CN101812687B - Slotted polysilicon wet velvet preparing device - Google Patents
Slotted polysilicon wet velvet preparing device Download PDFInfo
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- CN101812687B CN101812687B CN2010101463727A CN201010146372A CN101812687B CN 101812687 B CN101812687 B CN 101812687B CN 2010101463727 A CN2010101463727 A CN 2010101463727A CN 201010146372 A CN201010146372 A CN 201010146372A CN 101812687 B CN101812687 B CN 101812687B
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Abstract
The invention relates to a slotted polysilicon wet velvet preparing device which comprises a reaction tank provided with a liquid discharge hole at the bottom; the bottom of the reaction tank filled with liquid medicine is provided with a second-stage liquid injecting pipe which is communicated with a liquid outlet of a liquid medicine circulating pump by a first-stage liquid injecting pipe, and a liquid inlet of the pump is communicated with the reaction tank by a liquid conveying pipeline; a liquid flow homogenizing board is arranged above the second-stage liquid injecting pipe of the reaction tank; a second-stage capillary condenser pipe is positioned between the second-stage liquid injecting pipe and the liquid flow homogenizing board; a refrigerant liquid circulating system is formed by the second-stage capillary condenser pipe passing through a first-stage condenser pipe, a refrigerant liquid circulating pump connected in the first-stage condenser pipe in series and a cooling water tank filled with refrigerant liquid; and an evaporator of a compression refrigeration device provided with a controller is positioned inside the refrigerant liquid of the cooling water tank. The device leads the liquid medicine concentration and the temperature distribution on the surface of a silicon chip in the reaction tank to be even, effectively improves the velvet preparing effect, reduces the reflectivity, and improves the product quality.
Description
Technical field
The present invention relates to a kind of slotted polysilicon wet velvet preparing device, further be meant the polysilicon slot type wet-method etching treatment facility in semiconductor crystal silicon and the technical field of solar cell manufacturing.
Background technology
In semiconductor silicon and solar cell manufacturing; The slot type wet-method texturing manufacturing process is that wet etching is carried out on the crystal silicon chip surface, forms little ditch, matte, reduces the reflectivity of silicon chip surface; Thereby make sunshine carry out multiple reflection, to improve the utilization ratio of light at silicon chip surface.In the preparation technology of sun power crystal silicon cell, the slot type wet-method texturing manufacturing process is the integral part that is related to the silicon solar energy battery surface photoabsorption, also is one of important channel of improving solar conversion efficiency.
Surpassing half the polycrystalline etching device on the market now all is the flat polycrystalline making herbs into wool of the import of price up to up to a million dollars cleaning machine, owing in the process of making herbs into wool, adopt the travelling belt transmission manner, fragmentation rate is very high.Simultaneously, owing to receive the limitation of transmission speed, the production capacity limit of flat making herbs into wool cleaning machine is 1500 slices/hour.
Polycrystalline slot type wet-method etching equipment for is on the market deposited and following problem: (1) is difficult to accomplish that the liquor strength of all silicon chip surfaces and temperature reach even when a large amount of silicon chips get into texturing slot simultaneously and are processed; (2) be difficult to realize liquid homogeneous layer fluidisation from top to bottom in the groove, the while forms sinuous flow or retention areas on the surface of bottom, middle part and the silicon chip of groove; (3) size and the homogeneity of silicon chip surface matte after the very difficult assurance making herbs into wool.
Summary of the invention
The technical problem that the present invention will solve is that the defective to prior art exists provides a kind of slotted polysilicon wet velvet preparing device.It is low that it can effectively improve flat making herbs into wool cleaning machine production capacity, and the characteristics that fragmentation rate is high can be improved the liquor strength of silicon chip surface in the slot type making herbs into wool process and the homogeneity of temperature simultaneously, with effective making herbs into wool effect of improving, improves product quality, reduces reflectivity.
The present invention in order to realize the technical scheme that above purpose adopts is; Said slotted polysilicon wet velvet preparing device comprises that the bottom is provided with the reactive tank of leakage fluid dram; The bottom that is marked with the reactive tank of soup is furnished with the secondary liquid injection tube; This secondary liquid injection tube top has a plurality of apertures that can upwards spray soup, and the one-level liquid injection tube of said secondary liquid injection tube outside reactive tank is communicated with the liquid outlet of soup recycle pump, and the fluid inlet of soup recycle pump is communicated with reactive tank through infusion pipeline; The liquid even flow plate is equipped with in the secondary liquid injection tube top of reactive tank; Secondary capillary condensation pipe is housed between secondary liquid injection tube and liquid even flow plate, this secondary capillary condensation pipe between reactive tank and cooling water tank the one-level prolong and be serially connected in refrigerant fluid recycle pump in the one-level prolong, the cooling water tank that is marked with refrigerant fluid forms the refrigerant fluid recycle system; The vaporizer that is provided with the compression refrigerating apparatus of unit is arranged in the refrigerant fluid of cooling water tank.
