CN101308103A - Microbeam micro- zone X ray detecting probe analyzer - Google Patents

Microbeam micro- zone X ray detecting probe analyzer Download PDF

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CN101308103A
CN101308103A CN 200810116613 CN200810116613A CN101308103A CN 101308103 A CN101308103 A CN 101308103A CN 200810116613 CN200810116613 CN 200810116613 CN 200810116613 A CN200810116613 A CN 200810116613A CN 101308103 A CN101308103 A CN 101308103A
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micro
ray
sample
stepper motor
software
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CN101308103B (en
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孙传敏
曾国强
健 杨
峰 程
葛良全
赖万昌
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成都理工大学
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Abstract

The invention discloses an X ray probe analyzer in a micro-beam micro-area, which adopts the means of an X-ray tube and a focusing capillary tube to generate an X ray to implement the characteristic X ray excitation to a sample to be detected in a micro-area, the analyzer mainly comprises: an electronic micro-motion measuring platform for locating the sample micro-area and acquiring the image information of the sample micro-area, an XRF energy spectrometer realizing the X ray detection to the sample and sending an energy spectrum curve to a PC; and a PC upper computer software system analyzing spectral lines under the control of the corresponding control equipment and acquiring the analyzed results. The probe analyzer realizes the non-destructive test of sample, and need not carry out the surface conduction processing to the sample when in detection, meanwhile a laser positioning system is adopted to realize the automatic positioning of system, thereby facilitating the operation for users and saving the time needed for operation.

Description

一种微束微区x射线探针分析仪技术领域本发明涉及一种探针分析仪,尤其涉及一种微束微区x射线探针分析仪。 A micro-beam x-ray probe micro analyzer Technical Field The present invention relates to an analyzer probe, particularly to a micro-beam x-ray probe micro analyzer. 背景技术目前现有的电子探针x射线显微分析仪主要有电子光学系统,x谱仪结构和信息记录显示系统构成。 Background Art conventional x-ray electron probe micro-analyzer main electron optical system, x spectrometer configuration information recording and display system configuration. 参见图i提供的是现有的电子x射线探针分析仪的电子光学镜筒的结构,该电子光学镜筒主要包括:样品台l、样品托盘2、样品室3、样品更换室4、通用电子探测器5、后散射电子探测器6、物镜7、扫描线圈8、 目标抖动选择9、放大压縮目镜IO、对齐线圈ll、电子枪室12、阳极13、电缆14及电子枪15;首先将导电处理后的样品放入到样品操作台1上的样品盘2中, 需要操作人员通过光学镜筒人为的寻找待测样品微区,根据当前的相对偏移, 手动调整样品操作台外部X、 Y、 Z三轴控制手柄,通过调节手柄的位置进而控制样品操作台的位置,最终定位到待检测样品的微区。 Referring to FIG. I is provided in a conventional structure of the electron optical column of the electron probe x-ray analyzer, the electron optical lens barrel including: a sample stage L, the sample tray 2, the sample chamber 3, the specimen exchange chamber 4, GM electron detector 5, the scattered electron detector 6, an objective lens 7, a scanning coil 8, 9 select the target jitter, the IO zoom eyepiece compression, coil alignment ll, the electron gun chamber 12, an anode 13, an electron gun 15 and cable 14; a first electrically conductive treated sample into the sample placed on the sample pan console 12, the operator needs to search through the optical lens barrel artificial micro sample to be tested, according to the current relative offset, sample console external manual adjustment X, Y , Z axis control handle, by adjusting the position of the handle and thus the position of the control console of the sample, the final positioning of the micro sample to be detected. 当定位结束后,启动数码相机系统,进行图像采集,最后开始激发高能电子束对待检测样品的微区进行特征X射线的激发,再使用能谱仪或波谱仪进行元素分析,将分析结果存档禾口显示。 When positioning is completed, start the digital camera system, image acquisition, and finally the excitation energy electron beam treatment began micro sample was detected characteristic X-ray excitation, and then using the spectrometer or spectrometers elemental analysis, the results of the analysis archive Wo display port. 所述电子光学系统又称镜筒,镜筒部分与扫描电子显微镜功能相同,都是完成光学信号的放大和成像。 The electron optical system is also called barrel, barrel portion and a scanning electron microscope the same functions, are completed and the imaging optical signal amplification. x射线谱仪有x射线能量色散谱仪(简称能谱仪EDS)和X射线波长色散谱仪(简称谱仪)。 The x-ray spectrometer has an x-ray energy dispersive spectrometer (EDS referred EDS) and wavelength dispersive X-ray spectrometer (abbreviated spectrometer). 已有的电子探针X射线显微分析仪都采用的是高能聚焦电子束对样品的待检测微区进行特征X射线激发,产生高能电子束的电子装备体积庞大,价格昂贵。 Conventional electron probe X-ray micro-analyzer are used in a high-energy electron beam to be focused micro sample was detected characteristic X-ray excited, produce electronic equipment, high energy electron beams of a large volume, is expensive. 采用高能电子束进行X射线激发还带来另外一个问题,必须对样品表面进行特殊的导电处理,才能将投射到样品表面的电子电荷通过导电层引导到地,否则大量的高能电子聚焦在样品表面将会使样品升温,甚至燃烧,而对于样品导电层的处理又非常的麻烦和耗时。 Energy electron beam excited X-ray also brings another problem must be specially treated on the conductive surface of the sample, the electric charge can be projected onto the sample surface through the guide to the conductive layer, or a large number of energetic electrons focused on the sample surface the samples will be raised, and even burning, and for processing the samples and the conductive layer is very troublesome and time-consuming. already

