CN101858874B - Microbeam proton fluorescence spectrometer - Google Patents

Microbeam proton fluorescence spectrometer Download PDF

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CN101858874B
CN101858874B CN 201010180956 CN201010180956A CN101858874B CN 101858874 B CN101858874 B CN 101858874B CN 201010180956 CN201010180956 CN 201010180956 CN 201010180956 A CN201010180956 A CN 201010180956A CN 101858874 B CN101858874 B CN 101858874B
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proton
capillary
converger
optical
fluorescence spectrometer
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CN 201010180956
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CN101858874A (en
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刘志国
孙天希
李玉德
林晓燕
滕玥鹏
潘秋丽
王广甫
罗萍
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北京师范大学
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Abstract

The invention discloses a microbeam proton fluorescence spectrometer, which comprises a proton accelerator (4), a proton convergence component and a detector (6), wherein the proton accelerator (4) is used for emitting protons, the proton convergence component is used for converging protons emitted by the proton accelerator (4), and the detector (6) is used for receiving the fluorescence excited from the protons; the proton convergence component is a capillary optical converger (1); and the capillary optical converger (1) at least comprises a single capillary (2). The fluorescence spectrometer converges protons by using the capillary optical converger (1); and the capillary optical converger (1) is made of glass capillaries, and does not need to be supported by a bracket. Thus, the invention has the advantages of simple structure and low cost, thereby realizing proton convergence in a simple, economical and practical way. In addition, the invention simplifies the structure of the fluorescence spectrometer and lowers the production and use cost of the fluorescence spectrometer.

Description

微束质子荧光谱仪 Proton microbeam fluorescence spectrometer

技术领域 FIELD

[0001] 本发明涉及质子荧光分析技术领域,特别涉及一种对样品进行微区质子荧光分析的微束质子荧光谱仪。 [0001] The present invention relates to the field of fluorescence analysis of the proton, the proton beam in particular relates to a micro sample fluorescence spectrometer kind of micro proton fluorescence analysis.

背景技术 Background technique

[0002] 质子荧光技术是利用质子束激发样品中原子的特征X射线,然后通过分析此特征X射线而得到样品的元素组成等信息,由于质子荧光技术的探测限较低,所以该技术具有广泛的应用。 [0002] Fluorescence techniques are proton proton beam excites the characteristic X-ray sample atoms, an information element is then obtained by analyzing the composition of the sample, etc. This characteristic X-ray, due to the lower fluorescence detection limits of the proton, so this technique has wide Applications. 随着人们对样品分析要求的不断提高,微束质子荧光技术备受关注,因为微束质子突光技术可以对样品进行ニ维质子突光微区扫描分析。 As people continue to increase the required sample analysis, proton microbeam fluorescence concern, because the proton microbeam technology projection optical scanning analysis of samples Ni-dimensional micro optical projection proton. 在发展微束质子突光技术中,如何使质子会聚,是首先需要解决的问题。 In the development of proton microbeam light projection technique, how to make converge the proton, it is the first problem to be solved.

[0003] 由于质子是带有正电荷的带电粒子,当其在磁场中运动时,会受到磁场カ的作用而改变运动方向。 [0003] Since the protons are charged particles having a positive charge, which, when moving in a magnetic field, the magnetic field will be changed ka action of the direction of movement. 根据质子的上述特性,在ー种典型的质子会聚技术中,利用电磁会聚系统对质子束进行会聚,通过调节电磁会聚系统提供的电磁力的大小和方向,使通过电磁会聚系统的质子会聚成微束。 According to the characteristics of the proton, the ー typical proton convergence technique, using an electromagnetic convergence system for proton beam converged by adjusting the magnitude and direction of the electromagnetic force of the electromagnetic convergence system provided that converge into by proton magnetic convergence system Micro bundle. 但是,由于电磁会聚系统的结构较为繁锁,使得使用电磁会聚系统的微束质子荧光谱仪的结构较为复杂;并且,电磁会聚系统的成本较高,价格较为昂贵,从而使得微束质子荧光谱仪的成本较高。 However, since the structure of the electromagnetic convergence system is more cumbersome, so that the proton beam micro condensing fluorescence using an electromagnetic spectrometer system more complex structure; and, the costly electromagnetic convergence system, more expensive, so that the proton microbeam fluorescence spectrometer higher cost.