Said liquid even flow plate is a porous plate.
Refrigerant fluid is the mixture of terepthaloyl moietie and water in the said cooling water tank.
The refrigeration working medium of said compression refrigerating apparatus is a freonll-11.
In the said system; Form medicine liquid circulation by infusion pipeline, soup recycle pump, reactive tank, one-level liquid injection tube, secondary liquid injection tube, refrigeration control system comprises the compression refrigerating apparatus of one-level prolong, secondary capillary condensation pipe, cooling water tank, tape-controller; Therefore, polysilicon slot type wet-method etching equipment of the present invention comprises the medicine liquid circulation and the relatively independent recycle system of refrigeration control system two covers, and can realize the automated closed-loop function of whole systems.
Before the making herbs into wool; Artificial preparating liquid is poured nitric acid and hydrofluoric acid in the reactive tank into according to certain ratio, behind the unlatching soup recycle pump; Soup gets into the secondary liquid injection tube through the one-level liquid injection tube; Evenly inject reaction zone from the aperture ejection at its top after pass even flow plate after the refrigeration system cooling then, the soup recycle pump is extracted soup continuously out through infusion pipeline and is transported to the one-level liquid injection tube to circulate simultaneously, has realized the full and uniform of reactive tank herb liquid concentration.
Refrigeration control system comprises one-level prolong, secondary capillary condensation pipe, cooling water tank, compression refrigerating apparatus, unit; Can control compression refrigerating apparatus through setting controller makes the refrigerant fluid in the cooling water tank obtain cooling; And then make the refrigerant fluid in the one-level prolong reach required low temperature; Refrigerant fluid is taken away its ambient heat reaching the purpose of control reactive tank inner liquid medicine temperature through the secondary capillary condensation pipe of reaction tank bottom then, and makes reactive tank inner liquid medicine uniformity of temperature profile.
Finish can the leakage fluid dram of reaction tank bottom be opened behind the silicon chip of certain lot number and carry out discharge opeing, join night again then.
Known that by above the present invention is a kind of slotted polysilicon wet velvet preparing device, it can effectively improve the liquor strength of silicon chip surface in the slot type making herbs into wool process and the homogeneity of temperature; With effective making herbs into wool effect of improving; Improve product quality, reduce reflectivity, making herbs into wool back reflection rate reaches below 20%.Simultaneously, its output can not cause fragment basically up to per hour 1800, has improved yield rate and economic benefit greatly.In addition, slotted polysilicon wet velvet preparing device cost of the present invention is about 1,000,000 yuan, and cost performance has great cost advantage considerably beyond the flat making herbs into wool cleaning equipment of import.
Description of drawings
Fig. 1 is the system architecture synoptic diagram of an embodiment of the present invention.
In the drawings:
The 1-infusion pipeline, the 2-reactive tank, 3-one-level liquid injection tube,
4-secondary liquid injection tube, 5-one-level prolong, 6-secondary capillary condensation pipe,
The 7-cooling water tank, the 8-compression refrigerating apparatus, the 9-unit,
The 10-vaporizer, 11-refrigerant fluid recycle pump, 12-liquid even flow plate,
13-soup recycle pump.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified, these explanations only are used to understand the usefulness of technical scheme of the present invention, are not used in the scope of the present invention that limits.
As shown in Figure 1; Said slotted polysilicon wet velvet preparing device comprises that the bottom is provided with the reactive tank 2 of leakage fluid dram; The bottom that is marked with the reactive tank 2 of soup is furnished with secondary liquid injection tube 4; These secondary liquid injection tube 4 tops have a plurality of apertures that can upwards spray soup, and the one-level liquid injection tube 3 of said secondary liquid injection tube 4 outside reactive tank is communicated with the liquid outlet of soup recycle pump 13, and the fluid inlet of soup recycle pump 13 is communicated with reactive tank 2 through infusion pipeline 1; Liquid even flow plate 12 is equipped with in secondary liquid injection tube 4 tops of reactive tank 2; Secondary capillary condensation pipe 6 is housed between secondary liquid injection tube 4 and liquid even flow plate 12, this secondary capillary condensation pipe 6 between reactive tank 2 and cooling water tank 7 one-level prolong 5 and be serially connected in refrigerant fluid recycle pump 11 in the one-level prolong 5, the cooling water tank 7 that is marked with refrigerant fluid forms the refrigerant fluid recycle systems; The vaporizer 10 that is provided with the compression refrigerating apparatus 8 of unit 9 is arranged in the refrigerant fluid of cooling water tank 7.