有的电子探针x射线显微分析仪由具备复杂的光学系统,同时具备能谱仪和波 Some x-ray electron probe micro-analyzer includes a complex optical system, and along with the wave spectrometer

谱仪,因此整体体积庞大,价格昂贵,功能齐全,但通常都不具备自动控制系 Spectrometer, so the overall bulky, expensive, full-featured, but usually do not have the automatic control system

统,需要人工手动去调整待测样品与探测系统的相对位置。 System, it is necessary to manually adjust the relative position of the test sample and the detection system. 还有一些x射线微 There are some x-ray microanalysis

区分析仪虽然价格便宜,但仅仅是带了电子显微镜,不能进行数字拍照,对于被分析样品的表面不能进行图像存档。 Area Analyzer although cheap, but only with an electron microscope, a digital camera can not be performed, the surface of the sample being analyzed archived images can not be performed.

发明内容 SUMMARY

为解决上述中存在的问题与缺陷,本发明提供了一种微束微区x射线探针 To solve the above problems and defects, the present invention provides a micro-area x-ray microbeam probe

分析仪。 Analyzer.

本发明是通过以下技术方案实现的- The present invention is achieved by the following technical solutions -

本发明所涉及的一种微束微区x射线探针分析仪,采用了x光管与聚焦毛细管的方式产生x射线对待检测样品微区进行特征x射线激发,所述分析仪主 A micro beam microanalysis present invention relates to an x-ray analyzer probe, using a focused x-ray tube and the x-ray generating a capillary manner micro sample to be detected characteristic x-ray excitation for said main analyzer

要包括:电子微动测量平台,XRF能谱仪,多轴步进电机驱动器及运动控制器、 PC上位机软件系统与电源系统,其中,电子微动测量平台,用于对样品微区进行定位,并获取样品微区图像信息;XRF能谱仪,接收来自电子微动测量平台表面样品的被X光管激发后的特征X射线,实现样品的X射线检测,并形成X能谱,然后将能谱曲线发送到PC机;多轴步进电机驱动器及运动控制器实现对多个步进电机的精确运动控制及驱动;PC上位机软件系统,通过USB端口发送控制命令,控制多个步进电机的运动,控制图像信息的获取与处理,并对测量得到的谱线进行分析,将分析结果存储。 To include: micro electronic measurement platform, XRF spectrometer, multi-axis stepper motor drive and motion controller, PC and PC software system of the power supply system, wherein the electronic measuring micro platform for positioning micro sample , and acquires the image information of the sample micro; XRF spectrometer, after receiving from the micro electronic measurement platform surface of the sample excited by the X-ray characteristic X-ray tube to achieve X-ray detection sample spectrum and X form, then sent to the PC spectrum curve; multi-axis stepper motor drives and the motion controllers and precision motion control driving of the plurality of stepper motors; PC host computer software system, a control command transmitted through the USB port, a plurality of control stepping movement of the motor, the control image acquisition and processing of information, and the measured spectrum was analyzed, the analysis result storage.