[0004] 因此,如何简化微束质子荧光谱仪的结构,并且降低其生产和使用成本,就成为本领域技术人员亟须解决的问题。 [0004] Therefore, how to simplify fluorescence spectrometer proton microbeam structure, and reduce the cost of their production and use, it becomes a problem to those skilled in urgent need to resolve.

发明内容 SUMMARY

[0005] 本发明的目的是提供一种微束质子荧光谱仪,其结构较为简单,且生产和使用的成本较低。 [0005] The object of the present invention is to provide a proton microbeam fluorescence spectrometer of simple structure and low cost of production and use.

[0006] 为解决上述技术问题,本发明提供一种微束质子荧光谱仪,包括:用于发射质子的质子加速器、用于将所述质子加速器发射出的质子会聚的质子会聚部件,以及用于接收所述质子激发出的荧光的探測器,所述质子会聚部件为毛细管光学会聚器,所述毛细管光学会聚器包括至少ー根单毛细管。 [0006] To solve the above problems, the present invention provides a proton microbeam fluorescence spectrometer, comprising: a proton accelerator emitting protons, protons for converging the proton accelerator member proton emitted converging, and for receiving the fluorescent probe is excited protons, the proton converging optical convergence means is a capillary, said capillary tube comprises at least a converging optical ー capillary filaments.

[0007] 优选地,所述毛细管光学会聚器包括多根单毛细管。 [0007] Preferably, the capillary optical converger comprises a plurality of individual capillaries.

[0008] 优选地,所述毛细管光学会聚器包括20万-60万根单毛细管。 [0008] Preferably, the capillary optical converger comprises a single 200,000 -60 ten thousand capillaries.

[0009] 优选地,所述单毛细管的截面形状为圆形。 Cross-sectional shape [0009] Preferably, the single capillary tube is circular.

[0010] 优选地,所述毛细管光学会聚器垂直于其中心轴线方向的截面边缘上的各所述单毛细管的中心点连线的形状为正六边形。 [0010] Preferably, the capillary optical converger perpendicular to its center point of each of the electric wires of the capillary cross-sectional shape of the edge on the central axis of the regular hexagon.

[0011] 优选地,所述毛细管光学会聚器的进ロ截面的尺寸和其出口截面的尺寸,均小于所述毛细管光学会聚器除进ロ截面和出口截面以外的截面的尺寸。 [0011] Preferably, the inlet capillary optical converger ro-sectional size and the size of the outlet cross-section, is less than the capillary into other optical converger ro-sectional dimensions than the cross-section and an outlet section.

[0012] 优选地,所述毛细管光学会聚器为回转体,且其母线为预定函数。 [0012] Preferably, the capillary optical converger is a rotary body, and which is a predetermined function of the bus.

[0013] 优选地,所述进ロ截面的尺寸与所述出口截面的尺寸相等。 [0013] Preferably, the intake ro-sectional dimension equal to the outlet cross-sectional dimensions.

[0014] 本发明所提供的微束质子荧光谱仪,包括用于令质子加速并将加速后的质子发射出去的质子加速器,质子经过质子加速器以后进入质子会聚部件,并通过质子会聚部件会聚成质子束,质子束形成微焦斑并打在被测样品上,从而激发被测样品发出荧光,荧光进入位于样品之后的探測器,上述质子会聚部件为毛细管光学会聚器,且该毛细管光学会聚器包括至少ー根单毛细管。 [0014] Micro proton fluorescence spectrometer according to the present invention is provided, comprising instructions for causing a proton accelerator and the accelerated protons emitted proton accelerators, proton proton accelerator through subsequent proton enters the converging member, the converging member converging by proton and protons beam, proton beam forming micro-focus and hit the sample under test to excite the test sample to fluoresce, the fluorescence entering the detector located in the sample after the proton converging optical concentrator member is a capillary, and the capillary tube comprising the optical converger at least ー capillary filaments. 质子束从质子加速器射出之后,以适当的角度进入毛细管光学会聚器,在毛细管光学会聚器中,质子束在毛细管内壁上发生反射,经过若干次反射之后,质子束射出毛细管光学会聚器,并会聚得到微焦斑,从而实现质子会聚的目的。 After the proton beam from the proton accelerator is emitted, at an appropriate angle into the capillary of the optical concentrator, the optical converging in the capillary vessel, proton beam reflection occurs on the inner wall of the capillary, after several reflections, the proton beam is emitted capillary optical converger and converges to obtain micro-focus, in order to achieve the purpose of converging a proton. 该微束质子荧光谱仪通过毛细管光学会聚器对质子进行会聚,毛细管光学会聚器由玻璃毛细管构成, 且不需大型支架支撑,结构简单,且成本较低,从而实现了简单、经济、实用地对质子进行会聚,并且简化了微束质子荧光谱仪的结构,降低了微束质子荧光谱仪的生产和使用成本。 The proton microbeam fluorescence spectrometer by a capillary condensing optical converger proton, capillary optical converger constituted by glass capillary, and does not require large supporting bracket, simple structure and low cost, thereby achieving a simple, economical and practical manner of converging the proton, proton beam and simplifies the micro-structure of the fluorescent spectrometer, proton microbeam reduced fluorescence spectrometer and production cost.

