CN201368856Y - Microbeam X-ray diffractometer based on capillary X-ray optical device - Google Patents
Microbeam X-ray diffractometer based on capillary X-ray optical device Download PDFInfo
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- CN201368856Y CN201368856Y CNU2008201399220U CN200820139922U CN201368856Y CN 201368856 Y CN201368856 Y CN 201368856Y CN U2008201399220 U CNU2008201399220 U CN U2008201399220U CN 200820139922 U CN200820139922 U CN 200820139922U CN 201368856 Y CN201368856 Y CN 201368856Y
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Abstract
The utility model relates to a microbeam X-ray diffractometer based on a capillary X-ray optical device, consisting of an X-ray source, a sample table, a detector, a goniometer, a receiving gap, an integral capillary X-ray focusing lens and an integral capillary X-ray collimator, wherein the integral capillary X-ray focusing lens and the integral capillary X-ray collimator are arranged between the X-ray source and the sample table. The microbeam X-ray diffractometer is used for analyzing the microbeam X-ray diffraction of a sample; the core component of the microbeam X-ray diffractometer is the combination device of the integral capillary X-ray focusing lens and the integral capillary X-ray collimator; and through the combination device, the X-rays emitted by the X-ray source can be focused into collimated microbeam X-rays, so that the microbeam X-ray diffraction of the sample is analyzed. The utility model analyzes the X-ray diffraction with the light source with lower power. The utility model has simple structure and low manufacturing cost and is easy to promote and popularize.
Description
Technical field
The utility model relates to a kind of micro-beam X-ray diffractometer of learning device based on the kapillary X-ray.It is the novel scientific instrument that still do not have the use kapillary X-ray device of commodity release in the world.Can carry out the micro-beam X-ray diffraction analysis to sample with it.
Background technology
Existing micro-beam X-ray diffractometer, be to utilize aperture to obtain the quasi-parallel X-ray beam to come sample is carried out the micro-beam X-ray diffraction analysis, but adopt aperture to obtain quasi-parallel light, just the X ray card with other directions falls, the intensity of beating X ray on sample so just reduces greatly, so that influence surveys the quality of spectrum and prolonged the time of surveying spectrum, so need use high strength X ray light source when carrying out X-ray diffraction analysis with aperture.Therefore existing micro-beam X-ray diffractometer is subjected to the restriction of light source, has influenced popularizing and promoting of they.
The utility model content
The purpose of this utility model is to provide a kind of novel scientific instrument that can carry out the micro-beam X-ray diffraction analysis to material.
The purpose of this utility model realizes by following measure: this diffractometer comprises X source, entire capillary X-ray convergent lens, entire capillary x-ray collimator, angular instrument, sample stage, accepts slit and detector.It is characterized in that: after X source, lay entire capillary X-ray convergent lens and entire capillary x-ray collimator successively, just enter the entire capillary x-ray collimator through overregulating the focal spot that makes from the outgoing of entire capillary X-ray convergent lens, entire capillary X-ray convergent lens can be converged to the X ray of dispersing tens microns focal spot, the X ray of dispersing from focal spot enters the entire capillary x-ray collimator, the entire capillary x-ray collimator can be assembled once more to the X ray that enters, can form microbeam quasi-parallel light, thereby sample is carried out the micro-beam X-ray diffraction analysis.