所述微束微区X射线探针分析仪还包括:所述多轴运动控制器,用于接收PC上位机软件系统中传送出的控制指令,同时将指令转化为步进电机驱动器所能接受的细分脉冲;自由度步进电机驱动器,根据接收到的细分脉冲对多个步进电机进行细分驱动,以实现微步运动;电源系统,为电子微动测量平台、XRF 能谱仪、多轴运动控制器及多自由度步进电机驱动器进行供电并排除外界的干扰。 The X-ray micro beam probe micro analyzer further comprises: a multi-axis motion controller for receiving a control instruction PC PC software transported out of the system while the instructions into the stepper motor drive can accept pulse segments; DOF stepper motor driver, a plurality of the stepping motor according to the received segment subdivision driving pulses to effect micro-step motion; power systems, micro electronic measurement platform, XRF spectrometer , and multi-axis motion controller drives the stepping motor DOF power and eliminate external interference. 所述电子微动测量平台中的微动台包含:三个步进电机驱动、CCD相机、 The electronic measuring platform micro fine movement stage comprising: three stepping motor drive, the CCD camera,

x光管、x射线探测器及激光探测器,其中,所述三个步进电动机驱动,实现 x-ray tubes, x-ray detector and laser detector, wherein, the three stepper motor drives, to achieve

微动台的三维运动;CCD相机,设置有环形排列的白光LED光源,且由一个步进电动机控制所述CCD相机进行垂直方向自由度的运动;X光管,包括一聚焦毛细管与一激光发射器,且所述聚焦毛细管与激光发射器设置为一体,并通过一个步进电动机控制所述X光管倾斜角度上的运动。 Three-dimensional movement of the fine movement stage; CCD camera, is provided with a circular arrangement of the white LED light source, and for freedom of movement in the vertical direction by a stepper motor control of the CCD camera; X-ray tube, comprising a transmitter and a laser focusing capillary , a capillary tube and focusing the laser emitter is provided integrally on the motion and the inclination angle of the light pipe by a stepping motor controlling the X. X射线探测器及激光探测器,其X射线探测器及激光探测器设置为一体,并通过一个步进电动机控制所述X射线探测器及激光探测器进行倾斜角度上的运动。 Laser detector and X-ray detector, which X-ray detector and the laser detector is provided integrally, and the X-ray detector and the motion detector on a laser inclination angle by a stepper motor control.

所述PC上位机软件系统还包括:XRF能谱测量软件、图像采集与处理软件及主控软件,所述XRF能谱测量软件,将XRF能谱仪发送来的谱线进行分析, 并得到相应的元素含量分析结果;图像采集与处理软件,对电子微动测量平台中CCD相机发送的图像进行采集与处理,同时将用户定位的样品微区进行拍照存档;主控系统,用于对多轴运动控制器的控制和XRF能谱仪的控制,并将控制指令发送到多轴运动控制器中。 The PC host software system further comprising: XRF spectrum measurement software, image acquisition and processing software and the main software, the software XRF spectrum measurement, XRF spectrometer the transmitted spectrum analysis, and the corresponding elements of the result; image acquisition and processing software, micro electronic image measurement CCD camera platform is transmitted acquisition and processing, while the user location photographing micro sample archiving; master control system, for multiaxial the controller controls motion and XRF spectrometer control, and a control instruction to the multi-axis motion controller.

本发明提供的技术方案的有益效果是: The present invention provides advantageous effects of the technical solution is:

通过采用X光管产生X射线通过聚焦毛细管将聚焦后的X射线投射到待检测的样品表面,从而激发特征X射线,在检测过程中真正实现了样品的无损检测;而且操作方便、结构相对简单、体积小,也具备基本的元素分析功能。 By using the X-ray tube generates X-rays by focusing the capillary the focused X-rays is projected onto the sample surface to be detected to excite characteristic X-ray, in the detection process truly non-destructive testing of the sample; and easy to operate, relatively simple structure , small size, also has the basic function of elemental analysis.