[0015] 在一种优选的实施方式中,所述毛细管光学会聚器包括20万-60万根单毛细管, 从理论上来讲,毛细管光学会聚器中所包括的单毛细管的数量越多,同一时间内经过其会聚的质子的数量越多,从而显著提高了微束质子荧光谱仪会聚质子的效率。 [0015] In one preferred embodiment, the capillary comprises a converging optical 200,000 -60 ten thousand single capillary, in theory, the more the number of individual capillaries of the capillary optical converger included, at the same time the more the number of converged through protons, thereby significantly improving the efficiency of proton microbeam fluorescence spectrometer converging protons.

[0016] 在另ー种优选的实施方式中,所述毛细管光学会聚器垂直于其中心轴线方向的截面的形状为正六边形,也即多根单毛细管在排列组合呈毛细管光学会聚器时,其横截面排列成正六边形的结构,以便在单毛细管的数量确定的情况,使得毛细管光学会聚器所占的空间较小,从而进一步紧凑了本发明所提供的微束质子荧光谱仪的结构。 Cross-sectional shape [0016] In another embodiment, preferred species ー in the converging direction of the optical axis of the capillary tube is perpendicular to its center of a regular hexagon, i.e., a plurality of single capillaries were arranged in capillary optical converger combination, the its cross section arranged in a regular hexagonal configuration, so that in the case of determining the number of single capillary, the capillary optical converger less space occupied, thereby further compact the proton microbeam fluorescence spectrometer according to the present invention provides a structure.

附图说明 BRIEF DESCRIPTION

[0017]图I为本发明所提供微束质子荧光谱仪ー种具体实施方式的结构示意图; [0017] Figure I a schematic view of a microstructure provided by the present proton fluorescence spectrometer ー species specific embodiment of the invention, the beam;

[0018] 图2为本发明所提供的毛细管光学会聚器ー种具体实施方式的结构示意图; [0018] FIG 2 present invention provides a capillary structure diagram of an optical converger ー species specific embodiments;

[0019] 图3为图2所示毛细管光学会聚器垂直于其中心线方向的截面视图。 [0019] FIG. 3 is a vertical sectional view of a capillary to its centerline direction shown in FIG. 2 optical converger.

具体实施方式 Detailed ways

[0020] 本发明的核心是提供一种微束质子荧光谱仪,其结构较为简单,且生产和使用的成本较低。 [0020] The core of the invention is to provide a proton microbeam fluorescence spectrometer of simple structure and low cost of production and use.

[0021] 为了使本技术领域的人员更好地理解本发明的技术方案,下面结合附图和具体实施方式对本发明作进ー步的详细说明。 [0021] In order to make those skilled in the art better understand the technical solution of the present invention, the following drawings and detailed description of the embodiments in conjunction with the present invention will be described in detail ー feed step.

[0022] 请參考图1,图I为本发明所提供微束质子荧光谱仪具体实施方式的结构示意图。 [0022] Please refer to FIG 1, FIG I protons present microbeam fluorescence provides structural diagram showing a specific embodiment of the invention spectrometer.

[0023] 在ー种具体实施方式中,本发明所提供的微束质子荧光谱仪包括用于令质子加速并将加速后的质子发射出去的质子加速器4,质子经过质子加速器4以后进入质子会聚部件,并通过质子会聚部件会聚成质子束,质子束形成微焦斑并打在被测样品5上,从而激发被测样品5发出特征荧光,特征荧光进入位于样品之后的探測器6,上述质子会聚部件为毛细管光学会聚器1,该毛细管光学会聚器I包括至少ー根单毛细管2。 [0023] In particular embodiments ー species, proton microbeam fluorescence spectrometer according to the present invention include proton accelerator for accelerating protons proton order to accelerate the emitted and 4, 4 protons through the proton accelerator after entering the converging member proton and converging means to converge by proton proton beam, proton beam forming micro-focus and hit the test sample 5, the test sample to stimulate 5 emit characteristic fluorescence, wherein the fluorescence detector 6 is positioned into the sample after the convergence proton a converging optical member is a capillary 1, which capillary optical converger I comprises at least 2 ー monofilament capillaries.