Entire capillary X-ray convergent lens is the X ray optical device that utilizes the X ray total reflection principle to be designed to, and X-ray can be transferred to the other end by means of full the emission from an end of conduit in capillary vessel, in the transmission course, changed the direction of propagation of X-ray.Each entire capillary X-ray convergent lens is to be that 3-15 micron list glass capillary constitutes by ten thousand internal diameters of 20-50.The advantage of such device is: it can focus on full wave X ray, and simple, small and exquisite nimble, the A wide selection of colours and designs, cheap of manufacture craft.Entire capillary X-ray convergent lens be single, do not have the fritted glass solid that supports, in many capillaries are arranged; Lens are approximately the combination of space quafric curve section, quafric curve section or the combination of quafric curve section and straight-line segment along the profile bus of length and the profile bus of X-ray conduit and the axis of X-ray conduit, and the radial variations of the profile bus of the bus of lens and X-ray conduit is symmetrical for the central axis of lens.Entire capillary X-ray convergent lens can wide-angle on a large scale in the X-ray of converging and diverging, and the X-ray that will disperse is converged to little focal spot of tens of microns, thereby can carry out microcell scanning to sample, entire capillary X-ray convergent lens has 10
3The enlargement factor of the order of magnitude.The import cross section of entire capillary X-ray convergent lens and outlet size are less than lens full-size; Entrance point cross section and X-ray conduit are respectively regular hexagon and circle in the cross section perpendicular to the lens center axis direction; The entrance point cross section is identical with the endpiece cross sectional shape, and the X-ray conduit is the function in space along the sectional dimension perpendicular to the central line of lens direction, and the closer to two ends, sectional dimension is more little.The entire capillary x-ray collimator also is the X ray optical device that utilizes the design of X ray total reflection principle, and X-ray can be transferred to the other end by means of full the emission from an end of conduit in capillary vessel, in the transmission course, changed the direction of propagation of X-ray.Each entire capillary x-ray collimator is to be that 3-15 micron list glass capillary constitutes by ten thousand internal diameters of 20-50.The advantage of such device is: manufacture craft is simple, small and exquisite nimble, cheap.The entire capillary x-ray collimator be single, do not have the fritted glass solid that supports, in many capillaries are arranged; The entire capillary x-ray collimator is a straight line along the axis that the profile bus of the profile bus of length and X-ray conduit is approximately space quafric curve section, X-ray conduit, and the profile bus of the bus of entire capillary x-ray collimator and X-ray conduit is symmetrical for the central axis of entire capillary x-ray collimator diametrically.The entire capillary x-ray collimator can be assembled the X ray that enters, and finally forms the X ray of quasi-parallel in its exit.The cross section that the entire capillary x-ray collimator makes progress above perpendicular to its axis is a regular hexagon, and in the cross section of any position of axis equal and opposite in directions all.
The size of length, inlet diameter, outlet diameter and the maximum cross-section of entire capillary X-ray convergent lens and the length of entire capillary x-ray collimator, inlet diameter, outlet diameter all are because of the special design of the specific (special) requirements of micro-beam X-ray diffraction analysis research, constitute the internal diameter capillaceous and the number of lens and entire capillary x-ray collimator and draw material that lens adopt also because of research project require different.
The utility model has following advantage compared with the prior art:
1. the aperture that is adopted with respect to other micro-beam X-ray diffractometer, the composite set of entire capillary X-ray convergent lens and entire capillary x-ray collimator can be assembled X ray, so, the utility model adopts this composite set the power density of beating the X ray on sample can be improved several thousand times, therefore, the quality of the spectrum of surveying is increased.
2. the aperture that is adopted with respect to other micro-beam X-ray diffractometer, the power density that the composite set of entire capillary X-ray convergent lens and entire capillary x-ray collimator will be beaten the X ray on sample improves several thousand times, and this will shorten greatly surveys the needed time of spectrum.
3. because the composite set of entire capillary X-ray convergent lens and entire capillary x-ray collimator has very high enlargement factor, so the utility model can carry out X-ray diffraction analysis under low power sources.
4. entire capillary X-ray convergent lens can be converged to tens microns focal spot with the X ray of dispersing of X source emission, the X ray that is penetrated by this focal spot enters the entire capillary x-ray collimator and assembles once more, the X ray that penetrates from the entire capillary x-ray collimator is a microbeam quasi-parallel light, can carry out the micro-area diffraction analysis to sample.
