CN101852840A - Optical fiber Fabry-Perot magnetic field sensor and preparation method thereof - Google Patents
Optical fiber Fabry-Perot magnetic field sensor and preparation method thereof Download PDFInfo
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- CN101852840A CN101852840A CN 201010194583 CN201010194583A CN101852840A CN 101852840 A CN101852840 A CN 101852840A CN 201010194583 CN201010194583 CN 201010194583 CN 201010194583 A CN201010194583 A CN 201010194583A CN 101852840 A CN101852840 A CN 101852840A
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Abstract
The invention discloses an optical fiber Fabry-Perot magnetic field sensor, which comprises optical fiber and is characterized in that a Fabry-Perot cavity which uses gas or air as medium is arranged on one end surface of the optical fiber, the Fabry-Perot cavity comprises two reflecting surfaces, one reflecting surface is the end surface of the optical fiber, the other reflecting surface is a diaphragm corresponding to the end surface of the optical fiber, the diaphragm is plated or stuck with magnetic material or metal material, when the diaphragm gets close to a magnetic field, magnetic force drives the diaphragm to move to change the length of the Fabry-Perot cavity, and the optical fiber picks up the reflective optical signal of the Fabry-Perot cavity to obtain the length information of the length of the Fabry-Perot cavity to realize the measurement of the magnetic field. The invention has the advantages that the sensor overcomes the defects of the prior art, the long-term, stable and accurate measurement of the magnetic field can be realized, the sensitivity is high and the preparation method is simple.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, be specifically related to a kind of optical fiber Fabry-Perot magnetic field sensor and preparation method thereof.
Background technology
Magnetic-field measurement is an important branch of Techniques in Electromagnetic Measurement.Many fields in commercial production and scientific research all will relate to the magnetic-field measurement problem.As: current measurement, magnetic mine locating, magnetic suspension train, geologic prospecting, isotopic separation, mass spectrometer, electron beam and I.B.M. device, controlled thermonuclear reaction, and artificial earth satellite etc., even application is also being arranged aspect medical science and the biology.For example, magnetic field therapy is cured the disease, diagnose the illness with " magnetocardiogram ", " magneticencephalogram ", environmental magnetic field is to the effect of biological and human body, and the research of magnetic phenomenon and biological phenomena etc. all needs the development of magnetic-field measurement technology and magnetic measurement apparatus, therefore, the measuring technique in magnetic field and people's life is closely related.
Traditional magnetic field sensor is based on the electrical testing principle, as Hall effect and electromagnetic induction principle, matured product has been arranged.But the sensor as principles of electrical measurement often is subject to electromagnetic interference (EMI), easy magnetic saturation etc., thereby the magnetic field sensor of optical profile type more and more receives publicity.Existing optical magnetic field sensor mainly is based on Faraday rotation effect or magnetic-machine-light transfer principle, has that long-time stability are poor, the not high shortcoming of measuring accuracy.
Summary of the invention
Problem to be solved by this invention is: how a kind of optical fiber Fabry-Perot magnetic field sensor and preparation method thereof is provided, and this sensor can overcome the defective of prior art, can realize steady in a long-term, measure magnetic field accurately, and highly sensitive, the preparation method is simple.
Technical matters proposed by the invention is to solve like this: a kind of optical fiber Fabry-Perot magnetic field sensor is provided, comprise optical fiber, it is characterized in that, being provided with one at an end face of optical fiber is the enamel amber chamber of medium with gas or air, described enamel amber chamber comprises two reflectings surface, a reflecting surface is the end face of optical fiber, another reflecting surface is and the corresponding diaphragm of fiber end face, described diaphragm is coated with or is pasted with magnetic material or metal material, during near magnetic field, magnetic force drives motion of membrane and to change the chamber in described enamel amber chamber long, and the catoptrics signal in described optical pickup enamel amber chamber obtains chamber, enamel amber chamber long letter breath, and realization is to the measurement in magnetic field.
According to optical fiber Fabry-Perot magnetic field sensor provided by the present invention, it is characterized in that, the xsect in described enamel amber chamber greater than, be equal to or less than the xsect of the fibre core of optical fiber.