附图说明 BRIEF DESCRIPTION

图1是现有技术提供的电子X射线探针分析仪的电子光学镜筒的结构图; 图2是微束微区X射线探针分析仪系统结构图; FIG 1 is a configuration diagram of an electronic optical column of electron probe X-ray analyzer of the prior art provided; FIG. 2 is an X-ray micro-beam probe micro analyzer system configuration diagram;

图3是微束微区X射线探针分析仪的电子微动测量平台结构图。 FIG 3 is an X-ray microbeam micro electron probe micro analyzer measurement platform structure of FIG. 具体实施方式 Detailed ways

为使本发明的目的、技术方案和优点更加清楚,下面将结合附图对本发明实施方式作进一步地详细描述: To make the objectives, technical solutions, and advantages of the present invention will become apparent in conjunction with the accompanying drawings of the following embodiments of the present invention will be described in further detail:

参见图2,本实施例提供了一种微束微区X射线探针分析仪,包括:电子微 Referring to Figure 2, the present embodiment provides a micro-beam probe X-ray micro analyzer, comprising: an electronic micro

动测量平台201、多自由度步进电机驱动器202、多轴运动控制器203、 XRF能谱仪204、电源系统205及PC上位机软件系统,其中,所述电子微动测量平台201 是微束微区X射线探针分析仪系统的核心,用以对样品微区进行定位,X射线的检测及图像信息的获取,并将获取的X射线能谱与图像信息分别发送到XRF 能谱仪204及PC上位机软件系统中的图像采集与处理软件207中,由XRF能谱仪204对接收的X射线能谱进行测量;所述多轴运动控制器203接收来自PC上位机软件系统中主控软件208的控制指令,同时将所述控制指令转化成步进电机驱动器所能接受的细分脉冲并将该细分脉冲发送到多自由度步进电机驱动器202 中,然后多自由度步进电机驱动器202根据多轴运动控制器203发送的细分脉冲实现对多个步进电机的128细分驱动,为实现微步运动提供基础;所述电源系统205主要实现对 Moving measurement platform 201, multi-DOF stepper motor driver 202, multi-axis motion controller 203, XRF spectrometer 204, the power supply system 205 and PC host software system, wherein the electronic measurement platform 201 is a micro microbeam the core probe X-ray micro analyzer system for micro positioning the sample, and detecting X-rays acquired image information, and the acquired spectra and X-ray image information are transmitted to the XRF spectrometer 204 PC and PC software system image acquisition and processing software 207, the XRF spectrometer 204 pairs the received X-ray spectrum was measured; the multi-axis motion controller 203 receives from the PC master PC software system software control instruction 208, while the control command is converted into a stepping motor drive pulse and the breakdown of acceptable pulses to the multi-degree freedom subdivision stepping motor driver 202, and stepper motor MDOF driver 202 to implement a plurality of subdivision stepping motor 128 driven according to a pulse segments axis motion controller 203 transmits provide foundation for micro-step motion; said power supply system 205 is mainly achieved 统中的电子学单元的供电和抗干扰措施。 Power supply system and anti-jamming measures in the electronics unit.

所述PC上位机软件系统主要包括:XRF能谱测量软件206、图像采集与处理软件207及主控软件208,其中,所述XRF能谱测量软件206将XRF能谱仪204 发送来的谱线进行分析,并得到相应的元素含量分析结果;图像采集与处理软件207对电子微动测量平台201中CCD相机发送的图像进行采集与处理,同时将用户定位的样品微区进行拍照存档;主控软件208用于对多轴运动控制器203的控制和XRF能谱仪204的控帝U,并将控制指令发送到多轴运动控制器203中。 The PC host computer software system comprising: XRF spectrum measurement software 206, image acquisition and processing software 207 and the host software 208, wherein the XRF spectroscopy measurement software 206 spectrometer XRF spectral line transmitted 204 analysis, and the content of the corresponding element analysis; image acquisition and processing software 207 pairs of electronic micro image transmitted CCD camera measurement acquisition and processing platform 201, while the user location photo archive sample microchannel zone; master software for multi-axis motion controller 208 controls and 203 of XRF spectrometer control 204 Di U, and a control instruction to the multi-axis motion controller 203.

