CN101859976B - Preparation method of microporous liquid cooled non-deformation mirror - Google Patents
Preparation method of microporous liquid cooled non-deformation mirror Download PDFInfo
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- CN101859976B CN101859976B CN2010102013506A CN201010201350A CN101859976B CN 101859976 B CN101859976 B CN 101859976B CN 2010102013506 A CN2010102013506 A CN 2010102013506A CN 201010201350 A CN201010201350 A CN 201010201350A CN 101859976 B CN101859976 B CN 101859976B
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Abstract
The invention discloses a microporous liquid cooled non-deformation mirror and a preparation method thereof. Metal-based mixed powder is directly sintered on the back part of a mirror surface by adopting laser and a liquid flowing microporous layer is formed integrally, so that cooling liquid can flow in micropores of the liquid flowing microporous layer. Therefore, the mirror surface is cooled, and the temperature rise and deformation of the mirror surface can be reduced. Due to the adoption of the microporous liquid cooled non-deformation mirror and the preparation method thereof, the difficulty that a microporous liquid mirror cannot be welded integrally is overcome and the problem of insufficient heat exchange effect caused by cooling a non-deformation mirror by using a variety of liquid at present is solved at the same time. The microporous liquid cooled non-deformation mirror is prepared directly on the mirror surface by adopting a rapid forming method without subsequent welding; the method is simple; and the structure is controllable.
Description
Technical field
The invention belongs to laser optics resonant cavity field, be specifically related to a kind of liquid cooled non-deformation mirror and preparation method thereof, be mainly used in demanding high-energy laser optical resonator of high power density and face type and optical train.
Background technology
The laser optics resonant cavity causes mirror temperature inhomogeneous (as shown in Figure 1) because the absorption laser energy is inhomogeneous, causes the distortion of minute surface face type, causes the distortion of laser wave front, causes output beam quality and stability decreases.Along with laser power is more and more higher, this problem is more and more outstanding.Therefore, the inhomogeneous thermal deformation of minimizing minute surface is the key technology in the high power laser light technology.The main at present inhomogeneous heat distortion that reduces minute surface from three aspects: select suitable base material, make minute surface absorb under the same energy thermal deformation minimum; Be coated with high-reflecting film, reduce the absorption of minute surface laser; Adopt Active Cooling, reduce the temperature rise of minute surface.The selection of mirror body material is subject to physical property, optics processing characteristics and the mechanical performance of material, only adopts the single method of optimizing basis material can not satisfy the specific (special) requirements of superlaser to high light beam quality; The reflectivity that improves minute surface is very effective a kind of means, and reflectivity has reached 99.99% technological limits at present, but still can not solve the difficult problem that there is the minute surface distortion in growing high-energy laser; So, adopt the third method of initiatively cooling to become the hope that solves the superlaser surface deformation.
Adopt liquid cools (adopting water usually) is superpower laser active cooling scheme commonly used always, and liquid cooled non-deformation mirror has obtained extensive use.Conventional liquid cooled non-deformation mirror structure is made up of minute surface, liquid flow layer and mirror holder as shown in Figure 2.Minute surface and liquid flow layer link into an integrated entity by soldering or other methods of attachment.Minute surface absorbs heat under laser emission, cause whole mirror body temperature liter by heat conduction; Take away the heat that minute surface absorbs by heat conduction and thermal convection during liquid flow in the liquid flow layer, thereby suppress the mirror temperature rise, reduce thermal deformation.Mirror holder is that whole mirror provides support and pass in and out fluid passage.The heat exchange effect of liquid cooled non-deformation mirror is relevant with the planform of class of liquids, fluid flow and liquid flow layer.The physical property of the common liquid body of class of liquids and price limit, the kind that can adopt is limited, and liquid commonly used has water, heat conduction antifreezing and anti-rust liquid, and wherein water has obtained greatly using widely with inexpensive, thermal capacitance.Fluid flow is big, can obtain big Reynolds number, obtains being of value to the type of flow of heat exchange and big heat exchange coefficient.But big fluid flow can bring impact to minute surface, thereby brings additional deformation.So fluid flow has certain limitation in actual use.Therefore in the development of actual liquid cooling non-deformation mirror, suitable flow passage structure and shape are to improve the main method of liquid cooled non-deformation mirror heat exchange effect always.Suitable fluidized bed structure and shape in class of liquids and flow one timing, not only can obtain big heat exchange coefficient but also can improve heat exchange area, thereby increase the heat exchange effect, take away more heat, reduce the thermal deformation of minute surface.Be normally subject to processing conditions, the liquid flow path in the liquid flow layer is groove structure normally, groove be shaped as rectangle, column type and semicircle (as shown in Figure 2), groove is narrow more, the heat exchange effect is good more.At present, the liquid flow path of liquid cooled non-deformation mirror mostly is to adopt the method for machining to make.Because the restriction of machine work level, its width of channel is usually in the mm magnitude, the liquid cooled non-deformation mirror of this width is because raceway groove is wide, for high power laser light, for increasing heat exchange coefficient, the fluid flow that needs is big, thereby big flow liquid impacts to minute surface and makes minute surface generation blastic deformation; This kind liquid cooled non-deformation mirror is because heat exchange area is limited in addition, and the heat exchange effect is relatively poor, thereby does not reach instructions for use sometimes, particularly for more and more powerful laser.
