment of the present invention below in conjunction with accompanying drawing 3.
In rapid X-ray fluorescence CT experiment of the present invention, adopt Experimental equipment as shown in Figure 3.Experimental facilities mainly comprises monochromator 20, two X ray intensity detectors 41 and 42, the array fluorescent probe 60 that installs lead collimator 14 additional, sample stage 50 and data handling systems 90,100,110.
Operation principle according to rapid X-ray fluorescence CT method of the present invention is following:
The present invention depicts the image that element distributes, its theoretical formula list of references GF Rust and J Weigelt.IEEE Trans.Nucl.Sci., 1998,45 (10): 75-88 according to recording data for projection.
According to rapid X-ray fluorescence CT method of the present invention, main operation comprises:
(1) synchronizable optical 10 obtains monochromatic large spot 130 after monochromator 20 monochromes, be radiated at sample 50 ' on, sample along the translation of incident illumination direction once, the direction of its translation is shown in the arrow among Fig. 3 70, the distance of its translation is the wall thickness of lead collimator; After scanning process finishes; Sample will wind the angle of axle rotation perpendicular to incident illumination and sample translation direction, and its direction is shown in the arrow among Fig. 3 80, and its each anglec of rotation is exemplified as 1 °; And then the repeated translation scanning process, until the scanning of accomplishing 180 ° of scopes.Sample 50 in the scanning process ' be inspired characteristic X-ray fluorescence.
(2) utilize the array fluorescent probe 60 that installs lead collimator 14 additional to gather above-mentioned XRF, obtain one group of XRF power spectrum 90.
(3) resolve above-mentioned XRF power spectrum 90, the fluorescence intensity data that obtains one group of certain element is the data for projection 100a of fluorescence CT.
(4) sample 50 ' preceding X ray intensity detector 41 be used to survey incide sample 50 ' on light intensity; Sample 50 ' after X ray intensity detector 42 be used to measure the data for projection 100b of transmission CT;
(5) with whole data for projection 100a, 100b imports computer, and computer just can reconstruct the two-dimentional element distribution image 120 about detection plane according to the image reconstruction program 110 that designs.
Wherein, the diameter of monochromatic large spot 130 greater than sample 50 ' width.
Wherein, also need the transmission projection data of each fluorescent energy section of extra measurement sometimes, be used for the absorptance of calculation sample, the self-absorption of modified chi ray fluorescent X-ray.Be that image reconstruction 110 further comprises the self-absorption of correction sample to said XRF.Described correction is to carry out along the line direction (shown in EF among Fig. 3) that gets in the said lead collimator.
Wherein, the resolution of element distribution image 120 is by the horizontal opening decision of said lead collimator 14.
Wherein, the array fluorescent probe is exemplified as 64 * 64.But should be appreciated that the array fluorescent probe of other yuan number all can be used for the present invention, for example 32 * 32.Detector unit is many more, and the multiple that picking rate improves is many more, but the price of array fluorescent probe is high more simultaneously.
The present invention adopts the array fluorescent probe 60 that installs lead collimator 14 additional to gather fluorescence signal; Have only along the fluorescent X-ray of lead collimator direction (EF among Fig. 3) and could be received by certain unit of detector, the signal that i unit as shown in Figure 3 collects is the integration of concentration of element along straight line EF.Wherein, the effect of lead collimator 14 is to limit the certain regional emitted fluorescence of sample to arrive the detector of corresponding array fluorescent probe 60, and stops other regional fluorescence to get into this detector unit.
Wherein, Owing to adopt the array fluorescent probe to gather fluorescence data, replace point by point scanning step through less scanning step to sample, promptly only need along sample of incident illumination direction translation; The distance of translation is the wall thickness of lead collimator; Can finish data acquisition at an angle, sample forwards next angle to and adopts identical method image data more then, up to image data on the circumference of 180 degree.
The present invention provides a kind of improvement project of experimental provision: owing to adopt large spot irradiation sample, omitted the microbeam apparatus of traditional X-ray ray fluorescence CT; Owing to adopt the array fluorescent probe that installs lead collimator additional, once can gather a plurality of data for projection, and conventional fluorescent CT once obtain a data for projection only.
The present invention provides a kind of improvement project of acquisition time: the array fluorescent probe can be gathered a plurality of projections at fixing projected angle next time; Quantity depends primarily on the number of detector unit, and conventional fluorescent CT then needs big or small per sample and the translation of launching spot size scans repeatedly; Acquisition speed of the present invention is compared and can be increased many times with traditional XRF CT method; The multiple that acquisition speed improves is suitable with the number of arrays of array fluorescent probe; For example can improve about 64 * 64 times, thereby realize quick, original position XRF CT experiment for one 64 * 64 array fluorescent probe acquisition speed.
The present invention provides a kind of improvement project of fluorescent absorption correction: because sample is to the absorption of X ray; In the process of image reconstruction, add the correction that sample absorbs X ray; Its concrete correction algorithm is referring to document J P Hogan, R A Gonsalves, A S Krieger.IEEE Trans.Nuc.Sci.; 1991,38:1721-1727; T Yuasa, M Akiba, T Takeda, et al.IEEE Trans.Nucl.Sci., 1997,44:54-62; Rust G-F and Weigelt J..IEEE Trans.Nucl.Sci.1998,45:75-88; C GSchroer.Appl.Phys.Lett., 2001,79 (12): 1912-1914.The fluorescence self-absorption correction of fluorescence CT method of the present invention (as for the Q point) only need be revised along the line direction (EF) in the entering lead collimator among Fig. 3 and get final product; And the fluorescent absorption correction of conventional fluorescent CT method (as for the P point) need be along all revising from the P point to the detector surface direction among Fig. 2; The process more complicated, and be easy to introduce error.