According to optical fiber Fabry-Perot magnetic field sensor provided by the present invention, it is characterized in that described enamel amber chamber is to constitute with the diaphragm that is docked at fiber end face by being arranged on the inner RC cylindrical microflute of fiber end face.
According to optical fiber Fabry-Perot magnetic field sensor provided by the present invention, it is characterized in that described enamel amber chamber is to be made of the end face of optical fiber, the diaphragm that is set in the sleeve pipe on the optical fiber and is arranged on the sleeve pipe other end.
According to optical fiber Fabry-Perot magnetic field sensor provided by the present invention, it is characterized in that described optical fiber is the single-mode fiber that adopts quartz, polymkeric substance, jewel or photon crystal material to make.
A kind of preparation method of optical fiber Fabry-Perot magnetic field sensor is characterized in that, may further comprise the steps:
1. on the end face of optical fiber, process a cylindrical microflute, between the degree of depth 10 μ m to 10mm with the 157nm laser instrument;
2. outside cylindrical microflute to connecting the diaphragm of same material, form enamel amber chamber;
3. on diaphragm, plate magnetic material or metal material, made the Fabry-perot optical fiber magnetic field sensor.
A kind of preparation method of optical fiber Fabry-Perot magnetic field sensor is characterized in that, may further comprise the steps:
1. sleeve pipe two end-grain cutting are flat, the sheathed optical fiber of circle energy in the described sleeve pipe;
2. at an end of sleeve pipe to connecting the diaphragm with the sleeve pipe same material;
3. plate magnetic material or metal material at membrane surface, optical fiber is inserted in the sleeve pipe, and keep small distance, fix, made the Fabry-perot optical fiber magnetic field sensor with glue with diaphragm.
Principle of work of the present invention is: being provided with one is that medium comprises the enamel amber chamber that two optical reflection faces constitute with gas or air, one end in enamel amber chamber is a diaphragm, plating on the diaphragm or pasting magnetic material or metal material, the thickness of diaphragm and magnetic (metal) material and the dimension adjustable sensitivity of FP chamber.Near magnetic field, the magnetic field of magnetic (metal) material produces magneticaction with magnetic field perpendicular to diaphragm, and to change chamber, FP chamber long thereby magnetic force drives motion of membrane, obtains the chamber long letter with the catoptrics signal in optical pickup FP chamber and ceases, and just can realize the measurement to magnetic field.
The present invention is simple and reasonable, can realize long-term stability, measure magnetic field accurately, and sensitivity is very high, and implementation method is also very simple.
Description of drawings
Fig. 1 is the structural representation of first kind of embodiment of the present invention;
Fig. 2 a is the structural representation of second kind of embodiment of the present invention, and wherein Fig. 2 b is its right end face synoptic diagram of Fig. 2 a;
Fig. 3 is the structural representation of the third embodiment of the present invention;
Fig. 4 a is the structural representation of the 4th kind of embodiment of the present invention, and wherein Fig. 4 b is its right end face synoptic diagram of Fig. 4 a.
Wherein, 1, optical fiber, 2, diaphragm, 3, enamel amber chamber, 4, magnetic material layer, 5, sleeve pipe, 6, glue layer, 7, metal level.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described:
Shown in Fig. 1～4, this optical fiber Fabry-Perot magnetic field sensor, comprise optical fiber 1, being provided with one at an end face of optical fiber 1 is the enamel amber chamber 3 of medium with gas or air, enamel amber chamber 3 comprises two reflectings surface, a reflecting surface is the end face of optical fiber, another reflecting surface is and the corresponding diaphragm 2 of fiber end face, diaphragm 2 is coated with or is pasted with flux material layer 4 or metal level 7, during near magnetic field, magnetic force drives motion of membrane and to change the chamber in described enamel amber chamber long, and the catoptrics signal in described optical pickup enamel amber chamber obtains chamber, enamel amber chamber long letter breath, and realization is to the measurement in magnetic field.