The heat that adopts the fluid removal minute surface to be absorbed, thus temperature rise suppressed, reduce the minute surface inhomogeneous deformation thereby can effectively reduce the mirror temperature gradient.Now used liquid cooled non-deformation mirror is all based on this principle.The characteristic of the heat exchange effect of liquid cooled non-deformation mirror and temperature difference, mirror material, structure and fluid, flow etc. all have close ties.There are three kinds of methods can increase the heat exchange effect: to increase flow, increase heat exchange area, make fluid operating in turbulent condition.Increase flow owing to existing fluid to act on limited greatly to the minute surface impact.So people are seeking the method that increases heat exchange area and change fluid flow state always.Little groove and microporous liquid cooled non-deformation mirror are owing to exist minute yardstick effect, surface area/volume ratio and the moving additional heat exchange effect that causes of perturbation greatly, can strengthen the heat exchange effect greatly, thereby reduce the distortion of minute surface, so its efficient height, performance is better than conventional liq cooling non-deformation mirror.Therefore more and more come to have obtained high today to pay close attention to widely in laser power.
But little groove liquid cooled non-deformation mirror is owing to exist raceway groove and entity district, and the rigidity of mirror is inhomogeneous, thus after the processing particularly behind the plated film because the Stress Release minute surface produces inhomogeneous deformation.Adopt connection micropore technology then can avoid this defective, realize the good optical processing characteristics.
Adopt foam copper can make this microporous layers.But the welding of foam copper and minute surface then is an insoluble difficult problem.During soldering, the solder of fusing enters under the effect of capillary force in the micropore of foam copper, stops up the micropore of foam copper, thereby makes the liquid can't be unimpeded.
Summary of the invention
The object of the present invention is to provide a kind of microporous liquid cooled non-deformation mirror and preparation method thereof, adopt this method, can make indeformable microporous liquid cooled non-deformation mirror easily, the mirror that this method is made can be when the cooling liquid flow be less, rely on big heat exchange area and minute yardstick effect, increase the heat exchange effect, reduce minute surface temperature rise and distortion.
The concrete technical scheme that adopts is as follows:
A kind of manufacture method of microporous liquid cooled non-deformation mirror, be used for laser optics resonant cavity and optical train, by at the minute surface back side one-body molded liquid flow micropore layer, cooling liquid can be flowed in the micropore of this liquid flow micropore layer, thereby realize cooling to minute surface, reduce minute surface temperature rise and distortion, specifically comprise the steps:
(1) with the back side of minute surface as substrate, pre-plating layer of metal based powders mixture is as transition zone in this substrate;
(2) on above-mentioned transition zone, preset the described Metal Substrate mixture of powders of one deck, adopt laser that above-mentioned Metal Substrate mixture of powders is scanned, make low melting point powder smelting bonding high-melting-point powder wherein, sinter molding one deck microporous layers; On the microporous layers of above-mentioned moulding, repeatedly repeat above-mentioned presetting and scanning process again, thereby on transition zone, form the liquid flow micropore layer that multi-layer microporous layer constitutes;
(3) on aforesaid liquid flows microporous layers, mirror holder is installed, can be formed described microporous liquid cooled non-deformation mirror.
As a further improvement on the present invention, above-mentioned step (two) Metal Substrate mixture of powders is by at least two kinds of powder constituents that fusing point is different.
As a further improvement on the present invention, the coating method in the above-mentioned steps () can be heat spray degree, electrochemistry, magnetron sputtering or vacuum coating.
As a further improvement on the present invention, porosity, aperture and the shape of the intercommunicating pore in the described liquid flow micropore layer can be regulated by powder shape, composition, granularity or the proportioning of regulating the Metal Substrate mixture of powders.