[0024] 需要指出的是,本领域的技术人员应该知道,上述被测样品5上被激发出的荧光为X射线荧光。 [0024] It should be noted that those skilled in the art will appreciate that, said test sample 5 is excited to a fluorescent X-ray fluorescence.

[0025] 上述毛细管光学会聚器I主要由适当长度的玻璃管构成,高速质子在进入细长的玻璃管中后会发生若干次的反射,从而实现质子的会聚。 [0025] The capillary optical converger I consists essentially of a glass tube of appropriate length, high-speed proton reflection occurs several times after entering the elongated glass tube in order to achieve convergence of protons. 毛细管光学会聚器I中的细长玻璃管的长度和直径应根据实际使用的要求和装置的适用性等因素确定,在此不做限定。 Capillary optical converger I elongate length and diameter of the glass tube should be determined according to requirements and suitability apparatus actually used factor, which is not defined.

[0026] 当质子束从质子加速器4射出之后,以某ー适当的角度进入毛细管光学会聚器1,在毛细管光学会聚器I中,质子束在毛细管内壁上发生反射,经过若干次反射之后,质子束射出毛细管光学会聚器1,并会聚得到微焦斑,从而实现质子会聚的目的,微焦斑打到被测样品5上,从而激发出特征X射线荧光,激发出的荧光进入探測器6,从而实现对被测物体5 的荧光分析。 [0026] When the proton beam is emitted from the proton accelerator after 4 to a suitable angle into the capillary ー optical converger 1, the capillary optical converger I, the proton beam is reflected on the inner wall of the capillary, after several reflections, protons the optical beam emitted from the capillary converger 1, and the micro-focus converging to give, in order to achieve the purpose of converging a proton, micro-focus hit test sample 5, so that the characteristic X-ray fluorescence excitation, the excited fluorescence into the detector 6, fluorescence analysis thereby to achieve the object 5. 该微束质子荧光谱仪通过毛细管光学会聚器I对质子进行会聚,毛细管光学会聚器I由玻璃毛细管构成,且不需大型支架支撑,结构简単,且成本较低,从而实现了简单、经济、实用地对质子进行会聚,并且简化了微束质子荧光谱仪的结构,降低了微束质子荧光谱仪的生产和使用成本。 I is the proton microbeam fluorescence spectrometer by a capillary condensing optical converger proton, I capillary optic converger constituted by glass capillary, and does not require large supporting bracket, radiolabeling simple structure, and low cost, thereby achieving a simple, economical, condenses practically proton, proton beam and simplifies the micro-structure of the fluorescent spectrometer, proton microbeam reduced fluorescence spectrometer and production cost.

[0027] 还可以对本发明所提供的荧光谱仪进行进ー步的改进。 [0027] can also be modified into step ー fluorescence spectrometer according to the present invention is provided.

[0028] 请參考图2和图3,图2为本发明所提供的毛细管光学会聚器ー种具体实施方式的结构示意图;图3为图2所示毛细管光学会聚器垂直于其中心线方向的截面视图。 [0028] Please refer to FIG. 2 and FIG. 3, a schematic view of the structure of the capillary optical converger provided ー species specific embodiment of the present invention, FIG. 2; FIG. 3 is shown a capillary optical converger direction perpendicular to the center line sectional view.

[0029] 在ー种具体实施方式中,本发明所提供的毛细管光学会聚器I可以包括多根单毛细管2。 [0029] In particular embodiments ー species, the present invention provides an optical converger I capillary may include a plurality of individual capillaries 2. 显然地,相对于单毛细管来讲,多根单毛细管2的结合体能够显著提高毛细管光学会聚器I会聚质子的效率。 Obviously, with respect to the single capillary in terms of a combination of a plurality of individual capillaries 2 can significantly improve the efficiency of the capillary condensing optical converger I protons.