5. because entire capillary X-ray convergent lens and entire capillary x-ray collimator do not have support, compact conformation so the utility model is simple in structure, cheap, is convenient to popularize and promote the use of.
Description of drawings
Below in conjunction with accompanying drawing the utility model is described in further detail.
Fig. 1 is a micro-beam X-ray diffractometer structural representation of learning device based on the kapillary X-ray;
Fig. 2 is the synoptic diagram of entire capillary X-ray convergent lens in the utility model;
Fig. 3 is the synoptic diagram of entire capillary x-ray collimator in the utility model;
Fig. 4 is the sectional view of the edge of entire capillary X-ray convergent lens among Fig. 2 perpendicular to central line of lens;
Fig. 5 is the sectional view of the edge of entire capillary x-ray collimator among Fig. 3 perpendicular to entire capillary x-ray collimator center line.
Embodiment
Referring to accompanying drawing 1, the utility model by X source 1, entire capillary X-ray convergent lens 2, entire capillary x-ray collimator 3, sample stage 4, angular instrument 5, accept slit 6, detector 7 is formed.
Referring to Fig. 2, Fig. 2 provides the agent structure of convergent lens used in the diffractometer.Assembled by lens 2 from the X ray 8 of x-ray source 1 outgoing, its capture angle is ω
CaptureX ray is propagated in lens, and part is absorbed by the lens wall, and part is for passing lens.Remainder X ray 9 is converged to the back by lens and forms little focal spot.The geometry parameter of convergent lens has: the inlet end focal distance f
1(X source is from lens inlet end distance), the endpiece focal distance f
2(the lens endpiece is to the distance at focal spot place), x-ray lens length L, lens inlet end size D
In, endpiece size D
Out, full-size D
Max(to circle lens is its diameter, to the polygon lens be its opposite side distance from), lens are ω to the capture angle of the X-ray of X source outgoing
Capture, the physical parameter of convergent lens has: transfer efficiency, the size of focal spot, power density enlargement factor, equivalent distances and dutycycle.
Referring to Fig. 3, Fig. 3 provides the agent structure of entire capillary x-ray collimator used in the diffractometer.The X ray 9 that comes out from convergent lens enters entire capillary x-ray collimator 3, and X ray is propagated in the entire capillary x-ray collimator, and part is absorbed by entire capillary x-ray collimator wall, and part is for passing the entire capillary x-ray collimator.The remainder X ray is converged to the back by the entire capillary x-ray collimator and forms microbeam quasi-parallel light 10.The geometry parameter of entire capillary x-ray collimator has: entire capillary x-ray collimator length L
1, lens inlet end size D
In1, endpiece size D
Out1, the physical parameter of entire capillary x-ray collimator has: transfer efficiency, power density enlargement factor and dutycycle.
Referring to Fig. 4, the lens edge is a regular hexagon perpendicular to the profile of the xsect of central line of lens direction, and the profile of every capillary (being labeled as A among the figure) xsect is for circular.Kapillary closely is arranged in together, if the number of plies at a middle capillary place is defined as 1, then from inside to outside the number capillaceous on each layer is 6 (n-1), and wherein n＞1 is the number of plies, internal diameter size capillaceous can be identical also can be inequality.
Referring to accompanying drawing 5, entire capillary x-ray collimator edge is a regular hexagon perpendicular to the profile of the xsect of central line of lens direction, and the profile of every capillary (being labeled as B among the figure) xsect is for circular.Kapillary closely is arranged in together, if the number of plies at a middle capillary place is defined as 1, then from inside to outside the number capillaceous on each layer is 6 (n-1), and wherein n＞1 is the number of plies, internal diameter size capillaceous can be identical also can be inequality.