The microporous liquid cooled non-deformation mirror that utilizes above-mentioned manufacture method to make, comprise minute surface, transition zone, liquid flow micropore layer and mirror holder, wherein minute surface, transition zone and liquid flow micropore layer fix as one, and during work, minute surface is towards laser irradiation region, absorbing the heat temperature raises, cooling liquid by heat exchange, is taken away the heat that minute surface absorbs by the mobile microporous layers of the inlet opening influent on the mirror holder, thereby reduce the minute surface temperature rise, suppress distortion.
A kind of microporous liquid cooled non-deformation mirror manufacture method provided by the invention, it comprises minute surface, is communicated with micropore liquid cools layer and mirror holder; The minute surface of mirror is communicated with micropore liquid cools layer at the laser irradiation region back side towards laser irradiation region, on the mirror holder water nozzle can be installed, so that water inlet and water outlet.Connection micropore liquid cools layer of the present invention is the rapid shaping thought of making according to layering, according to required geometry, at the back side of minute surface, by the laser scanning metal dust, is layering, and obtains required micropore liquid cools layer.Because there is hole in laser sintered metal dust, thereby produce the micropore that is communicated with.When cooling liquid such as water flow through these micropores, because surface area is very big, thereby heat exchange area was very big; Because the size of intercommunicating pore is minimum, thereby can produce big minute yardstick effect and turbulent effect under the certain flow, heat exchange coefficient is increased.Take away more heat, reduce the minute surface thermal deformation.
With respect to little groove liquid cooled non-deformation mirror that little groove processing technologies such as line cutting are made, the microporous layers that method provided by the invention is made is evenly distributed owing to micropore, thereby mirror body rigid uniform, can not produce uneven distortion behind the polishing plated film; And the pore size that the present invention makes is littler, the simpler more aspect of heat exchange better effects if, manufacture craft.
With respect to the microporous liquid cooled non-deformation mirror that foam copper is made, the present invention has saved soldering processes because minute surface and microporous layers directly are made into one, thereby has avoided the solder of fusing to enter micropore under the effect of capillary force, blocking microporous trouble.
Description of drawings
Fig. 1 is because the inhomogeneous minute surface distortion schematic diagram that causes of mirror temperature;
Fig. 2 is a conventional liq cooling non-deformation mirror structure;
Fig. 3 is the structure of integrated microporous liquid cooled non-deformation mirror;
Fig. 4 is the manufacture method flow chart of integrated microporous liquid cooled non-deformation mirror.
Embodiment
The present invention is further detailed explanation with concrete embodiment below in conjunction with accompanying drawing.
Under laser irradiation, minute surface is owing to absorb heat, and cause temperature rise and expand, owing to exist temperature gradient, distortion to be obstructed, thus produce surface deformation.If the non-irradiated site at laser adopts water-cooled to lead away heat, then can reduce and even eliminate whole mirror body temperature degree gradient, thereby suppress the distortion of minute surface face type.Fluid heat exchange effect is relevant with flow size, groove structure, heat exchange area and flow regime, if increase heat exchange area and change flow regime, then can improve the heat exchange effect greatly, thereby adopts low discharge also can obtain good heat exchange.It is big to be communicated with micropore specific area, have the minute yardstick effect, thereby the heat exchange effect is fine.But how to make microporous liquid cooled non-deformation mirror and also do not have good method.
The present invention adopts advanced rapid shaping technique, adopts laser direct sintering Metal Substrate powder in the minute surface substrate, owing to there is micropore, and micropore communicates, thereby being made into one microporous liquid cooled non-deformation mirror easily.
As shown in Figure 3, microporous liquid cooled non-deformation mirror provided by the invention comprises minute surface 1, transition zone 2, liquid flow micropore layer 3 and mirror holder 4 four parts.Wherein minute surface 1, transition zone 2 and liquid flow micropore layer 3 are an integral body.During work, minute surface 1 raises owing to absorb the heat temperature towards laser irradiation region.Cooling liquid such as water by heat exchange, are taken away the heat that minute surface absorbs by the mobile microporous layers 3 of the inlet opening influent on the mirror holder 4, thereby reduce the minute surface temperature rise, suppress distortion.
As shown in Figure 3, to adopt the back side of minute surface 1 be substrate in the present invention.At first the Metal Substrate mixture of powders that the about 0.1mm of pre-plating one layer thickness is thick in substrate is as transition zone 2.This Metal Substrate powder is by at least two kinds of powder constituents that fusing point is different.Usually the high-melting-point powder is the good powder of thermal conductivity such as metal, as Cu, Fe, stainless steel, A1 etc.; The low melting point powder is toner, low-melting-point metal, low-melting-point metal compound normally, as powder such as Cu alloy, nylon, Sn, Pb.Coating method can be methods such as heat spray degree, electrochemistry, magnetron sputtering, vacuum coating.