Above-described, be according to most preferred embodiment of the present invention, be not in order to limiting scope of the present invention, the above embodiment of the present invention can also be made various variations.Be that every simple, equivalence of doing according to the claims and the description of application of the present invention changes and modification, all fall into claim protection domain of the present invention.The present invention not technology contents of detailed description is those skilled in the art's a common practise.
Claims (8)
1. rapid X-ray fluorescence CT method comprises:
(1) monochromatic light is shone on the sample, said sample is inspired characteristic X-ray fluorescence simultaneously by translation and rotation;
(2) utilize fluorescent probe to gather said XRF, obtain the XRF power spectrum;
(3) resolve said XRF power spectrum, obtain the data for projection of XRF CT;
(4) utilize the X ray intensity detector to gather the data for projection of the transmission CT of said sample;
(5), reconstruct the element distribution image of said sample according to the data for projection of said XRF CT and the data for projection of said transmission CT;
It is characterized in that described monochromatic spot diameter is greater than the width of said sample; Described fluorescent probe is the array fluorescent probe that installs lead collimator additional.
2. rapid X-ray fluorescence CT method as claimed in claim 1 is characterized in that, said translation is that with said sample along said monochromatic incident direction translation once the distance of said translation is the wall thickness of said lead collimator.
3. rapid X-ray fluorescence CT method as claimed in claim 2 is characterized in that, said rotation is that said sample is wound perpendicular to 1 ° of the each rotation of the axle of said monochromatic incident direction, until the scanning of accomplishing 180 ° of scopes.
4. rapid X-ray fluorescence CT method as claimed in claim 1 is characterized in that, described fluorescent probe is 64 * 64 or 32 * 32 element array fluorescent probes.
5. rapid X-ray fluorescence CT method as claimed in claim 1 is characterized in that, described array fluorescent probe is gathered perpendicular to all XRFs in the said lead collimator zone of said monochromatic incident direction.
6. rapid X-ray fluorescence CT method as claimed in claim 1; It is characterized in that; The data for projection of said transmission CT further comprises the data for projection of the transmission CT of each fluorescent energy section, calculates the absorptance of said sample to fluorescent X-ray, the self-absorption of modified chi ray.
7. rapid X-ray fluorescence CT method as claimed in claim 6 is characterized in that, the self-absorption of described modified chi ray is to carry out along the line direction that gets into lead collimator.
8. rapid X-ray fluorescence CT method as claimed in claim 1 is characterized in that, the resolution of described element distribution image is by the horizontal opening decision of said lead collimator.
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| CN103767726B (en) * | 2014-02-25 | 2016-01-06 | 重庆大学 | A kind of quick super-resolution XRF CT imaging and reconfiguration system and method |
| JP6385591B2 (en) | 2015-04-07 | 2018-09-05 | シェンゼン・エクスペクトビジョン・テクノロジー・カンパニー・リミテッド | Semiconductor X-ray detector |
| CN107533145B (en) | 2015-04-07 | 2019-03-19 | 深圳帧观德芯科技有限公司 | The method for making Semiconductor X-Ray detector |
| SG11201707508PA (en) | 2015-04-07 | 2017-10-30 | Shenzhen Xpectvision Tech Co Ltd | Semiconductor x-ray detector |
| WO2016197338A1 (en) * | 2015-06-10 | 2016-12-15 | Shenzhen Xpectvision Technology Co.,Ltd. | A detector for x-ray fluorescence |
| WO2017004824A1 (en) | 2015-07-09 | 2017-01-12 | Shenzhen Xpectvision Technology Co., Ltd. | Methods of making semiconductor x-ray detector |
| US10705031B2 (en) | 2015-08-27 | 2020-07-07 | Shenzhen Xpectvision Technology Co., Ltd. | X-ray imaging with a detector capable of resolving photon energy |
| CN107923987B (en) | 2015-09-08 | 2020-05-15 | 深圳帧观德芯科技有限公司 | Method for producing an X-ray detector |
| CN105738393A (en) * | 2016-02-23 | 2016-07-06 | 国家再生有色金属橡塑材料质量监督检验中心（安徽） | Method for determining tin, antimony, arsenic, bismuth, copper, cadmium, calcium and silver in lead alloy through wavelength dispersion X-ray fluorescent spectrometry |
| CN105842267A (en) * | 2016-03-28 | 2016-08-10 | 重庆大学 | Non-synchrotron radiation micro-X-ray fluorescence CT imaging system and method |
| CN106066339B (en) * | 2016-06-21 | 2019-03-05 | 中国科学院深圳先进技术研究院 | A kind of X-ray cold light computed tomography experimental system and method |
| CN106198589B (en) * | 2016-06-23 | 2019-03-19 | 中国科学院高能物理研究所 | A kind of x-ray fluorescence CT equipment, data acquisition and image rebuilding method |
| CN106248705A (en) * | 2016-09-09 | 2016-12-21 | 重庆大学 | A kind of formation method mixing XRF CT and X-ray acoustic CT and system |
| CN107315019A (en) * | 2017-07-25 | 2017-11-03 | 清华大学 | Transmission of radiation and fluorescence CT imaging systems and imaging method |
| WO2019019041A1 (en) * | 2017-07-26 | 2019-01-31 | Shenzhen Xpectvision Technology Co., Ltd. | Methods of making and using an x-ray detector |
| CN111226137B (en) * | 2017-10-26 | 2023-07-14 | 深圳帧观德芯科技有限公司 | Detector for X-ray fluorescence |
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