CN202643915U - High precision groove body heat exchange system - Google Patents
High precision groove body heat exchange system Download PDFInfo
- Publication number
- CN202643915U CN202643915U CN 201220104115 CN201220104115U CN202643915U CN 202643915 U CN202643915 U CN 202643915U CN 201220104115 CN201220104115 CN 201220104115 CN 201220104115 U CN201220104115 U CN 201220104115U CN 202643915 U CN202643915 U CN 202643915U
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- China
- Prior art keywords
- groove body
- high precision
- exchange system
- temperature
- upper groove
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Abstract
The utility model discloses a high precision groove body heat exchange system, which is characterized in that: the system includes a heat exchanger, an upper groove body, a lower groove body, a pump, a filter device and water pipes, wherein the heat exchanger, the upper groove body, the lower groove body, the pump and the filter device are successively connected to form a loop, the heat exchanger is connected with an ice water machine through a hot and cold water exchange pipeline to form a cooling water circulation system. The beneficial effects of the heat exchange system are that: the temperature of the solution can be sufficiently decreased to the best texturing temperature in a cooling system. The temperature distribution is uniform. The problem of high local temperature is solved.
Description
[technical field]
The utility model relates to a kind of technology of polycrystalline silicon texturing process middle slot temperature control, relates in particular to a kind of high precision cell body heat-exchange system.
[background technology]
At present, known polycrystalline suede cell body temperature-controlled process processed is to add the cooling tubule in the cell body, by outside frozen water machine cold water is imported into by tubule and reaches the temperature controlled purpose of cell body in the cell body.But the method for this routine has great drawback, and this traditional type of cooling produces greatly impact so that the interior local temperature control accuracy of cell body is on the low side to silicon wafer suede, causes the polycrystalline matte inhomogeneous, and it is larger that pile depth differs.Cause the higher battery efficiency that affects of reflectivity of silicon chip.
[utility model content]
In order to overcome existing making herbs into wool cell body cooling system to temperature controlled inhomogeneous, in line with a kind of excellent making herbs into wool cell body cooling system of utility model, accurate control flume temperature not only, and can fully ignore in the pipeline impact on temperature.Can make the polycrystalline matte reach desirable effect.
Above-mentioned purpose of the present utility model realizes by following technical scheme: a kind of high precision cell body heat-exchange system, it is characterized in that: it comprises interchanger, upper groove body, lower groove, pumping, filtration unit and water pipe, described interchanger, upper groove body, lower groove, pumping and filtration unit are connected and are connected and form the loop, described interchanger connects the frozen water machine by cold and hot water exchange pipeline, consists of cooling water recirculation system.
Water pipe arm between described interchanger and the upper groove body is provided with diaphragm valve.
Described pumping exit is provided with the decompression protection pipeline.
Described interchanger is provided with the hydrops discharge pipe.
Structure design of the present utility model, so that liquid medicine absorbing heat in the cell body working cycle of upper strata, in the recycle system enters lower groove.Enter heat exchanger through pumping and strainer, make it heat and fully exchange and enter the upper groove body work area, finish whole circulation.
The beneficial effects of the utility model are: can make liquid fill temperature in cooling system and fully be reduced to best making herbs into wool temperature.And uniformity of temperature profile has solved the too high problem of local temperature.
[description of drawings]
Fig. 1 is structural representation of the present utility model.
[embodiment]
Below in conjunction with accompanying drawing the utility model is described in further detail:
As shown in Figure 1, a kind of high precision cell body heat-exchange system, it is characterized in that: it comprises interchanger 1, upper groove body 2, lower groove 3, pumping 4, filtration unit 5 and water pipe 6, described interchanger 1, upper groove body 2, lower groove 3, pumping 4 are connected with strainer and are connected successively and form the loop, described interchanger 1 connects frozen water machine 8 by cold and hot water exchange pipeline 7, consists of cooling water recirculation system.
As shown in Figure 1, the water pipe arm 9 between described interchanger 1 and the upper groove body 2 is provided with diaphragm valve 10; Described pumping 4 exits are provided with decompression protection pipeline 11; Described interchanger 1 is provided with hydrops discharge pipe 12.
As shown in Figure 1, principle of work of the present utility model: cold water enters interchanger 1 from pipeline by the flange connection by frozen water machine 8, the cooling liquid enters upper groove body 2 by pipeline in the interchanger 1, water pipe arm 9 between interchanger 1 and the upper groove body 2 is provided with diaphragm valve 10, regulates the flow of each arm of control; Upper groove body 2 enters in the lower groove 3 by return line through high temperature liquid medicine after reacting, lower groove 3 high temperature liquid medicine enter interchanger 1 by magnetic force pumping 4 through strainer 5, absorbed by frozen water during waste heat process interchanger 1, low temperature liquid medicine enters upper groove body 1 by pipeline like this, needs temperature when reaching work.In this process, pass through protector, such as flow regulation devices such as hydrops discharge pipe 12, decompression protection pipeline 11, diaphragm valve 10 etc., guaranteed that whole heat transfer process finishes safely, realized process of cooling.
Then the technical program is implemented complete.
Claims (4)
1. high precision cell body heat-exchange system, it is characterized in that: it comprises interchanger, upper groove body, lower groove, pumping, filtration unit and water pipe, described interchanger, upper groove body, lower groove, pumping and filtration unit are connected and are connected and form the loop, described interchanger connects the frozen water machine by cold and hot water exchange pipeline, consists of cooling water recirculation system.
2. a kind of high precision cell body heat-exchange system according to claim 1, it is characterized in that: the water pipe arm between described interchanger and the upper groove body is provided with diaphragm valve.
3. a kind of high precision cell body heat-exchange system according to claim 1, it is characterized in that: described pumping exit is provided with the decompression protection pipeline.
4. a kind of high precision cell body heat-exchange system according to claim 1, it is characterized in that: described interchanger is provided with the hydrops discharge pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220104115 CN202643915U (en) | 2012-03-19 | 2012-03-19 | High precision groove body heat exchange system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220104115 CN202643915U (en) | 2012-03-19 | 2012-03-19 | High precision groove body heat exchange system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202643915U true CN202643915U (en) | 2013-01-02 |
Family
ID=47413049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220104115 Expired - Fee Related CN202643915U (en) | 2012-03-19 | 2012-03-19 | High precision groove body heat exchange system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202643915U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104112599A (en) * | 2014-06-27 | 2014-10-22 | 四川石棉华瑞电子有限公司 | Formation system capable of controlling treatment tank liquid to be in constant temperature state |
| CN109473374A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | A kind of digging groove groove body with medical fluid circulator |
| CN109473375A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | A kind of digging groove groove body conducive to homogeneous corrosion |
| CN109473375B (en) * | 2017-09-08 | 2024-05-03 | Tcl环鑫半导体(天津)有限公司 | Grooved body beneficial to uniform corrosion |
-
2012
- 2012-03-19 CN CN 201220104115 patent/CN202643915U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104112599A (en) * | 2014-06-27 | 2014-10-22 | 四川石棉华瑞电子有限公司 | Formation system capable of controlling treatment tank liquid to be in constant temperature state |
| CN109473374A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | A kind of digging groove groove body with medical fluid circulator |
| CN109473375A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | A kind of digging groove groove body conducive to homogeneous corrosion |
| CN109473375B (en) * | 2017-09-08 | 2024-05-03 | Tcl环鑫半导体(天津)有限公司 | Grooved body beneficial to uniform corrosion |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130102 Termination date: 20150319 |
|
| EXPY | Termination of patent right or utility model |