As shown in Figure 4, preset the thick Metal Substrate mixture of powders of 0.01-0.5mm on transition zone 2, adopting power then is 10W-3000W, and sweep speed is the laser scanning Metal Substrate mixture of powders of 10mm/s-1000mm/s; Owing to absorbed laser energy, the temperature of laser irradiation region mixed-powder raises, and when laser power density was enough big, the low melting point powder smelting in the mixed-powder became liquid; After laser is removed, thereby these liquid solidify bonding high-melting-point powder.
Repeat this process, be layering, because the mixed-powder density that presets is limited and the fusing or the vaporization of low melting point powder, the 3D solid of sinter molding is formed liquid flow micropore layer 3 by intercommunicating pore 5 and entity 6.These intercommunicating pores 5 can allow cooling liquid flow therein.The characterisitic parameter of intercommunicating pore 5: porosity, aperture and shape can be regulated by shape, composition, granularity and the proportioning of regulating mixed-powder.Since the granularity of mixed-powder usually several microns to tens of micron dimensions, thereby the aperture of the intercommunicating pore 5 that forms also usually at several microns to tens of micron dimensions, promptly so-called micropore.These intercommunicating pores 5 are owing to exist the minute yardstick effect, thereby mirror has better heat exchange property under certain fluid flow, can take away more thermal energy.Since liquid flow micropore layer 3 be directly on minute surface sintering form, so liquid flow micropore layer 3 and minute surface 1 be an integral body, need not following process such as soldering.
After forming above-mentioned metal connection microporous layers 3, mirror holder is installed again can be formed microporous liquid cooled non-deformation mirror of the present invention.
Claims (3)
1. the manufacture method of a microporous liquid cooled non-deformation mirror, by at minute surface (1) back side one-body molded liquid flow micropore layer (3), cooling liquid can be flowed in the micropore of this liquid flow micropore layer (3), thereby realize cooling to minute surface (1), reduce the temperature rise and the distortion of minute surface (1), specifically comprise the steps:
(1) with the back side of minute surface (1) as substrate, pre-plating layer of metal based powders mixture is as transition zone (2) in this substrate;
(2) on above-mentioned transition zone (2), preset the described Metal Substrate mixture of powders of one deck, this Metal Substrate mixture of powders is by at least two kinds of powder constituents that fusing point is different, adopt laser that above-mentioned Metal Substrate mixture of powders is scanned, make low melting point powder smelting bonding high-melting-point powder wherein, sinter molding one deck microporous layers; On the microporous layers of above-mentioned moulding, repeatedly repeat above-mentioned presetting and scanning process again, thereby go up the liquid flow micropore layer (3) that forms multi-layer microporous layer formation at transition zone (2);
(3) go up installation mirror holder (4) in the mobile microporous layers (3) of aforesaid liquid, can form described microporous liquid cooled non-deformation mirror.
2. manufacture method according to claim 1 is characterized in that, the coating method in the above-mentioned steps () is thermal spray, electrochemistry, magnetron sputtering or vacuum coating.
3. manufacture method according to claim 1 and 2, it is characterized in that porosity, aperture and the shape of the intercommunicating pore (5) in the described liquid flow micropore layer (3) can be regulated by powder shape, composition, granularity or the proportioning of regulating the Metal Substrate mixture of powders.
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| DE102012201221B4 (en) * | 2012-01-27 | 2022-03-03 | Carl Zeiss Smt Gmbh | Optical mirror assembly for beam guidance and mirror temperature control device with such a mirror assembly |
| CN102856779A (en) * | 2012-09-10 | 2013-01-02 | 华中科技大学 | Microporous metal cooling mirror and production method thereof |
| CN103050869B (en) * | 2012-12-18 | 2014-12-17 | 华中科技大学 | Micro-pore cooling mirror with mirror surface of non-equal thickness |
| CN105022162B (en) * | 2015-07-27 | 2017-11-10 | 宁波大学 | A kind of water cooling piezoelectric deforming mirror |
| CN107831583A (en) * | 2017-12-19 | 2018-03-23 | 中国科学院光电技术研究所 | A kind of high-power laser mirror of preprocessing |
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| US7310360B2 (en) * | 2004-10-25 | 2007-12-18 | The Boeing Company | Apparatus and method for face cooling of optical components of a laser system |
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| CN1963568A (en) * | 2006-11-10 | 2007-05-16 | 北京礴德恒激光科技有限公司 | A water-cooled metal reflector |
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