参见图3,提供了微束微区X射线探针分析仪的电子微动测量平台结构,该结构主要包括三个步进电机驱动、CCD相机301、 X光管302、 X射线探测器303 及微动台304;其中,三个步进电机驱动可以实现三个自由度的运动,即自由度a、自由度b与自由度c,微动台以实现X、 Y、 Z三维运动,CCD相机301和左光源306、右光源307设计为一体,由一个步进电动机控制所述CCD相机301进行自由度l垂直向下运动到规定的位置,并且控制X光管302和X射线探测器303 一起运动到规定的位置(该位置是事先调好的,在该位置上X光管发射的电子束可以很好的聚焦到样品的微区,也就是CCD相机的正下方零点处),控制X 光管302发射X射线,同时启动XRF能谱仪204进行谱线测量。 Referring to Figure 3, there is provided an X-ray microbeam micro electron probe micro analyzer measurement platform structure which includes three stepping motor driver, the CCD camera 301, 302 X-ray tube, an X-ray detector 303 and fine movement stage 304; wherein three stepper motor drive can effect movement of three degrees of freedom, i.e. the degree of freedom a, b and freedom freedom C, to achieve a fine stage X, Y, Z three-dimensional motion, the CCD camera a light source 301 and left 306 and right source 307 designed integrally by a stepper motor 301 controls the degree of freedom l CCD camera is moved to a predetermined position vertically downward, and controls the X-ray tube 302 and X-ray detector 303 with moved to a predetermined position (a position which is tuned beforehand, the position of the X-ray tube emitting the electron beams can be well focused to micro samples, i.e. directly below zero CCD camera), X-ray controls tube 302 emits X-rays, while the start XRF spectral line 204 spectrometer measurements. 所述X光管302是由聚焦毛细管308和激光发射器309为一体的结构,并通过一个步进电动机控制所述X光管302进行自由度2方向上的运动;X射线半导体探测器303和激光探测器310为一体结构,并通过一个步进电动机控制所述X射线探测器303及激光探测器31 O进行自由度3方向上的运动。 The X-ray tube 302 by focusing the laser emitter 308 and the capillary 309 as a unitary structure, and degree of freedom in movement in the second direction by a stepping motor 302 controls the X-ray tube; X-ray detector 303 and the semiconductor laser detector 310 is a unitary structure, and by a stepping motor controlling the X-ray detector 303, and laser detector 31 O 3 in the direction of motion freedom. 所述CCD相机301在垂直移动位置与控制X光管302发射X射线及启动XRF 能谱仪204进行谱线测量之前还包括:如果激光发射器309发出的光线未能经过样品305反射回激光探测器309则说明样品还没有到达指定的Z轴零点位置,则微动台继续垂直向上的Z轴运动,知道激光探测器309接收到激光发射器的信号,此时需要将样品的微区进行X、 Y方向上的定位。 The CCD camera 301 in the vertical movement position control of the X-ray tube emitting X-rays 302 and 204 prior to starting can XRF spectrometer for spectral measurements further comprises: if the light emitted from the laser emitter 309 through the sample 305 fails to detect laser light reflected back 309 then the sample has not reached the specified Z-axis zero position, then the station continues to jog the Z-axis vertically upward movement, known laser detector 309 receives a signal laser emitter, at this time needs to be micro sample X positioning in the Y direction. 由于样品己经定位到Z轴零点(事先我们已经调试好,当样品处于该位置CCD相机可以很好的进行清晰拍照),那么我们可以在PC机的图像采集软件207上看到清晰的样品放大图样, 之后用户只需要点击主控软件上的按钮,平移微动台的X, Y轴,用户找到自定义的样品微区,关闭激光发射器,进行拍照留档。 