[0030] 具体地,所述毛细管光学会聚器I可以包括20万-60万根单毛细管2,从理论上来讲,毛细管光学会聚器I中所包括的单毛细管2的数量越多,同一时间内经过其会聚的质子的数量越多,从而能够显著提高荧光谱仪质子会聚的效率;但是,由于技术和空间有限,20 万至60万根单毛细管2既能够满足使用要求,又能够会聚足够多的质子,从而保证了毛细管光学会聚器I具有较高的会聚效率。 [0030] In particular, the capillary tube may comprise optical converger I 200 000 -60 ten thousand single capillary 2, theoretically, the greater the number of single capillaries capillary optical converger 2 I included, in the same time after which the number of the converging protons, thereby remarkably improved fluorescence spectrometer proton condensing efficiency; however, due to the limited and space, from 200,000 to 600,000 single capillaries 2 may be able to meet the requirements, and can be condensed enough proton, thus ensuring the capillary optical converger I have a high condensing efficiency.

[0031 ] 上述毛细管光学会聚器I中包括的单毛细管2的数量也不局限于20万至60万根, 其具体数量应根据实际使用情况等诸多因素确定,其具体数量不应受到本说明书具体实施方式的限定。 [0031] The number of individual capillaries of the capillary tube 2 optical converger I included not limited to 200,000 to 600,000, the specific amount to be determined based on several factors like the actual use, the specific amount of this specification should not be particularly defined embodiments.

[0032] 上述单毛细管2的截面形状可以为圆形,以便保证质子束在单毛细管2中的反射进行的较为顺利。 [0032] The sectional shape of the single capillary tube 2 may be circular, in order to ensure the proton beam in a single reflection of the capillary 2 more smoothly performed.

[0033] 上述毛细管光学会聚器I垂直于其中心轴线方向的截面的形状为正六边形,由于毛细管光学会聚器I是由若干根单毛细管2排列而成的,则上述毛细管光学会聚器I在垂直于其中心轴线方向上的截面形状,是由组成该截面的若干单毛细管2的截面组合而成的,上述单毛细管2的截面形状为圆形,则显然的,在数目一定的情况下,若干的圆形排列组合后,形成ー个正六边形能够使该截面具有最小的面积,以便在单毛细管的数量确定的情况,使得毛细管光学会聚器所占的空间最小,从而进一步紧凑了本发明所提供的荧光谱仪的结构。 [0033] The cross-sectional shape perpendicular to the central axis of the capillary tube to its optical converger I regular hexagon, since I is an optical arrangement capillary converger 2 by a plurality of filaments made of a capillary, the capillary tube is in optical converger I cross-sectional shape in the axial direction perpendicular to its center, 2 is a cross section of the section composed of a plurality of single-capillary combination, a single sectional shape of the capillary tube 2 is circular, it is clear that, in the case where a certain number, after the combination of several circular arrangement formed ー hexagons enables the cross-section having a minimum area in order to determine where the number of single capillaries so as to minimize the space occupied by the capillaries of the optical concentrator, the present invention further compact of fluorescence spectrometer provided.

[0034] 上述毛细管光学会聚器I的进ロ截面11的尺寸和其出口截面12的尺寸,均小于所述毛细管光学会聚器I除进ロ截面11和出ロ截面12以外的截面的尺寸,以便提高毛细管光学会聚器I的质子会聚范围。 [0034] ro-sectional dimensions of the capillary tube into an optical concentrator 11 and I is the size of the outlet section 12 are smaller than the capillaries into the other optical converger I ro ro-section 11 and the cross-sectional dimensions than the cross-section 12, so that proton improve the convergence range of capillary optical converger I.

[0035] 所述毛细管光学会聚器I可以为回转体,且其母线为预定函数。 [0035] The capillary optical converger I may be a rotating body, and whose generatrix is ​​a predetermined function. 上述预定函数可以近似为空间椭球二次曲线段、椭球二次曲线段的组合或椭球二次曲线段与直线段的组合,且其径向变化对于透镜的中心轴线是対称的,从而能够实现多毛细管光学会聚器件在较大角度范围内会聚发散的质子,并将发散的质子会聚成微焦斑。 The predetermined function can be approximated by the quadratic curve segment spatial ellipsoid, an ellipsoid, or a combination of conic section and straight segments conic section ellipsoid, and changes radially to the central axis of the lens is known Dui so polycapillary optical convergence can be achieved within a large angular range devices proton converging diverging, converging and diverging into a proton micro-focus.