Comprise optical fiber 1, at an end face of optical fiber 1 cylindrical microflute is set, the degree of depth is between 10 μ m to 10mm, and butt joint and the corresponding diaphragm 2 of fiber end face outside cylindrical microflute form enamel amber chamber 3, and diaphragm 2 is coated with or is pasted with magnetic material or metal material layer.The preparation method is: 1. process a cylindrical microflute with the 157nm laser instrument on the end face of optical fiber, between the degree of depth 10 μ m to 10mm; 2. outside cylindrical microflute to connecting the diaphragm of same material, form enamel amber chamber; 3. on diaphragm, plate magnetic material 4 or metal material 7, made the Fabry-perot optical fiber magnetic field sensor.
Comprise optical fiber 1, being provided with one at an end face of optical fiber 1 is the enamel amber chamber 3 of medium with gas or air, enamel amber chamber 3 is to be made of the end face of optical fiber 1, the diaphragm 2 that is set in the sleeve pipe 5 on the optical fiber 1 and is arranged on sleeve pipe 5 other ends, and diaphragm 2 is coated with or is pasted with magnetic material or metal material layer.The preparation method is: 1. that 5 liang of end-grain cutting of sleeve pipe are flat, and the sheathed optical fiber 1 of circle energy in the sleeve pipe 5; 2. at an end of sleeve pipe 5 to connecting the diaphragm 2 with sleeve pipe 5 same material; 3. plate magnetic material 4 or metal material layer 7 on diaphragm 2 surfaces, optical fiber 1 is inserted in the sleeve pipe 5, and keep small distance with diaphragm 2, fixing with glue layer 6, made the Fabry-perot optical fiber magnetic field sensor.
Claims (7)
1. optical fiber Fabry-Perot magnetic field sensor, comprise optical fiber, it is characterized in that, being provided with one at an end face of optical fiber is the enamel amber chamber of medium with gas or air, described enamel amber chamber comprises two reflectings surface, a reflecting surface is the end face of optical fiber, another reflecting surface is and the corresponding diaphragm of fiber end face, described diaphragm is coated with or is pasted with magnetic material or metal material, during near magnetic field, magnetic force drives motion of membrane and to change the chamber in described enamel amber chamber long, and the catoptrics signal in described optical pickup enamel amber chamber obtains chamber, enamel amber chamber long letter breath, and realization is to the measurement in magnetic field.
2. optical fiber Fabry-Perot magnetic field sensor according to claim 1 is characterized in that, the xsect in described enamel amber chamber greater than, be equal to or less than the xsect of the fibre core of optical fiber.
3. optical fiber Fabry-Perot magnetic field sensor according to claim 2 is characterized in that, described enamel amber chamber is to constitute with the diaphragm that is docked at fiber end face by being arranged on the inner RC cylindrical microflute of fiber end face.
4. optical fiber Fabry-Perot magnetic field sensor according to claim 2 is characterized in that, described enamel amber chamber is to be made of the end face of optical fiber, the diaphragm that is set in the sleeve pipe on the optical fiber and is arranged on the sleeve pipe other end.
5. according to the arbitrary described optical fiber Fabry-Perot magnetic field sensor of claim 1～4, it is characterized in that described optical fiber is the single-mode fiber that adopts quartz, polymkeric substance, jewel or photon crystal material to make.
6. the preparation method of optical fiber Fabry-Perot magnetic field sensor according to claim 3 is characterized in that, may further comprise the steps:
1. on the end face of optical fiber, process a cylindrical microflute, between the degree of depth 10 μ m to 10mm with the 157nm laser instrument;
2. outside cylindrical microflute to connecting the diaphragm of same material, form enamel amber chamber;
3. on diaphragm, plate magnetic material or metal material, made the Fabry-perot optical fiber magnetic field sensor.
7. the preparation method of optical fiber Fabry-Perot magnetic field sensor according to claim 4 is characterized in that, may further comprise the steps:
1. sleeve pipe two end-grain cutting are flat, the sheathed optical fiber of circle energy in the described sleeve pipe;
2. at an end of sleeve pipe to connecting the diaphragm with the sleeve pipe same material;
3. plate magnetic material or metal material at membrane surface, optical fiber is inserted in the sleeve pipe, and keep small distance, fix, made the Fabry-perot optical fiber magnetic field sensor with glue with diaphragm.