Since the sample is already positioned to Z zero (in advance we have good debugging, when the sample is in the position of the CCD camera can be a very good definition camera), then we can see a clear sample zoom in on the PC image capture software 207 pattern, then the user need only click the button on the master software, micro translation stage X, Y-axis, the user finds a custom micro sample, turn off the laser emitter, photographed on file. 所述谱线测量结束后,XRF能谱仪将测量得到的能谱曲线上传到PC机中, 由XRF能谱测量软件206进行数据解释也就是元素分析结果的获取,并与事先得到的图片一起存档。 After completion of the measurement line, XRF spectrometer can upload curve measured spectrum to the PC, the data interpreted by XRF spectroscopy is the measurement software 206 acquires the results of elementary analysis, and together with the image previously obtained archive. 一次完整的测量过程就结束了。 A complete measurement process is over. 本实施例提供的微束微区X射线探针分析仪采用X光管和聚焦毛细管的方式产生X射线对待检测样品微区进行特征X射线激发。 Microbeam domains provided in the present embodiment probe X-ray analyzer by way of focusing X-ray tube and the X-ray generating capillary micro sample to be detected for characteristic X-ray excitation. 由于X光管和聚焦毛细管体积小巧,而且无需对样品表面进行特殊的导电处理,实现了真正的样品无损检测,大大减小了系统的体积,功耗和成本,也节约了检测样品的准备时间,提高了检测效率。 Since the X-ray tube and focusing capillary compact, and require no special sample surface conductive processing, a real sample non-destructive testing, greatly reduces the size, power consumption and cost of the system, but also saves the time to prepare the test sample to improve the detection efficiency. 同时采用了高倍率的CCD相机替代了传统的复杂光学系统和普通照相机系统具有结构简单,体积小巧的特点;同时由于采用了激光定位和自动控制技术减少了测量的定位时间和操作的复杂度,提高了系统的实用性。 While using a high magnification CCD camera instead of the conventional complicated optical system and a general camera system has a simple structure, small size characteristics; while the introduction of the laser positioning and automatic control technology reduces the complexity of the positioning time and the operation of measurement, improve the usability of the system. 本系统整体的价格要远低于现有的电子探针X射线分析仪,可以广泛适用于小型的矿山样品分析和小型科研所的科研工作。 The overall price of the system is much lower than existing electron probe X-ray analyzer can be widely used in scientific research sample analysis of small mines and small research institutes.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。 Above, the present invention is merely preferred specific embodiments, but the scope of the present invention is not limited thereto, any skilled in the art in the art within the scope of the invention disclosed can be easily thought of the changes or Alternatively, it shall fall within the protection scope of the present invention. 因此,本发明的保护范围应该以权利要求的保护范围为准。 Accordingly, the scope of the present invention should be defined by the scope of the claims.