[0036] 上述进ロ截面11的尺寸可以与出口截面12的尺寸相等。 [0036] ro-sectional dimension of the inlet 11 may be equal to the size of the outlet section 12. 具体地,本发明所提供的毛细管光学会聚器I的各几何參量可以如图2中所示,入口焦距表示质子加速器4距离毛细管光学会聚器I入口端的距离;出ロ焦距f2表示毛细管光学会聚器I出ロ端到其焦斑处的距离山表示毛细管光学会聚器I的长度;Din表示毛细管光学会聚器I的入口截面尺寸! Geometrical parameters of the capillary optical converger I Specifically, the present invention is provided may be as shown in Figure 2, the inlet focal length represents a distance proton accelerator 4 from the capillary optical converger I inlet end; a ro focal length f2 denotes capillary optical converger Mount the distance ro I end thereof at the focal spot of the optical converger I indicates a capillary length; Din represents an inlet cross-sectional dimension of the capillary optical converger I! Drat表不毛细管光学会聚器I的出ロ截面尺寸;Dmax表不毛细管光学会聚器I的最大尺寸,上述Din与Drat可以相等,并且均小于D_。 Drat table is not a capillary ro-sectional size of the optical concentrator is I; Dmax table is not the maximum size of the optical concentrator capillary I, said Drat Din and may be equal, and less than D_.

[0037] 以上对本发明所提供的微束质子荧光谱仪进行了详细介绍。 [0037] The foregoing proton microbeam fluorescence spectrometer provided by the present invention in detail. 本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。 Herein through specific examples and embodiments of the principles of the present invention are set forth in the above described embodiments are only used to help understand the method and core idea of ​​the present invention. 应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。 It should be noted that those of ordinary skill in the art, in the present invention without departing from the principles of the premise, may also be a number of modifications and improvements of the present invention, and these improvements and modifications also fall within the scope of the claims of the invention.

6 6

Claims (5)

1. 一种微束质子荧光谱仪,包括:用于发射质子的质子加速器(4)、用于将所述质子加速器(4)发射出的质子会聚的质子会聚部件,以及用于接收所述质子激发出的荧光的探測器(6),其特征在于,所述质子会聚部件为毛细管光学会聚器(I),所述毛细管光学会聚器(I)包括至少ー根单毛细管(2),所述单毛细管(2)的截面形状为圆形,所述毛细管光学会聚器(I)的进ロ截面(11)的尺寸和其出口截面(12)的尺寸,均小于所述毛细管光学会聚器⑴除进ロ截面(11)和出口截面(12)以外的截面的尺寸。 A proton microbeam fluorescence spectrometer, comprising: a proton accelerator for proton emission (4), for the proton-proton accelerator (4) emitted proton converging member converging, and for receiving the proton excited fluorescence detector (6), characterized in that the proton converging optical concentrator is a capillary member (I), the capillary optical converger (I) comprises at least ー monofilament capillaries (2), the size single capillary (2) having a circular cross-section, of the capillary optical converger (I) into a ro-section (11) and its outlet cross-sectional dimension (12) less than the capillary optical converger addition ⑴ the cross-sectional size than the cross section (11) and outlet section (12) into the ro.
2.根据权利要求I所述的微束质子荧光谱仪,其特征在于,所述毛细管光学会聚器(I) 包括多根单毛细管(2)。 The proton microbeam fluorescence spectrometer according to claim I, wherein said capillary optical converger (I) comprises a plurality of single capillary (2).
3.根据权利要求2所述的微束质子荧光谱仪,其特征在于,所述毛细管光学会聚器(I) 包括20万一60万根单毛细管(2)。 According to claim proton microbeam fluorescence spectrometer of claim 2, wherein said capillary optic concentrator (I) comprises a case 20 600000 single capillary (2).
4.根据权利要求3所述的微束质子荧光谱仪,其特征在于,所述毛细管光学会聚器(I) 为回转体,且其母线为预定函数。 According to claim proton microbeam fluorescence spectrometer of claim 3, wherein said capillary optic concentrator (I) is a rotating body, and which is a predetermined function of the bus.
5.根据权利要求4所述的微束质子荧光谱仪,其特征在于,所述进ロ截面(11)的尺寸与所述出口截面(12)的尺寸相等。 According to claim proton microbeam fluorescence spectrometer of claim 4, characterized in that the feed cross-section of equal size ro (11) is a cross-sectional dimension of the outlet (12).
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