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| CN 201010194583 CN101852840A (en) | 2010-06-08 | 2010-06-08 | Optical fiber Fabry-Perot magnetic field sensor and preparation method thereof |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102621104A (en) * | 2012-03-15 | 2012-08-01 | 电子科技大学 | Graphene film sensitized D-shaped optical fiber surface plasmon resonance (SPR) sensor and preparation method thereof |
| CN106908092A (en) * | 2017-04-12 | 2017-06-30 | 北京航空航天大学 | A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method |
| WO2018041718A1 (en) | 2016-08-29 | 2018-03-08 | fos4X GmbH | Optical magnetic-field sensor |
| CN109506764A (en) * | 2018-12-12 | 2019-03-22 | 电子科技大学 | A kind of optical fiber MEMS microphone array acoustic detecting plate and system |
| CN110579726A (en) * | 2019-10-15 | 2019-12-17 | 哈尔滨理工大学 | Spr-based high-sensitivity magnetic field sensing device |
| CN112433102A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Optical fiber electric field sensor based on F-P interference principle and method thereof |
| CN112433182A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Device and method for accurately measuring magnetostriction micro deformation |
| CN112798289A (en) * | 2020-12-21 | 2021-05-14 | 中国船舶重工集团公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
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| US5982174A (en) * | 1997-07-21 | 1999-11-09 | Wagreich; Richard B. | External cavity fiber Fabry-Perot magnetometer |
| JP2005055415A (en) * | 2003-08-02 | 2005-03-03 | Ishihara Sangyo:Kk | Optical fiber type fabry-perot resonator |
| CN101424547A (en) * | 2008-10-27 | 2009-05-06 | 冉曾令 | Resonance type optical fiber F-P sensor and method of producing same |
| CN101598773A (en) * | 2009-07-02 | 2009-12-09 | 西北工业大学 | A kind of magnetic induction intensity sensing head and magnetic induction intensity measurement method and device thereof |
| CN201689165U (en) * | 2010-06-08 | 2010-12-29 | 电子科技大学 | Optical fiber Fabry-Perot magnetic field sensor |
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2010
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5982174A (en) * | 1997-07-21 | 1999-11-09 | Wagreich; Richard B. | External cavity fiber Fabry-Perot magnetometer |
| JP2005055415A (en) * | 2003-08-02 | 2005-03-03 | Ishihara Sangyo:Kk | Optical fiber type fabry-perot resonator |
| CN101424547A (en) * | 2008-10-27 | 2009-05-06 | 冉曾令 | Resonance type optical fiber F-P sensor and method of producing same |
| CN101598773A (en) * | 2009-07-02 | 2009-12-09 | 西北工业大学 | A kind of magnetic induction intensity sensing head and magnetic induction intensity measurement method and device thereof |
| CN201689165U (en) * | 2010-06-08 | 2010-12-29 | 电子科技大学 | Optical fiber Fabry-Perot magnetic field sensor |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102621104A (en) * | 2012-03-15 | 2012-08-01 | 电子科技大学 | Graphene film sensitized D-shaped optical fiber surface plasmon resonance (SPR) sensor and preparation method thereof |
| WO2018041718A1 (en) | 2016-08-29 | 2018-03-08 | fos4X GmbH | Optical magnetic-field sensor |
| CN106908092A (en) * | 2017-04-12 | 2017-06-30 | 北京航空航天大学 | A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method |
| CN109506764A (en) * | 2018-12-12 | 2019-03-22 | 电子科技大学 | A kind of optical fiber MEMS microphone array acoustic detecting plate and system |
| CN110579726A (en) * | 2019-10-15 | 2019-12-17 | 哈尔滨理工大学 | Spr-based high-sensitivity magnetic field sensing device |
| CN112433102A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Optical fiber electric field sensor based on F-P interference principle and method thereof |
| CN112433182A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Device and method for accurately measuring magnetostriction micro deformation |
| CN112798289A (en) * | 2020-12-21 | 2021-05-14 | 中国船舶重工集团公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
| CN112798289B (en) * | 2020-12-21 | 2024-02-09 | 中国船舶集团有限公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
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Application publication date: 20101006 |