Claims (5)

1、一种微束微区X射线探针分析仪,采用了X光管与聚焦毛细管的方式产生X射线对待检测样品微区进行特征X射线激发,其特征在于,所述分析仪主要包括:电子微动测量平台,XRF能谱仪,多轴步进电机驱动器及运动控制器、PC上位机软件系统与电源系统,其中电子微动测量平台,用于对样品微区进行定位,并获取样品微区图像信息; XRF能谱仪,接收来自电子微动测量平台表面样品的被X光管激发后的特征X射线,实现样品的X射线检测,并形成X能谱,然后将能谱曲线发送到PC机; 多轴步进电机驱动器及运动控制器实现对多个步进电机的精确运动控制及驱动; PC上位机软件系统,通过USB端口发送控制命令,控制多个步进电机的运动,控制图像信息的获取与处理,并对测量得到的谱线进行分析,将分析结果存储。 1. A micro-beam probe X-ray micro analyzer, using the X-ray tube and the focus of the capillary generates X-rays to be detected embodiment micro sample for characteristic X-ray excitation, characterized in that said analyzer includes: micro electronic measurement platform, XRF spectrometer, multi-axis stepper motor drive and motion controller, PC and PC software system of the power supply system, wherein the micro electronic measurement platform configured to locate micro sample, and obtaining a sample micro image information; XRF spectrometer, receives from the electronic micro platform surface of the sample is measured after the X-ray tube excitation of characteristic X-ray, X-ray detector to achieve a sample of X and formation of spectrum, and then transmits the spectrum curve to the PC; multi-axis stepper motor drives and the motion controllers to the plurality of stepper motor drive and precision motion control; PC host computer software system, the port control commands transmitted via USB, a plurality of stepper motors controlling the motion, controlling image acquisition and processing of information, and the measured spectrum was analyzed, the analysis result storage.
2、 根据权利要求1所述的微束微区X射线探针分析仪,其特征在于,所述多轴运动控制器,用于接收PC上位机软件系统中传送出的控制指令,同时将指令转化为步进电机驱动器所能接受的细分脉冲;自由度步进电机驱动器,根据接收到的细分脉冲对多个步进电机进行细分驱动,以实现微步运动;电源系统,为电子微动测量平台、XRF能谱仪、多轴运动控制器及多自由度步进电机驱动器进行供电并排除外界的干扰。 2, the micro microbeam of claim 1, the probe X-ray analyzer, wherein said multi-axis motion controller for receiving a control instruction PC PC software transported out of the system while the instructions converted to stepper motor drive pulses acceptable subdivision; DOF stepper motor driver, a plurality of the stepping motor according to the received segment subdivision driving pulses to effect micro-step motion; power supply system, the electronic micro measurement platform, XRF spectrometer, multi-axis motion controller and multi-degree freedom stepper motor drive is powered and negative outside interference.
3、 根据权利要求1所述的微束微区X射线探针分析仪,其特征在于,所述电子微动测量平台中的微动台包含:三个步进电动机驱动、CCD相机、X光管、 X射线探测器及激光探测器,其中三个步进电动机驱动,实现微动台的三维运动;CCD相机,设置有环形排列的白光LED光源,且由一个步进电动机控制所述CCD相机进行垂直方向自由度的运动;X光管,包括一聚焦毛细管与一激光发射器,且所述聚焦毛细管与激光发射器设置为一体,并通过一个步进电动机控制所述X光管倾斜角度上的运动;X射线探测器及激光探测器,其X射线探测器及激光探测器设置为一体, 并通过一个步进电动机控制所述X射线探测器及激光探测器进行倾斜角度上的运动。 3, the micro microbeam of claim 1, the probe X-ray analyzer, characterized in that said electronic measuring platform micro fine movement stage comprising: three stepper motor drive, the CCD camera, X-ray tubes, X-ray detector and laser detector, wherein the three stepper motor drives, to achieve three-dimensional movement of the fine movement stage; CCD camera, is provided with a circular arrangement of the white LED light source and the CCD camera by a stepper motor control for freedom of movement in the vertical direction; X-ray tube, comprising a capillary tube with a focusing laser emitter and focusing the laser emitter is provided with a capillary tube integrally, and the X-ray tube by a stepping motor controlling the tilt angle motion; laser detector and X-ray detector, which X-ray detector and the laser detector is provided integrally, and the X-ray detector and the motion detector on a laser inclination angle by a stepper motor control.
4、 根据权利要求3所述的微束微区X射线探针分析仪,其特征在于,所述CCD相机垂直运动的位置控制X光管与X射线探测器运动的位置。 4, the micro-beam as claimed in claim 3 micro X-ray analyzer probe, wherein the location of the CCD camera control the position of the vertical movement of the X-ray tube and X-ray detector moving.
5、 根据权利要求1所述的微束微区X射线探针分析仪,其特征在于,所述PC上位机软件系统还包括:XRF能谱测量软件、图像采集与处理软件及主控软件,所述XRF能谱测量软件,将XRF能谱仪发送来的谱线进行分析,并得到相应的元素含量分析结果;图像采集与处理软件,对电子微动测量平台中CCD相机发送的图像进行采集与处理,同时将用户定位的样品微区进行拍照存档;主控软件,用于对多轴运动控制器的控制和XRF能谱仪的控制,并将控制 5, the micro-beam as claimed in claim 1 micro X-ray analyzer probe, wherein said PC host software system further comprising: XRF spectrum measurement software, image acquisition and processing software and the main software, the XRF spectroscopy measurement software, the XRF spectrometer transmitted spectrum analysis, and the content of the corresponding element analysis; image acquisition and processing software, micro electronic image measurement CCD camera platform transmitted collection and processing, while the user location photographing micro sample archiving; master control software for controlling the control and multi-axis motion controller XRF spectrometer, and the control
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CN101858874B (en) 2010-05-18 2012-07-25 北京师范大学 Microbeam proton fluorescence spectrometer
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