Said reactive tank 2 usefulness PVDF (pvdf) material, cell body volume 350L, degree of depth 320cm; Trench bottom is provided with leakage fluid dram, and inlet, cell body position on the lower side are provided with liquid even flow plate 12, also can soup circulation port, prolong import and export, high, normal, basic three liquid level sensors and TP be set at the groove rear wall.
Described one-level liquid injection tube 3 is divided into 4 branch roads in reaction tank bottom, and promptly the secondary liquid injection tube 4, and its top is drilled with aperture, supplies soup to inject in the reactive tank.
In the described cooling water tank 7 the ball-type level sensor can be set, keep constant level in order to automatic water supplement, its compression by compression refrigerating apparatus 8 freonll-11 is freezed, and temperature is regulated by unit 9; Reactive tank inner liquid medicine temperature is controlled at about 5 ℃.
Described secondary capillary condensation pipe 6 is between liquid even flow plate 12 and secondary liquid injection tube 4, and secondary capillary condensation pipe 6 outside surfaces are provided with the corrosive of anti-strong acid resist; This resist can use the corrosive of anti-strong acid macromolecular material to make.
Described soup recycle pump 13 is the erosion resistance pump, and rate of discharge and lift should satisfy PM replacement(metathesis)reaction groove inner liquid medicine at least 1 time at least; The automatic valve of configuration can adopt the automatic diaphragm valve of acid-resistant corrosion.
Claims (5)
1. slotted polysilicon wet velvet preparing device; Comprise that the bottom is provided with the reactive tank (2) of leakage fluid dram; It is characterized in that this reactive tank (2) is marked with soup and the bottom is furnished with secondary liquid injection tube (4), this secondary liquid injection tube (4) top has a plurality of apertures that can upwards spray soup; The one-level liquid injection tube (3) of said secondary liquid injection tube (4) outside reactive tank is communicated with the liquid outlet of soup recycle pump (13), and the fluid inlet of soup recycle pump (13) is communicated with through the same reactive tank of infusion pipeline (1) (2); Liquid even flow plate (12) is equipped with in secondary liquid injection tube (4) top of reactive tank (2); Between secondary liquid injection tube (4) and liquid even flow plate (12), secondary capillary condensation pipe (6) is housed, this secondary capillary condensation pipe (6) between reactive tank (2) and cooling water tank (7) one-level prolong (5) and be serially connected in refrigerant fluid recycle pump (11) in the one-level prolong (5), the cooling water tank (7) that is marked with refrigerant fluid forms the refrigerant fluid recycle system; The vaporizer (10) that is provided with the compression refrigerating apparatus (8) of unit (9) is arranged in the refrigerant fluid of cooling water tank (7).
2. according to the said slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that said reactive tank (2) rear wall is provided with liquid level sensor and TP.
3. according to the said slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that said refrigerant fluid is the mixture of terepthaloyl moietie and water.
4. according to the said slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that, the ball-type level sensor is set in the described cooling water tank.
5. according to the said slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that secondary capillary condensation pipe (6) outside surface is provided with the corrosive of anti-strong acid resist.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101463727A CN101812687B (en) | 2010-04-14 | 2010-04-14 | Slotted polysilicon wet velvet preparing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101463727A CN101812687B (en) | 2010-04-14 | 2010-04-14 | Slotted polysilicon wet velvet preparing device |
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| Publication Number | Publication Date |
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| CN101812687A CN101812687A (en) | 2010-08-25 |
| CN101812687B true CN101812687B (en) | 2012-05-23 |
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| CN2010101463727A Active CN101812687B (en) | 2010-04-14 | 2010-04-14 | Slotted polysilicon wet velvet preparing device |
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| CN102842526B (en) * | 2012-07-31 | 2015-03-04 | 耿彪 | High temperature etching process tank |
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| JP2005303255A (en) * | 2004-03-17 | 2005-10-27 | Shinryo Corp | Low-reflectance processing method of silicon substrate for solar cells |
| CN100433376C (en) * | 2007-08-07 | 2008-11-12 | 南京航空航天大学 | Integrated processing method for cotton cutting of solar silicon and its device |
| CN101276855A (en) * | 2008-04-30 | 2008-10-01 | 苏州纳米技术与纳米仿生研究所 | Process and equipment for cleaning, suede-making and drying silicon solar cell |
| CN201695088U (en) * | 2010-04-14 | 2011-01-05 | 湖南红太阳新能源科技有限公司 | Tank type polycrystalline silicon wet-process texturing equipment |
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| CN101812687A (en) | 2010-08-25 |
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