Provide the example of whole X-ray convergent lens below: lens have 276000 X-ray conduits and constitute, and on the direction cross section perpendicular to central line of lens, the internal diameter size of every capillary is identical, and on the maximum cross section, the internal diameter of every capillary is about 6 μ m; The length of lens is 87.6mm, the inlet end of lens and the diameter of endpiece are respectively 4.3mm and 3.1mm, at the 17.4keV energy point, lens inlets focal length, outlet focal length, transfer efficiency, focused spot diameter, enlargement factor and capture angle, be respectively 78mm, 13mm, 1%, 27 μ m, 3000 and 2 °.
Provide the example of entire capillary x-ray collimator below: the entire capillary x-ray collimator has 253000 X-ray conduits and constitutes, on direction cross section perpendicular to central line of lens, the internal diameter size of every capillary is identical, and the internal diameter of every capillary is about 6 μ m; The length of entire capillary x-ray collimator is 14.1mm, and the inlet end of entire capillary x-ray collimator and the diameter of endpiece all are 6.2mm.
Claims (6)
1. micro-beam X-ray diffractometer of learning device based on the kapillary X-ray, this diffractometer comprises X source, entire capillary X-ray convergent lens, entire capillary x-ray collimator, angular instrument, sample stage, accepts slit and detector, it is characterized in that: lay entire capillary X-ray convergent lens and entire capillary x-ray collimator successively after X source.
2. micro-beam X-ray diffractometer according to claim 1 is characterized in that: entire capillary X-ray convergent lens be single, do not have the fritted glass solid that supports, in many capillaries are arranged; These lens are approximately the combination of space quafric curve section, quafric curve section or the combination of quafric curve section and straight-line segment along the profile bus of length and the profile bus of X-ray conduit and the axis of X-ray conduit, and the radial variations of the profile bus of the bus of lens and X-ray conduit is symmetrical for the central axis of lens.
3. micro-beam X-ray diffractometer according to claim 1 is characterized in that: the entire capillary x-ray collimator be single, do not have the fritted glass solid that supports, in many capillaries are arranged; The entire capillary x-ray collimator is a straight line along the axis that the profile bus of the profile bus of length and X-ray conduit is approximately space quafric curve section, X-ray conduit, and the profile bus of the bus of entire capillary x-ray collimator and X-ray conduit is symmetrical for the central axis of entire capillary x-ray collimator diametrically.
4. micro-beam X-ray diffractometer according to claim 1 is characterized in that: entire capillary is assembled x-ray lens and is had 10
3The enlargement factor of the order of magnitude.
5. micro-beam X-ray diffractometer according to claim 1 is characterized in that: the import cross section of entire capillary X-ray convergent lens and outlet size are less than lens full-size; Entrance point cross section and X-ray conduit are respectively regular hexagon and circle in the cross section perpendicular to the lens center axis direction; The entrance point cross section is identical with the endpiece cross sectional shape, and the X-ray conduit is the function in space along the sectional dimension perpendicular to the central line of lens direction, and the closer to two ends, sectional dimension is more little.
6. micro-beam X-ray diffractometer according to claim 1 is characterized in that: the cross section that the entire capillary x-ray collimator makes progress above perpendicular to its axis is a regular hexagon, and in the cross section of any position of axis equal and opposite in directions all.
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| CNU2008201399220U CN201368856Y (en) | 2008-10-20 | 2008-10-20 | Microbeam X-ray diffractometer based on capillary X-ray optical device |
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| CNU2008201399220U CN201368856Y (en) | 2008-10-20 | 2008-10-20 | Microbeam X-ray diffractometer based on capillary X-ray optical device |
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| CN102110486A (en) * | 2010-12-23 | 2011-06-29 | 北京师范大学 | Glass multi-capillary convergent collimator and X-ray pulsar detection device and method |
| CN102128846A (en) * | 2010-12-22 | 2011-07-20 | 中国政法大学 | Quasi parallel beam capillary X-ray lens-based plastic material evidence detection spectrometer |
| CN102325421A (en) * | 2011-05-18 | 2012-01-18 | 中国科学院上海光学精密机械研究所 | Regulatable X-ray pseudo-thermal light source based on microporous membrane |
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